JP2535089B2 - Polishing method and polishing apparatus - Google Patents

Description

TECHNICAL FIELD The present invention relates to a polishing method and a polishing apparatus for collectively polishing a plurality of works such as an aluminum substrate for a magnetic disk.

2. Description of the Related Art Conventionally, for example, a processing machine (51) shown in FIG. 2 has been used as a polishing processing machine for polishing an aluminum substrate for a magnetic disk.

The polishing machine (51) shown in the figure has a lower surface plate (53) which is rotatably held and has a donut disk-shaped grindstone (52) attached to its upper surface, and an upper surface of the lower surface plate (53). An upper surface plate (55), which is arranged coaxially with the surface plate (53) at a position opposite to the surface plate, is rotatably driven and is vertically movable, and has a donut disk-shaped grindstone (54) attached to the lower surface thereof. , Each whetstone (5
2) A sun gear (57) arranged at the axial center position of the grindstone between (54), and an internal gear (59) arranged concentrically at a radially outer position of the sun gear (57), The internal gear (59)
And the lower surface plate (5
Both gears (57) (5) while mounted on the grindstone (52) of 3)
9) External gear-shaped work carrier (5)
6). This work carrier (56)
Has a circular holding hole (60) eccentric along the outer peripheral shape of the magnetic disk substrate (A), and the magnetic disk substrate (A) is arranged in the holding hole (60). The board is formed thinner than the board (A) so that both upper and lower surfaces of the board project outward from the holding holes (60) of the carrier (56).

In this polishing machine (51), the magnetic disk substrate (A) is placed in the holding hole (60) of the work carrier (56) with the upper surface plate (55) being positioned at the upper standby position.
Then, the upper surface plate (55) is lowered and both surfaces of the magnetic disk substrate (A) are sandwiched by the upper and lower grindstones (52) (54). Then, in the pressurized state, the work carrier (56) is revolved around the sun gear (57) while the sun gear (57) is rotated, and the upper and lower surface plates (53, 55) are also rotated. While being rotated, both surfaces of the plurality of magnetic disk substrates (A) are simultaneously polished.

By the way, conventionally, the polishing work using this polishing machine (51) has been performed as follows.

That is, in the state where the polishing of the preceding magnetic disk substrate (A) is completed and the upper surface plate (55) is returned to the upper standby position, the operator or the robot operates the polishing machine (5
The substrates (A) held by the carrier (56) in 1) are taken out one by one, and when the taking out is completed, this time, one unprocessed substrate is taken and the above work carrier (5) is taken.
Place it in 6). Then descend the upper surface plate (55),
The polishing of the substrate (A) is restarted.

However, the processed substrates (A) are taken out from the polishing machine (51) one by one as described above, and after the completion of taking out, one unprocessed substrate is placed on the carrier (56). In the process of finishing, the time from the end of one polishing process to the start of the next polishing process, that is, the idle time of the polishing machine (51) becomes considerably long, and the polishing speed of the workpiece is increased. Will be late.

The present invention solves such a problem and shortens the time required for loading and unloading of a work on the main body of a polishing machine for collectively polishing a plurality of works, that is, shortening the idle time of the main body of the polishing machine, The main object is to provide a polishing apparatus that can increase the speed.

Means for Solving the Problems In the above object, the first invention is that a sun gear, an internal gear arranged on a concentric outer portion of the sun gear, and a gear arranged between both gears in a meshed state. And a plurality of external gear-shaped work carriers, the work carrier has a plurality of work holding portions at a position eccentric from the center,
The work carrier is revolved around the sun gear by the action of the sun gear and the internal gear while revolving around the sun gear, and a polishing unit for polishing all the workpieces held by the plurality of carriers is provided. The polishing processing unit is drive-controlled so that all the work holding units of all carriers are stopped at a predetermined fixed position at the end of polishing processing, and the polishing processing unit is driven adjacent to the polishing processing unit. The unprocessed work standby part for waiting each unprocessed work is arranged in the arrangement relationship corresponding to the arrangement relationship of the respective work holding parts in the stopped state, and the driving stop of this polishing processing part is also adjacent to the polishing processing part. In the state, a processed work standby unit for waiting each processed work is arranged in an arrangement relationship corresponding to the arrangement relationship of each work holding unit, and the unprocessed work An unprocessed workpiece batch transfer device that collectively transfers the workpieces waiting in the standby unit to the polishing unit, and a process that collectively transfers the workpieces polished by the polishing unit to the processed workpiece standby unit. Using a polishing device equipped with a batch transfer device for finished workpieces, finish polishing the workpieces in the polishing part, and batch the processed workpieces in each work holding part of the polishing part with the batch transfer device for processed workpieces. After that, the unprocessed workpiece batch transfer device collectively arranges the unprocessed workpieces in the respective work holding portions of the polishing processing portion, and restarts the polishing processing of the workpieces in the polishing processing portion. The gist is the polishing method.

A second aspect of the present invention is a sun gear, an internal gear arranged concentrically outside the sun gear, and a plurality of external gear-shaped workpieces arranged in a meshed state between the two gears. A carrier is provided, the work carrier has a plurality of work holding portions at positions eccentric from the center thereof, and the work carrier is revolved around the sun gear while being rotated by the rotational drive of the sun gear. It is equipped with a polishing unit that polishes all the workpieces held in a batch, and the polishing unit has a tooth ratio between the sun gear, the internal gear and the work carrier set to 1: 3: 1. At the time when the sun gear is rotated by an integer multiple of 4 after the rotation drive is started, the sun gear is driven and controlled so as to stop the rotation and finish the polishing work. , All All the work holding parts of the carrier are arranged to be stopped at a predetermined fixed position, and adjacent to the polishing part, an arrangement corresponding to the arrangement relationship of the respective work holding parts in the drive stopped state of the polishing part. In the relationship, an unprocessed work standby part for waiting each unprocessed work is arranged, and also adjacent to the polishing process part, an arrangement relationship corresponding to the arrangement relationship of each work holding part in the drive stopped state of this polishing process part. In the processing machine, a processed work waiting section for waiting for each processed work is arranged, and the workpieces polished by the polishing processing section are collectively transferred to the processed work waiting section while the unprocessed work waiting is performed. The polishing apparatus is characterized by comprising one or a plurality of workpiece batch transfer devices for batch-transferring each of the workpieces, which are on standby in the section, to the polishing section. To.

A third aspect of the present invention is a sun gear, an internal gear arranged concentrically outside the sun gear, and a plurality of external gear-like workpieces arranged between the two gears in mesh with each other. A carrier is provided, the work carrier has a plurality of work holding portions at positions eccentric from the center thereof, and the work carrier is revolved around the sun gear while being rotated by the rotational drive of the sun gear. It is equipped with a polishing unit that polishes all the workpieces held in a batch, and the polishing unit has a tooth ratio between the sun gear, the internal gear and the work carrier set to 1: 3: 1. At the time when the sun gear is rotated by an integer multiple of 4 after the rotation drive is started, the sun gear is driven and controlled so as to stop the rotation and finish the polishing work. , All All the work holding parts of the carrier are arranged to be stopped at a predetermined fixed position, and adjacent to the polishing part, an arrangement corresponding to the arrangement relationship of the respective work holding parts in the drive stopped state of the polishing part. In the relationship, an unprocessed work standby part for waiting each unprocessed work is arranged, and also adjacent to the polishing process part, an arrangement relationship corresponding to the arrangement relationship of each work holding part in the drive stopped state of this polishing process part. In the machined workpiece standby unit for arranging the machined workpiece standby unit for waiting the machined workpieces, and for collectively transferring the workpieces that have been queued in the unmachined workpiece standby unit to the polishing unit, the polishing unit Each of the workpieces that have been polished by the processing unit is collectively provided with a processed workpiece batch transfer device that transfers the workpieces to the processed workpiece standby unit. After finishing the polishing process of the workpiece, the processed workpieces in each work holding part of the polishing unit are collectively taken out by the processed workpiece batch transfer device, and then the unprocessed workpieces are polished by the unprocessed workpiece batch transfer device. SUMMARY OF THE INVENTION A gist is a polishing apparatus characterized in that the operation is controlled so as to be collectively arranged in each work holding part of the part and to restart the polishing work of the work in the polishing part.

In addition, in the above-mentioned invention, it is preferable to include an unprocessed work individual transfer device that sequentially transfers the unprocessed work from the accommodation portion to the unprocessed work standby portion.

Further, in the above-mentioned invention, it is preferable that a machined work individual transfer device for sequentially transferring the machined work placed on the machined work waiting section to the post-processing step section such as a cleaning / drying section is provided.

Action In the polishing method and the polishing apparatus according to the first to third aspects of the present invention, an unprocessed work that is adjacent to a polishing processing unit that collectively processes a plurality of works and waits a corresponding plurality of unprocessed works. A standby unit and a processed workpiece standby unit that holds a plurality of corresponding processed workpieces are placed, and the workpiece batch transfer device batches all the workpieces that have been polished by the polishing unit and waits for the processed workpieces. In addition to transferring the workpieces to the polishing section, the workpieces held in the unprocessed workpiece standby section are collectively transported to the polishing section. Therefore, a plurality of processed workpieces that have been polished in the polishing unit are taken out one by one from the polishing unit, and when the removal is completed, another work is performed again.
Compared with the conventional method of setting unprocessed workpieces individually in the polishing unit, the time from the end of the polishing process in the polishing unit to the next start, that is, the idle time of the polishing unit is significantly shortened.

In particular, while utilizing the time during which a plurality of preceding workpieces are polished in the polishing section, a workpiece is placed in the unprocessed workpiece standby section and a plurality of unprocessed workpieces are placed in standby in advance during that time. , It is possible to move the machined workpiece in the machined workpiece standby section to the next process and leave the machined workpiece standby section in an empty state. Not only can it be transferred to the processed work standby part, but also the unprocessed work that has been made to stand by in the unprocessed work standby part can be quickly transferred to the polishing process part. The idle time until the next start is further shortened.

Moreover, the polishing unit is driven and controlled so that a plurality of works are stopped at predetermined fixed positions. The standby part is configured to make each unprocessed work stand by in the arrangement relationship corresponding to the arrangement relationship of the work holding parts in the drive stopped state of the polishing part, and the processed work standby part is also the polishing part. The processed workpieces are made to stand by in an arrangement relationship corresponding to the arrangement relationship of the respective work holding portions in the drive stopped state. Therefore, in batch transfer of processed workpieces from the polishing unit to the processed workpiece standby unit by the batch transfer device, further, batch transfer of a plurality of unprocessed workpieces from the unprocessed workpiece standby unit to the polishing unit by the batch transfer device. In each case, it is sufficient to receive, transfer, and set the workpieces as they are without changing and adjusting the relative positional relationship between the workpieces. Therefore, the time required for adjusting the relative positional relationship between the workpieces is deleted, The idle time of the polishing section is further shortened.

In addition, the polishing portion includes a sun gear, an internal gear arranged concentrically outside the sun gear, and a plurality of external gear-like workpieces arranged between the two gears in mesh with each other. A carrier is provided, and the work carrier has a plurality of work holding portions at positions eccentric from the center thereof, and revolves around the sun gear while rotating the work carrier by the action of the sun gear and the internal gear, It is premised that it is a rotation-revolution type polishing unit for polishing all the workpieces held by the plurality of carriers at once. In such a polishing section, drive control is performed so that all the work holding sections of all the carriers are stopped at a predetermined fixed position. Then, with respect to the rotation revolving type polishing processing section of such a fixed position stop configuration, the unprocessed workpiece standby section is arranged in the arrangement relationship corresponding to the arrangement relationship of each work holding section in the drive stopped state of the polishing processing section. In addition to the configuration in which the unmachined work is made to stand by, the machined work stand-by unit also makes each machined work stand by in an arrangement relationship corresponding to the arrangement relationship of the respective work holders in the drive stopped state of the polishing section. The work is collectively transferred by the batch transfer device. Therefore, the rotation-revolution type polishing as described above, which has a complicated operation that was unthinkable with the drive control configuration that stops all the work holding parts of all carriers at a predetermined fixed position. When the processing section is adopted, the idle time from the end of the polishing processing in the polishing processing section to the next start is significantly shortened.

Further, in the rotation-revolution type polishing processing section in the polishing apparatus of the second and third inventions, the tooth ratio between the sun gear, the internal gear and the work carrier is set to 1: 3: 1, and the sun gear is However, after the start of the rotation drive, the rotation of the carrier is controlled so that the rotation is stopped and the polishing process is ended at the time when the carrier is rotated an integer multiple of 4, so that at the end of the polishing process, All the work holding parts are stopped at predetermined fixed positions. Therefore, since each carrier and each work holding part can be returned to the original positional relationship by rotating the sun gear only four times, each carrier and each work holding part are returned to their original positional relationship. It is possible to efficiently control the operation of returning to the high speed without wasteful rotation of the sun gear in a short time, and therefore, the processing time required for one cycle of polishing is further shortened and the work is Polishing will be performed at a higher processing speed.

Further, in the polishing method and the polishing apparatus according to the first and second inventions, an unprocessed workpiece batch transfer device for collectively transferring each of the workpieces waiting in the unprocessed workpiece standby portion to the polishing processing portion, and each polished workpiece Each is equipped with a processed workpiece batch transfer device that collectively transfers the processed workpieces to the processed workpiece standby section, finishes the polishing processing of the workpieces in the polishing processing section, and processes the processed workpieces in each workpiece holding section of the polishing processing section. After batch-picking up with the finished work batch transfer device, unprocessed work batch transfer device places the unprocessed work in batch in each work holding part of the polishing part, and polishes the work in the polishing part Is restarted, and the operation is controlled as such. Therefore, the time until the next unprocessed workpiece is placed in the polishing unit after the processed workpiece is taken out from the polishing unit after the polishing process is completed is shortened, and the next start from the end of the polishing process in the polishing unit is started. The idle time up to is further shortened.

EXAMPLE An example of applying the present invention to polishing an aluminum substrate for a disk-shaped magnetic disk will be described below with reference to the drawings.

In the polishing apparatus shown in FIG. 1, (1) is a polishing processing section, (2) is an unprocessed workpiece standby section, (3) is a processed workpiece standby section, and (4) is an unprocessed workpiece batch transfer apparatus.
(5) is a machined work batch transfer device. Also,
(6) is an unprocessed work storage rack, (7) is a cleaning / drying unit, (8) is an unprocessed work individual transfer device, and (9) is a processed work individual transfer device.

The polishing part (1) includes upper and lower surface plates (11) and (12), a sun gear (13), an internal gear (14), and a work carrier (1).
5) With a grinding machine composed of a sun gear (1
The carrier (15) is rotated and revolved by the rotation of 3), and the upper and lower surface plates (11, 12) are also rotationally driven to polish the substrate (A).

In this polishing part (1), the lower surface plate (11) is
A doughnut-shaped grindstone (17) having a predetermined thickness is attached to the upper portion of the grindstone, and can be rotated about its own axis and moved in the vertical direction by a driving device (not shown).

The upper surface plate (12) is coaxially disposed above the lower surface plate (11), and a donut disk-shaped grindstone (18) is attached to the lower part of the upper surface plate (12) so as to face the grindstone (17). It was done. The upper surface plate (12) can also rotate about its own axis and move in the vertical direction by a driving device (not shown).

The sun gear (13) is arranged at the axial center position of the grindstones (17) and (18) between the upper and lower surface plates (11) and (12), and is rotated around its own axis by a drive device (not shown). Has been done.

The internal gear (14) is concentrically arranged at a radially outward position of the sun gear (13) with a donut-shaped space between the sun gear (13) and the sun gear (13).

The work carriers (15) are thin plate-shaped external gears, and a plurality of work carriers (15) are arranged in a doughnut-shaped space between the sun gear (13) and the internal gear (14). It is meshed with the gears (13) (14). Further, the work carrier (15) is provided with a plurality of circular holding holes (19) along the outer peripheral shape of the magnetic disk substrate (A) at a position eccentric from the center position thereof. The work carrier (15) has a thickness smaller than that of the magnetic disk substrate (A), and the upper and lower sides of the work carrier (15) with the magnetic disk substrate (A) arranged in the holding hole (19). The surface of is capable of protruding to the outside of the holding hole (19).

The ratio of the number of teeth among the sun gear (13), the internal gear (14) and the work carrier (15) is set to 1: 3: 1, and the sun gear (13) is an integer of 4. When rotated multiple times, the work carrier (15) returns to the position it was in when the revolution started, and the work holding hole (19) of the carrier (15) also returns to the position it had when starting rotation. Has been

On the other hand, the unprocessed work standby part (2) and the processed work standby part (3) are arranged on both sides of the polishing process part (1). These standby units (2) and (3) are installed on the table (2
1) (22), and on each upper surface thereof, the work corresponding to the position of the holding hole (19) of the carrier (15) when the sun gear (13) of the polishing part (1) is stopped. Receiving parts (23) (24) are provided.

Further, the unprocessed workpiece batch transfer device (4) is guided by a guide rail (25) arranged in parallel with the polishing portion (1) and the workpiece standby portions (2) and (3) behind them. It is configured to be reciprocated between an upper position of the unprocessed work standby table (21) and a position between the upper and lower surface plates (11) and (12) of the polishing part (1). In addition, the machined work batch transfer device (5) is also equipped with a guide rail (25) behind it.
Guided by the upper and lower surface plates (11) (1) of the polishing part (1)
It is supposed to be reciprocally operated between the position between 2) and the position above the processed work standby table (22). Then, in each of the transfer devices (4) and (5), the substrate (A) is provided in its shaft hole corresponding to the positions of the work receiving portions (23) and (24) of the standby tables (21) and (22). Substrate chuckers (26) (27) for expanding and chucking the diameter are provided.

In addition, the raw work storage rack (6) is a substrate (A).
Are housed in a stacked state, and are arranged adjacent to the unprocessed work waiting section (2) by a conveyor or the like.

Then, the unprocessed workpiece individual transfer device (8) is arranged between the rack (6) and the unprocessed workpiece standby unit (2),
The substrates (A) are chucked one by one from the rack (6) and placed on the workpiece receiving portion (23) of the unprocessed workpiece standby table (21). The patterned operation is repeated. Has been done.

The cleaning / drying device (7) is arranged adjacent to the processed workpiece standby part (3). The machined work individual transfer device (9) is arranged between the cleaning / drying device (7) and the machined work standby unit (3), and the machine work receiving unit (24) of the machined work standby table (22). Substrate (A) waiting for each of the substrates is picked up one by one, taken out, and passed to the cleaning / drying device (7) to repeat the patterned operation.

In the above-mentioned polishing device, the unworked work individual transfer device (8)
Thus, the substrates (A) in the rack (6) are sequentially arranged in the work receiving portion (23) of the unprocessed work standby table (21).

After the arrangement is completed, the unprocessed workpiece batch transfer device (4) descends while being positioned above the table (21), and the chucker (26) collectively chucks the substrates (A) and ascends.

Immediately after that, the unprocessed workpiece individual transfer device (8) is activated again, and the operation of transferring the substrates (A) in the rack (6) to the table (21) one by one is started.

After moving up, the unprocessed workpiece batch transfer device (4) moves in parallel to the polishing processing part (1) side and is positioned on the lower surface plate (11). Then, it descends, and the substrate (A) is moved to the carrier (1
After the batch placement in the holding hole (19) of 5), the chucker (26) is released, the chuck rises, and the workpiece moves to the unprocessed work standby table (21) again.

Then, in the polishing section (1), the upper surface plate (12) is moved downward, and the upper and lower surfaces of the substrate (A) are the upper and lower grindstones (17) (1
It is held under pressure in 8) and the sun gear (13) is held in that state.
Is rotated, and the upper and lower surface plates (11, 12) are also rotated to polish the substrate (A). Then, after the sun gear (13) has been rotated a predetermined number of times (an integer multiple of 4), the upper surface plate (12) is moved up. At that time, the work (A) is held by the carrier (15) in the same positional relationship as that of the sun gear (13) at the start of rotation.

After that, the machined work batch transfer device (5) moves to the lower surface plate (11), descends, collectively chucks the substrate, and ascends, and moves to the machined work standby table (22) side. The substrate (A) is collectively placed in the substrate receiving portion (24) of the table (22) by descending on the table (22), releasing the substrate chuck, and ascending.

In the meantime, the unprocessed workpiece batch transfer device (4) is actuated so that the substrates (A) on the unprocessed workpiece standby table (21) are collectively transported by the carrier (15) of the polishing section (1) in the above-described manner. ), The upper platen (12) is subsequently lowered, and polishing of the unprocessed substrate is restarted.

Further, during the polishing process, the substrates (A) held by the processed work standby table (22) are taken out one by one by the processed work individual transfer device (9), and then washed and dried (7). ) Will be sequentially passed.

After that, the above operation is repeated, and the substrate (A) is polished one after another.

The polishing section in the present invention may be a polishing machine using a grindstone, or may be a polishing machine using a so-called buffing system in which a polishing cloth is used instead of the grinding stone.

EFFECTS OF THE INVENTION As described above, the polishing method and the polishing apparatus according to the first to third inventions are provided with a plurality of corresponding unworked workpieces adjacent to the polishing processing unit for collectively polishing a plurality of workpieces. There is a non-machined work standby part that waits for each of the workpieces and a machined work standby part that waits for a plurality of corresponding processed workpieces.The workpiece batch transfer device batches all the workpieces that have been polished by the polishing part. Then, the workpieces that have been made to stand by in the unprocessed workpiece standby section are collectively transported to the polishing section, and therefore, a plurality of workpieces that have been polished in the polishing section are completed. Compared to the conventional method in which processed workpieces are taken out one by one from the polishing section, and when they have been taken out and unprocessed workpieces are set again in the polishing section, the next start from the end of polishing in the polishing section It is possible to drastically reduce the time until, that is, the idle time of the polishing portion, and to polish the work at a high processing speed.

In particular, while utilizing the time during which a plurality of preceding workpieces are polished in the polishing section, a workpiece is placed in the unprocessed workpiece standby section and a plurality of unprocessed workpieces are placed in standby in advance during that time. , It is possible to move the machined workpiece in the machined workpiece standby section to the next process and leave the machined workpiece standby section in an empty state. Not only can it be transferred to the processed work standby part, but also the unprocessed work that has been made to stand by in the unprocessed work standby part can be quickly transferred to the polishing process part. The idle time until the next start can be further shortened, and the work can be polished at a high processing speed.

Moreover, the polishing unit is driven and controlled so that a plurality of works are stopped at predetermined fixed positions. The standby part is configured to make each unprocessed work stand by in the arrangement relationship corresponding to the arrangement relationship of the work holding parts in the drive stopped state of the polishing part, and the processed work standby part is also the polishing part. Since the processed workpieces are made to stand by in the arrangement relationship corresponding to the arrangement relationship of the workpiece holding portions in the drive stopped state of the workpieces, the processed workpieces from the polishing processing unit to the processed workpiece standby unit by the batch transfer device are processed. In the batch transfer of, and in the batch transfer of the unprocessed workpieces from the unprocessed workpiece standby section to the polishing section by the batch transfer device, It is sufficient to receive, transfer, and set the workpieces as they are without changing the relative positional relationship between the workpieces.Therefore, the time required to adjust the relative positional relationship between the workpieces can be eliminated, and polishing can be performed. The idle time of the processing section can be further shortened, and the work can be polished at a high processing speed.

Moreover, since it is not necessary for the batch transfer device to have a function of adjusting the relative positional relationship between the workpieces, the batch transfer device can be mechanically simple, which in turn simplifies the overall structure of the polishing device. Can be

In addition, the polishing portion includes a sun gear, an internal gear arranged concentrically outside the sun gear, and a plurality of external gear-like workpieces arranged between the two gears in mesh with each other. A carrier is provided, and the work carrier has a plurality of work holding portions at positions eccentric from the center thereof, and revolves around the sun gear while rotating the work carrier by the action of the sun gear and the internal gear, Assuming that it is a revolving type polishing unit that polishes all the works held by the plurality of carriers at once, in such a polishing unit, all the work holding units of all the carriers are processed. Drive control is performed so that it is stopped at a predetermined fixed position, and the unprocessed workpiece standby unit is used for this polishing process, in contrast to the revolving-revolution type polishing process unit with such a fixed position stop configuration. In addition to the configuration in which the unprocessed workpieces are made to stand by in the arrangement relationship corresponding to the arrangement relationship of the respective work holding portions in the drive stopped state of the polishing section, the processed workpiece standby section also makes each workpiece in the drive stopped state of the polishing processing section. All the work holders of all carriers have been configured so that the processed workpieces are put on standby in the arrangement relationship corresponding to the arrangement of the holders, and the workpieces are collectively transferred by the batch transfer device. (In this case, it should be especially noted that each work holding part of the carrier is provided at a position eccentric from the center of the carrier.) A drive control configuration for stopping at a predetermined fixed position is adopted. In the adoption of a spinning revolving type polishing processing section that performs a complicated operation that could not be considered, polishing processing in the polishing processing section The idle time from the end until the next start can be greatly reduced,
The work can be polished at high processing speed. Moreover, in adopting such a rotation / revolution type polishing processing section, it is not necessary to provide the batch transfer device with the function of adjusting the relative positional relationship between the works, and the batch transfer device can be mechanically simplified. As a result, the entire structure of the polishing apparatus can be simplified.

Further, in the rotation-revolution type polishing processing section in the polishing apparatus of the second and third inventions, the tooth number ratio among the sun gear, the internal gear and the work carrier is set to 1: 3: 1, and the sun gear However, after the start of the rotation drive, the rotation of the carrier is controlled so that the rotation is stopped and the polishing process is ended at the time when the carrier is rotated an integer multiple of 4, so that at the end of the polishing process, Since all the work holding parts are stopped at a predetermined fixed position, this rotation-revolution type polishing processing part that performs complicated operation can be used for all carriers of a simple control structure. The work holding part can be stopped at a predetermined fixed position, which simplifies the control structure of the polishing processing part, and thus simplifies the mechanical structure of the batch transfer device and simplifies the overall structure of the polishing device. It is possible to to.

Not only that, each carrier and each work holding part can be returned to the original positional relationship by rotating the sun gear only four times, so that each carrier and each work holding part can be returned to the original positional relationship. The returning operation control can be efficiently performed in a short time without wasteful rotation of the sun gear. Therefore, the processing time required for one cycle of polishing can be shortened and the processing speed of the workpiece can be increased. It can be polished.

Further, the polishing method and the polishing apparatus according to the first and second aspects of the present invention include an unprocessed workpiece batch transfer device that collectively transfers the respective workpieces waiting in the unprocessed workpiece standby section to the polishing processing section, and polishing processing in the polishing processing section. Each of the processed workpieces is collectively transferred to the processed workpiece standby unit and the processed workpiece batch transfer device is provided. The polishing processing unit finishes the polishing of the workpieces and the processing of each workpiece holding unit of the polishing processing unit. After the finished workpieces are collectively taken out by the processed workpieces batch transfer device, the unprocessed workpieces batch transfer device places the unprocessed workpieces in the workpiece holders at the same time. Since the polishing work of the work is restarted and the operation is controlled in such a manner, after the polishing work is completed, the processed work is taken out from the polishing work part, and then the next unworked work is put in the polishing work part. To It is possible to shorten the time until the location, the idle time between the end of the polishing process in the polishing part and the commencement of the next addition can be further reduced.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the polishing apparatus of the present invention,
FIG. 2 is a perspective view showing the structure of a polishing machine that has been conventionally used. (1) ... polishing part, (2) ... unprocessed work standby part, (3) ... processed work standby part, (4) ... unprocessed work batch transfer device, (5) ... processed Work batch transfer device (A) ... Aluminum substrate for magnetic disk.

Front page continued (72) Inventor Isao Tezuka, 6-224, Kaiyama-cho, Sakai-shi, Osaka, Showa Aluminum Co., Ltd. (72) Yoshinobu Kimura, 6-224, Haiyama-cho, Sakai-shi, Osaka Prefecture, Showa Aluminum Co., Ltd. (56) Bibliography Sho 63-4250 (JP, U) JP 61-50749 (JP, B2)

Claims (3)

(57) [Claims] 1. A sun gear, an internal gear arranged concentrically outside the sun gear, and a plurality of external gear-shaped work carriers arranged in mesh with both gears. It is provided, the work carrier has a plurality of work holding portions in a position eccentric from the center thereof, and the work carrier is revolved around the sun gear while rotating around the sun gear by the action of the sun gear and the internal gear, A polishing section for polishing all the workpieces held by the carrier in a lump is provided, and at the end of polishing processing, all the workpiece holding sections of all carriers are stopped at a predetermined fixed position. Drive control is performed so that the unprocessed workpieces are placed in a standby position adjacent to the polishing processing section in a layout relationship corresponding to the layout relationship of the workpiece holding sections in the drive stopped state of the polishing processing section. A processed workpiece that has a workpiece standby section and is also adjacent to the polishing section, and that makes each processed workpiece stand by in an arrangement relationship corresponding to the arrangement relationship of each workpiece holding section when the polishing section is in the stopped state. An unprocessed work batch transfer device in which a standby part is arranged, and collectively transfers each work waited in the unprocessed work standby part to the polishing process part,
Using a polishing device equipped with a processed workpiece batch transfer device that collectively transfers the workpieces that have been polished by the polishing processing part to the processed workpiece standby part, After finishing, the processed workpieces of each work holding part of the polishing processing part are collectively taken out by the processed work batch transfer device, and then the unprocessed workpieces are held by the unprocessed work batch transfer device in each polishing work part. A polishing method, wherein the polishing processing is performed by collectively arranging the workpieces in a portion and restarting the polishing processing of the work in the polishing processing section. 2. A sun gear, an internal gear arranged concentrically outside of the sun gear, and a plurality of external gear-like work carriers arranged in mesh with both gears. The work carrier has a plurality of work holding portions at positions eccentric from the center of the work carrier, revolves around the sun gear while rotating around the sun gear by the rotation drive of the sun gear, and is held by the plurality of carriers. Further, a polishing processing unit for polishing all the workpieces at a time is provided, and the polishing processing unit has a tooth number ratio between the sun gear, the internal gear and the work carrier set to 1: 3: 1, and After the sun gear is started to be driven to rotate, when the sun gear is rotated an integer multiple of four, the sun gear is driven and controlled so as to stop the rotation and end the polishing process, so that all the Career All the work holding parts are stopped at a predetermined fixed position. Adjacent to the polishing processing part, the arrangement relationship corresponding to the arrangement relationship of the respective work holding parts in the drive stopped state of the polishing processing part. In the layout relationship corresponding to the layout relationship of the workpiece holding sections in the drive stopped state of the polishing processing section as well as the unworking workpiece standby section for waiting for each unprocessed workpiece A processed work standby part is provided for waiting each processed work, and the workpieces polished by the polishing part are collectively transferred to the processed work standby part, while the unprocessed work standby part is transferred. A polishing apparatus comprising: one or a plurality of workpiece batch transfer devices for batch-transferring each of the workpieces that have been on standby to the polishing section. 3. A sun gear, an internal gear arranged concentrically outside of the sun gear, and a plurality of external gear-like work carriers arranged in mesh with both gears. The work carrier has a plurality of work holding portions at positions eccentric from the center of the work carrier, revolves around the sun gear while rotating around the sun gear by the rotation drive of the sun gear, and is held by the plurality of carriers. Further, a polishing processing unit for polishing all the workpieces at a time is provided, and the polishing processing unit has a tooth number ratio between the sun gear, the internal gear and the work carrier set to 1: 3: 1, and After the sun gear is started to be driven to rotate, when the sun gear is rotated an integer multiple of four, the sun gear is driven and controlled so as to stop the rotation and end the polishing process, so that all the Career All the work holding parts are stopped at a predetermined fixed position. Adjacent to the polishing processing part, the arrangement relationship corresponding to the arrangement relationship of the respective work holding parts in the drive stopped state of the polishing processing part. In the layout relationship corresponding to the layout relationship of the workpiece holding sections in the drive stopped state of the polishing processing section as well as the unworking workpiece standby section for waiting for each unprocessed workpiece A processed workpiece standby unit for arranging each processed workpiece is arranged, and an unprocessed workpiece batch transfer device for collectively transferring each workpiece waited in the unprocessed workpiece standby unit to the polishing processing unit,
Each of the workpieces that have been polished by the polishing unit is collectively transported to the processed workpiece standby unit, and the polishing unit completes the polishing of the workpieces. After the processed workpieces in each work holding part of the machine are collectively taken out by the processed work batch transfer device, the unprocessed workpieces are collectively transferred to each work holding part of the polishing part by the unprocessed work batch transfer device. A polishing apparatus which is arranged and operation-controlled so as to restart polishing of a work in a polishing unit.