JP2539798Y2 - 化学気相成長装置 - Google Patents

化学気相成長装置

Info

Publication number
JP2539798Y2
JP2539798Y2 JP40016890U JP40016890U JP2539798Y2 JP 2539798 Y2 JP2539798 Y2 JP 2539798Y2 JP 40016890 U JP40016890 U JP 40016890U JP 40016890 U JP40016890 U JP 40016890U JP 2539798 Y2 JP2539798 Y2 JP 2539798Y2
Authority
JP
Japan
Prior art keywords
substrate
thermocouple
growth
vapor deposition
chemical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP40016890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0487637U (cs
Inventor
信裕 三沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP40016890U priority Critical patent/JP2539798Y2/ja
Publication of JPH0487637U publication Critical patent/JPH0487637U/ja
Application granted granted Critical
Publication of JP2539798Y2 publication Critical patent/JP2539798Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP40016890U 1990-12-07 1990-12-07 化学気相成長装置 Expired - Lifetime JP2539798Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40016890U JP2539798Y2 (ja) 1990-12-07 1990-12-07 化学気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40016890U JP2539798Y2 (ja) 1990-12-07 1990-12-07 化学気相成長装置

Publications (2)

Publication Number Publication Date
JPH0487637U JPH0487637U (cs) 1992-07-30
JP2539798Y2 true JP2539798Y2 (ja) 1997-06-25

Family

ID=31878458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40016890U Expired - Lifetime JP2539798Y2 (ja) 1990-12-07 1990-12-07 化学気相成長装置

Country Status (1)

Country Link
JP (1) JP2539798Y2 (cs)

Also Published As

Publication number Publication date
JPH0487637U (cs) 1992-07-30

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Legal Events

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A01 Written decision to grant a patent or to grant a registration (utility model)

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Effective date: 19970218