JP2513180Y2 - 縦型ｃｖｄ装置 - Google Patents

縦型ｃｖｄ装置

Info

Publication number
JP2513180Y2
JP2513180Y2 JP1986155207U JP15520786U JP2513180Y2 JP 2513180 Y2 JP2513180 Y2 JP 2513180Y2 JP 1986155207 U JP1986155207 U JP 1986155207U JP 15520786 U JP15520786 U JP 15520786U JP 2513180 Y2 JP2513180 Y2 JP 2513180Y2
Authority
JP
Japan
Prior art keywords
sample
gas
reaction gas
sample stage
wind control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986155207U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6361120U (enExample
Inventor
努 中沢
雄二 古村
文健 三重野
喜久雄 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1986155207U priority Critical patent/JP2513180Y2/ja
Publication of JPS6361120U publication Critical patent/JPS6361120U/ja
Application granted granted Critical
Publication of JP2513180Y2 publication Critical patent/JP2513180Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986155207U 1986-10-09 1986-10-09 縦型ｃｖｄ装置 Expired - Lifetime JP2513180Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986155207U JP2513180Y2 (ja) 1986-10-09 1986-10-09 縦型ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986155207U JP2513180Y2 (ja) 1986-10-09 1986-10-09 縦型ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6361120U JPS6361120U (enExample) 1988-04-22
JP2513180Y2 true JP2513180Y2 (ja) 1996-10-02

Family

ID=31075707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986155207U Expired - Lifetime JP2513180Y2 (ja) 1986-10-09 1986-10-09 縦型ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JP2513180Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207332A (en) * 1981-06-15 1982-12-20 Toshiba Corp Pressure reducing cvd device

Also Published As

Publication number Publication date
JPS6361120U (enExample) 1988-04-22

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