JP2519505Y2 - 結晶成長装置 - Google Patents

結晶成長装置

Info

Publication number
JP2519505Y2
JP2519505Y2 JP532790U JP532790U JP2519505Y2 JP 2519505 Y2 JP2519505 Y2 JP 2519505Y2 JP 532790 U JP532790 U JP 532790U JP 532790 U JP532790 U JP 532790U JP 2519505 Y2 JP2519505 Y2 JP 2519505Y2
Authority
JP
Japan
Prior art keywords
heater
crucible
graphite
electrode
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP532790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0396355U (cs
Inventor
薫 倉持
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Sitix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Sitix Corp filed Critical Sumitomo Sitix Corp
Priority to JP532790U priority Critical patent/JP2519505Y2/ja
Publication of JPH0396355U publication Critical patent/JPH0396355U/ja
Application granted granted Critical
Publication of JP2519505Y2 publication Critical patent/JP2519505Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP532790U 1990-01-23 1990-01-23 結晶成長装置 Expired - Lifetime JP2519505Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP532790U JP2519505Y2 (ja) 1990-01-23 1990-01-23 結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP532790U JP2519505Y2 (ja) 1990-01-23 1990-01-23 結晶成長装置

Publications (2)

Publication Number Publication Date
JPH0396355U JPH0396355U (cs) 1991-10-02
JP2519505Y2 true JP2519505Y2 (ja) 1996-12-04

Family

ID=31509042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP532790U Expired - Lifetime JP2519505Y2 (ja) 1990-01-23 1990-01-23 結晶成長装置

Country Status (1)

Country Link
JP (1) JP2519505Y2 (cs)

Also Published As

Publication number Publication date
JPH0396355U (cs) 1991-10-02

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