JPH02212842A - Cleaning device - Google Patents

Abstract

PURPOSE:To enable anybody to easily perform uniform operation without limiting an operator by putting the cleaned surface of a photomask in eccentric motion under constant pressure. CONSTITUTION:The cleaning device is provided with a cleaning tool 1 which cleans a body to be cleaned (photomask) mounted in a mask holder 3 and a vertical motion driving shaft 13 which is fitted with the rotary arm 12, also fitted movably in the axial direction, and fixed in cleaning operation. Further, the device is equipped with an axial driving part 19 which drives the vertical motion driving shaft 13 and applies necessary pressure to the body 2 to be cleaned, driving parts 30 and 31 which put rotary arm 12 in the eccentric motion, and a control part 36 which controls respective parts at specific timing. Consequently, the specific pressure is applied to the cleaned surface, which is cleaned while put in the eccentric motion. Consequently, anybody can carry on the stable cleaning without any irregularity for a long time.

Description

[Detailed Description of the Invention] (Industrial Application) This invention relates to a cleaning device, and particularly to a cleaning device that enables high-quality cleaning to remove submicron dust and stains from exposure masks and the like. It is.

[Conventional technology]

Conventionally, this type of cleaning has been performed manually. That is, using a cleaning tool 1 made of cotton or the like as shown in FIG. 345(a), a photomask 2 is placed on a cleaning table 100 as shown in FIG. was dropped, and the operator 300 manually cleaned the surface of the photomask 2 using the cleaning tool 1 while eccentrically moving the surface of the photomask 2 as shown in FIG. An example of the dimensions of the photomask 2 is 152 nm x 152 mm, and the dimensions of the cleaning tool 1 are 40 mm in diameter.

When it is moved while being eccentrically moved in this way, cleaning marks 400 are left on the cleaning surface as shown in FIG. 6, but after that, the detergent 200 adhering to the cleaning surface is washed away again with pure water. The cleaning work was completed by cleaning the front and back surfaces as described above.

[Problem to be solved by the invention]

In the manual cleaning method described above, there is considerable individual variation, and foreign body inspection after cleaning often requires re-cleaning. Further, since the cleaning work is hard work and requires about 10 minutes of work with a pressing force of 2 kg or more, the worker 300 often complained of pain in his arms, shoulders, etc. Furthermore, since the workers 300 are limited to highly skilled workers,
If the person in question is absent, a series of processes will be disrupted, and it will be extremely difficult to select a suitable worker.

This invention was made in order to solve the above-mentioned problems, and provides a cleaning device that standardizes cleaning work, eliminates the heavy labor of workers, and allows anyone to clean uniformly automatically. The purpose is to

[Means to solve the problem]

The cleaning device according to the present invention includes a rotating arm to which a cleaning tool for cleaning an object placed in a holder is attached;
a vertical drive shaft to which the rotary arm is attached, movable in the axial direction, and fixed during cleaning;
The device includes an axial drive unit that drives the vertical drive shaft and applies a required pressure to the object to be cleaned, a drive unit that eccentrically moves the rotary arm, and a control unit that controls each part at a predetermined timing. It is something.

[Effect]

The cleaning device according to the present invention is configured to perform cleaning while applying a predetermined pressure to the surface to be cleaned and moving the surface eccentrically, so that cleaning can be performed by a motion similar to that of an operator's hand. Therefore, cleaning can be performed without damaging the cleaning surface, and unlike manual cleaning, it is possible to constantly clean with a constant pressure depending on the dirt on the cleaning surface, and even and stable cleaning can be continued for a long time. can do.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

Figures 1 to 4 are diagrams showing one embodiment of the present invention.
The figure is a front view showing the entire cleaning device, FIG. 2 is a top view, FIG. 3 is an enlarged side view of the main part of FIG. 1, and FIG. 4 is a perspective view.

In these figures, 1 is a cleaning tool, 2 is a photomask cleaned by this cleaning tool 1, and 3 is this photomask 2.
This mask holder 3 is attached to a holder mounting plate 4. Reference numeral 5 denotes an XY stage, which is composed of an X stage 5a and a Y stage 5b, and the holder mounting plate 4 is attached to the Y stage 5b.

The XY stage 5 is guided by the guide shafts 9 and 11 and moved in the XY direction by driving the respective drive shafts 8 and 10 by the drive motors 6 and 7, and is thereby attached to the holder mounting plate 4. mask holder 3
The upper photomask 2 is moved in the X-Y direction. 1
2 is a rotating arm, and as shown in FIG. The tools 1 are attached and each locked in a predetermined position. Reference numeral 15 denotes a butterfly bolt for attaching the fixture 14 to the rotating arm 12. 16 is a housing in which the vertical drive shaft 13 is mounted, and a stroke bearing 17 is mounted inside thereof. Housing 16
In this case, the vertical drive shaft 13 is driven via the fixture 18,
An axial drive, for example a cylinder 1, is attached which applies the required pressure to the photomask 2. 20 is IJi
This is a cushion for the city. A positioning cam 21 is attached to the lower end of the vertical drive shaft 13, and two bearings 22 for vertically moving the vertical drive shaft 13 are attached so as to sandwich the flange surface 21a of the positioning cam 21. This bearing 22 is connected to the cylinder 19. Positioning bearings 24 are attached to side plates 23 disposed on both sides of the positioning cam 21 (FIG. 4). This positioning bearing 24 fits into a groove 21b formed in the positioning cam 21, and locks its operation. Reference numeral 25 denotes a fixed plate, on which the aforementioned XY stage 5 and the like are placed. Reference numeral 26 denotes a movable plate, which is located at the opening of the fixed plate 25 as shown in FIG.
9 is attached, and furthermore, a drive unit, ie, a motor 30.9, for eccentrically moving the rotary arm 12. A gear 31 is attached to the gear 31, and an eccentric cam 32 and a bearing 33 are attached to the gear 31. This bearing 33 fits into a hole 26a formed in the moving plate 26 (FIG. 3).

Furthermore, vibration-proofing rubber 34 is disposed at appropriate locations between the fixed plate 25 and the bottom plate 27. 35 is attached with bolts. Further, numeral 36 in FIG. 1 is a control section that controls the entire apparatus at a predetermined timing.

Next, an overview of the operation will be explained.

As shown in FIGS. 1 to 3, a photomask 2 is set on a mask holder 3. When a start switch (not shown) is turned on, the motor 30 rotates to rotate the eccentric cam 32 as shown in FIG. The power of the eccentric cam 32 is provided by a bearing 33. X slide tool 28. In accordance with the eccentric movement of the 8-rotation arm 12 that is sequentially transmitted via the Y slide tool 29 and causes the rotation arm 12 to rotate, that is, move eccentrically, the cleaning tool 1 attached thereto also moves eccentrically. At the same time, the cylinder 19, which had been stopped at the upper limit, is lowered and the bearing 22 is lowered across the collar surface 21a of the positioning cam 21, and the positioning bearing 24 enters the groove 21b of the positioning cam 21 to fix the vertical drive shaft 13.
The driving force from the motor 30 is only for eccentric movement of the rotary arm 12. That is, when the motor 30 rotates, this rotational force is applied to the eccentric cam 32. The rotating arm 12, which is fixed at a predetermined position by the X slide tool 28 and the Y slide tool 29, is moved eccentrically through the bearing 33. This eccentric movement and constant pressure are applied to the cleaning surface of the photomask 2, and the surface of the photomask 2 is cleaned while being eccentrically moved, similar to the manual operation shown in FIG. Next, in order to evenly clean the surface of the photomask 2, as shown in FIG.
The photomask 2 is moved by the Y stage 5b and the Y stage 5b. When the surface of the photomask 2 is completely cleaned, the detergent is automatically washed away with a pure water shower (not shown).

Next, the rotary arm 12 is rotated 120 degrees, the cleaning tool 1 to which no detergent is attached is placed on the surface of the photomask 2, and the cleaning operation using only pure water is repeated in the manner described above. Not only can surfaces be cleaned evenly, but a constant cleaning effect can always be obtained regardless of the skill level of the operator.

In the above embodiments, cleaning of photomasks was explained, but the present invention is not limited to photomasks, but can also be applied to cleaning of dust and fats and oils of 1 μm or less.

〔Effect of the invention〕

As explained above, the present invention includes a rotating arm to which a cleaning tool for cleaning an object placed in a holder is attached, and a rotating arm to which the rotating arm is attached and movable in the axial direction. A vertical drive shaft that is fixed at the same time, an axial drive section that drives the vertical drive shaft and applies the required pressure to the object to be cleaned, and a drive section that eccentrically moves the rotary arm, and each part is operated at a predetermined timing. Since the system is configured with a control unit that controls the system, it is possible to create a manual so that anyone can easily perform the same work without limiting the number of operators. Therefore, cleaning can be performed without damaging the cleaning surface, and unlike manual cleaning, it is possible to constantly clean with a constant pressure depending on the dirt on the cleaning surface, and even and stable cleaning can be continued for a long time. can do. Furthermore, there is no need for re-cleaning due to cleaning errors as in the past, and there is no harm to the health of the workers, and the surface can be cleaned smoothly.

[Brief explanation of the drawing]

Figures 1 to 4 are diagrams showing one embodiment of the present invention.
The figure is a front view showing the overall configuration of a photomask cleaning device.
Fig. 2 is a schematic plan view of Fig. 1, Fig. 3 is an enlarged side view of the main parts of Fig. 1, Fig. 4 is an enlarged perspective view, and Fig. 5(a) is a conventional photomask cleaning method. FIG. 5(b) is a perspective view showing a conventional example of a photomask cleaning device using the cleaning tool of FIG. 5(a), and FIG. FIG. In the figure, 1 is a cleaning tool, 2 is a photomask, 3 is a mask holder, 4 is a mounting plate, 5 is an XY stage, 5a is an X stage, 5b is a Y stage, 6°7 is a drive motor, 86
10 is a drive shaft, 9.11 is a guide shaft, 12 is a rotating arm,
13 is a vertical drive shaft, 14 is a fixture, 15 is a butterfly bolt,
16 is the housing, 17 is the stroke bearing, 18
19 is a cylinder, 20 is a buffer cushion, 21 is a positioning cam, 22 is a bearing, 23 is a side plate, 24 is a positioning bearing, 25 is a fixed plate, 26 is a moving plate, 27 is a bottom plate, 28 is an X 29 is a Y slide tool, 30 is a motor, 31 is a gear, 32 is an eccentric cam, 3
3 is a bearing, 34 is a vibration isolating rubber, 35 is a mounting bottle, and 36 is a control unit. Note that the same reference numerals in each figure indicate the same or corresponding parts. -m j:lN size-■- I-11-PN Katsuragi Ryo 8 Shoko Tsubasa Agent Masuo Oiwa (2 others) Fig. Fig.

Claims (1)

[Claims] A rotating arm to which a cleaning tool for cleaning an object to be cleaned placed in a holder is attached; a vertical drive shaft to which the rotating arm is attached, movable in the axial direction, and fixed during cleaning; , drives this vertical drive shaft,
A cleaning device comprising: an axial drive section that applies a required pressure to the object to be cleaned; a drive section that moves the rotary arm eccentrically; and a control section that controls each section at a predetermined timing.