JP2532517B2 - Magnetic recording media - Google Patents

Magnetic recording media

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Publication number
JP2532517B2
JP2532517B2 JP62262130A JP26213087A JP2532517B2 JP 2532517 B2 JP2532517 B2 JP 2532517B2 JP 62262130 A JP62262130 A JP 62262130A JP 26213087 A JP26213087 A JP 26213087A JP 2532517 B2 JP2532517 B2 JP 2532517B2
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JP
Japan
Prior art keywords
film
magnetic recording
present
thin film
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP62262130A
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Japanese (ja)
Other versions
JPH01105316A (en
Inventor
紘一 篠原
猛 村上
秀樹 ▲吉▼田
修 小浜
隆志 藤田
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Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
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Priority to JP62262130A priority Critical patent/JP2532517B2/en
Publication of JPH01105316A publication Critical patent/JPH01105316A/en
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Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録に適する強磁性金属薄膜を磁
気記録層とする磁気記録媒体に関するものである。
Description: TECHNICAL FIELD The present invention relates to a magnetic recording medium having a ferromagnetic metal thin film suitable for high density magnetic recording as a magnetic recording layer.

従来の技術 近年、磁気記録の高密度化の進歩は目覚しく、強磁性
金属薄膜を磁気記録層とする磁気記録媒体の短波長出力
特性が注目されている〔アイイーイーイー トランザク
ションズ オン マグネティクス(IEEE Transactions
on magnetics)vcl.MAG−21,No−3,P.P.1217〜1220(19
85)参照〕。特に垂直磁気記録方式は原理的に高密度化
に適していることから、ディジタル信号記録における狭
トラック化,ビット長の短縮による高密度化の実現のた
め、各方面で開発が続けられている。
2. Description of the Related Art In recent years, the progress of high density magnetic recording has been remarkable, and attention has been paid to the short wavelength output characteristics of a magnetic recording medium having a ferromagnetic metal thin film as a magnetic recording layer [IE Transactions on Magnetics (IEEE Transactions
on magnetics) vcl.MAG-21, No-3, PP1217-1220 (19
85)]. In particular, since the perpendicular magnetic recording method is suitable for high density recording in principle, development is being continued in various fields in order to realize narrow track in digital signal recording and high density by shortening bit length.

かかる磁気記録媒体は生産の立場からみて、ポリエス
テルフィルム等のフレキシブルな基板上に直接電子ビー
ム蒸着法や高速スパッタリング法でCo−Cr,Co−Cr−Nb,
Co−O等の垂直磁化膜を形成したものが、実用にたえう
るC/Nを確保でき、且つ耐久性も満足できるものとなる
ことが強く望まれている。
From the standpoint of production, such a magnetic recording medium is directly Co-Cr, Co-Cr-Nb, Co-Cr-Nb, by electron beam evaporation method or high-speed sputtering method on a flexible substrate such as polyester film.
It is strongly desired that a perpendicularly magnetized film of Co-O or the like be formed to have a C / N that can be practically used and to have satisfactory durability.

そのため、高分子フィルムからあらかじめ十分ガスを
放出させることが検討され〔日本応用磁気学会学術講演
概要集26aA−8(1985)、日本応用磁気学会誌vol.11,N
o2,P.P.69−72(1987)等参照〕結晶配向性の改善等が
はかられている。
Therefore, it has been considered to release sufficient gas from the polymer film beforehand [Abstracts of Papers of the Japan Society for Applied Magnetics 26aA-8 (1985), Journal of the Japan Society for Applied Magnetics, vol.11, N.
o2, PP69-72 (1987), etc.] The crystal orientation has been improved.

発明が解決しようとする問題点 しかしながら、市販のポリアミドイミドフィルム,ポ
リイミドフィルム,ポリエチレンテレフタレートフィル
ムのガス出し前処理を十分行っても、ビット長が0.3μ
m以下になると十分なC/Nの磁気テープが得られないと
いった問題があり改善が望まれていた。
Problems to be Solved by the Invention However, even if a commercially available polyamide-imide film, polyimide film, or polyethylene terephthalate film is sufficiently pre-gassed, the bit length is 0.3 μm.
There is a problem that a magnetic tape having a sufficient C / N cannot be obtained when it is less than m, and improvement has been desired.

本発明は上記した事情に鑑みなされたもので、高密度
記録再生で十分なC/Nを得ることの出来る磁気記録媒体
を提供することを目的とするものである。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a magnetic recording medium capable of obtaining a sufficient C / N in high-density recording / reproduction.

問題点を解決するための手段 本発明の磁気記録媒体は上記した問題を解決するた
め、高分子フィルムを構成する結晶部分の結晶粒径が長
手方向と直交方向とで略同一であるフィルム上に強磁性
金属薄膜を配したものである。
Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention is formed on a film in which the crystal grain sizes of the crystal parts constituting the polymer film are substantially the same in the longitudinal direction and the orthogonal direction. It has a ferromagnetic metal thin film.

作用 上記構成によれば、結晶部分以外はアモルファスで特
に方向性がないため、機械強度的に巨視的にとらえた場
合、強化延伸による方向性があっても、結晶が等方的な
ため、微視的には方向性がなく、三次元形状の微小面中
に形成される磁気ヘッドのギャップと安定な接触追従性
が得られ、短波長になる程重大な損失となるスペーシン
グ損失が大幅に改善されることでビット長0.3μm,記録
波長0.6μm以下でもC/Nが改善確保できると共に、微視
的に方向性がなく、強磁性金属薄膜の結晶成長が均一に
なることから、磁気特性や薄膜の結晶物性も改善され、
C/N改善が可能となるものである。
Action According to the above-mentioned configuration, since it is amorphous except for the crystal part and has no particular directionality, when it is macroscopically considered in terms of mechanical strength, even if there is directionality due to the strengthening stretching, the crystal is isotropic. There is no directivity in the direction, the gap of the magnetic head formed in the three-dimensional micro surface and the stable contact followability are obtained, and the spacing loss, which is a serious loss at shorter wavelengths, is significantly increased. As a result of the improvement, the C / N can be improved and secured even at a bit length of 0.3 μm and a recording wavelength of 0.6 μm or less, and there is no microscopic directionality, and the crystal growth of the ferromagnetic metal thin film is uniform, so the magnetic characteristics And the physical properties of thin films are improved,
C / N can be improved.

実施例 以下、本発明の実施例について詳しく、図面参照しな
がら説明する。第1図は本発明の一実施例の磁気記録媒
体の拡大断面図、第2図は本発明に用いた高分子フィル
ムの結晶粒径異方性とC/Nの関係を示す特性図である。
Examples Hereinafter, examples of the present invention will be described in detail with reference to the drawings. FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is a characteristic diagram showing the relationship between crystal grain size anisotropy and C / N of a polymer film used in the present invention. .

第1図において、1はポリエチレンテレフタレート,
ポリエチレン2.6−ナフタレート,ポリフェニレンサル
ファイド,ポリエーテルサルフォン等の高分子フィルム
で、結晶粒径が磁気テープを構成するのに用いた等、長
手方向となる方向と、それと直交する方向とで、同一サ
イズとなるよう構成されたもので、他の機械物性,光学
物性等については格別の限定を受けるものではない。但
し、結晶粒径については、短波長C/Nと若干の相関をも
つので70Å以下、更に好ましくは60Å以下で構成するも
のとする。なお、この高分子フィルムの粒子形状はX線
回析により容易に計測することが可能である。さらに、
高分子フィルムの厚みは、磁気テープであれば4μmか
ら15μm、磁気ディスクであれば20μmから60μmが好
ましい。尚必要であれば、微粒子を高分子フィルム上に
配してもよいが、微粒子を固定するために特に樹脂を用
いる場合は、付着量について十分検討し、その量は抑制
するのが好ましい。これらの微粒子としては、50Åから
500ÅのSiO2,Al2O3,CaCo3,BaCo3,MgO,TiO2,ZrO2,ZnO,Eu
2O3,Cr2O3,Fe2O3等を0.1〜100μm2配したものが適して
いるが、微粒子物質は上記した無機微粒子に限らず、有
機微粒子であってもよい。
In FIG. 1, 1 is polyethylene terephthalate,
A polymer film of polyethylene 2.6-naphthalate, polyphenylene sulfide, polyether sulfone, etc., having the same grain size in the longitudinal direction and in the direction orthogonal to it, such as when the crystal grain size was used to construct a magnetic tape. However, the other mechanical properties, optical properties, etc. are not particularly limited. However, the crystal grain size is 70 Å or less, more preferably 60 Å or less, because it has a slight correlation with the short wavelength C / N. The particle shape of this polymer film can be easily measured by X-ray diffraction. further,
The thickness of the polymer film is preferably 4 μm to 15 μm for a magnetic tape and 20 μm to 60 μm for a magnetic disk. If necessary, the fine particles may be arranged on the polymer film, but when a resin is used particularly for fixing the fine particles, it is preferable to thoroughly study the amount of adhesion and to suppress the amount. As for these fine particles, from 50Å
500Å SiO 2 , Al 2 O 3 , CaCo 3 , BaCo 3 , MgO, TiO 2 , ZrO 2 , ZnO, Eu
A material in which 2 O 3 , Cr 2 O 3 , Fe 2 O 3 and the like are arranged in a range of 0.1 to 100 μm 2 is suitable, but the fine particle substance is not limited to the above-mentioned inorganic fine particles, and may be organic fine particles.

あらかじめ長手方向に延伸比率を1.5〜2倍に(長手
方向に対して)設定したフィルムをガラス転移点温度近
く(68〜72℃)で長時間(10h〜120h)熱処理すること
で粒子径の調整を行うことで上記の条件の高分子フィル
ムを得ることができる。
Adjusting the particle size by heat-treating a film with a draw ratio of 1.5 to 2 times in the longitudinal direction (relative to the longitudinal direction) at a temperature near the glass transition temperature (68 to 72 ° C) for a long time (10 to 120h). By performing the above, a polymer film under the above conditions can be obtained.

2は強磁性金属薄膜で、Co−Ni,Co−Fe,Co−Cr,Co−
O,Co−P,Co−Re,Co−Ta,Co−W,Co−Ni−O,Co−Cr−Nb,C
o−Ni−Pr−O等の斜め蒸着膜,垂直磁化膜等から成る
もので、電子ビーム蒸着法,イオンプレーティング法,
高速スパッタリング法等で形成されるもので、300Åか
ら3000Åの膜厚で、必要なら多層化したものでもよい。
2 is a ferromagnetic metal thin film, which is Co-Ni, Co-Fe, Co-Cr, Co-
O, Co-P, Co-Re, Co-Ta, Co-W, Co-Ni-O, Co-Cr-Nb, C
It consists of an obliquely evaporated film such as o-Ni-Pr-O, a perpendicular magnetization film, etc., and can be formed by electron beam evaporation method, ion plating method,
It is formed by a high-speed sputtering method or the like, and may have a film thickness of 300 Å to 3000 Å, and may have a multi-layer structure if necessary.

3はアモルファスカーボン薄膜,MoS2,WS2スパッタ薄
膜,プラズマ重合膜,脂肪酸膜,脂肪酸アミド膜,パー
フルオロアルキルカルボン酸膜等の組み合わせから成る
保護潤滑層である。
Reference numeral 3 is a protective lubricating layer composed of a combination of an amorphous carbon thin film, MoS 2 , WS 2 sputtered thin film, plasma polymerized film, fatty acid film, fatty acid amide film, perfluoroalkylcarboxylic acid film and the like.

以下、更に具体的に本発明の一実施例について比較例
との対比で詳しく説明する。
Hereinafter, an example of the present invention will be described more specifically in comparison with a comparative example.

厚み10μmのポリエチレンテレフタレートフィルムで
結晶部分を構成する結晶粒径が長手方向、それと直交す
る方向とでいずれも測定誤差内で54Åで同一のベースフ
ィルムAと、長手方向が54Åで直交方向が50Åのベース
Bと、長手方向が52Å,直交方向が56ÅのベースCとを
準備し(ベースAは長手方向延伸倍率1.7倍、直交方向
3.1倍で延伸した後69℃、8時間熱処理して得たものを
用い、ベースBは長手方向2.4倍、直交方向1.9倍で熱処
理を施さずに使用、ベースCは長手方向1.7倍、直交方
向2.8倍で熱処理を施さずに使用した)、いずれのフィ
ルムも平均粗さ30Å,最大粗さ70Åと同一の表面のもの
を用い、直径60ÅのFe2O3微粒子をイソプロピルアルコ
ールに分散させて塗布,乾燥し、平均15μm2の突起を形
成しうる微粒子を配してから高周波スパッタリング法で
Co−Cr(Co,78wt%)の垂直磁化膜を0.1μm形成し、グ
ラファイトをターゲットとし、ArとH2分圧比Ar/H2−2/
1)を混合した放電ガスを用い、0.05Torrで13.56MHz2.2
KWのグロー放電を利用したスパッタリング法で硬質炭素
薄膜を100Å配し、その上にパーフルオロオクタン酸を5
0Å真空蒸着し、夫々8ミリ幅にして磁気テープ化し、
改造した8ミリビデオデッキにより、ギャップ長0.12μ
mのセンダストヘッドにより、トラック幅8μm,ビット
長0.22μmの短形波を記録し、帯域9MHzでのC/Nを比較
した。ベースAを用いたものは、ベースBを用いたもの
より3.4dB C/Nが改善されていて、ベースCを用いたも
のはベースBに比べ0.5dB C/Nが低かった。すなわち、
長手方向および直交方向に略同一の径を有する結晶から
なる高分子フィルムベースAを用いた場合最も良好なC/
Nを得られるものである。
With a 10 μm thick polyethylene terephthalate film, the crystal grain size that constitutes the crystal part is 54 Å within the measurement error in the longitudinal direction and the direction orthogonal to it. Prepare a base B and a base C having a length of 52Å and an orthogonal direction of 56Å.
It was drawn by stretching 3.1 times and then heat-treated at 69 ° C for 8 hours. Base B was used 2.4 times in the longitudinal direction and 1.9 times in the orthogonal direction without heat treatment. Base C was 1.7 times in the longitudinal direction and orthogonal direction. 2.8 times used without heat treatment), all films had the same roughness as average roughness of 30Å and maximum roughness of 70Å, and Fe 2 O 3 fine particles with diameter of 60Å were dispersed in isopropyl alcohol and applied. , Dry, and dispose fine particles that can form protrusions with an average diameter of 15 μm 2 by high frequency sputtering
Co-Cr (Co, 78wt% ) perpendicular magnetization film 0.1μm formation, graphite as a target, Ar and H 2 partial pressure ratio Ar / H 2 -2 /
Using discharge gas mixed with 1), 13.56MHz 2.2 at 0.05 Torr
A hard carbon thin film was placed 100 Å by a sputtering method using KW glow discharge, and 5% of perfluorooctanoic acid was placed on it.
0Å Vacuum deposition, each 8mm width, magnetic tape,
Gap length of 0.12μ due to the modified 8 mm VCR
A rectangular wave having a track width of 8 μm and a bit length of 0.22 μm was recorded by a sendust head of m, and the C / N at a band of 9 MHz was compared. The one using the base A was improved by 3.4 dB C / N as compared with the one using the base B, and the one using the base C was lower by 0.5 dB C / N than the one using the base B. That is,
When the polymer film base A made of crystals having substantially the same diameter in the longitudinal direction and the orthogonal direction is used, the best C /
You can get N.

さて、同一のベースA,B,Cを用い強磁性金属薄膜とし
て前述のCo−CrからCo−Niとしたものについて以下に説
明する。直径1mの円筒キャンに沿わせて最小入射角50
度,酸素分圧5.9×10-5Torrの酸素中でCo−Ni(Co;80wt
%)を0.1μm蒸着して得たCo−Ni−O薄膜から磁気テ
ープを構成した。ビット長0.28μm,トラック幅6μm
で、C/NはベースCを用いたものをOdBとするとベースB
を用いたものは+1dB、ベースAを用いたものは+4.2dB
と、ベースAを用いたものが最も良好であった。
Now, a ferromagnetic metal thin film using the same bases A, B, and C and changing from Co—Cr to Co—Ni will be described below. Minimum incident angle of 50 along a cylindrical can with a diameter of 1 m
And oxygen partial pressure of 5.9 × 10 -5 Torr in Co-Ni (Co; 80wt
%) Was evaporated to form a magnetic tape from a Co-Ni-O thin film. Bit length 0.28μm, Track width 6μm
And C / N is base B when OdB is the one using base C.
The one using + 1dB, the one using base A is + 4.2dB
And the one using the base A was the best.

第2図は、Co−Ni−O薄膜を用いた第2の実験例を含
めて、本発明の有効性を示した特性線図である。図から
明らかなように、粒径比が0.98から1.02の範囲をはずれ
るとC/Nの平均値とばらつきが悪くなることがわかり、
本発明品の有用性が理解できる。本発明で長手方向と直
交方向の粒径が同一であるということは、フィルムの結
晶粒径を任意に少なくとも5ケ所測定した平均値で、そ
の粒径比率が0.98から1.02までの範囲を含んで定義され
るものである。尚第2図に示したデータは、結晶粒径が
80Åから47Åまでの範囲のものを網羅している。また、
第2図は初期値の比較であるが、各々の磁気テープを10
00時間使用した時に、本発明品以外は、更にばらつきが
大きくなることが実験の結果判った。したがって、本発
明品が短波長記録再生で重要である安定なスペーシング
の確保が確実なものであることが言える。又本発明品は
製造的にみても有用で、通常当業者の行いうる脱ガス処
理の範囲で、上記した性能が均一に大面積に得られる点
も特筆されることである。以上のべた効果はポリエチレ
ンテレフタレート以外、前述の高分子フィルムでもその
結晶粒径を直交方向ならびに長手方向に略同一とすれば
同様に得られる。
FIG. 2 is a characteristic diagram showing the effectiveness of the present invention, including the second experimental example using a Co—Ni—O thin film. As can be seen from the figure, when the particle size ratio deviates from the range of 0.98 to 1.02, the average value of C / N and the variation become worse,
The usefulness of the product of the present invention can be understood. In the present invention, the grain size in the longitudinal direction and the grain size in the orthogonal direction are the same, which means an average value obtained by arbitrarily measuring at least 5 crystal grain sizes of the film, and the grain size ratio includes a range of 0.98 to 1.02. It is defined. The data shown in FIG.
It covers the range from 80Å to 47Å. Also,
Fig. 2 shows a comparison of initial values.
As a result of the experiment, it was found that, when used for 00 hours, the variation was further increased except for the products of the present invention. Therefore, it can be said that the product of the present invention ensures secure stable spacing, which is important in short wavelength recording and reproduction. It is also noteworthy that the product of the present invention is useful from a manufacturing standpoint, and the above-mentioned performance can be uniformly obtained in a large area within the range of degassing treatment which can be carried out by a person skilled in the art. In addition to polyethylene terephthalate, the above-described effects can be obtained similarly in the above-mentioned polymer films, if the crystal grain sizes are substantially the same in the orthogonal direction and the longitudinal direction.

発明の効果 本発明によれば、短波長記録再生において優れたC/N
が初期的にも、実使用でも継続的に得られるといったす
ぐれた効果がある。
EFFECTS OF THE INVENTION According to the present invention, excellent C / N in short wavelength recording / reproducing
Has an excellent effect that it can be obtained even in the initial stage and continuously in actual use.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例の磁気記録媒体の拡大断面
図、第2図は本実施例の条件と特性の関係を示す特性線
図である。 1……高分子フィルム、2……強磁性金属薄膜、3……
保護潤滑層。
FIG. 1 is an enlarged cross-sectional view of a magnetic recording medium of one embodiment of the present invention, and FIG. 2 is a characteristic diagram showing the relationship between the conditions and characteristics of this embodiment. 1 ... Polymer film, 2 ... Ferromagnetic metal thin film, 3 ...
Protective lubrication layer.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小浜 修 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (72)発明者 藤田 隆志 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Osamu Obama 1006 Kadoma, Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Takashi Fujita 1006 Kadoma, Kadoma, Osaka Matsushita Electric Industrial Co., Ltd. Within

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】結晶部分の結晶粒径が長手方向と直交方向
で略同一である高分子フィルム上に強磁性金属薄膜を配
設することを特徴とする磁気記録媒体。
1. A magnetic recording medium in which a ferromagnetic metal thin film is provided on a polymer film having a crystal grain size of a crystal portion which is substantially the same in the direction orthogonal to the longitudinal direction.
JP62262130A 1987-10-16 1987-10-16 Magnetic recording media Expired - Lifetime JP2532517B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62262130A JP2532517B2 (en) 1987-10-16 1987-10-16 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62262130A JP2532517B2 (en) 1987-10-16 1987-10-16 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH01105316A JPH01105316A (en) 1989-04-21
JP2532517B2 true JP2532517B2 (en) 1996-09-11

Family

ID=17371468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62262130A Expired - Lifetime JP2532517B2 (en) 1987-10-16 1987-10-16 Magnetic recording media

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JP (1) JP2532517B2 (en)

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JPH01105316A (en) 1989-04-21

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