JP2515879Y2 - 基板支持具 - Google Patents

基板支持具

Info

Publication number
JP2515879Y2
JP2515879Y2 JP1990094882U JP9488290U JP2515879Y2 JP 2515879 Y2 JP2515879 Y2 JP 2515879Y2 JP 1990094882 U JP1990094882 U JP 1990094882U JP 9488290 U JP9488290 U JP 9488290U JP 2515879 Y2 JP2515879 Y2 JP 2515879Y2
Authority
JP
Japan
Prior art keywords
substrate
substrate support
support
moving body
wall surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990094882U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452743U (enrdf_load_stackoverflow
Inventor
保夫 今西
雅巳 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1990094882U priority Critical patent/JP2515879Y2/ja
Publication of JPH0452743U publication Critical patent/JPH0452743U/ja
Application granted granted Critical
Publication of JP2515879Y2 publication Critical patent/JP2515879Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1990094882U 1990-09-10 1990-09-10 基板支持具 Expired - Fee Related JP2515879Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990094882U JP2515879Y2 (ja) 1990-09-10 1990-09-10 基板支持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990094882U JP2515879Y2 (ja) 1990-09-10 1990-09-10 基板支持具

Publications (2)

Publication Number Publication Date
JPH0452743U JPH0452743U (enrdf_load_stackoverflow) 1992-05-06
JP2515879Y2 true JP2515879Y2 (ja) 1996-10-30

Family

ID=31833160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990094882U Expired - Fee Related JP2515879Y2 (ja) 1990-09-10 1990-09-10 基板支持具

Country Status (1)

Country Link
JP (1) JP2515879Y2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63257217A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 熱処理用治具
JPH01100446U (enrdf_load_stackoverflow) * 1987-12-23 1989-07-05
JPH0295244U (enrdf_load_stackoverflow) * 1989-01-13 1990-07-30
JPH081921B2 (ja) * 1990-01-13 1996-01-10 東京エレクトロン株式会社 半導体製造装置

Also Published As

Publication number Publication date
JPH0452743U (enrdf_load_stackoverflow) 1992-05-06

Similar Documents

Publication Publication Date Title
CN1126610C (zh) 半导体自动处理设备和方法
CN113333305B (zh) 基于视觉检测系统的检测设备及使用方法
JP3724478B2 (ja) バックアッププレート昇降装置
US5853532A (en) Wafer ring supply and return device
KR100962362B1 (ko) 기판세정장치
JP2515879Y2 (ja) 基板支持具
JPH07335718A (ja) ウエハキャリア装置
JP4203164B2 (ja) 金属薄板検査方法及び装置
JP2511728B2 (ja) 基板給排装置
US5603446A (en) Bonding apparatus
JP2884522B2 (ja) ウエハ移し換え装置
KR100527352B1 (ko) 웨이퍼의 손상을 방지하는 웨이퍼 로더
KR102726153B1 (ko) 비전검사장치
JPH1035882A (ja) 板状物の作業位置への非接触連続搬送装置
JPH05286526A (ja) ウエハ移載装置
CN119501304A (zh) 激光加工生产线及其控制方法
KR101179563B1 (ko) 기판처리장치 및 기판처리방법
JPH07232802A (ja) 基板搬送装置
KR100220795B1 (ko) 반도체 리드 검사 장치
JPH0638445B2 (ja) 基板移載装置
JPH05291376A (ja) ウエハ移載装置
JPH0625305Y2 (ja) 融雪瓦製造システムにおける瓦移載装置
CN119703454A (zh) 一种激光加工设备
JP3936015B2 (ja) 静電浮上型搬送装置
JP2504337Y2 (ja) 基板の搬出・搬入装置

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees