JP2526655B2 - Cleaning equipment - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a cleaning device, and more particularly to a cleaning device capable of high-quality cleaning for removing submicron dust or stains on an exposure mask or the like. is there.

[Conventional technology]

Conventionally, this type of cleaning has been performed manually. That is, using the cleaning tool 1 made of cotton or the like shown in FIG. 5A, the photomask 2 is placed on the cleaning table 100 as shown in FIG. 200 was dropped, and the operator 300 manually washed the cleaning surface with the cleaning tool 1 while eccentrically moving the surface of the photomask 2 as shown in FIG. An example of the size of the photomask 2 is 152 mm × 152 mm, and the size of the cleaning tool 1 is 40 m in diameter.
mφ.

When the eccentric movement is carried out in this way, a cleaning mark 400 is formed on the cleaning surface as shown in FIG. 6, but thereafter, the detergent 200 adhering to the cleaning surface is washed away again with pure water.
The cleaning work was completed by cleaning the front and back surfaces as described above.

[Problems to be Solved by the Invention]

The above-mentioned manual cleaning method has a large individual difference, and the foreign matter inspection after cleaning often requires re-cleaning. In addition, since the work at the time of washing is hard work and the work is performed with a pressing force of 2 kg or more for about 10 minutes, the worker 300 often complained of pain in the arms and shoulders. In addition, worker 30
Since 0 is limited to highly skilled workers, when the person is absent, it interferes with the series of processes and it is extremely difficult to select a worker who matches it. was there.

The present invention has been made in order to solve the above-mentioned problems, and in addition to standardizing the cleaning work, eliminates the heavy labor of the worker, and obtains a cleaning device that can perform uniform cleaning automatically and by anyone. The purpose is to

[Means for solving the problem]

A cleaning device according to the present invention is provided with a rotating arm to which a cleaning tool for cleaning an object to be cleaned placed in a holder is attached, a plurality of rotating arms attached at equal angular intervals, and a shaft. Mounted so that it can move in any direction,
A vertical drive shaft that is fixed during cleaning, an axial drive unit that drives the vertical drive shaft and applies a required pressure to the object to be cleaned, a drive unit that causes the rotary arm to make a circular motion, and each of the above units. And a control unit that controls at the timing.

[Action]

Since the cleaning apparatus according to the present invention is configured to clean the surface without eccentric movement by applying a predetermined pressure to the surface, the cleaning can be performed by the same operation as that of the operator. Therefore, it is possible to perform cleaning without damaging the surface to be cleaned, and unlike manual work, it is possible to always perform cleaning under a constant pressure according to the dirt on the surface to be cleaned, and to maintain stable cleaning for a long period of time. can do.

〔Example〕

 An embodiment of the present invention will be described below with reference to the drawings.

1 to 4 are views showing an embodiment of the present invention, FIG. 1 is a front view showing the entire cleaning apparatus, FIG. 2 is a top view of the same, and FIG. 3 is a main part of FIG. FIG. 4 is an enlarged side view and FIG. 4 is a perspective view of the same.

In these figures, 1 is a cleaning tool, 2 is this cleaning tool 1
A photomask 3 to be cleaned is a mask holder on which the photomask 2 is placed, and the mask holder 3 is attached to a holder attachment plate 4. 5 is an XY stage,
The holder mounting plate 4 is composed of an XY stage 5a and a Y stage 5b, and is mounted on the Y stage 5b. The XY stage 5 is driven by drive motors 6 and 7 to drive the respective drive shafts 8.
And 10 are driven to move in the XY directions guided by the guide shafts 9 and 11, whereby the photomask 2 on the mask holder 3 mounted on the holder mounting plate 4 moves in the XY directions. Can be moved. 12 is a rotating arm,
As shown in FIG. 2, three pieces, which are equally divided at 120 ° intervals, are attached to the vertical movement drive shaft 13, and the cleaning tool 1 is attached to each rotary arm 12 via the attachment tool 14.
Each is locked at a predetermined position. Fifteen
Is a butterfly bolt for attaching the fixture 14 to the rotary arm 12. Reference numeral 16 is a housing in which the vertical drive shaft 13 is mounted, and a stroke bearing 17 is mounted inside.
The housing 16 is provided with an axial drive unit, such as a cylinder 19, which drives the vertical drive shaft 13 via a fixture 18 and applies a required pressure to the photomask 2. 20 is a cushion for cushioning. A positioning cam 21 is attached to the lower end of the vertical movement drive shaft 13, and two bearings 22 for moving the vertical movement drive shaft 13 up and down so as to sandwich the flange surface 21a thereof. The bearing 22 is connected to the cylinder 19. The side plates 23 arranged on both sides of the positioning cam 21 have positioning bearings 24 (see FIG. 4).
Is attached. This positioning bearing 24
It fits into the groove 21b formed on the positioning cam 21 and locks its operation. Reference numeral 25 is a fixed plate on which the XY stage 5 and the like described above are placed. A moving plate 26 is located at the opening of the plate 25 as shown in FIG. Further, a drive unit for circularly moving the rotating arm 12, that is, a motor 30 and a gear 31 are attached, and an eccentric cam 32 and a bearing 33 are attached to the gear 31. The bearing 33 is fitted in a hole 26a formed in the moving plate 26 (Fig. 3).

Further, a vibration-proof rubber 34 is disposed at an appropriate position between the fixed plate 25 and the bottom plate 27. 35 is a mounting bolt. Reference numeral 36 in FIG. 1 is a control unit for controlling the entire apparatus at a predetermined timing.

 Next, the outline of the operation will be described.

As shown in FIGS. 1 to 3, the photomask 2 is set on the mask holder 3. When a start switch (not shown) is turned on, the motor 30 rotates to rotate the eccentric cam 32 as shown in FIG. The power of the eccentric cam 32 is sequentially transmitted through the bearing 33, the X slide tool 28, and the Y slide tool 29 to rotate the rotary arm 12, that is, to make a circular motion. As the rotary arm 12 moves circularly, the cleaning tool 1 attached thereto also moves circularly. At the same time, the cylinder 19 that has stopped at the upper limit descends, the bearing 22 descends with the flange surface 21a of the positioning cam 21 sandwiched, and the positioning bearing 24 enters the groove 21b of the positioning cam 21 to fix the vertical motion drive shaft 13. The driving force from the motor 30 is only circular movement of the rotary arm 12. That is, when the motor 30 rotates, the rotational force causes the rotary arm 12 fixed at a predetermined position by the X slide tool 28 and the Y slide tool 29 to move circularly via the eccentric cam 32 and the bearing 33. This circular motion and constant pressure are applied to the cleaning surface of the photomask 2, and the surface of the photomask 2 is cleaned while circularly moving as in the manual operation shown in FIG. Next, in order to thoroughly clean the surface of the photomask 2, as shown in FIG. 2, an X stage 5a and a Y stage 5b are used.
The photomask 2 is moved by. When the surface of the photomask 2 is completely cleaned, although not shown, the detergent is automatically washed away with a pure water shower. Next, rotate arm 12
The surface of the photomask 2 can be cleaned evenly by rotating the cleaning tool 1 on which the detergent is not attached on the surface of the photomask 2 by rotating 120 ° and repeating the cleaning operation using only pure water in the manner described above. Not only that, a certain cleaning effect can always be obtained regardless of the skill level of the operator.

In the above embodiments, the cleaning of the photomask has been described, but the present invention is not limited to the photomask and 1 μm.
It can also be diverted to the following for cleaning dust and fats and oils.

〔The invention's effect〕

As described above, according to the present invention, the rotating arm to which the cleaning tool for cleaning the object to be cleaned placed in the holder is attached, and the plurality of rotating arms are attached at equal angular intervals, and A vertically moving drive shaft that is movably mounted in the axial direction and is fixed during cleaning, an axial drive unit that drives the vertically moving drive shaft and applies a required pressure to the object to be cleaned, and circularly moves the rotary arm. Since the drive unit and the control unit that controls each unit at a predetermined timing are configured, it is possible to make a manual so that anyone can easily perform the same work without limiting the worker. Therefore, the pressing force of the cleaning tool on the cleaning surface can be controlled to be constant, and cleaning can be performed without damaging the cleaning surface. With, cleaning can be performed, and uniform and stable cleaning can be continued for a long time. Further, unlike the conventional case, there is no need for re-cleaning due to a cleaning error, further, the health of the worker is not impaired, and the surface can be smoothly cleaned.

[Brief description of drawings]

1 to 4 are views showing an embodiment of the present invention.
The figure is a front view showing the overall configuration of the photomask cleaning device,
2 is a schematic plan view of FIG. 1, FIG. 3 is an enlarged side view of the main part of FIG. 1, FIG. 4 is an enlarged perspective view of the same, and FIG. 5 (a) is a conventional photomask cleaning process. FIG. 5 (b) is a perspective view showing a conventional example of a photomask cleaning device using the cleaning tool of FIG. 5 (a), and FIG. 6 is an eccentric movement of the mask surface by hand. It is a top view which shows the state which makes it. In the figure, 1 is a cleaning tool, 2 is a photomask, 3 is a mask holder, 4 is a mounting plate, 5 is an XY stage, 5a is an X stage, 5b is a Y stage, 6 and 7 are drive motors, and 8 and 10 are drive. Shaft, 9 and 11 are guide shafts, 12 is rotary arm, 13 is vertical drive shaft, 14 is fixture, 15 is butterfly bolt, 16 is housing, 17 is stroke bearing, 18 is fixture, 19 is cylinder, 20
Is a cushion for cushioning, 21 is a positioning cam, 22 is a bearing, 23 is a side plate, 24 is a positioning bearing, 25 is a fixed plate,
26 is a moving plate, 27 is a bottom plate, 28 is an X slide tool, 29 is a Y slide tool, 30 is a motor, 31 is a gear, 32 is an eccentric cam, 33 is a bearing, 34 is a rubber for vibration isolation, 35 is a mounting bottle, 36 is a control unit. The same reference numerals in each drawing indicate the same or corresponding parts.

Claims (1)

(57) [Claims] 1. A rotating arm, to which a cleaning tool for cleaning an object to be cleaned placed in a holder is attached, and a plurality of the rotating arms are attached at equal angular intervals and are movable in an axial direction. An up-and-down drive shaft fixed to the cleaning unit, an axial drive unit for driving the up-and-down drive shaft to apply a required pressure to the object to be cleaned, and a drive unit for circularly moving the rotary arm; A cleaning apparatus comprising a control unit that controls each of the units at a predetermined timing.