JP2565525B2 - Anti-reflection film attached transparent plate with metal film - Google Patents
Anti-reflection film attached transparent plate with metal filmInfo
- Publication number
- JP2565525B2 JP2565525B2 JP63004409A JP440988A JP2565525B2 JP 2565525 B2 JP2565525 B2 JP 2565525B2 JP 63004409 A JP63004409 A JP 63004409A JP 440988 A JP440988 A JP 440988A JP 2565525 B2 JP2565525 B2 JP 2565525B2
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- layer
- oxide
- antireflection film
- transparent plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Surface Treatment Of Optical Elements (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、透明基板の光の反射を低減する反射防止膜
付着透明板、特に光を吸収する金属層、または金属合金
層を有する多層反射防止膜付着透明板に関する。TECHNICAL FIELD The present invention relates to an antireflection film-attached transparent plate for reducing light reflection of a transparent substrate, particularly a multilayer reflection having a light absorbing metal layer or a metal alloy layer. The present invention relates to a transparent plate having a protective film attached.
［従来の技術］ 従来、光を吸収する金属層を有する多層反射防止膜付
着透明板として、透明基板の一方の面に誘電体のみから
なる多層反射防止膜を形成し、もう一方の面に透過率が
30％〜80％となるような厚みの光吸収のある金属層を形
成したものが特開昭62−58202で公知である。この金属
層を有する多層反射防止膜付着透明板は多層反射防止膜
により透明板の反射率を下げると共に金属層により光を
吸収して透明基板の透過率を調整しようとするものであ
る。[Prior Art] Conventionally, as a multi-layer anti-reflection film-attached transparent plate having a metal layer that absorbs light, a multi-layer anti-reflection film made of only a dielectric is formed on one surface of a transparent substrate and is transmitted to the other surface. Rate is
A light-absorbing metal layer having a thickness of 30% to 80% is known from JP-A-62-58202. The multilayer antireflection film-attached transparent plate having the metal layer is intended to adjust the transmittance of the transparent substrate by lowering the reflectance of the transparent plate by the multilayer antireflection film and absorbing light by the metal layer.
［発明が解決しようとする課題］ しかしながら、このような金属層を有する多層反射防
止膜付着透明板は透明基板表面に付着した多層反射防止
膜により、その表面反射は極めて小さくすることができ
るが、透明基体のもう一方の面と金属層との界面の反射
等により、該透明板全体の反射率を約１％程度にしか低
下できず、この金属層を有する多層反射防止膜付着透明
板をCRT等のガラス製ディスプレイに貼付けて使用する
場合でも、その全体の視感度反射率を0.6％程度にまで
しか下げることができなかった。[Problems to be Solved by the Invention] However, in a multilayer antireflection film-attached transparent plate having such a metal layer, the surface reflection can be extremely reduced by the multilayer antireflection film attached to the transparent substrate surface. Due to reflection at the interface between the other surface of the transparent substrate and the metal layer, the reflectance of the entire transparent plate can be reduced to only about 1%, and a multilayer antireflection film-attached transparent plate having this metal layer can be used as a CRT. Even when it is used by pasting it on a glass display such as, the overall luminous reflectance could be reduced only to about 0.6%.
［課題を解決するための手段］ この発明は、このような従来の問題点を解決すべくな
されたもので有り、透明板全体の反射率を極めて小さく
した反射防止膜付着透明板を提供することを目的とした
ものである。[Means for Solving the Problems] The present invention has been made to solve such conventional problems, and provides an antireflection film-attached transparent plate in which the reflectance of the entire transparent plate is extremely small. It is intended for.
この目的を達成するために、この発明は屈折率が1.40
〜1.70の透明基板の光の反射を防止するための反射防止
膜を付着した透明板において、該反射防止膜が2.00〜2.
40の屈折率で、0.07×λ0/4〜1.20×λ0/4（但しλ０は
中心波長、以下同じ）の光学膜厚である高屈折率誘電体
層と、1.37〜1.50の屈折率で、1.40×λ0/4〜1.70×λ0
/4の光学膜厚である第１の低屈折率融電体層と、30Å〜
60Åのチタン、クロム、ジルコニウム、モリブデン、ニ
ッケル、ニッケル・クロム合金、またはステンレスのい
ずれかの金属層または合金層と、1.37〜1.50の屈折率
で、0.8×λ0/4〜1.0×λ0/4の光学膜厚の第２の低屈折
率誘電体層とからなり、各層が該透明基板表面から順次
形成されている。To this end, the invention has a refractive index of 1.40.
In a transparent plate having an antireflection film for preventing light reflection of the transparent substrate of 1.70 to 1.70, the antireflection film has 2.00 to 2.
With a refractive index of 40, a high-refractive-index dielectric layer having an optical film thickness of 0.07 × λ0 / 4 to 1.20 × λ0 / 4 (where λ0 is a central wavelength, the same applies hereinafter), and a refractive index of 1.37 to 1.50, 1.40. × λ0 / 4 to 1.70 × λ0
1/4 low refractive index fused metal layer having an optical thickness of / 4, and 30Å ~
With a metal layer or alloy layer of 60 Å titanium, chromium, zirconium, molybdenum, nickel, nickel-chromium alloy, or stainless steel, with a refractive index of 1.37 to 1.50, 0.8 × λ 0/4 to 1.0 × λ 0/4 A second low-refractive-index dielectric layer having an optical film thickness, and each layer is sequentially formed from the surface of the transparent substrate.
本発明において、屈折率が1.40〜1.70の透明基板とし
ては通常ガラス板、または合成樹脂板が用いられる。合
成樹脂板としてはアクリル樹脂板、ポリカーボネイト樹
脂板、またはポリスチレン樹脂板が好んで用いられる。In the present invention, a glass plate or a synthetic resin plate is usually used as the transparent substrate having a refractive index of 1.40 to 1.70. As the synthetic resin plate, an acrylic resin plate, a polycarbonate resin plate, or a polystyrene resin plate is preferably used.
また、本発明において、前記高屈折率誘電体層とし
て、酸化チタン（TiO2）、酸化タンタル（Ta2O5）、酸
化ジルコニウム（ZrO2）、チタン酸プラセオジム（PrTi
O3）、酸化ハフニウム（HfO2）、硫化亜鉛（ZnS）、酸
化スズ（SnO2）、酸化インジウム（In2O3）、及び錫を
ドープした酸化インジウム（例えば、酸化インジウムと
酸化スズの重量比が95:5であるITO）のいずれかを用い
ることができる。更にまた、本発明において前記第１及
び第２の低屈折率誘電体層としてフッ化マグネシウム
（MgF2）、または酸化シリコン（SiO2）のいずれかを用
いることができる。Further, in the present invention, as the high refractive index dielectric layer, titanium oxide (TiO 2 ), tantalum oxide (Ta 2 O 5 ), zirconium oxide (ZrO 2 ), praseodymium titanate (PrTi) is used.
O 3 ), hafnium oxide (HfO 2 ), zinc sulfide (ZnS), tin oxide (SnO 2 ), indium oxide (In 2 O 3 ), and tin-doped indium oxide (for example, the weight of indium oxide and tin oxide). Any of ITO) having a ratio of 95: 5 can be used. Furthermore, in the present invention, either magnesium fluoride (MgF 2 ) or silicon oxide (SiO 2 ) can be used as the first and second low refractive index dielectric layers.
［作用］ このような反射防止膜中に光吸収のある金属層または
合金層を組入れた本発明においては透明板に入射する光
は無論、透明板の裏面での反射光がこの金属層、または
合金層で吸収減衰されるため、反射防止膜付着透明板全
体の反射光は小さくなる。[Operation] In the present invention in which a metal layer or an alloy layer having light absorption is incorporated in such an antireflection film, the light incident on the transparent plate is of course the light reflected on the back surface of the transparent plate. Since it is absorbed and attenuated by the alloy layer, the reflected light of the entire antireflection film-attached transparent plate becomes small.
［実施例１］ 以下、本発明の実施例を図面を引用して説明する。Example 1 An example of the present invention will be described below with reference to the drawings.
第１図において、１は屈折率が1.51のガラス板であっ
て、ガラス板１の表面に反射防止膜６が形成されてい
る。反射防止膜６はガラス板１側から順次屈折率が2.40
で、光学膜厚が0.1825×λ0/4（但しλ０＝504nm、以下
同じ）の酸化チタン層２と、屈折率が1.37で、光学膜厚
が1.5829×λ0/4のフッ化マグネシウム層３と、膜層が3
5Aのステンレス層４（ステンレスは72重量％のニッケ
ル、16重量％のクロム及び８重量％の鉄の合金である）
と、屈折率が1.37で、光学膜厚が0.9331×λ0/4のフッ
化マグネシウム層５とからなり、各層はガラス板１面上
に順次真空蒸着法で形成された。In FIG. 1, reference numeral 1 is a glass plate having a refractive index of 1.51, and an antireflection film 6 is formed on the surface of the glass plate 1. The antireflection film 6 has a refractive index of 2.40 sequentially from the glass plate 1 side.
And a titanium oxide layer 2 having an optical film thickness of 0.1825 × λ0 / 4 (where λ0 = 504 nm, the same applies hereinafter), and a magnesium fluoride layer 3 having a refractive index of 1.37 and an optical film thickness of 1.5829 × λ0 / 4, 3 membrane layers
5A stainless steel layer 4 (stainless steel is an alloy of 72% by weight nickel, 16% by weight chromium and 8% by weight iron)
And a magnesium fluoride layer 5 having a refractive index of 1.37 and an optical film thickness of 0.9331 × λ0 / 4.
反射防止膜６を形成したガラス板１のガラス面側をガ
ラスと同じ程度の屈折率を有する接着剤を用いて、CRT
のフェースプレートに接着してガラス面側の反射をなく
した。このときの反射防止膜付着ガラス板の反射特性を
第２図に、透過率特性を第３図に、視感度反射率及び視
感度透過率を第１表に夫々示した。The glass surface side of the glass plate 1 on which the antireflection film 6 is formed is bonded to the CRT using an adhesive having a refractive index similar to that of glass.
It was adhered to the face plate of to eliminate the reflection on the glass surface side. The reflection characteristics and the transmittance characteristics of the glass plate with the antireflection film attached at this time are shown in FIG. 2, FIG. 3 and the luminous reflectance and the luminous transmittance are shown in Table 1, respectively.
［実施例２］ 第１図に示したと同様な構成の反射防止膜付着ガラス
板であって、反射防止膜６の多層膜を以下の如く変え
た。 [Example 2] An antireflection film-attached glass plate having the same structure as that shown in Fig. 1, in which the multilayer film of the antireflection film 6 was changed as follows.
すなわち、反射防止膜６は屈折率が2.15で、光学膜厚
が0.2385×λ0/4のチタン酸プラセオジム層２と、屈折
率が1.37で、光学膜厚が1.5582×λ0/4のフッ化マグネ
シウム層３と、膜層が36Aのニッケル・クロム合金（90
重量％のニッケルと10重量％のクロムとの合金）層４
と、屈折率が1.37で、光学膜厚が0.9336×λ0/4のフッ
化マグネシウム層５とからなり、これらの層はガラス板
１上に順次真空蒸着法により形成された。That is, the antireflection film 6 has a refractive index of 2.15 and a praseodymium titanate layer 2 having an optical film thickness of 0.2385 × λ0 / 4, and a magnesium fluoride layer having a refractive index of 1.37 and an optical film thickness of 1.5582 × λ0 / 4. 3 and a nickel-chromium alloy with a film layer of 36 A (90
Alloy of wt% nickel and 10 wt% chromium) Layer 4
And a magnesium fluoride layer 5 having a refractive index of 1.37 and an optical film thickness of 0.9336 × λ0 / 4, which were sequentially formed on the glass plate 1 by a vacuum vapor deposition method.
このようにして得られた反射防止膜付着ガラス板を実
施例１と同様にして光学特性を測定したところ、第１表
に示したとおり視感度反射率が0.06％、視感度透過率が
58％であった。The optical properties of the thus-obtained glass plate with an antireflection film were measured in the same manner as in Example 1. As shown in Table 1, the luminous reflectance was 0.06% and the luminous transmittance was 0.06%.
It was 58%.
［実施例３］ 第１図に示したと同様な構成の反射防止膜付着ガラス
板であって、反射防止膜６の多層膜を以下の如くした。Example 3 An antireflection film-attached glass plate having the same structure as that shown in FIG. 1, and the multilayer film of the antireflection film 6 was as follows.
すなわち、反射防止膜は屈折率が2.40で、光学膜厚が
0.2357×λ0/4の酸化チタン層２と、屈折率が1.46で、
光学膜厚が1.6105×λ0/4の酸化シリコン層３と、膜厚
が43Åのステンレス層４（72重量％のニッケルと16重量
％のクロムと８重量％の鉄との合金）と、屈折率が1.46
で、光学膜厚が0.9260×λ0/4の酸化シリコンとからな
り、各層はガラス板１上に順次スパッタ法により形成さ
れた。That is, the antireflection film has a refractive index of 2.40 and an optical film thickness of
Titanium oxide layer 2 of 0.2357 × λ0 / 4 and refractive index of 1.46,
Silicon oxide layer 3 with an optical thickness of 1.6105 × λ0 / 4, stainless steel layer 4 with a thickness of 43Å (alloy of 72 wt% nickel, 16 wt% chromium and 8 wt% iron), and refractive index Is 1.46
Then, each layer was made of silicon oxide having an optical film thickness of 0.9260 × λ0 / 4, and each layer was sequentially formed on the glass plate 1 by the sputtering method.
このようにして得られた反射防止膜付着ガラス板を実
施例１と同様にして光学特性を測定したところ、第１表
に示したとおり、視感度反射率が0.08％、視感度透過率
が54％であった。The optical properties of the thus-obtained glass plate with an antireflection film attached were measured in the same manner as in Example 1. As shown in Table 1, the luminous reflectance was 0.08% and the luminous transmittance was 54%. %Met.
［発明の効果］ 以上のように本発明の反射防止膜付着透明板は反射防
止膜中に光吸収のある金属層、または合金層を組入れる
ことにより、CRT等の反射防止板として使用した場合に
は視感度反射率を0.1％以下のきわめて小さくすること
ができる。[Effects of the Invention] As described above, the antireflection film-attached transparent plate of the present invention can be used as an antireflection plate such as a CRT by incorporating a metal layer or an alloy layer having light absorption in the antireflection film. Can reduce the luminous reflectance to 0.1% or less.
従って、CRTの画面が見やすくなり、更に光吸収の金
属層または合金属によりCRTの蛍光面に入射する光が吸
収されてコントラストがよくなる。また前記金属層また
は合金層をアースすることにより、前記透明板に帯電防
止機能を付与することができる。Therefore, the screen of the CRT becomes easy to see, and the light incident on the fluorescent surface of the CRT is absorbed by the light-absorbing metal layer or metal alloy, and the contrast is improved. Further, by grounding the metal layer or the alloy layer, it is possible to impart an antistatic function to the transparent plate.
図面は本発明の実施例を示すものであって、第１図は反
射防止膜付着透明板の断面図、第２図は反射防止膜付着
透明板の反射特性、第３図はその透過率特性である。 1:透明板、2:高屈折率誘電体層、 3:第１の低屈折率誘電体層 4:金属層または合金層 5:第２の低屈折率誘電体層 6:反射防止膜The drawings show an embodiment of the present invention. FIG. 1 is a cross-sectional view of a transparent plate with an antireflection film, FIG. 2 is a reflection characteristic of the transparent plate with an antireflection film, and FIG. 3 is its transmittance characteristic. Is. 1: transparent plate, 2: high refractive index dielectric layer, 3: first low refractive index dielectric layer 4: metal layer or alloy layer 5: second low refractive index dielectric layer 6: antireflection film
Claims (3)
を防止するための反射防止膜を付着した透明板におい
て、該反射防止膜が2.00〜2.40の屈折率で、0.07×λ0/
4〜1.20×λ0/4（但しλ０は中心波長、以下同じ）の光
学膜厚である高屈折率誘電体層と、1.37〜1.50の屈折率
で、1.40×λ0/4〜1.70×λ0/4の光学膜厚である第１の
低屈折率融電体層と、30Å〜60Åのチタン、クロム、ジ
ルコニウム、モリブデン、ニッケル、ニッケル・クロム
合金、またはステンレスのいずれかの金属層または合金
層と、1.37〜1.50の屈折率で、0.8×λ0/4〜1.0×λ0/4
の光学膜厚の第２の低屈折率誘電体層とからなり、各層
が該透明基板表面から順次形成されてなる金属膜を有す
る反射防止膜付着透明板。1. A transparent plate having an antireflection film for preventing light reflection from a transparent substrate having a refractive index of 1.40 to 1.70, wherein the antireflection film has a refractive index of 2.00 to 2.40 and 0.07 × λ0 /
A high refractive index dielectric layer having an optical film thickness of 4 to 1.20 × λ0 / 4 (where λ0 is the central wavelength, the same applies hereinafter) and a refractive index of 1.37 to 1.50, 1.40 × λ0 / 4 to 1.70 × λ0 / 4 A first low-refractive-index electroluminescent layer having an optical film thickness of 30 Å to 60 Å titanium, chromium, zirconium, molybdenum, nickel, a nickel-chromium alloy, or a metal layer or alloy layer of stainless steel, 0.8 × λ0 / 4〜1.0 × λ0 / 4 with refractive index of 1.37〜1.50
And a second low-refractive-index dielectric layer having an optical film thickness of (3), each layer having a metal film sequentially formed from the surface of the transparent substrate.
タンタル、酸化ジルコニウム、チタン酸プラセオジム、
酸化ハフニウム、硫化亜鉛、酸化スズ、酸化インジウ
ム、及び錫をドープした酸化インジウムのいずれかであ
る特許請求の範囲第１項に記載の金属膜を有する反射防
止膜付着透明板。2. The high refractive index dielectric layer comprises titanium oxide, tantalum oxide, zirconium oxide, praseodymium titanate,
An antireflection film-attached transparent plate having a metal film according to claim 1, which is any one of hafnium oxide, zinc sulfide, tin oxide, indium oxide, and indium oxide doped with tin.
ッ化マグネシウム、または酸化シリコンのいずれかであ
る特許請求の範囲第１項または第２項に記載の反射防止
膜付着透明板。3. An antireflection film-attached transparent film according to claim 1, wherein the first and second low-refractive-index dielectric layers are either magnesium fluoride or silicon oxide. Board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63004409A JP2565525B2 (en) | 1988-01-12 | 1988-01-12 | Anti-reflection film attached transparent plate with metal film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63004409A JP2565525B2 (en) | 1988-01-12 | 1988-01-12 | Anti-reflection film attached transparent plate with metal film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01180501A JPH01180501A (en) | 1989-07-18 |
| JP2565525B2 true JP2565525B2 (en) | 1996-12-18 |
Family
ID=11583518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63004409A Expired - Lifetime JP2565525B2 (en) | 1988-01-12 | 1988-01-12 | Anti-reflection film attached transparent plate with metal film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2565525B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09186949A (en) * | 1995-12-27 | 1997-07-15 | Toshiba Lighting & Technol Corp | Video equipment |
| JP2000021336A (en) * | 1998-07-01 | 2000-01-21 | Nippon Sheet Glass Co Ltd | Glass article having conductive reflection preventive film and cathode-ray tube using it |
| JP4921833B2 (en) * | 2005-08-30 | 2012-04-25 | 積水化学工業株式会社 | Rail soundproofing device |
| JP7025892B2 (en) * | 2017-11-07 | 2022-02-25 | デクセリアルズ株式会社 | Laminates, anti-reflection structures and camera module mounting devices |
| JP7129781B2 (en) * | 2018-01-25 | 2022-09-02 | 株式会社乾レンズ | spectacle lenses and spectacles |
| CN108828697B (en) * | 2018-08-30 | 2020-08-11 | 厦门美澜光电科技有限公司 | Eimeria antioxidant anti-reflection corrosion-resistant lens and preparation method thereof |
-
1988
- 1988-01-12 JP JP63004409A patent/JP2565525B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01180501A (en) | 1989-07-18 |
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