JP2519883B2 - MIM structure - Google Patents
MIM structureInfo
- Publication number
- JP2519883B2 JP2519883B2 JP60004574A JP457485A JP2519883B2 JP 2519883 B2 JP2519883 B2 JP 2519883B2 JP 60004574 A JP60004574 A JP 60004574A JP 457485 A JP457485 A JP 457485A JP 2519883 B2 JP2519883 B2 JP 2519883B2
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- pixel electrode
- pixel
- electrically connected
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004973 liquid crystal related substance Substances 0.000 claims description 8
- 239000011159 matrix material Substances 0.000 claims description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、導電層−絶縁層−導電層構造の非線形素子
を用いた液晶表示体に関する。TECHNICAL FIELD The present invention relates to a liquid crystal display using a nonlinear element having a conductive layer-insulating layer-conductive layer structure.
［従来の技術］ 従来の液晶表示体における導電層−絶縁層−導電層構
造を持つ非線形素子は、例えば、論文「The Optimizati
on of Metal-Insulator-Metal Nonlinear Divices for
Use in Multiplexed Liquid Crystal Displays」 IEEE
TRANSACTIONS ON ELECTRON DEVICES, VOL.ED-28, No.6,
JUNE 1981に記載されており、第２図に示す構造であ
る。第２図において、５は画素用配線であり、２は該画
素用配線５の表面に形成された絶縁層である。導電層４
の両端は画素電極３と接しており、導電層４の画素電極
３と接する辺の領域が、該導電層４の該絶縁層２と接す
る辺の領域と同じ広さである。[Prior Art] A non-linear element having a conductive layer-insulating layer-conductive layer structure in a conventional liquid crystal display is described in, for example, the paper "The Optimizati.
on of Metal-Insulator-Metal Nonlinear Divices for
Use in Multiplexed Liquid Crystal Displays "IEEE
TRANSACTIONS ON ELECTRON DEVICES, VOL.ED-28, No.6,
It is described in JUNE 1981 and has the structure shown in FIG. In FIG. 2, reference numeral 5 is a pixel wiring, and 2 is an insulating layer formed on the surface of the pixel wiring 5. Conductive layer 4
Both ends of are in contact with the pixel electrode 3, and the region of the side of the conductive layer 4 in contact with the pixel electrode 3 is as large as the region of the side of the conductive layer 4 in contact with the insulating layer 2.
［発明が解決しようとする課題］ ところが、前述の従来技術では、画素電極３のパター
ンを形成する際、導電層４と画素電極３が接する部分に
おいて断線を生じ、画素電極と非線形素子との導通不良
を引き起こす場合が多く、歩留り上の問題となってい
た。導電層４を全体的に大きくすれば上記の問題が解決
できるが、非線形素子部分の面積はより小さくなければ
十分な画像特性を得ることはできない。[Problems to be Solved by the Invention] However, in the above-described conventional technique, when the pattern of the pixel electrode 3 is formed, a disconnection occurs at a portion where the conductive layer 4 and the pixel electrode 3 are in contact with each other, so that the pixel electrode and the nonlinear element are electrically connected. This often causes defects, which has been a problem in yield. Although the above problem can be solved by enlarging the conductive layer 4 as a whole, sufficient image characteristics cannot be obtained unless the area of the nonlinear element portion is smaller.
そこで、本発明は、非線形素子の面積を従来と変化さ
せることなく、非線形素子と画素電極との断線を極力抑
えるような構造を提供するものであり、前述のような問
題点を解決することを目的としている。Therefore, the present invention provides a structure in which the disconnection between the non-linear element and the pixel electrode is suppressed as much as possible without changing the area of the non-linear element from the conventional one, and it is possible to solve the above problems. Has an aim.
［課題を解決するための手段］ 本発明は、画素用配線と、マトリクス状の画素電極と
が、第１導電層−絶縁層−第２導電層構造の非線形素子
を介して電気的に接続されてなる液晶表示体において、
前記第１導電層は、その一端が前記画素用配線に電気的
に接続され、他端が前記画素電極側に突出してなり、前
記第２導電層は、前記絶縁層を介して前記第１導電層の
突出した部分と交差するように形成され、かつ前記画素
電極に電気的に接続されてなり、前記第２導電層の配線
幅は、前記第１導電層との交差部の幅よりも前記画素電
極の端部に接する部分の幅の方が広くなるように、前記
第１導電層との交差部と前記画素電極の端部との間で切
り替わっていることを特徴とする。[Means for Solving the Problems] In the present invention, the pixel wiring and the pixel electrode in a matrix are electrically connected to each other through a nonlinear element having a first conductive layer-insulating layer-second conductive layer structure. In the liquid crystal display that consists of
The first conductive layer has one end electrically connected to the pixel wiring and the other end protruding toward the pixel electrode side, and the second conductive layer has the first conductive layer via the insulating layer. The wiring width of the second conductive layer is formed so as to intersect the projecting portion of the layer and electrically connected to the pixel electrode, and the wiring width of the second conductive layer is larger than the width of the intersection with the first conductive layer. It is characterized in that switching is performed between the intersection with the first conductive layer and the end of the pixel electrode so that the width of the portion in contact with the end of the pixel electrode becomes wider.
［作用］ 本発明の上記の構成によれば、非線形素子の面積を従
来と変化させることなく、非線形素子と画素電極との断
線を抑えることができ、歩留りを著しく向上させること
ができる。[Operation] According to the above configuration of the present invention, it is possible to suppress disconnection between the non-linear element and the pixel electrode without changing the area of the non-linear element from the conventional one, and it is possible to significantly improve the yield.
［実施例］ 第１図（ａ）に本発明の実施例の平面図、（ｂ）に第
１図（ａ）の破線部分における断面図を示す。図中、４
及び５はそれぞれ導電層及び画素用配線であり、通常は
tTa、Cr等の金属が用いられ、画素用配線５上に形成さ
れた絶縁層２には、画素用配線５の酸化物が多く用いら
れる。さらに、画素電極３には例えば、ITO、酸化スズ
等が用いられる。[Embodiment] FIG. 1 (a) is a plan view of an embodiment of the present invention, and FIG. 1 (b) is a sectional view taken along the broken line in FIG. 1 (a). In the figure, 4
And 5 are conductive layers and pixel wirings, respectively,
A metal such as tTa or Cr is used, and an oxide of the pixel wiring 5 is often used for the insulating layer 2 formed on the pixel wiring 5. Furthermore, ITO, tin oxide, or the like is used for the pixel electrode 3, for example.
第１図において、画素電極３と導電層４が接する部分
の幅は、従来と比較すると約２倍となっており、導電層
４の画素電極３の端部と接する領域が広がっている。従
って、導電層４と画素電極３が接する部分で断線が生じ
たとしても、完全に導通不良になりにくくなった。この
ような構成により、前述のような原因で従来0.1％発生
していた断線を約0.001％まで改善することができ、歩
留り向上に大きく寄与した。In FIG. 1, the width of the portion where the pixel electrode 3 and the conductive layer 4 are in contact with each other is about twice that of the conventional case, and the region of the conductive layer 4 in contact with the end of the pixel electrode 3 is widened. Therefore, even if a disconnection occurs at the portion where the conductive layer 4 and the pixel electrode 3 are in contact with each other, it is less likely that the conduction failure will occur completely. With such a configuration, it is possible to reduce the wire breakage that had occurred in the past by 0.1% to about 0.001%, which greatly contributed to the improvement in yield.
また、第３図は本発明のよる他の実施例を示す図であ
り、第１図の構成に加えて、さらに導電層４の画素電極
３の端部と接する領域が広がるように、画素電極３の形
状を変形したものである。FIG. 3 is a diagram showing another embodiment of the present invention. In addition to the configuration of FIG. 1, the pixel electrode 3 is formed so that the region of the conductive layer 4 in contact with the end of the pixel electrode 3 is further expanded. This is a modification of the shape of 3.
［発明の効果］ 以上説明した通り、本発明は、画素用配線と、マトリ
クス状の画素電極とが、第１導電層−絶縁層−第２導電
層構造の非線形素子を介して電気的に接続されてなる液
晶表示体において、前記第１導電層は、その一端が前記
画素用配線に電気的に接続され、他端が前記画素電極側
に突出してなり、前記第２導電層は、前記絶縁層を介し
て前記第１導電層の突出した部分と交差するように形成
され、かつ前記画素電極に電気的に接続されてなり、前
記第２導電層の配線幅は、前記第１導電層との交差部の
幅よりも前記画素電極の端部に接する部分の幅の方が広
くなるように、前記第１導電層との交差部と前記画素電
極の端部との間で切り替わっていることにより、非線形
素子の導電層と画素電極とが接する部分で、一部に断線
が生じてもこれをカバーし、なおかつ非線形素子部分の
面積は従来通りであるから、素子特性に変化は生じな
い。EFFECTS OF THE INVENTION As described above, according to the present invention, the pixel wiring and the matrix-shaped pixel electrode are electrically connected to each other through the nonlinear element having the first conductive layer-insulating layer-second conductive layer structure. In the liquid crystal display, the first conductive layer has one end electrically connected to the pixel wiring and the other end protruding toward the pixel electrode, and the second conductive layer is the insulating layer. And a wiring width of the second conductive layer, which is formed so as to intersect the protruding portion of the first conductive layer via a layer and is electrically connected to the pixel electrode. Are switched between the intersection with the first conductive layer and the end of the pixel electrode so that the width of the portion in contact with the end of the pixel electrode is wider than the width of the intersection. This causes disconnection at a part where the conductive layer of the nonlinear element and the pixel electrode are in contact with each other. However, the area of the non-linear element portion is the same as the conventional one, so that the element characteristics do not change.
このように、本発明によれば、素子特性が変化をさせ
ることなく、非線形素子と画素電極との間に断線がな
く、画素欠陥が非常に少ない液晶表示体を得ることがで
き、従って歩留り向上に大きく貢献することができると
いう効果を有する。As described above, according to the present invention, it is possible to obtain a liquid crystal display body in which the element characteristics do not change, there is no disconnection between the non-linear element and the pixel electrode, and the number of pixel defects is very small. Therefore, the yield is improved. It has the effect of being able to greatly contribute to
第１図は本発明の非線形素子構造の一実施例を示す図で
あり、（ａ）は平面図、（ｂ）は（ａ）の破線部分にお
ける断面図である。 第２図は従来の非線形素子構造を示す平面図である。 第３図は本発明による非線形素子構造の他の実施例を示
す図である。 １……非線形素子部分 ２……絶縁層 ３……画素電極 ４……導電層 ５……画素用配線1A and 1B are views showing an embodiment of a non-linear element structure of the present invention, FIG. 1A is a plan view, and FIG. FIG. 2 is a plan view showing a conventional non-linear element structure. FIG. 3 is a diagram showing another embodiment of the non-linear element structure according to the present invention. 1 ... Non-linear element part 2 ... Insulating layer 3 ... Pixel electrode 4 ... Conductive layer 5 ... Pixel wiring
Claims (1)
が、第１導電層−絶縁層−第２導電層構造の非線形素子
を介して電気的に接続されてなる液晶表示体において、 前記第１導電層は、その一端が前記画素用配線に電気的
に接続され、他端が前記画素電極側に突出してなり、 前記第２導電層は、前記絶縁層を介して前記第１導電層
の突出した部分と交差するように形成され、かつ前記画
素電極に電気的に接続されてなり、 前記第２導電層の配線幅は、前記第１導電層との交差部
の幅よりも前記画素電極の端部に接する部分の幅の方が
広くなるように、前記第１導電層との交差部と前記画素
電極の端部との間で切り替わっていることを特徴とする
液晶表示体。1. A liquid crystal display body in which pixel wirings and pixel electrodes in a matrix are electrically connected to each other through a non-linear element having a first conductive layer-insulating layer-second conductive layer structure. The first conductive layer has one end electrically connected to the pixel wiring and the other end protruding toward the pixel electrode side, and the second conductive layer is the first conductive layer via the insulating layer. Is formed so as to intersect with a protruding portion of the pixel and electrically connected to the pixel electrode, and a wiring width of the second conductive layer is larger than a width of a crossing portion with the first conductive layer. A liquid crystal display body, wherein switching is performed between an intersection of the first conductive layer and an end of the pixel electrode so that a width of a portion in contact with an end of the electrode becomes wider.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60004574A JP2519883B2 (en) | 1985-01-14 | 1985-01-14 | MIM structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60004574A JP2519883B2 (en) | 1985-01-14 | 1985-01-14 | MIM structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61163677A JPS61163677A (en) | 1986-07-24 |
| JP2519883B2 true JP2519883B2 (en) | 1996-07-31 |
Family
ID=11587803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60004574A Expired - Lifetime JP2519883B2 (en) | 1985-01-14 | 1985-01-14 | MIM structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2519883B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2600731B2 (en) * | 1987-12-10 | 1997-04-16 | セイコーエプソン株式会社 | Liquid crystal device |
-
1985
- 1985-01-14 JP JP60004574A patent/JP2519883B2/en not_active Expired - Lifetime
Non-Patent Citations (1)
| Title |
|---|
| ＪａｐａｎＤｉｓｐｌａｙ‘８３．Ｐｒｏｃ．ｏｆｔｈｅ３ｒｄＩｎｔ’１ＤｉｓｐｌａｙＲｅｓ．Ｃｏｎｆ．（１９８３）Ｐ．４０４〜Ｐ．４０７ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61163677A (en) | 1986-07-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |