JP2521154Y2 - 真空中磁気浮上搬送装置の熱シールド装置 - Google Patents

真空中磁気浮上搬送装置の熱シールド装置

Info

Publication number
JP2521154Y2
JP2521154Y2 JP8304890U JP8304890U JP2521154Y2 JP 2521154 Y2 JP2521154 Y2 JP 2521154Y2 JP 8304890 U JP8304890 U JP 8304890U JP 8304890 U JP8304890 U JP 8304890U JP 2521154 Y2 JP2521154 Y2 JP 2521154Y2
Authority
JP
Japan
Prior art keywords
magnetic levitation
heat shield
heat
levitation body
heat source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8304890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440030U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
一郎 盛山
宗芳 西辻
収 藤木
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP8304890U priority Critical patent/JP2521154Y2/ja
Publication of JPH0440030U publication Critical patent/JPH0440030U/ja
Application granted granted Critical
Publication of JP2521154Y2 publication Critical patent/JP2521154Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Thermal Insulation (AREA)
JP8304890U 1990-08-04 1990-08-04 真空中磁気浮上搬送装置の熱シールド装置 Expired - Lifetime JP2521154Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8304890U JP2521154Y2 (ja) 1990-08-04 1990-08-04 真空中磁気浮上搬送装置の熱シールド装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8304890U JP2521154Y2 (ja) 1990-08-04 1990-08-04 真空中磁気浮上搬送装置の熱シールド装置

Publications (2)

Publication Number Publication Date
JPH0440030U JPH0440030U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-06
JP2521154Y2 true JP2521154Y2 (ja) 1996-12-25

Family

ID=31630394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8304890U Expired - Lifetime JP2521154Y2 (ja) 1990-08-04 1990-08-04 真空中磁気浮上搬送装置の熱シールド装置

Country Status (1)

Country Link
JP (1) JP2521154Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017224644A (ja) * 2016-06-13 2017-12-21 株式会社アルバック 搬送装置
JP6814570B2 (ja) * 2016-08-18 2021-01-20 株式会社アルバック 搬送装置
CN114518006A (zh) * 2020-11-19 2022-05-20 中国航天科工飞航技术研究院(中国航天海鹰机电技术研究院) 管道壁面套管式冷却循环散热系统及磁悬浮运输系统

Also Published As

Publication number Publication date
JPH0440030U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-06

Similar Documents

Publication Publication Date Title
JPH10120171A (ja) 真空処理システム内で基板を搬送するための装置
US4624617A (en) Linear induction semiconductor wafer transportation apparatus
US5309049A (en) Alternating current magnetic levitation transport system
JP2521154Y2 (ja) 真空中磁気浮上搬送装置の熱シールド装置
US4676699A (en) Semiconductor wafer guides
US7581639B2 (en) Photo mask retainer for photo mask delivery box
JPH04286537A (ja) 搬送装置
JPS63261850A (ja) 縦型x−yステ−ジ
JP2775336B2 (ja) 真空中磁気浮上搬送装置の浮上体冷却装置
JPH06179524A (ja) 磁気浮上真空搬送装置
JP3988225B2 (ja) 搬送装置
JP2705785B2 (ja) ステージ装置
JP2005303297A (ja) 基板保持部材、基板保持方法、及び露光装置
JPH07117849A (ja) 磁気浮上搬送装置
JPS63302755A (ja) リニアモ−タ−
JPH0638427Y2 (ja) 磁気浮上型ウエハ搬送装置
JP2003168716A (ja) 部品搬送装置及びこれを用いた部品保管装置
JP2562958Y2 (ja) 磁気浮上搬送装置の可動アーム装置
JPS63299760A (ja) 搬送装置および半導体製造装置
JP7742562B2 (ja) 誘導加熱調理器
JP2542238Y2 (ja) 真空中に於ける加熱ワークの搬送装置
JPH01315205A (ja) 真空処理炉の搬送装置
TWI247201B (en) Stage device and exposure system
JP2025002723A (ja) フレームガイドユニット及び搬送機構
JPS63202204A (ja) 磁気浮上型搬送装置

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term