JP2560864B2 - Testing method of conductor pattern with measuring needle - Google Patents

Description

The present invention relates to a method for testing the electrical characteristics of a large number of conductor patterns formed so that at least one end is aligned on the surface of an insulating substrate, the method being independent of the unevenness and waviness of the insulating substrate. For the purpose of allowing the test to be performed, a strip-shaped common electrode in which a flexible plate-shaped conductor is superposed on a sheet having conductivity and rubber-like elasticity is prepared, and the common electrode is the sheet. Are mounted on the insulating substrate so as to overlap with each end of the conductor pattern, and a desired tester is connected between the common electrode and a measuring needle movable in the alignment direction of the conductor pattern, and the measuring needle is connected to the measuring needle. While sequentially contacting each other end of the conductor pattern, a roller rotating while moving together with the measuring needle presses the facing portion of the common electrode against one end of the conductor pattern contacting the measuring needle. To configure and butterflies.

[Industrial applications]

The present invention relates to a novel method for testing the electrical properties of a large number of conductor patterns formed on the surface of an insulating substrate, particularly the openness of conductor patterns and short-circuit with other adjacent conductor patterns.

An insulating substrate on which a large number of conductor patterns are formed, such as a liquid crystal panel (LCD) or plasma display panel (PDP)
In order to improve the quality of an image, a large number of conductor patterns (electrodes) formed on a glass substrate in the above-mentioned manner are becoming more dense and thinner.

Therefore, there has been a demand for a method of stably testing electrical characteristics such as open and short in a high-density conductor pattern without being damaged by unevenness and undulation of an insulating substrate.

[Conventional technology]

FIG. 5 is a perspective view schematically showing a glass substrate of PDP, and FIG. 6 is an explanatory view of a conventional test method for the electrode shown in FIG.

In FIG. 5, a large number of electrodes 2 are formed at regular intervals on the surface of a glass substrate (insulating substrate) 1, and one end 2a and the other end 2b of each electrode (conductor pattern) 2 are linearly aligned.

In FIG. 6, the testing device for the electrode 2 has a large number of electrode ends.
The common electrode 3 for communicating the 2a, the measuring needle (probe: PGS alloy wire) 4 that sequentially contacts the multiple electrode ends 2b, the metal plate 5 that supports the measuring needle 4, the common electrode 3 and the metal plate 5. It comprises a measuring device 6 connected between the two.

The strip-shaped common electrode 3 includes a contact member 7 having conductivity and rubber-like elasticity such as conductive rubber or stainless felt.
And a metal plate 8 made of aluminum or the like having a thickness of about 5 mm, and the whole glass substrate 1 with an appropriate pressing force.
Pressed to.

The measuring needle 4 contacts the electrode end 2b by a pressing force using the elastic force of the measuring needle 4 itself and the metal plate 5, and moves in the alignment direction of the electrode end 2b.

Then, the electrical characteristics such as the open (cutting of the intermediate portion) and the resistance value of the electrode 2 are detected by the tester 6.

[Problems to be Solved by the Invention]

In the above-mentioned conventional test method, the contact member 3a of the common electrode 3 absorbs the unevenness and undulations on the surface of the glass substrate 1. However, electrode 2 with a pitch of about 0.3 mm
When the pitch becomes about 0.1 mm due to the higher density and thinner wires, the electrode ends 2b are formed in the concaves and convexes of the glass substrate 1 and do not come into contact with the common electrode 3 under the conventional pressing force.

Such contact failure can be solved by increasing the pressing force of the common electrode 3, but since increasing the pressing force may break the glass substrate 1, a new method has been desired.

[Means for solving the problem]

According to FIG. 1 according to the embodiment of the present invention, which is intended to solve the above-mentioned problems, when measuring the electrical characteristics of a large number of conductor patterns 2 formed and aligned on the surface of an insulating substrate 1, A strip-shaped common electrode 13 in which a flexible plate-shaped conductor 22 is superposed on a rubber-like sheet having elasticity is prepared, and the common electrode 13 is arranged so that the sheet overlaps each end (right end) of the conductor pattern 2. Is mounted on the insulating substrate 1 and the desired tester 6 is connected between the common electrode 13 and the measuring needle 4 which is movable in the alignment direction of the conductor pattern 2. The conductor pattern 2 that contacts with the measuring needle 4 while being sequentially contacted with the left end)
Pressing the opposing portion of the common electrode 13, which is in contact with one end (right end), with a rubber ring 17 or the like that rotates while moving together with the measuring needle 4 biased by a compression coil spring,
It is characterized by.

[Action]

According to the above means, since the pressing force for pressing the common electrode 13 partially acts, it is possible to make it larger than the electrode end 2a to be tested by the uniform pressing force in the conventional method, and the common electrode 13 Since it can be deformed according to the surface state of the glass substrate 1, the electrical connection between the electrode end 2a and the common electrode 13 is stabilized even if the surface of the glass substrate 1 has irregularities and undulations.

〔Example〕

Examples of the method of the present invention will be described below with reference to the drawings.

FIG. 1 is a plan view of the main part of the apparatus according to an embodiment of the present invention,
2 is a side view of the measuring needle support portion shown in FIG. 1, FIG. 3 is a sectional view of the common electrode pressing portion shown in FIG. 1, and FIG. 4 is a configuration diagram of the common electrode shown in FIG. is there.

In FIG. 1, the electrodes (conductor pattern) shown in FIG.
The test device 11 of No. 2 has a glass substrate (insulating substrate) 1 fixed on a table 12 and a large number of electrode ends on the glass substrate 1.
A common electrode 13 that allows 2a to communicate is mounted.

The measuring needle 4 is supported on one end portion (the left end portion in the drawing) of the carrier 14 which is guided by the rail 24 and moves in the vertical direction in the drawing, via the metal plate 15 having a spring property, and the other end of the carrier 14 is supported. A roller 16 that is biased toward the glass substrate 1 and is rotatable is provided at the end (right end in the drawing) of the rubber ring, and the roller 16 presses a part of the common electrode 13 by the biasing force.
17 is fitted.

The rubber ring 17 is configured to press the common electrode 13 above the electrode end (one end of the conductor pattern) 2a of the electrode 2 where the measuring needle 4 contacts the electrode end (the other end of the conductor pattern) 2b. The measuring device 6 is connected between the electrode 13 and the metal plate 15.

In FIG. 2, the measuring needle 4 which moves to the left in the figure,
Utilizing the elasticity of the measuring needle 4 itself and the elasticity of the metal plate 15,
It contacts the electrode end 2b with a pressing force of about 20 gr.

In FIG. 3, the roller 16 fitted with the rubber ring 17
Is fitted to the shaft 18, and the shaft 18 is urged downward by a compression coil spring 19 to, for example, about 600 gr and can be moved up and down.
Supported by.

In FIG. 4, the common electrode 13 is, for example, a wire mesh formed by knitting a stainless wire having a diameter of about 0.05 mm on a sheet 21 having a thickness of about 0.2 mm having conductive and rubber-like elasticity such as conductive rubber or stainless felt. As described above, the flexible plate-shaped conductors 22 are stacked, and the conductors 22 have a tester 6
One end of the wire rod 23 connected to is connected.

In the device configured as described above, when the carrier 14 guided by the rail 24 is moved upward from the lower part of FIG. 1, the measuring needle 4 is vertically aligned with each electrode end 2b of the electrode 2. While moving sequentially while contacting with each other, a part of the common electrode 13 pressed by the rubber ring 17 is pressed toward the electrode end 2a communicating with the contacting electrode end 2b of the measuring needle 4 to open each electrode 2 and the like. The characteristics are sequentially detected by the tester 6.

Then, the rubber ring urged by the coil spring 19
Since the pressing force of 17 pressing the common electrode 13 partially acts,
Since it is possible to make the electrode end 2a larger than the uniform pressing force in the conventional method and the common electrode 13 can be deformed according to the surface state of the glass substrate 1, unevenness and unevenness are formed on the surface of the glass substrate 1. Even if there is undulation, the electrical connection between the electrode end 2a and the common electrode 13 is stabilized.

〔The invention's effect〕

As described above, according to the present invention, it is possible to stably test electrical characteristics of a finely densified conductor pattern without suffering from irregularities or undulations on the substrate surface on which the conductor pattern is formed. Has the effect of

[Brief description of drawings]

 FIG. 1 is a plan view of a main part of the apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the measuring needle support part shown in FIG. 1, and FIG. 3 is a common electrode pressing part shown in FIG. FIG. 4 is a cross-sectional view, FIG. 4 is a configuration diagram of the common electrode shown in FIG. 1, FIG. 5 is a schematic perspective view of a glass substrate for PDP, and FIG. 6 is an explanatory view of a conventional test method of the electrode shown in FIG. Is. In the figure, 1 is a glass substrate (insulating substrate), 2 is an electrode (conductor pattern), 2a is an electrode end (one end of the conductor pattern), 2b is an electrode end (the other end of the conductor pattern), 4 is a measuring needle, 6 Is a tester, 13 is a common electrode, 16 is a roller on which a rubber ring is fitted, 17 is a rubber ring for pressing the common electrode, 19 is a rubber ring biasing coil spring, 21 is a conductive, rubber-like elastic sheet Reference numeral 22 denotes a flexible plate-shaped conductor.

Claims (1)

(57) [Claims] 1. When measuring the electrical characteristics of a large number of conductor patterns (2) formed and aligned on the surface of an insulating substrate (1), a sheet (21) having conductivity and rubber-like elasticity is provided with flexibility. A strip-shaped common electrode (13) having plate-shaped conductors (22) is prepared, and the common electrode (13) is such that the sheet (21) overlaps each end (2a) of the conductor pattern (2). As the insulating substrate (1)
And a desired tester (6) is connected between the common electrode (13) and a measuring needle (4) movable in the alignment direction of the conductor pattern (2), and the measuring needle (4) is connected. The other end (2b) of the conductor pattern (2)
And a roller (16) that rotates while moving together with the measuring needle (4), is connected to the common electrode at one end (2a) of the conductor pattern (2) with which the measuring needle (4) contacts. A method for testing a conductor pattern using a measuring needle, characterized in that the opposing portions of (13) are pressed.