JP2576284Y2 - 静圧気体スライドテーブル - Google Patents

静圧気体スライドテーブル

Info

Publication number
JP2576284Y2
JP2576284Y2 JP1990053314U JP5331490U JP2576284Y2 JP 2576284 Y2 JP2576284 Y2 JP 2576284Y2 JP 1990053314 U JP1990053314 U JP 1990053314U JP 5331490 U JP5331490 U JP 5331490U JP 2576284 Y2 JP2576284 Y2 JP 2576284Y2
Authority
JP
Japan
Prior art keywords
static pressure
pressure gas
slide table
exhaust
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990053314U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0411919U (OSRAM
Inventor
嘉一郎 永倉
裕司 坂井
Original Assignee
旭光学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旭光学工業株式会社 filed Critical 旭光学工業株式会社
Priority to JP1990053314U priority Critical patent/JP2576284Y2/ja
Publication of JPH0411919U publication Critical patent/JPH0411919U/ja
Application granted granted Critical
Publication of JP2576284Y2 publication Critical patent/JP2576284Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1990053314U 1990-05-22 1990-05-22 静圧気体スライドテーブル Expired - Fee Related JP2576284Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990053314U JP2576284Y2 (ja) 1990-05-22 1990-05-22 静圧気体スライドテーブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990053314U JP2576284Y2 (ja) 1990-05-22 1990-05-22 静圧気体スライドテーブル

Publications (2)

Publication Number Publication Date
JPH0411919U JPH0411919U (OSRAM) 1992-01-30
JP2576284Y2 true JP2576284Y2 (ja) 1998-07-09

Family

ID=31574394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990053314U Expired - Fee Related JP2576284Y2 (ja) 1990-05-22 1990-05-22 静圧気体スライドテーブル

Country Status (1)

Country Link
JP (1) JP2576284Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2981459B2 (ja) 1998-05-01 1999-11-22 株式会社日本マクシス 水晶基板傷検査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0257722A (ja) * 1988-08-22 1990-02-27 Canon Inc 直進型気体軸受の接続方法
JPH0243133U (OSRAM) * 1988-09-14 1990-03-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2981459B2 (ja) 1998-05-01 1999-11-22 株式会社日本マクシス 水晶基板傷検査装置

Also Published As

Publication number Publication date
JPH0411919U (OSRAM) 1992-01-30

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Legal Events

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