JP2571015B2 - Method of manufacturing gas discharge display panel - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a gas discharge display panel, and more particularly to a method for manufacturing an AC drive type gas discharge display panel.

[0002]

2. Description of the Related Art FIG. 2 is a sectional view showing the structure of an example of a conventional AC drive type (hereinafter referred to as AC type) gas discharge display panel. As shown in FIG. 2, a conventional AC-type gas discharge display panel has electrodes 2a and 2b arranged at right angles to respective surfaces of a first substrate 1a and a second substrate 1b. Dielectric layer 3 covering electrode 2a and electrode 2b
a, the dielectric layer 3b, the dielectric layer 3a and the dielectric layer 3b
A protective layer 5a and a protective layer 5b formed thereon;
The first substrate 1a and the second substrate 1b are separated from each other so that a discharge cell corresponding to a pixel where the electrode 2a and the electrode 2b intersect is separated from each other and a discharge space is narrowed to form an electrode pair including the electrode 2a and the electrode 2b. Frit glass 8
And heat sealed. Further, a glass tube 7 formed so as to be connected to the discharge space in a place other than the display area of the second substrate 1b in order to emit light by discharge.
Vacuum heating while evacuating through the chamber, and finally filling discharge gas.

The protective layers 5a and 5b are composed of dielectric layers 3a and 3b
While being prevented from being sputtered by the discharge,
It also has a role as a secondary electron emission layer for generating a discharge at a low voltage. Further, since light emission is observed from the first substrate 1a side through the protective layer 5a, transparency to visible light is also required. For this reason, as a material for the protective layers 5a and 5b, magnesium oxide (hereinafter referred to as MgO) is widely used because of its characteristics such as low sputtering rate, high secondary electron emission coefficient, and transparency to visible light. As a method of forming the protective layers 5a and 5b using MgO, a vacuum deposition method using an electron beam is generally used, but a screen printing method is also used.

[0004]

The driving voltage of the conventional AC type gas discharge display panel is not yet low from the viewpoint of withstand voltage and power consumption of the driving circuit. Further lowering of the voltage is desired. The driving voltage of an AC type gas discharge display panel is determined by many factors such as the pixel structure and the filling gas, and the secondary electron emission coefficient of the protective layer is one of the major factors. Is higher, it can be driven at a lower voltage. As described above, conventionally, the drive voltage has been considerably reduced by using MgO for the protective layer, but it is still not sufficient. However, in view of the various characteristics required for the protective layer, no substance has been found to replace MgO.

On the other hand, regarding MgO itself, the difference in the secondary electron emission coefficient due to the crystal orientation has been discussed. That is, when the (111) crystal plane direction is oriented perpendicular to the first and second substrate surfaces, the secondary electron emission coefficient increases. However, there is a problem that it is difficult to control such crystal orientation in a conventional film formation by a vacuum deposition method or a screen printing method.

An object of the present invention is to provide a method for manufacturing a gas discharge display panel which can be driven at a low voltage by increasing the secondary electron emission coefficient by controlling the crystal orientation.

[0007]

According to a first aspect of the present invention, there is provided a first and a second insulating substrate, and an electrode pair arranged to face each of the first and the second insulating substrate. When,
A dielectric layer covering each electrode of the electrode pair, a magnesium oxide layer formed on each of the dielectric layers, and a discharge space formed by filling a discharge gas between the magnesium oxide layers. Wherein the step of forming the magnesium oxide layer comprises dispersing a medium in which a plate-like magnesium oxide crystal powder extending flat in the (111) crystal plane direction is dispersed in a medium. Is sprayed on the dielectric layer by an air spray method using a spray gun.

According to a second aspect of the present invention, there are provided a first and a second insulating substrate, an electrode pair arranged to face each of the first and the second insulating substrate, AC drive having a dielectric layer covering each electrode, a magnesium oxide layer formed on each of the dielectric layers, and a discharge space formed by filling a discharge gas between the magnesium oxide layers In the method for manufacturing a gas discharge display panel of the die type, the step of forming the magnesium oxide layer includes spraying a suspension in which a plate-like magnesium hydroxide crystal powder extending flat in the (0001) crystal plane direction is dispersed in a medium. Forming a magnesium hydroxide layer by spraying the dielectric layer on the dielectric layer by air spraying, and thermally decomposing the magnesium hydroxide layer to form the magnesium oxide layer. And a step of the beam layer.

[0009]

When a plate-like powder is sprayed onto a substrate using a spray gun, the powder follows the substrate surface and adheres horizontally to the substrate surface. Therefore, when a suspension in which MgO microcrystalline powder extending flat in the (111) crystal plane direction is dispersed is sprayed on the substrate surface by an air spray method, each MgO microcrystalline powder adheres to the substrate surface in a stacked manner. When viewed as a whole, the protective layer becomes a MgO microcrystalline powder having a (111) plane orientation perpendicular to the surface of the substrate.

Similarly, when a suspension in which magnesium hydroxide (hereinafter referred to as Mg (OH) ₂ ) microcrystalline powder extending flat in the (0001) crystal plane direction is dispersed is sprayed on the substrate surface by an air spray method. The (0001) plane orientation is perpendicular to the surface of the substrate to obtain an Mg (OH) ₂ layer. When MgO is obtained from Mg (OH) ₂ by thermal decomposition, a certain relationship is observed between the crystal orientation of the original Mg (OH) _{2 and} the crystal orientation of MgO after dispersion, and Mg (O) is obtained.
It is known that the (0001) crystal plane of H) ₂ becomes the (111) crystal plane of MgO. Therefore, as described above, by thermally decomposing Mg (OH) ₂ whose (0001) plane orientation is perpendicular to the substrate surface, MgO fine particles whose (111) plane orientation is perpendicular to the substrate surface are thermally decomposed. It becomes a protective layer in which the crystal powder is laminated.

By using MgO having the (111) plane orientation perpendicular to the surface of the substrate for the protective layer, MgO having no orientation or other orientation (for example, (20)
(0) crystal plane) is oriented in a direction perpendicular to the surface of the substrate, the protective layer has a higher secondary electron emission coefficient, and can be driven at a low voltage.

[0012]

Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram illustrating a first embodiment of the present invention.
It is sectional drawing of the glass substrate in which the gO film was formed. In the first embodiment of the present invention, as shown in FIG. 1, first, an electrode 2 patterned into a predetermined shape is formed on a glass substrate 1. Next, a glass paste for a dielectric layer is applied on the glass substrate 1 by a screen printing method so as to cover the electrode 2, and then the glass substrate 1 is heated to about 600 ° C. and fired to form the dielectric layer 3. .

Next, the diameter is 1-2 μm and the thickness is 0.2-0.2 μm.
It is approximately disk-shaped with a thickness of about 0.4 μm.
1) MgO microcrystalline powder having a uniform plane orientation is dispersed in ethyl alcohol as a dispersion medium to form a suspension used for spraying. Next, the suspension and high-pressure air for atomization are supplied to a two-fluid spray gun, and the suspension is spray-coated on the glass substrate 1. Then, the glass substrate 1 is heated to 200 ° C. to remove ethyl alcohol. Evaporate enough to obtain MgO microcrystals 4a
Is obtained.

In the MgO film 4 thus obtained, the plate-like MgO microcrystals 4a adhere to the surface of the glass substrate 1 at the time of spray coating, so that the entire MgO film 4 is formed on the surface of the glass substrate 1. A protective layer in which the (111) plane orientation is oriented vertically.

Next, as shown in FIG. 2, a first substrate 1a on which a protective layer 5a made of an MgO film 4 is
On the protective layer 5b made of the gO film 4, a glass paste for forming a partition was printed and applied by screen printing and baked at 500 ° C. to form a partition 6, and a glass tube 7 for evacuation and discharge gas introduction was further formed. The opposing second substrate 1b is heat-sealed with frit glass 8. Finally, vacuum heating is performed while evacuating through the glass tube 7, and a helium-xenon (He-Xe) mixed gas is sealed, thereby obtaining the AC type gas discharge display panel according to the first embodiment.

Alternatively, an electrode 2a, a dielectric layer 3a and a partition 6 may be formed on the first substrate 1a, and then a protective layer 5a made of the MgO film 4 may be formed.

The structure of the AC type gas discharge display panel is not limited to the above-described example of the pair of electrodes facing each other, but the pair of electrodes for forming a discharge is formed on the same substrate, and the protective layer is formed on the substrate side where the electrodes are formed. A so-called surface-discharge type AC gas discharge display panel may be formed.

In the second embodiment of the present invention, as in the first embodiment, first, an electrode patterned in a predetermined shape is formed on a glass substrate. Next, a glass paste for a dielectric layer is applied by a screen printing method so as to cover the electrodes on the glass substrate, and then the glass substrate is heated to about 600 ° C. and baked to form a dielectric layer.

Next, the diameter is 1-2 μm and the thickness is 0.2-0.2 μm.
In the approximate disk shape of about 0.4 μm,
1) Fine crystal powder of Mg (OH) ₂ having a uniform plane orientation is dispersed using water as a dispersion medium to form a suspension used for spraying. Next, the suspension and high-pressure air are supplied to a two-fluid spray gun, and the suspension is spray-coated on a glass substrate heated to about 70 ° C. At this time, since the glass substrate is heated, water evaporates quickly, and the (0001) plane orientation of the Mg (OH) ₂ microcrystals becomes an Mg (OH) ₂ film stacked perpendicular to the surface of the glass substrate. Further, the Mg (O
H) By thermally decomposing the ₂ film at 450 ° C., a protective layer having the (111) plane orientation perpendicular to the surface of the glass substrate 1 is obtained as the whole MgO film 4 as in the first embodiment shown in FIG. Can be

Mg (OH) formed according to the second embodiment
_The crystallinity of the _two films was evaluated by X-ray diffraction (X-ray diffractometer). Table 1 shows the diffraction intensity of each crystal plane direction when the crystal plane direction at which the highest diffraction intensity was obtained was taken as 100. ASTM (Americic) is included in the table for reference.
an Society for TestingMat
(Erials) card shows the diffraction intensity ratio of each crystal plane orientation.

[0022]

[Table 1]

The MgO film obtained by thermal decomposition was also evaluated. Table 2 shows the results. In the table, for comparison, an MgO film formed by vacuum evaporation and an MgO film formed by screen printing using a paste in which the same plate-like MgO microcrystalline powder used in the first example were dispersed were used.
The evaluation results of the O film and the diffraction intensity ratio of each crystal plane orientation according to the ASTM card are shown.

[0024]

[Table 2]

Table 1 shows that the Mg (OH) ₂ film formed by the air spray method of the _second embodiment is very strong (000
1) It can be seen that they are oriented in the plane direction. Also, Table 2 shows that the MgO film obtained by the second example is very strongly oriented in the (111) plane direction.

Finally, an AC type gas discharge display panel according to the second embodiment is obtained through the same process as in the first embodiment using the glass substrate on which the protective layer is formed.

In the second embodiment, as in the first embodiment, after forming electrodes, dielectric layers, and partition walls on the first substrate, M
It is needless to say that a g (OH) ₂ film may be formed and thermally decomposed to form a protective layer made of an MgO film, and it may be applied to a surface discharge type AC type gas discharge display panel.

[0028]

As described above, according to the present invention, by combining a plate-like microcrystalline powder suspension having a uniform crystal orientation with an air spray method, the suspension can be made perpendicular (1) to the substrate surface.
11) It is possible to easily obtain a protective layer made of an MgO film having a crystal orientation of a crystal plane orientation. By using this protective layer in an AC-type gas discharge display panel, the driving voltage can be reduced, so that the power consumption of the AC-type discharge display panel can be reduced, and the degree of freedom in driving method and driving circuit design can be increased. There is an effect that can be.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a glass substrate on which an MgO film is formed for explaining a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a configuration of an example of a conventional AC gas discharge display panel.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Glass substrate 1a 1st substrate 1b 2nd substrate 2, 2a, 2b Electrode 3, 3a, 3b Dielectric layer 4 MgO film 4a MgO microcrystal 5a, 5b Protective layer 6 Partition wall 7 Glass tube 8 Frit glass

Claims (2)

(57) [Claims] A first insulating substrate and a first insulating substrate;
And a pair of electrodes arranged to face each of the second insulating substrates, a dielectric layer covering each electrode of the pair of electrodes, and a magnesium oxide formed on each of the dielectric layers. In the method for manufacturing an AC-driven gas discharge display panel having a layer and a discharge space formed by filling a discharge gas between the magnesium oxide layers, the step of forming the magnesium oxide layer may include (11)
1) a step of spraying a suspension in which a plate-like magnesium oxide crystal powder extending flat in the crystal plane direction is dispersed in a medium onto the dielectric layer by an air spray method using a spray gun to form the suspension. A method for manufacturing a gas discharge display panel, which is characterized in that: 2. The first and second insulating substrates, and the first and second insulating substrates.
And a pair of electrodes arranged to face each of the second insulating substrates, a dielectric layer covering each electrode of the pair of electrodes, and a magnesium oxide formed on each of the dielectric layers. In the method for manufacturing an AC-driven gas discharge display panel having a layer and a discharge space formed by filling a discharge gas between the magnesium oxide layers, the step of forming the magnesium oxide layer may include (00)
01) A suspension in which a plate-like magnesium hydroxide crystal powder extending flat in the crystal plane direction is dispersed in a medium is sprayed on the dielectric layer by an air spray method using a spray gun to form a magnesium hydroxide layer. And a step of converting the magnesium hydroxide layer into the magnesium oxide layer by thermal decomposition.