JP2515343Y2 - 光導波路型吸光光度計 - Google Patents

光導波路型吸光光度計

Info

Publication number
JP2515343Y2
JP2515343Y2 JP437991U JP437991U JP2515343Y2 JP 2515343 Y2 JP2515343 Y2 JP 2515343Y2 JP 437991 U JP437991 U JP 437991U JP 437991 U JP437991 U JP 437991U JP 2515343 Y2 JP2515343 Y2 JP 2515343Y2
Authority
JP
Japan
Prior art keywords
light
optical waveguide
detection
waveguide type
photodetector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP437991U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0496051U (OSRAM
Inventor
博誠 犬塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP437991U priority Critical patent/JP2515343Y2/ja
Publication of JPH0496051U publication Critical patent/JPH0496051U/ja
Application granted granted Critical
Publication of JP2515343Y2 publication Critical patent/JP2515343Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating Or Analysing Materials By Optical Means (AREA)
JP437991U 1991-01-16 1991-01-16 光導波路型吸光光度計 Expired - Lifetime JP2515343Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP437991U JP2515343Y2 (ja) 1991-01-16 1991-01-16 光導波路型吸光光度計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP437991U JP2515343Y2 (ja) 1991-01-16 1991-01-16 光導波路型吸光光度計

Publications (2)

Publication Number Publication Date
JPH0496051U JPH0496051U (OSRAM) 1992-08-20
JP2515343Y2 true JP2515343Y2 (ja) 1996-10-30

Family

ID=31734129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP437991U Expired - Lifetime JP2515343Y2 (ja) 1991-01-16 1991-01-16 光導波路型吸光光度計

Country Status (1)

Country Link
JP (1) JP2515343Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002168776A (ja) * 2000-12-01 2002-06-14 Advantest Corp 環境モニタ方法及び装置並びに半導体製造装置

Also Published As

Publication number Publication date
JPH0496051U (OSRAM) 1992-08-20

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Effective date: 19960528