JP2517871Y2 - 荷電粒子検出用プローブの駆動機構 - Google Patents

荷電粒子検出用プローブの駆動機構

Info

Publication number
JP2517871Y2
JP2517871Y2 JP14600489U JP14600489U JP2517871Y2 JP 2517871 Y2 JP2517871 Y2 JP 2517871Y2 JP 14600489 U JP14600489 U JP 14600489U JP 14600489 U JP14600489 U JP 14600489U JP 2517871 Y2 JP2517871 Y2 JP 2517871Y2
Authority
JP
Japan
Prior art keywords
probe
guide pipe
gear
drive mechanism
rack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14600489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0384548U (https=
Inventor
始三 斎藤
和男 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP14600489U priority Critical patent/JP2517871Y2/ja
Publication of JPH0384548U publication Critical patent/JPH0384548U/ja
Application granted granted Critical
Publication of JP2517871Y2 publication Critical patent/JP2517871Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP14600489U 1989-12-19 1989-12-19 荷電粒子検出用プローブの駆動機構 Expired - Lifetime JP2517871Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14600489U JP2517871Y2 (ja) 1989-12-19 1989-12-19 荷電粒子検出用プローブの駆動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14600489U JP2517871Y2 (ja) 1989-12-19 1989-12-19 荷電粒子検出用プローブの駆動機構

Publications (2)

Publication Number Publication Date
JPH0384548U JPH0384548U (https=) 1991-08-27
JP2517871Y2 true JP2517871Y2 (ja) 1996-11-20

Family

ID=31692618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14600489U Expired - Lifetime JP2517871Y2 (ja) 1989-12-19 1989-12-19 荷電粒子検出用プローブの駆動機構

Country Status (1)

Country Link
JP (1) JP2517871Y2 (https=)

Also Published As

Publication number Publication date
JPH0384548U (https=) 1991-08-27

Similar Documents

Publication Publication Date Title
JPH01187441A (ja) Ｘ線回折装置の三軸回転ゴニオメータ
JP2517871Y2 (ja) 荷電粒子検出用プローブの駆動機構
Deslattes Two‐Crystal, Vacuum Monochromator
US3728541A (en) X-ray diffractometer
CN115308787A (zh) 一种轨道式x射线管检测辐量装置
US20230095065A1 (en) Absolute encoder
JP2743212B2 (ja) 石英治具の測定装置
US2418903A (en) Electron optical instrument with adjustable specimen support
JPS58144474A (ja) スパツタリング装置
EP0120535B1 (en) Beam exposure apparatus comprising a diaphragm drive for an object carrier
JP2000258366A (ja) 微小部ｘ線回折装置
CN211013246U (zh) 一种渐变镜分光仪定向定点检测装置
JPH055842A (ja) 顕微鏡用試料ホルダーの位置決め装置
CN112683200A (zh) 一种溅射旋转靶材直线度检验装置
CN220944813U (zh) 一种用于扇形永磁铁氧体的磨夹角检规装置
Anderson et al. Automatic Recording of the Pressure‐Area, Pressure‐Time, and Area‐Time Characteristics of Monomolecular Films
US3263645A (en) Adjusting mechanism
JP2539394Y2 (ja) 表面分析装置
JPH0355059Y2 (https=)
JPH065555A (ja) プラズマ装置
JP2002257643A (ja) Ｘ線応力測定装置
JPH0523571Y2 (https=)
Tribedi et al. A triple axes multiple target holder assembly
JPH05223992A (ja) Ｘ線回折装置用ゴニオメータ
JPH0637316Y2 (ja) Ｘ線回折試料位置調整装置