JP2580352B2 - ラスター電子顕微鏡 - Google Patents

ラスター電子顕微鏡

Info

Publication number
JP2580352B2
JP2580352B2 JP1501135A JP50113589A JP2580352B2 JP 2580352 B2 JP2580352 B2 JP 2580352B2 JP 1501135 A JP1501135 A JP 1501135A JP 50113589 A JP50113589 A JP 50113589A JP 2580352 B2 JP2580352 B2 JP 2580352B2
Authority
JP
Japan
Prior art keywords
raster
electron
axis
goniometer
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1501135A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02503046A (ja
Inventor
ハインツ ステルマン，カール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MAACHIN KURAIN
Original Assignee
MAACHIN KURAIN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MAACHIN KURAIN filed Critical MAACHIN KURAIN
Publication of JPH02503046A publication Critical patent/JPH02503046A/ja
Application granted granted Critical
Publication of JP2580352B2 publication Critical patent/JP2580352B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
JP1501135A 1988-01-29 1989-01-17 ラスター電子顕微鏡 Expired - Fee Related JP2580352B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3802598.1 1988-01-29
DE3802598A DE3802598C1 (enExample) 1988-01-29 1988-01-29

Publications (2)

Publication Number Publication Date
JPH02503046A JPH02503046A (ja) 1990-09-20
JP2580352B2 true JP2580352B2 (ja) 1997-02-12

Family

ID=6346210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1501135A Expired - Fee Related JP2580352B2 (ja) 1988-01-29 1989-01-17 ラスター電子顕微鏡

Country Status (5)

Country Link
EP (1) EP0357699B1 (enExample)
JP (1) JP2580352B2 (enExample)
AT (1) ATE113756T1 (enExample)
DE (2) DE3802598C1 (enExample)
WO (1) WO1989007330A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4140710A1 (de) * 1991-12-10 1993-06-17 Integrated Circuit Testing Positioniersystem
US5852298A (en) * 1995-03-30 1998-12-22 Ebara Corporation Micro-processing apparatus and method therefor
US6661009B1 (en) * 2002-05-31 2003-12-09 Fei Company Apparatus for tilting a beam system
DE102004010535B4 (de) * 2003-11-10 2006-04-27 Jaroslav Jan Hatle Bewegungsantrieb für eine Ionenstrahlbearbeitungsanlage
DE102008035163B4 (de) 2008-07-28 2013-12-12 Ellcie Industries Gmbh Elektronenmikroskop
DE102008035165A1 (de) 2008-07-28 2010-02-11 Ellcie Maintenance Gmbh Elektronenmikroskop
CN111141766A (zh) * 2020-02-05 2020-05-12 天津大学 一种用于扫描电子显微镜原位观测的疲劳加载装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4460827A (en) 1981-02-06 1984-07-17 Kabushiki Kaisha Akashi Seisakusho Scanning electron microscope or similar equipment with tiltable microscope column

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD124091A1 (enExample) * 1975-09-24 1977-02-02
FR2499314A1 (fr) * 1981-02-04 1982-08-06 Centre Nat Rech Scient Ensemble de microscope electronique a balayage a fonctionnement in situ
WO1987004846A1 (en) * 1986-02-03 1987-08-13 Crewe Albert V Electron beam memory system with ultra-compact, high current density electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4460827A (en) 1981-02-06 1984-07-17 Kabushiki Kaisha Akashi Seisakusho Scanning electron microscope or similar equipment with tiltable microscope column

Also Published As

Publication number Publication date
JPH02503046A (ja) 1990-09-20
EP0357699B1 (de) 1994-11-02
ATE113756T1 (de) 1994-11-15
EP0357699A1 (de) 1990-03-14
DE58908583D1 (de) 1994-12-08
WO1989007330A1 (fr) 1989-08-10
DE3802598C1 (enExample) 1989-04-13

Similar Documents

Publication Publication Date Title
US5510615A (en) Scanning probe microscope apparatus for use in a scanning electron microscope
Maser et al. Soft X‐ray microscopy with a cryo scanning transmission X‐ray microscope: I. Instrumentation, imaging and spectroscopy
Kilcoyne et al. Interferometer-controlled scanning transmission X-ray microscopes at the Advanced Light Source
US6548810B2 (en) Scanning confocal electron microscope
EP0509856A1 (en) Scanning probe type microscope combined with an optical microscope
JP2580352B2 (ja) ラスター電子顕微鏡
US12417893B2 (en) Diffractometer for charged-particle crystallography
JP2005530125A5 (enExample)
Marsman et al. Mechanical scan system for microscopic applications
Jaschinsky et al. Design and performance of a beetle-type double-tip scanning tunneling microscope
JPH0579814A (ja) 走査プローブ型顕微鏡装置
Wiessner et al. Design considerations and performance of a combined scanning tunneling and scanning electron microscope
Ade et al. Scanning transmission X-ray microscopy at a bending magnet beamline at the Advanced Light Source
Nazaretski et al. Nm-scale spatial resolution X-ray imaging with MLL nanofocusing optics: Instrumentational requirements and challenges
JPS63298951A (ja) 走査顕微鏡
CN110010435B (zh) 一种原位失效分析样品台及扫描电镜
JPH07181030A (ja) 原子間力顕微鏡
JPH08273570A (ja) 試料に対する精密作業を行う装置
Thibado et al. Scanning tunneling microscope combined with scanning electron microscope for the study of grain boundaries
CN217385552U (zh) 一种基于探针移动扫描的原子力显微镜光机系统
JPH10293200A (ja) 真空光学系構造
JP3702685B2 (ja) 荷電粒子線装置
RU2238537C2 (ru) Устройство для исследования образцов в процессе их нагружения
JP3471893B2 (ja) 透過型電子顕微鏡装置
JP2000149847A (ja) 試料ステージ

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S303 Written request for registration of pledge or change of pledge

Free format text: JAPANESE INTERMEDIATE CODE: R316303

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071121

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081121

Year of fee payment: 12

LAPS Cancellation because of no payment of annual fees