JP2522546Y2 - 温純水乾燥装置 - Google Patents

温純水乾燥装置

Info

Publication number
JP2522546Y2
JP2522546Y2 JP3624990U JP3624990U JP2522546Y2 JP 2522546 Y2 JP2522546 Y2 JP 2522546Y2 JP 3624990 U JP3624990 U JP 3624990U JP 3624990 U JP3624990 U JP 3624990U JP 2522546 Y2 JP2522546 Y2 JP 2522546Y2
Authority
JP
Japan
Prior art keywords
pure water
hot pure
tank
hot
supply port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3624990U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03126047U (enExample
Inventor
松夫 秋林
Original Assignee
スピードファムクリーンシステム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スピードファムクリーンシステム株式会社 filed Critical スピードファムクリーンシステム株式会社
Priority to JP3624990U priority Critical patent/JP2522546Y2/ja
Publication of JPH03126047U publication Critical patent/JPH03126047U/ja
Application granted granted Critical
Publication of JP2522546Y2 publication Critical patent/JP2522546Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP3624990U 1990-04-04 1990-04-04 温純水乾燥装置 Expired - Lifetime JP2522546Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3624990U JP2522546Y2 (ja) 1990-04-04 1990-04-04 温純水乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3624990U JP2522546Y2 (ja) 1990-04-04 1990-04-04 温純水乾燥装置

Publications (2)

Publication Number Publication Date
JPH03126047U JPH03126047U (enExample) 1991-12-19
JP2522546Y2 true JP2522546Y2 (ja) 1997-01-16

Family

ID=31542321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3624990U Expired - Lifetime JP2522546Y2 (ja) 1990-04-04 1990-04-04 温純水乾燥装置

Country Status (1)

Country Link
JP (1) JP2522546Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW513594B (en) * 1996-06-14 2002-12-11 Seiko Epson Corp Pull-up Novel pull-up drying method and apparatus
JP5014066B2 (ja) * 2007-11-01 2012-08-29 三菱電機株式会社 過酸化水素製造用電解セル

Also Published As

Publication number Publication date
JPH03126047U (enExample) 1991-12-19

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