JP2568975B2 - Dry grinding method and equipment - Google Patents

Dry grinding method and equipment

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Publication number
JP2568975B2
JP2568975B2 JP5232263A JP23226393A JP2568975B2 JP 2568975 B2 JP2568975 B2 JP 2568975B2 JP 5232263 A JP5232263 A JP 5232263A JP 23226393 A JP23226393 A JP 23226393A JP 2568975 B2 JP2568975 B2 JP 2568975B2
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JP
Japan
Prior art keywords
grinding
inert gas
workpiece
atmosphere
dry grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP5232263A
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Japanese (ja)
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JPH0760621A (en
Inventor
佳成 磯部
泰生 加藤
保 田戸
正信 香川
Original Assignee
山口県
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Publication of JPH0760621A publication Critical patent/JPH0760621A/en
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は,加工雰囲気として窒素
ガス等の不活性気体を用い,非酸化効果,冷却効果,低
加工抵抗効果を実現する乾式研削加工法及び研削加工装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dry grinding method and a grinding apparatus that use an inert gas such as nitrogen gas as a processing atmosphere to realize a non-oxidizing effect, a cooling effect, and a low working resistance effect. .

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】研削加
工法は研削液を用いる湿式研削加工法と,大気中でその
まま実施される乾式研削加工法とに分けられる。従来,
乾式研削加工法は研削液を用いないため,加工面に研削
熱の影響を直接受けて研削焼け,研削割れを生じやす
い。また,湿式研削加工法は,冷却油又は水を用い,潤
滑効果,冷却効果,洗浄効果を得ているが,表面品位に
関わる加工面酸化が避けられない。そしてまた,微小機
械構造部品の加工においては,研削液の液圧の作用だけ
で加工物が損傷を受けるので,必ずしも満足な方法では
ない。また,湿式研削加工における研削液の使用は,ミ
ストの飛散等による作業環境の汚染も生じるが,これを
防止する好適な手段が開発されていない。
2. Description of the Related Art Grinding methods are classified into a wet grinding method using a grinding fluid and a dry grinding method performed directly in the atmosphere. Conventionally,
Since the dry grinding method does not use a grinding fluid, it is susceptible to grinding burns and grinding cracks due to the direct influence of grinding heat on the machined surface. In addition, the wet grinding method uses a cooling oil or water to obtain a lubricating effect, a cooling effect, and a cleaning effect. However, oxidation of the processed surface relating to the surface quality is inevitable. Also, in the processing of micro mechanical structural parts, the work is damaged only by the action of the hydraulic pressure of the grinding fluid, and is not always a satisfactory method. In addition, use of a grinding fluid in wet grinding causes contamination of the working environment due to scattering of mist and the like, but no suitable means for preventing this has been developed.

【0003】[0003]

【課題を解決するための手段】本発明は上記課題に鑑み
てなされたもので,その目的とするところは,冷却効
果,非酸化効果,低加工抵抗効果を実現し、かつ加工作
業環境の清浄化、加工雰囲気ガス(不活性気体)のリサ
イクル使用によるコスト低減化を可能とした乾式研削加
工法及び装置を提供しようとするものである。上記課題
は,下記構成の本発明によって解決できる。 (1)被加工物の乾式研削加工法において、研削加工部
を覆ってなる常温の不活性気体を充満した気密室内で被
加工物の研削加工を行い、かつ前記気密室内の不活性気
体を濾過器と冷却器と送風器を備えてなる循環濾過装置
を通して濾過・冷却して循環使用することを特徴とする
乾式研削加工法。 (2)被加工物の乾式研削加工法において,非酸化,冷
却,低加工抵抗用の媒体として常温の不活性気体を加工
雰囲気に用いたことを特徴とする前記(1)項記載の乾
式研削加工法。 (3)被加工物の乾式研削加工装置において,研削加工
部を覆ってなる,常温の不活性気体を充満した気密室
と,気密室内の不活性気体の循環濾過装置とを備えてな
り、かつ前記循環濾過装置は濾過器と冷却器と送風器を
具備してなることを特徴とする乾式研削加工装置。
SUMMARY OF THE INVENTION The present invention has been made in consideration of the above problems, and has as its object to realize a cooling effect, a non-oxidizing effect, a low working resistance effect , and a working work.
Purification of industrial environment, Lisa for processing atmosphere gas (inert gas)
An object of the present invention is to provide a dry grinding method and an apparatus capable of reducing costs by using a cycle . The above problem can be solved by the present invention having the following configuration. (1) In the dry grinding method of the workpiece, the grinding portion
In an airtight chamber filled with an inert gas at room temperature.
Grind the workpiece, and inert gas in the hermetic chamber
A circulating filtration device comprising a filter, a cooler and a blower for the body
Dry grinding method characterized by being filtered, cooled and recycled . (2) The dry grinding method according to (1), wherein an inert gas at room temperature is used as a medium for non-oxidizing, cooling, and low working resistance in the working atmosphere in the dry grinding method for the workpiece. Processing method. (3) In a dry grinding apparatus for a workpiece, an airtight chamber, which covers the grinding portion and is filled with an inert gas at normal temperature, and a device for circulating and filtering the inert gas in the airtight chamber, must be provided.
And the circulating filtration device includes a filter, a cooler, and a blower.
A dry grinding apparatus characterized by comprising:

【0004】[0004]

【作用】先ず,本発明の乾式研削加工法を実施するため
の被加工物の研削加工雰囲気として不活性気体を用いた
乾式研削加工装置の作用を,図1の実施例を示す構成説
明側面図を用いて説明する。平面研削盤M上の研削加工
部Gを覆った気密室5には,気体タンク7により窒素ガ
ス等の不活性気体が充填され,その不活性気体を用いた
加工雰囲気が生成され,その中で研削加工が実施され
る。気密室5内の不活性気体は循環濾過装置8により常
時循環濾過され,該装置8の濾過器8a,冷却器8b,
送風器8cを通って清浄冷却された不活性気体は再び気
密室5の砥石カバー部6に送り戻される。気密室5内で
は,ディスク状研削砥石4により不活性雰囲気下で被加
工物が研削加工される。したがって、気密室5内の不活
性気体は、濾過器8aによって、研削加工時に発生する
微小研削屑、砥粒屑、ミスト等が濾過・除去されて清浄
化され、また、冷却器8bによって、研削加工熱、機械
発熱等で昇温された不活性気体の発熱分が回収・冷却さ
れ、そして送風器8cによって、清浄化・冷却された不
活性気体が気密室内にリサイクル供給される。
First, the operation of a dry grinding apparatus using an inert gas as an atmosphere for grinding a workpiece for carrying out the dry grinding method of the present invention will be described. This will be described with reference to FIG. The gas tight chamber 5 covering the grinding portion G on the surface grinder M is filled with an inert gas such as nitrogen gas by a gas tank 7, and a working atmosphere using the inert gas is generated. A grinding process is performed. The inert gas in the hermetic chamber 5 is constantly circulated and filtered by the circulating filtration device 8, and the filter 8a, the cooler 8b,
The inert gas that has been cleaned and cooled through the blower 8c is sent back to the grindstone cover 6 of the airtight chamber 5 again. In the airtight chamber 5, the workpiece is ground by the disk-shaped grinding wheel 4 under an inert atmosphere. Therefore, inactive in the airtight chamber 5
The volatile gas is generated by the filter 8a during the grinding process.
Fine grinding dust, abrasive dust, mist, etc. are filtered and removed for cleaning
The grinding machine heat and machine
The heat generated by the inert gas heated due to heat generation is collected and cooled.
And cleaned and cooled by the blower 8c.
The active gas is recycled into the hermetic chamber.

【0005】次に,かかる不活性気体を用いた加工雰囲
気で実施される本発明の乾式研削加工法において,不活
性気体が非酸化,冷却,低加工抵抗用の媒体として有効
に作用している点を,従来の大気中の乾式研削加工と比
較しながら説明する。本発明の乾式研削加工法では,不
活性気体を充満した気密室内の雰囲気で乾式研削加工
が実施できるので,大気中での研削加工時における酸素
に起因する酸化反応や表面性状の変質は回避される。こ
の事実は,発明者が行った,窒素ガスを用いた加工雰囲
気中で炭素鋼を研削加工する実験において,非酸化に対
する作用効果が明瞭に観察され,加工面には酸化物の生
成が認められなかったことにより確認できた。
Next, in the dry grinding method of the present invention carried out in a working atmosphere using such an inert gas, the inert gas effectively acts as a medium for non-oxidation, cooling and low working resistance. The points are explained in comparison with the conventional dry grinding in the atmosphere. In the dry grinding method of the present invention, since the dry grinding in an atmosphere of air-tight chamber which is filled with inert gas can be performed, the deterioration of the oxidation reaction and the surface properties due to oxygen during grinding in air avoidance Is done. This fact is clear from the fact that in the experiments conducted by the inventor on grinding carbon steel in a processing atmosphere using nitrogen gas, the effect on non-oxidation was clearly observed, and oxide formation was observed on the processed surface. It was confirmed by the absence.

【0006】また,発明者らの炭素鋼(S45C)研削の
実験結果から不活性気体(窒素ガス)の冷却効果を説明す
る。発明者らは,光ファイバを用いた赤外線センサ放射
温度測定システムを試作し,炭素鋼の乾式研削加工時の
赤外線強度を測定することで,高速に変化する研削時の
砥石表面の微小領域温度の測定に成功した。図5は前記
の測定システムにおける研削温度測定の要部説明図であ
るが,被加工物(S45C)3の底面3bから研削表面
3aの下方160μmまで設けた直径2mmの細穴12
に光ファイバ13を挿入し,その受光面13aが細穴1
2の底部12aから100μmの位置で固定した。毎切
込み量20μmの乾式ワンパス平面プランジ研削を実施
し,光ファイバ13は被加工物3の細穴12の底部12
aから放射される赤外線を受光し,研削時の被加工物3
の研削表面3aの過渡的温度を測定した。なお,総切込
量160μmのとき研削表面3aに細穴12が貫通す
る。底部12aから80μmの位置に研削表面3aが達
したときの空気雰囲気の測定値は,同じ不活性気体雰囲
気の測定値とほぼ等しいが,それ以後の表面近傍の測定
値は,空気雰囲気のものが高温になっていた。両者の電
圧差を温度変換すると底部12aから40μmの位置に
研削表面3aが達したときの空気雰囲気での測定値と不
活性雰囲気での測定値には100℃の温度差があって,
空気雰囲気では酸化燃焼反応による温度上昇が認められ
た。これらの測定及びその他関係実験から,以下のこと
がわかった。 (1)空気雰囲気中でのS45C材の研削加工において測
定出力には加工発熱と切屑の酸化燃焼反応による発熱が
加味されている。 (2)定量的には加工発熱以外の酸化による発熱は,加工
発熱に比較して,加工直後からはるかに大きい熱量を発
生する。 (3)本測定システムによる砥石表面の測定出力は,砥石
研削点が光ファイバ直上に位置する場合,雰囲気に影響
されず表面に応じた出力をする。 (4)以上から,酸化反応を生起させない不活性気体雰囲
気による冷却効果が確認される。 また加工面には研削熱による研削焼け,研削割れの発生
が認められなかった。
Further, the cooling effect of the inert gas (nitrogen gas) will be described based on the results of experiments of grinding carbon steel (S45C) by the inventors. The inventors prototyped an infrared sensor radiation temperature measurement system using an optical fiber, and measured the infrared intensity during dry grinding of carbon steel. The measurement was successful. FIG. 5 is an explanatory view of a main part of the grinding temperature measurement in the above-mentioned measuring system.
The optical fiber 13 is inserted into the
2 was fixed at a position 100 μm from the bottom 12a. A dry one-pass plane plunge grinding with a depth of cut of 20 μm was performed, and the optical fiber 13 was placed on the bottom 12 of the small hole 12 of the workpiece 3.
Workpiece 3 that receives infrared rays emitted from a
The transient temperature of the ground surface 3a was measured. When the total cutting depth is 160 μm, the fine hole 12 penetrates the ground surface 3a. The measured value of the air atmosphere when the grinding surface 3a reaches a position 80 μm from the bottom 12a is almost equal to the measured value of the same inert gas atmosphere, but the measured values near the surface thereafter are those of the air atmosphere. It was hot. When the voltage difference between the two is converted into a temperature, there is a temperature difference of 100 ° C. between the measured value in the air atmosphere and the measured value in the inert atmosphere when the ground surface 3a reaches a position 40 μm from the bottom 12a.
In the air atmosphere, a temperature rise due to the oxidative combustion reaction was observed. From these measurements and other related experiments, the following was found. (1) In the grinding processing of S45C material in an air atmosphere, the measurement output takes into account the heat generated by the processing and the heat generated by the oxidation combustion reaction of the chips. (2) Quantitatively, the heat generated by oxidation other than the heat generated by processing generates a much larger amount of heat immediately after processing than the heat generated by processing. (3) The measurement output of the grinding wheel surface by this measurement system is output according to the surface without being affected by the atmosphere when the grinding wheel grinding point is located directly above the optical fiber. (4) From the above, the cooling effect by the inert gas atmosphere that does not cause the oxidation reaction is confirmed. No grinding burns or grinding cracks were observed on the machined surface due to the grinding heat.

【0007】また,同じく発明者の,ステンレス鋼(S
US304)研削の実験結果から不活性気体(窒素ガ
ス)の研削抵抗の低減効果を説明する。図2は不活性気
体雰囲気の場合,図3は空気雰囲気の場合のそれぞれの
研削主分力抵抗の測定出力波形図である。なお,これら
の測定データは圧電素子センサーを用いた研削主分力抵
抗測定装置(キスラ動力計)(キスラー社(スイス)
製)を用いて測定されたものである。被加工物(SUS
304)に対しワンパス当たりの切り込み量10μmの
乾式平面プランジ研削を多数回にわたるパスで実施した
とき,8パス目における「キスラ動力計」で研削加工時
の研削主分力抵抗(加工物接線方向の研削抵抗)を測定
したものである。図2,図3の出力波形は前記ステンレ
ス鋼加工物(長さ22〜24mm,幅10mm)の8パ
ス目の測定値である。図3の空気雰囲気での研削主分力
抵抗値には,図2の不活性雰囲気での測定値にはない過
渡的な異常値が表れている(点線Sで表示)。これは,
8パス目での研削抵抗でディスク研削砥石に片減りを生
じ,砥石の被加工物接触での強弱がそのまま研削主分力
抵抗値に表れたと考られる。これに対して,不活性気体
雰囲気での研削加工では,ディスク状砥石に片減りが見
られないことから同雰囲気における研削抵抗の低減効果
が確認できる。以上のごとく,気密室内での加工雰囲気
として窒素ガス等の不活性気体を用いる本発明の乾式研
削加工法においては,その不活性気体が研削加工法にお
ける非酸化,冷却,低加工抵抗用の媒体として作用し、
かつ不活性気体のたれ流しが無く有効利用が図られる
とが判る。通常の空気雰囲気での乾式研削加工では,酸
化反応により被加工物の表面に酸化着色膜が生じる場合
があるが,本発明によればそのような着色が生成せず,
酸化が進行していないことが解る。
[0007] Also, a stainless steel (S
US304) The effect of reducing the grinding resistance of an inert gas (nitrogen gas) will be described based on the results of grinding experiments. FIG. 2 is a measured output waveform diagram of the main grinding component force resistance in an inert gas atmosphere, and FIG. 3 is a measured output waveform diagram in an air atmosphere. These measurement data are based on a main component force resistance measuring device (Kistler dynamometer) using a piezoelectric element sensor (Kistler, Switzerland)
Was used for the measurement. Workpiece (SUS
304), when the dry plane plunge grinding with a cutting depth of 10 μm per pass was performed in a large number of passes, the main component resistance of the grinding (the tangential direction in the workpiece tangential direction) at the 8th pass by the “Kistler dynamometer” (Grinding resistance). The output waveforms in FIGS. 2 and 3 are measured values of the stainless steel workpiece (length 22 to 24 mm, width 10 mm) in the eighth pass. A transient abnormal value that is not present in the measured value in the inert atmosphere in FIG. 2 appears in the grinding main component force resistance value in the air atmosphere in FIG. 3 (indicated by a dotted line S). this is,
It is considered that the grinding resistance at the 8th pass caused the disc grinding wheel to lose weight, and the strength of the grinding wheel in contact with the workpiece was directly expressed in the grinding main component resistance value. On the other hand, in the grinding process in an inert gas atmosphere, no reduction is observed in the disc-shaped grindstone, so that the effect of reducing the grinding resistance in the same atmosphere can be confirmed. As described above, in the dry grinding method of the present invention in which an inert gas such as nitrogen gas is used as the processing atmosphere in the hermetic chamber, the inert gas is used as a medium for non-oxidation, cooling, and low processing resistance in the grinding method. Act as
It can be seen that there is no flow of the inert gas and effective utilization is achieved . In dry grinding in an ordinary air atmosphere, an oxidation coloring film may be formed on the surface of a workpiece due to an oxidation reaction. However, according to the present invention, such coloring is not generated.
It turns out that oxidation has not progressed.

【0008】[0008]

【実施例】平面研削盤における,本発明の被加工物の研
削加工雰囲気として不活性気体を用いる乾式研削加工装
置を使用する実施例を図面に基づき説明する。図1は本
発明の乾式研削加工装置1の構成説明図である。図中,
Mは平面研削盤であり,2は平面研削盤Mのテーブルで
ある。3はテーブル2に取り付けられた加工物であっ
て,テーブル2と共に図面上の左右方向に往復移動す
る。また,4は正面方向の水平な砥石軸に取り付けられ
たディスク状の研削砥石であって,砥石4を高速回転さ
せて往復移動する被加工物3の平面を研削するものであ
る。また,前記の研削盤M上には,往復動するテーブル
2及び加工物3と,正面に向かって回転する研削砥石4
とを含む研削加工部Gを気密に覆ってなる,箱状の気密
室5が載設され,中央の研削砥石4の突出部分には砥石
カバー部6が突設されている。また気密室5の給気孔5
aと不活性気体タンク7とは開閉弁7aを介してパイプ連
結され,気密室5には該気体タンク7から窒素ガス等の
不活性気体が送給,充填され,研削加工部Gにはその不
活性気体が充満された加工雰囲気が生成されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which a dry grinding apparatus using an inert gas as an atmosphere for grinding a workpiece according to the present invention in a surface grinder will be described with reference to the drawings. FIG. 1 is a diagram illustrating the configuration of a dry grinding apparatus 1 according to the present invention. In the figure,
M is a surface grinder, and 2 is a table of the surface grinder M. Reference numeral 3 denotes a workpiece mounted on the table 2, which reciprocates with the table 2 in the horizontal direction on the drawing. Reference numeral 4 denotes a disk-shaped grinding wheel attached to a horizontal grinding wheel shaft in the front direction, which rotates the grinding wheel 4 at high speed to grind a plane of the workpiece 3 reciprocating. On the grinding machine M, a table 2 and a workpiece 3 reciprocating and a grinding wheel 4 rotating toward the front are arranged.
A box-shaped hermetic chamber 5 is hermetically covered so as to air-tightly cover the grinding portion G including the following. A grinding wheel cover 6 is protrudingly provided at a protruding portion of the central grinding wheel 4. The air supply hole 5 of the airtight chamber 5
a and an inert gas tank 7 are connected by a pipe via an on-off valve 7a, and an inert gas such as nitrogen gas is supplied and filled into the airtight chamber 5 from the gas tank 7; A processing atmosphere filled with an inert gas is generated.

【0009】また,加工装置1には,気密室5内で研削
加工に使用された不活性気体を循環し,清浄冷却するた
めの濾過器8a,冷却器8b,送風器8cからなる循環濾
過装置8が設置されている。気密室5の排気孔5bと前
記の循環濾過装置8とは,送りパイプ9aを介して連結
され,気密室5内の不活性気体を循環濾過装置8内に給
送する。該装置8内では,給送された不活性気体が濾過
器8a,冷却器8b,送風器8cの順に循環する。先ず濾
過器8aでは,研削加工のとき生成された微小研削屑,
砥粒屑等が回収され,不活性気体を清浄化する。次の冷
却器8bでは,研削加工熱,機械発熱等で加熱された不
活性気体の発熱分を回収冷却する。次の送風器8cで
は,清浄冷却された不活性気体を気密室5の砥石カバー
部6に送り戻している。9bはその戻しパイプで,砥石
カバー部6の側面の送気孔6aに連結される。
Further, the processing apparatus 1 circulates an inert gas used for grinding in the airtight chamber 5 and circulates and filters the filter 8a, the cooler 8b, and the blower 8c for clean and cooling. 8 are installed. The exhaust hole 5b of the hermetic chamber 5 and the circulating filter 8 are connected via a feed pipe 9a, and feeds the inert gas in the hermetic chamber 5 into the circulating filter 8. In the device 8, the supplied inert gas circulates in the order of the filter 8a, the cooler 8b, and the blower 8c. First, in the filter 8a, fine grinding dust generated during the grinding process is removed.
Abrasive dust and the like are collected to purify the inert gas. The next cooler 8b recovers and cools the heat generated by the inert gas heated by the grinding heat, mechanical heat, and the like. In the next blower 8c, the clean and cooled inert gas is sent back to the grindstone cover 6 in the airtight chamber 5. The return pipe 9b is connected to the air supply hole 6a on the side surface of the grinding wheel cover 6.

【0010】一方,砥石カバー部6内では,ディスク状
研削砥石4が高速回転している(図4) かくして,砥石4の研削加工点には,気密室5に充満さ
れた不活性気体の加工雰囲気が生成され,循環濾過装置
8により,清浄冷却された不活性気体は再度研削加工点
に放出され,常に本発明の乾式研削加工法が実施可能な
ように新鮮な不活性気体を用いた加工雰囲気を生成保持
する。
On the other hand, in the grinding wheel cover 6, the disk-shaped grinding wheel 4 is rotating at a high speed (FIG. 4). Thus, at the grinding point of the grinding wheel 4, the inert gas filled in the airtight chamber 5 is processed. An atmosphere is generated, and the inert gas that has been cleaned and cooled by the circulation filtration device 8 is discharged again to the grinding point, and the processing using the fresh inert gas is performed so that the dry grinding method of the present invention can always be performed. Generate and hold the atmosphere.

【0011】次に,かかる不活性気体を用いた加工雰囲
気で本発明の乾式研削加工法を実施したが,前述の[作
用]の欄で述べたごとく,不活性気体が非酸化,冷却,
低加工抵抗用の媒体として、かつ不活性気体のたれ流し
がなく、有効に作用していることが確認できた。
[0011] Then, was carried out dry grinding method of the present invention in the processing atmosphere using such an inert gas, the above-mentioned [work
As described in the section for “
As a medium for low machining resistance , and with a flow of inert gas
Without, it was confirmed that they are working effectively.

【0012】[0012]

【発明の効果】本発明の被加工物の研削加工雰囲気とし
て不活性気体を用いた乾式研削加工法及び装置は,以上
詳記したように,従来の大気中における乾式研削加工法
と異なり,冷却効果・非酸化効果・低加工抵抗効果を実
現でき、加工作業環境の清浄化、加工雰囲気ガス(不活
性気体)のリサイクル利用によるコストの低減化を可能
とし、かつ従来のような研削焼け,研削割れ及び酸化物
の生成をきわめて効率的に排除できる。特に,酸化を嫌
う部品の研削加工には本発明は好適である。また,湿式
研削加工を採用する研削液の液圧により損傷を受け易い
微小機械構造部品の研削加工分野に,本発明を適用すれ
ば,そうした損傷を受けることがないため,同分野に多
大な貢献をなすものである。さらに,本発明の装置によ
れば従来の湿式研削加工における研削液のミストの飛散
による作業環境の汚染は生じない。また,本発明による
低加工抵抗効果により,被加工物に対する研削能力を向
上させることができる。
As described in detail above, the dry grinding method and the apparatus of the present invention using an inert gas as the grinding atmosphere for the workpiece are different from the conventional dry grinding method in the atmosphere, and are different from the conventional dry grinding method. Effect, non-oxidizing effect, low working resistance effect , clean working environment, working atmosphere gas (inactive)
Cost can be reduced by recycling
In addition, grinding burns, grinding cracks, and generation of oxides as in the prior art can be eliminated very efficiently . In particular, the present invention is suitable for the grinding of parts that do not like oxidation. In addition, if the present invention is applied to the field of grinding small mechanical structure components that are easily damaged by the hydraulic pressure of the grinding fluid that employs wet grinding, such damage will not occur, making a great contribution to the field. It is what makes. Furthermore, according to the apparatus of the present invention, contamination of the working environment due to scattering of the mist of the grinding fluid in the conventional wet grinding does not occur. Further, the grinding ability for the workpiece can be improved by the low machining resistance effect according to the present invention.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の加工装置の構成説明側面図である。FIG. 1 is a configuration explanatory side view of a processing apparatus of the present invention.

【図2】不活性気体雰囲気における研削主分力抵抗の測
定出力波形図である。
FIG. 2 is a measurement output waveform diagram of a main component resistance of grinding in an inert gas atmosphere.

【図3】空気雰囲気における研削主分力抵抗の測定出力
波形図である。
FIG. 3 is a measurement output waveform diagram of a main component resistance of grinding in an air atmosphere.

【図4】研削砥石の側面図である。FIG. 4 is a side view of the grinding wheel.

【図5】研削温度測定の要部説明図である。FIG. 5 is an explanatory diagram of a main part of grinding temperature measurement.

【符号の説明】[Explanation of symbols]

1 乾式研削加工装置2 テーブル
3 被加工物 4 研削砥石 5 気密室 5a 給気孔 5c 排気孔 6 砥石カバー部 6a 送気孔 7 不活性気体タンク 7a 開閉弁 8 循環濾過装置 8a 濾過器 8b 冷却器 8c 送風器 9a 送りパイプ 9b 戻しパイ
プ 11 砥石軸 12 細穴 13 光ファイバ M 平面研削盤 G 研削加工
1 Dry grinding machine 2 Table
Reference Signs List 3 Workpiece 4 Grinding stone 5 Airtight chamber 5a Air supply hole 5c Exhaust hole 6 Grinding stone cover 6a Air supply hole 7 Inert gas tank 7a Open / close valve 8 Circulation filter 8a Filter 8b Cooler 8c Blower 9a Send pipe 9b Return pipe 11 Grinding wheel shaft 12 Fine hole 13 Optical fiber M Surface grinder G Grinding part

フロントページの続き (56)参考文献 特開 平5−220665(JP,A) 特開 昭57−211460(JP,A) 特開 昭55−112761(JP,A) 特開 昭55−96249(JP,A)Continuation of the front page (56) References JP-A-5-220665 (JP, A) JP-A-57-211460 (JP, A) JP-A-55-112761 (JP, A) JP-A-55-96249 (JP, A) , A)

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】被加工物の乾式研削加工法において、研削
加工部を覆ってなる常温の不活性気体を充満した気密室
内で被加工物の研削加工を行い、かつ前記気密室内の不
活性気体を濾過器と冷却器と送風器を備えてなる循環濾
過装置を通して濾過・冷却して循環使用することを特徴
とする乾式研削加工法。
In a dry grinding method for a workpiece , grinding is performed.
An airtight chamber filled with room temperature inert gas that covers the processing section
Grinding the workpiece in the airtight chamber
Circulation filtration of active gas with filter, cooler and blower
A dry grinding method characterized by filtering, cooling and circulating through a filtration device .
【請求項2】被加工物の乾式研削加工法において,非酸
化,冷却,低加工抵抗用の媒体として常温の不活性気体
を加工雰囲気に用いたことを特徴とする請求項1記載の
乾式研削加工法。
2. The dry grinding method according to claim 1 , wherein an inert gas at room temperature is used as a medium for non-oxidizing, cooling, and low working resistance in the working atmosphere in the dry grinding method for the workpiece. Processing method.
【請求項3】被加工物の乾式研削加工装置において,研
削加工部を覆ってなる,常温の不活性気体を充満した気
密室と,気密室内の不活性気体の循環濾過装置とを備え
てなり、かつ前記循環濾過装置は濾過器と冷却器と送風
器を具備してなることを特徴とする乾式研削加工装置。
3. A dry grinding apparatus for a workpiece, comprising: an airtight chamber, which covers the grinding portion and is filled with an inert gas at normal temperature; and a device for circulating and filtering the inert gas in the airtight chamber. And the circulating filtration device includes a filter, a cooler,
Dry grinding machine characterized by comprising a grinding machine.
JP5232263A 1993-08-26 1993-08-26 Dry grinding method and equipment Expired - Fee Related JP2568975B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5232263A JP2568975B2 (en) 1993-08-26 1993-08-26 Dry grinding method and equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5232263A JP2568975B2 (en) 1993-08-26 1993-08-26 Dry grinding method and equipment

Publications (2)

Publication Number Publication Date
JPH0760621A JPH0760621A (en) 1995-03-07
JP2568975B2 true JP2568975B2 (en) 1997-01-08

Family

ID=16936517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5232263A Expired - Fee Related JP2568975B2 (en) 1993-08-26 1993-08-26 Dry grinding method and equipment

Country Status (1)

Country Link
JP (1) JP2568975B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19544282A1 (en) * 1995-11-28 1997-06-05 Nagel Masch Werkzeug Method of cooling and removing swarf for honing operation
EP0958887B1 (en) * 1998-05-13 2003-03-19 Enshu Limited Nitrogen gas supply system for dry-cut working machine
JP2002126967A (en) * 2000-10-20 2002-05-08 Enshu Ltd Cutting chip gathering system of dry machining device
JP4448297B2 (en) 2002-12-27 2010-04-07 株式会社荏原製作所 Substrate polishing apparatus and substrate polishing method
CN103029019A (en) * 2012-12-17 2013-04-10 四川成发航空科技股份有限公司 Dry grinding method for finishing workpiece
JP2018075680A (en) * 2016-11-10 2018-05-17 ファナック株式会社 Machine tool
CN107520714A (en) * 2017-09-15 2017-12-29 南通欧伦嘉机械设备有限公司 A kind of hardware machinery sanding apparatus
CN117245491B (en) * 2023-11-15 2024-01-26 哈尔滨安宇迪航空工业股份有限公司 Polishing device, polishing method and aviation process equipment for manufacturing aviation parts

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112761A (en) * 1979-02-20 1980-08-30 Disco Abrasive Sys Ltd Dry type cutting method
JPS57211460A (en) * 1981-06-16 1982-12-25 Toyo Seikan Kaisha Ltd Method and device for removing film

Also Published As

Publication number Publication date
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