JP2514846Y2 - Ｃｖｄエピタキシヤル成長装置用加熱コイル - Google Patents

Ｃｖｄエピタキシヤル成長装置用加熱コイル

Info

Publication number
JP2514846Y2
JP2514846Y2 JP1986181968U JP18196886U JP2514846Y2 JP 2514846 Y2 JP2514846 Y2 JP 2514846Y2 JP 1986181968 U JP1986181968 U JP 1986181968U JP 18196886 U JP18196886 U JP 18196886U JP 2514846 Y2 JP2514846 Y2 JP 2514846Y2
Authority
JP
Japan
Prior art keywords
susceptor
heating coil
reaction tube
coil
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986181968U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6389230U (enrdf_load_stackoverflow
Inventor
公夫 天野
芳男 上野
Original Assignee
日本真空技術 株式会社
高周波熱錬 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術 株式会社, 高周波熱錬 株式会社 filed Critical 日本真空技術 株式会社
Priority to JP1986181968U priority Critical patent/JP2514846Y2/ja
Publication of JPS6389230U publication Critical patent/JPS6389230U/ja
Application granted granted Critical
Publication of JP2514846Y2 publication Critical patent/JP2514846Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Constitution Of High-Frequency Heating (AREA)
  • Chemical Vapour Deposition (AREA)
JP1986181968U 1986-11-28 1986-11-28 Ｃｖｄエピタキシヤル成長装置用加熱コイル Expired - Lifetime JP2514846Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986181968U JP2514846Y2 (ja) 1986-11-28 1986-11-28 Ｃｖｄエピタキシヤル成長装置用加熱コイル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986181968U JP2514846Y2 (ja) 1986-11-28 1986-11-28 Ｃｖｄエピタキシヤル成長装置用加熱コイル

Publications (2)

Publication Number Publication Date
JPS6389230U JPS6389230U (enrdf_load_stackoverflow) 1988-06-10
JP2514846Y2 true JP2514846Y2 (ja) 1996-10-23

Family

ID=31127334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986181968U Expired - Lifetime JP2514846Y2 (ja) 1986-11-28 1986-11-28 Ｃｖｄエピタキシヤル成長装置用加熱コイル

Country Status (1)

Country Link
JP (1) JP2514846Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6389230U (enrdf_load_stackoverflow) 1988-06-10

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