JP2527674Y2 - スペーサ散布装置 - Google Patents

スペーサ散布装置

Info

Publication number
JP2527674Y2
JP2527674Y2 JP1990120677U JP12067790U JP2527674Y2 JP 2527674 Y2 JP2527674 Y2 JP 2527674Y2 JP 1990120677 U JP1990120677 U JP 1990120677U JP 12067790 U JP12067790 U JP 12067790U JP 2527674 Y2 JP2527674 Y2 JP 2527674Y2
Authority
JP
Japan
Prior art keywords
substrate
spacer
spray
spray chamber
curved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990120677U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0477130U (cs
Inventor
秀章 植野
康宏 野々部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP1990120677U priority Critical patent/JP2527674Y2/ja
Publication of JPH0477130U publication Critical patent/JPH0477130U/ja
Application granted granted Critical
Publication of JP2527674Y2 publication Critical patent/JP2527674Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990120677U 1990-11-16 1990-11-16 スペーサ散布装置 Expired - Lifetime JP2527674Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990120677U JP2527674Y2 (ja) 1990-11-16 1990-11-16 スペーサ散布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990120677U JP2527674Y2 (ja) 1990-11-16 1990-11-16 スペーサ散布装置

Publications (2)

Publication Number Publication Date
JPH0477130U JPH0477130U (cs) 1992-07-06
JP2527674Y2 true JP2527674Y2 (ja) 1997-03-05

Family

ID=31868572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990120677U Expired - Lifetime JP2527674Y2 (ja) 1990-11-16 1990-11-16 スペーサ散布装置

Country Status (1)

Country Link
JP (1) JP2527674Y2 (cs)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2579920B2 (ja) * 1986-12-25 1997-02-12 株式会社東芝 基板処理方法
JPH0194319A (ja) * 1987-10-07 1989-04-13 Matsushita Electric Ind Co Ltd 液晶表示パネルのスペーサ材分散装置
JPH01210868A (ja) * 1988-02-18 1989-08-24 Tdk Corp 電圧センサ及び電圧測定装置

Also Published As

Publication number Publication date
JPH0477130U (cs) 1992-07-06

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