JP2522131B2 - Method and apparatus for evaluating mechanical properties of coating - Google Patents
Method and apparatus for evaluating mechanical properties of coatingInfo
- Publication number
- JP2522131B2 JP2522131B2 JP3304117A JP30411791A JP2522131B2 JP 2522131 B2 JP2522131 B2 JP 2522131B2 JP 3304117 A JP3304117 A JP 3304117A JP 30411791 A JP30411791 A JP 30411791A JP 2522131 B2 JP2522131 B2 JP 2522131B2
- Authority
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- Prior art keywords
- coating
- elastic wave
- film
- value
- indenter
- Prior art date
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- Expired - Lifetime
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- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、厚膜や薄膜の被膜の評
価に関し、特に、被膜の靭性値の評価に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the evaluation of thick and thin films, and more particularly to the evaluation of the toughness value of the film.
【０００２】[0002]
【従来の技術】基板上に形成された硬質被膜の機械的特
性を決定する因子としては、被膜の硬度、被膜と基板と
の密着力及び被膜の靭性値などが挙げられる。工具など
の耐摩耗性の向上のためにその表面に硬質膜を形成して
使用する場合、その特性はこれらの因子の影響を大きく
受ける。実際の工具の特性を評価する場合には、例えば
ドリルなどでは、ＮＣボール盤を使用して連続的に穴を
あける作業を切削不能になるまで繰り返し、穴のあいた
数により特性を評価することが行われている。しかし、
最近の高性能の硬質膜では数百穴あるいは数千穴の切削
にも耐える材料も開発されている。このような実際の工
具特性の評価には、大型の評価用機械を用い、大量の被
切削材を使用するためコストがかかり、さらに評価結果
が出るのに時間もかかる。そのため、基本物性である硬
度、密着力、靭性値などの評価から工具の特性を予想す
る試みが行われているが、未だに基本物性評価と工具特
性評価の対応は得られていない。2. Description of the Related Art Factors that determine the mechanical properties of a hard coating formed on a substrate include the hardness of the coating, the adhesion between the coating and the substrate, and the toughness value of the coating. When a hard film is formed on the surface of a tool to improve its wear resistance, its characteristics are greatly affected by these factors. When evaluating the characteristics of an actual tool, for example, with a drill, etc., the work of continuously drilling holes using an NC drilling machine is repeated until cutting becomes impossible, and the characteristics are evaluated by the number of holes. It is being appreciated. But,
In recent years, high-performance hard films have been developed with materials that can withstand cutting of hundreds or thousands of holes. Such an actual tool characteristic evaluation requires a large-sized evaluation machine and a large amount of material to be cut, which is costly, and it takes time to obtain an evaluation result. Therefore, attempts have been made to predict the characteristics of the tool from the evaluation of the basic physical properties such as hardness, adhesion, and toughness value, but the correspondence between the basic physical property evaluation and the tool property evaluation has not yet been obtained.
【０００３】被膜の硬度については、従来より金属材料
の評価に用いられている圧子により荷重を負荷し、試験
片の表面に圧子により形成された圧痕のサイズを計測す
る硬度計において、圧子に負荷する荷重を小さくして評
価を行っている。[0003] The hardness of the coating is loaded and loaded by not that pressure transducer used in the evaluation of a conventional metal material in hardness meter for measuring the size of an indentation formed by an indenter on the surface of the test piece, the indenter The evaluation is performed by reducing the applied load.
【０００４】また、被膜と基板との密着力の測定には、
試験片に圧子を接触させて試験片を一方向に移動させ、
圧子に連続的に増加する荷重を加えるスクラッチ試験法
が行われている。スクラッチ試験においては、荷重が増
加することにより膜が破壊した際に発生する弾性波を検
知し、その破壊が生じた時の荷重値を臨界荷重と称し、
被膜と基板との密着力の尺度として慣用的に使用されて
いる。このスクラッチ試験では、一般に圧子に加える荷
重値を横軸とし、発生した弾性波信号を縦軸にしたチャ
ートとして記録される。ここでは、破壊により弾性波信
号が多発し始める時の横軸の荷重を臨界荷重としている
が、異なるサンプルを評価した場合に臨界荷重は同じで
も弾性波信号の波形が異なることも多々見受けられる。
ここでの縦軸の弾性波信号は、圧子によるスクラッチで
発生する多数のミクロな破壊を検知しているものである
が、一つのミクロな破壊により開放されるエネルギーと
破壊の数の混在した情報であり、このままでは被膜の物
性との相関は認められない。Further, in measuring the adhesion between the coating and the substrate,
Move the test piece in one direction by contacting the indenter with the test piece,
A scratch test method is used in which a continuously increasing load is applied to an indenter. In the scratch test, the elastic wave generated when the film breaks due to an increase in load is detected, and the load value at the time of the break is called the critical load,
It is commonly used as a measure of the adhesion between the coating and the substrate. In this scratch test, the load value applied to the indenter is generally recorded as a horizontal axis and the generated elastic wave signal is recorded as a vertical axis. Here, the load on the abscissa when the elastic wave signals start to occur frequently due to breakage is taken as the critical load, but when different samples are evaluated, it is often found that the waveform of the elastic wave signal is different even though the critical load is the same.
The elastic wave signal on the vertical axis here detects a large number of microscopic fractures caused by scratches due to the indenter, but the information released by one microscopic fracture and the number of fractures are mixed. As such, no correlation with the physical properties of the coating film is observed.
【０００５】本発明者らは、このスクラッチ試験におい
て、この弾性波信号を解析するシステムとその評価方法
を考案し、特開平０１−３１６６３２にて開示した。そ
の構成の一例を図３に示す。すなわち、スクラッチ試験
機本体のステージ２に試料ａを固定し、圧子３を固定レ
バー４及び調節器５により試料表面までセットする。ス
クラッチ試験機のスイッチを入れることにより、圧子３
は試料ａに接触し、順次荷重がかけられると同時にステ
ージ２が一定方向に定速度で移動する。圧子３に加えら
れた荷重はロードセル７により測定され、圧子３から発
生した弾性波はＡＥセンサー６により検知される。弾性
波及び荷重の信号はロードセル増幅器８及びＡＥ増幅器
９を通りＸ−Ｙレコーダ１０に記録される。ここで、Ａ
Ｅセンサー６からの信号は同時にＡＥ信号計測装置１１
に送られ、このＡＥ信号計測装置１１により、弾性波は
破壊の発生数と弾性波の振幅に分離される。ＡＥ信号計
測装置１１により分離された情報は、インターフェース
１２を介してコンピュータ１３に接続され、破壊の発生
数と弾性波の振幅（エネルギー）のデータを演算処理
し、弾性波の発生数、弾性波の振幅分布、弾性波の振幅
値の総和等のデータが得られる。The inventors of the present invention have devised a system for analyzing the elastic wave signal in the scratch test and a method for evaluating the system, and disclosed it in Japanese Patent Laid-Open No. 01-316632. An example of the configuration is shown in FIG. That is, the sample a is fixed to the stage 2 of the scratch tester main body, and the indenter 3 is set to the sample surface by the fixing lever 4 and the adjuster 5. Indenter 3 by turning on the scratch tester
Contacts the sample a and is sequentially loaded, and at the same time, the stage 2 moves in a constant direction at a constant speed. The load applied to the indenter 3 is measured by the load cell 7, and the elastic wave generated from the indenter 3 is detected by the AE sensor 6. Signal of the acoustic wave and the load is recorded as X-Y recorder 10 a load cell amplifier 8 and AE amplification unit <br/> 9. Where A
The signals from the E sensor 6 are simultaneously measured by the AE signal measuring device 11
And the elastic wave is separated by the AE signal measuring device 11 into the number of occurrences of breakage and the amplitude of the elastic wave. The information separated by the AE signal measuring device 11 is connected to the computer 13 via the interface 12, and the data of the number of occurrences of breakage and the amplitude (energy) of elastic waves is arithmetically processed to determine the number of occurrences of elastic waves and elastic waves. Data such as the amplitude distribution of A, the sum of the amplitude values of elastic waves, and the like can be obtained.
【０００６】特開平０１−３１６６３２では、弾性波の
発生数、振幅度、振幅の総和値を求めることにより、被
膜の靭性度と、アコースティックエミッション（Ａ
Ｅ）、すなわち被膜が破壊されるときに発生する弾性波
の大きさとの間に関係があることを明らかにしたにすぎ
なかった。In Japanese Patent Laid-Open No. 01-316632, the toughness of the coating and the acoustic emission (A) are obtained by obtaining the number of elastic waves generated, the amplitude, and the sum of the amplitudes.
E), that is, an elastic wave generated when the coating is destroyed
Only revealed that there is a relationship between the size
There wasn't .
【０００７】機械的特性を決定する因子として硬度、密
着力及び靭性値があるが、その中で、靭性値が被膜の応
用特性に大きく影響する。しかし、靭性値の評価方法に
ついては未だに適切な手法が確立されていない。Hardness, adhesion and toughness are factors that determine the mechanical properties, of which the toughness greatly affects the applied properties of the coating. However, an appropriate method has not yet been established for evaluating the toughness value.
【０００８】従来の被膜の靭性値の評価法としては、圧
子押し込み法と称される方法で評価されていた。As a conventional method for evaluating the toughness value of a coating, a method called indenter indentation method has been used.
【０００９】圧子押し込み法では、ピラミッド型の圧子
を一定の比較的大きな荷重で被膜に押し込み、被膜を破
壊させ、その時に発生した被膜のクラックの長さを測定
し、その値を半経験式により演算して靭性値を算出して
いた。In the indenter indentation method, a pyramid-type indenter is pushed into the coating with a constant and relatively large load to destroy the coating, and the length of the crack of the coating generated at that time is measured. The toughness value was calculated by calculation.
【００１０】[0010]
【発明が解決しようとする課題】しかし、上記圧子押し
込み法では、試料に一度圧子を押し込んだ後に圧子を除
去し、その後にあらためて試料表面を顕微鏡により観察
してクラックの長さを計測し、このとき観察されたクラ
ックの長さをもとに被膜の靭性値を求める計算を行うた
め、一つの試料の測定に長時間がかかるという問題があ
る。また、クラックの長さの測定は肉眼で行うため、測
定値に個人差が大きく影響することも問題となる。[SUMMARY OF THE INVENTION However, in the above indentation method, the indenter was removed after I press to write once indenter in the sample, measuring the length of the crack then again the sample surface was observed by a microscope However, the calculation of the toughness value of the coating is performed based on the length of the cracks observed at this time, so that it takes a long time to measure one sample. Further, since the crack length is measured with the naked eye, there is a problem that the individual difference greatly affects the measured value.
【００１１】本発明は、上記圧子押し込み法の問題点を
解決すべく、より短時間に被膜の靭性値を評価する方法
を提供することを目的とするものである。また、本発明
は、本来、密着力を測定するためのスクラッチ試験装置
から靭性値に関する情報を得る方法を提供するものであ
る。An object of the present invention is to provide a method for evaluating the toughness value of a coating in a shorter time in order to solve the problems of the indentation method. Further, the present invention inherently provides a method for obtaining information on a toughness value from a scratch test device for measuring an adhesion force.
【００１２】[0012]
【課題を解決するための手段】上記目的を達成するため
に、本発明は、厚膜や薄膜の被膜を表面に形成した試験
片に圧子を接触させて試験片を一方向に移動させ、該圧
子に連続的に増加する荷重を加えて、被膜の破壊時の弾
性波を検知し、被膜の破壊時の弾性波エネルギーを測定
することにより被膜の靭性値を評価する方法において、
被膜の破壊時の弾性波エネルギーとして弾性波の振幅の
自乗が測定され、弾性波の振幅の自乗の総和を弾性波の
発生数で割った値（Ｅ／Ｎ）を被膜の靭性値の尺度とす
ることを特徴とする被膜の機械的特性の評価方法を提供
する。In order to achieve the above object, the present invention provides a test piece having a thick film or a thin film formed on its surface with an indenter to move the test piece in one direction. in addition the load increases continuously to the indenter, and detects the acoustic waves at break of the coating, the method of evaluating the toughness of the coating by measuring the elastic Namie energy at break of the coating,
Of the amplitude of the elastic wave as the elastic wave energy at the time of the coating failure
The square is measured and the sum of the squares of the amplitude of the elastic wave is calculated as
The value (E / N) divided by the number of occurrences is used as a measure of the toughness value of the coating.
Provides a method of evaluating the mechanical properties of the film, characterized in that that.
【００１３】また、表面に被膜を形成した試験片に圧子
を接触させて試験片を一方向に移動させ、該圧子に連続
的に増加する荷重を加え被膜の破壊時の弾性波を検知す
る装置と、被膜の破壊時の弾性波エネルギーを測定する
計測装置と、該計測装置からの信号を解析する演算装置
からなる評価装置において、被膜の破壊時の弾性波エネ
ルギーとして弾性波の振幅の自乗が測定され、弾性波の
振幅の自乗の総和を弾性波の発生数で割った値（Ｅ／
Ｎ）を被膜の靭性値の尺度とすることを特徴とする被膜
の機械的特性の評価装置を提供する。Further, an indenter is brought into contact with a test piece having a film formed on its surface to move the test piece in one direction, and a continuously increasing load is applied to the indenter to detect an elastic wave when the film is broken. When a measuring device for measuring the elastic Namie energy at break of the coating, in the evaluation apparatus comprising a computing device for analyzing the signal from the measuring device, acoustic wave energy at break of the coating
The square of the amplitude of the elastic wave is measured as
A value obtained by dividing the sum of squared amplitudes by the number of elastic waves generated (E /
Provided is an apparatus for evaluating the mechanical properties of a coating, characterized in that N) is a measure of the toughness value of the coating.
【００１４】靭性値未知の試料の靭性値は、前記Ｅ／Ｎ
値と、圧子押し込み法により求めた靭性値の対応関係を
調べ、検量線を作成することにより、被膜の破壊時の弾
性波エネルギーから直接得ることができる。The toughness value of a sample whose toughness value is unknown is the above-mentioned E / N.
Value and the toughness value obtained by the indentation method
By investigating and creating a calibration curve, it is possible to
It can be obtained directly from the sex wave energy.
【００１５】本発明で評価される厚膜は、主に基板にペ
ーストを塗布し、その後に焼成して作製するペースト
膜、あるいはゾルゲル法といわれる方法により作製され
た膜が含まれる。また、薄膜には真空蒸着やスパッタリ
ングあるいはイオンプレーティングにより作製された膜
が含まれる。The thick film evaluated in the present invention mainly includes a paste film prepared by applying a paste on a substrate and then firing, or a film prepared by a method called a sol-gel method. Further, the thin film includes a film produced by vacuum vapor deposition, sputtering or ion plating.
【００１６】[0016]
【作用】本評価方法にて使用される装置には特開平０１
−３１６６３２にて開示した装置を利用できる。The apparatus used in this evaluation method is disclosed in
The device disclosed in −316632 can be used.
【００１７】本発明での評価方法では、上記装置から得
られた弾性波の発生数、弾性波の振幅分布、弾性波の振
幅値の総和等の情報の中で、弾性波の振幅の自乗を弾性
波エネルギーとし、弾性波エネルギーの総和を弾性波の
発生数で割った値（Ｅ／Ｎ）を靭性値の尺度とするもの
である。すなわち、破壊１回当たりに放出される平均エ
ネルギ−を求めて、被膜の靱性値の評価値（Ｅ／Ｎ）と
する。In the evaluation method according to the present invention, the square of the amplitude of the elastic wave is included in the information such as the number of generated elastic waves, the amplitude distribution of the elastic waves, and the total sum of the amplitude values of the elastic waves obtained from the above apparatus. The elastic wave energy is used, and a value (E / N) obtained by dividing the total sum of elastic wave energy by the number of elastic waves generated is used as a scale of the toughness value. That is, the average energy released per fracture is determined and used as the evaluation value (E / N) of the toughness value of the coating.
【００１８】以上により、本発明による評価を行うと、
膜に機械的な力が加わって破壊が生じる際に放出される
エネルギーの大きさを評価することができる。When the evaluation according to the present invention is performed as described above,
The amount of energy released when mechanical forces are applied to the membrane to cause rupture can be evaluated.
【００１９】すなわち、破壊の形態などにより異なるこ
とがあるが、同種の膜の間では、破壊一回当りに放出さ
れるエネルギーの大きさは、靭性値と相関関係が成立す
ることを見いだされた。具体的には、Ｅ／Ｎ値は、薄膜
では、靱性値の大きいものでは小さくなり、靱性値の小
さいものでは大きくなる傾向があり、逆に厚膜では、靱
性値の大きいものでは大きくなり、靱性値の小さいもの
では小さくなる傾向がある。いずれにせよ、同種の被膜
について、圧子押し込み法により求めた靭性値とＥ／Ｎ
の対応関係を調べ、検量線を作成することにより、靭性
値未知の試料の靭性値を直接得ることができるようにな
る。That is, although it may vary depending on the form of fracture, it has been found that the magnitude of the energy released per fracture is correlated with the toughness value between films of the same type. . Specifically, the E / N value tends to decrease with a large toughness value in a thin film and increase with a small toughness value, and conversely increases in a thick film with a high toughness value. Smaller toughness values tend to be smaller. In any case, for the same kind of coating, the toughness value and E / N obtained by the indentation method
It is possible to directly obtain the toughness value of the sample of which the toughness value is unknown by investigating the correspondence relationship of and making a calibration curve.
【００２０】[0020]
【実施例】次に、実験例を参照して、本発明の好ましい
実施例を以下に説明する。Next, preferred embodiments of the present invention will be described below with reference to experimental examples.
【００２１】［実施例１］アーク放電型イオンプレーテ
イング装置により、約４μｍのＣｒＮ膜をＳＫＨ−１１
高速度鋼上に成膜した。ここでは、基板に印加するバイ
アス電圧を変えることにより、靭性の異なる３種の試料
を得た。[Embodiment 1] A CrN film of about 4 μm was formed on an SKH-11 by an arc discharge type ion plating apparatus.
A film was formed on high speed steel. Here, three types of samples having different toughness were obtained by changing the bias voltage applied to the substrate.
【００２２】この試料の靭性値（Ｋ1cと略称される）を
圧子押し込み法により測定した。靭性値の単位はｋＮｍ
-3/2である。The toughness value (abbreviated as K1c) of this sample was measured by the indenter indentation method. The unit of toughness value is kNm
-3/2 .
【００２３】次にこの試料を図３の測定機により評価を
行った。密着力の尺度である臨界荷重としては、どの試
料も約４０（Ｎ）となった。Next, this sample was evaluated by the measuring machine shown in FIG. The critical load, which is a measure of adhesion, was about 40 (N) for all samples.
【００２４】弾性波の解析では、靭性値の大きな試料で
は破壊により放出される全エネルギー（Ｅ）及び破壊の
回数（Ｎ）は小さくなる傾向を示した。ここで、ＥをＮ
で割った破壊当たりのエネルギ−Ｅ／Ｎと靭性値Ｋ1cの
関係を図１に示す。Ｅ／ＮとＫ1cの対数との間には直線
関係がみられた。すなわち、Ｋ1cが１．７×１０+6、
２．０×１０+6、３．３×１０+6のときＥ／Ｎはそれぞ
れ６０、９３、１６６であった。The analysis of elastic waves showed that the total energy (E) released by fracture and the number of fractures (N) tended to be smaller in samples having large toughness values. Where E is N
The relationship between the energy E / N per fracture divided by and the toughness value K1c is shown in FIG. A linear relationship was found between E / N and the logarithm of K1c. That is, K1c is 1.7 × 10 +6 ,
At 2.0 × 10 +6 and 3.3 × 10 +6 , the E / Ns were 60, 93 and 166, respectively.
【００２５】［実施例２］鉛珪酸ガラスにＲｕＯ2 ある
いはＰｂ2 Ｒｕ2 Ｏ6.5 を分散させた抵抗ペーストにお
いて、ガラス：ＲｕＯ2 あるいはＰｂ2 Ｒｕ2 Ｏ6.5 の
比率を変えた抵抗ペーストを用い、ペーストを塗布、焼
成することにより、５種の厚膜を作製した。[Example 2] In a resistance paste in which RuO 2 or Pb 2 Ru 2 O 6.5 was dispersed in lead silicate glass, a resistance paste in which the ratio of glass: RuO 2 or Pb 2 Ru 2 O 6.5 was changed was used. Five kinds of thick films were prepared by applying and firing the paste.
【００２６】これらの厚膜について、圧子押し込み法に
より靱性値を測定した。次に、本発明の装置により、厚
膜に０（Ｎ）から１０（Ｎ）までの荷重を掛けて、スク
ラッチし、厚膜を破壊し、その時の弾性波を測定解析し
た。厚膜の破壊により放出された全エネルギ−を破壊の
数で割った値、すなわちＥ／Ｎを演算した。The toughness values of these thick films were measured by the indenter indentation method. Next, with the device of the present invention, a load of 0 (N) to 10 (N) was applied to the thick film to scratch the thick film, the thick film was broken, and the elastic wave at that time was measured and analyzed. A value obtained by dividing the total energy released by breaking the thick film by the number of breaking, that is, E / N was calculated.
【００２７】図２に、圧子押し込み法による靱性値とＥ
／Ｎ値との関係を示す。この図のように、Ｅ／Ｎ値は厚
膜の靱性値と相関関係にあることが示された。FIG. 2 shows the toughness value and E by the indenter indentation method.
The relationship with the / N value is shown. As shown in this figure, the E / N value was shown to be correlated with the toughness value of the thick film.
【００２８】なお、この測定に掛かった時間は約５分で
あり、圧子押し込み法では、１つの資料について約３０
分掛かるのに比べて、大幅な短縮であった。It should be noted that the time required for this measurement is about 5 minutes, and in the indenter pushing method, it is about 30 for one material.
It was a great reduction compared to the time it took.
【００２９】[0029]
【発明の効果】本発明によれば、被膜の靭性値を迅速に
測定することができ、また測定の値についても個人差が
なくなり、より信頼性の高い評価値が得られる。According to the present invention, the toughness value of the coating can be measured quickly, and the measured value has no individual difference, and a more reliable evaluation value can be obtained.
【図１】本発明を薄膜に適用した実施例のＥ／Ｎ値と圧
子押し込み法による靭性値の相関を示すグラフである。FIG. 1 is a graph showing a correlation between an E / N value and a toughness value by an indenter indentation method in an example in which the present invention is applied to a thin film.
【図２】本発明を厚膜に適用した実施例のＥ／Ｎ値と圧
子押し込み法による靭性値の相関を示すグラフである。FIG. 2 is a graph showing a correlation between an E / N value and a toughness value by an indenter indentation method in an example in which the present invention is applied to a thick film.
【図３】本発明に使用しうる評価装置の一例の模式図で
ある。FIG. 3 is a schematic diagram of an example of an evaluation device that can be used in the present invention.
１ スクラッチ試験本体 ２ ステージ ３ 圧子 ４ 固定レバー ５ 調節器 ６ ＡＥセンサー ７ ロードセル ８ ロードセル増幅器 ９ ＡＥ増幅器 １０ Ｘ−Ｙレコーダ １１ ＡＥ信号計測装置 １２ インターフェース １３ コンピュータ ａ 試料 1 Scratch test main body 2 Stage 3 Indenter 4 Fixed lever 5 Regulator 6 AE sensor 7 Load cell 8 Load cell amplifier 9 AE amplifier 10 XY recorder 11 AE signal measuring device 12 Interface 13 Computer a Sample
Claims (4)
触させて試験片を一方向に移動させ、該圧子に連続的にMove the test piece in one direction by touching it and
増加する荷重を加えて、被膜の破壊時の弾性波を検知Detects elastic waves when the coating breaks by applying increasing load
し、被膜の破壊時の弾性波エネルギーを測定することにAnd to measure elastic wave energy at the time of film destruction
より被膜の靭性値を評価する方法において、被膜の破壊In the method of evaluating the toughness value of the coating, the destruction of the coating
時の弾性波エネルギーとして弾性波の振幅の自乗が測定The square of the elastic wave amplitude is measured as the elastic wave energy
され、弾性波の振幅の自乗の総和を弾性波の発生数で割Then, the sum of the squares of the elastic wave amplitudes is divided by the number of elastic wave generations.
った値（Ｅ／Ｎ）を被膜の靭性値の尺度とすることを特The measured value (E / N) is used as a measure of the toughness value of the coating.
徴とする被膜の機械的特性の評価方法。Evaluation method of mechanical properties of coating film.
法。2. The evaluation method according to claim 1, wherein the coating film is a thick film.
法。3. The evaluation method according to claim 1, wherein the coating film is a thin film.
触させて試験片を一方向に移動させ、該圧子に連続的にMove the test piece in one direction by touching it and
増加する荷重を加え被膜の破壊時の弾性波を検知する装A device that detects elastic waves when the coating breaks under increasing load.
置と、被膜の破壊時の弾性波エネルギーを測定する計測And measurement to measure elastic wave energy when the coating breaks
装置と、該計測装置からの信号を解析する演算装置からFrom the device and the arithmetic device that analyzes the signal from the measuring device
なる評価装置において、被膜の破壊時の弾性波エネルギOf the evaluation device, the elastic wave energy at the time of the destruction of the film
ーとして弾性波の振幅の自乗が測定され、弾性波の振幅The square of the amplitude of the elastic wave is measured as
の自乗の総和を弾性波の発生数で割った値（Ｅ／Ｎ）をThe value (E / N) obtained by dividing the sum of squares of by the number of elastic waves generated
被膜の靭性値の尺度とすることを特徴とする被膜の機械Coating machine characterized by being a measure of coating toughness
的特性の評価装置。Evaluation device for physical characteristics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3304117A JP2522131B2 (en) | 1991-10-23 | 1991-10-23 | Method and apparatus for evaluating mechanical properties of coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3304117A JP2522131B2 (en) | 1991-10-23 | 1991-10-23 | Method and apparatus for evaluating mechanical properties of coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05118974A JPH05118974A (en) | 1993-05-14 |
| JP2522131B2 true JP2522131B2 (en) | 1996-08-07 |
Family
ID=17929239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3304117A Expired - Lifetime JP2522131B2 (en) | 1991-10-23 | 1991-10-23 | Method and apparatus for evaluating mechanical properties of coating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2522131B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5070146B2 (en) * | 2008-06-12 | 2012-11-07 | 株式会社レスカ | Test method and test apparatus |
| US8322217B2 (en) * | 2010-04-06 | 2012-12-04 | Varel Europe S.A.S. | Acoustic emission toughness testing for PDC, PCBN, or other hard or superhard material inserts |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6174829A (en) * | 1984-09-19 | 1986-04-17 | Nitto Electric Ind Co Ltd | Manufacture of anisotropic-conductive sheet |
| JPH0625724B2 (en) * | 1986-03-31 | 1994-04-06 | 株式会社島津製作所 | Ultra-small material testing equipment |
| JPH0612320B2 (en) * | 1988-06-17 | 1994-02-16 | 住友金属鉱山株式会社 | Device and method for evaluating mechanical properties of thin film |
-
1991
- 1991-10-23 JP JP3304117A patent/JP2522131B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05118974A (en) | 1993-05-14 |
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