JP2512518B2 - Fluidic flow meter - Google Patents
Fluidic flow meterInfo
- Publication number
- JP2512518B2 JP2512518B2 JP63054631A JP5463188A JP2512518B2 JP 2512518 B2 JP2512518 B2 JP 2512518B2 JP 63054631 A JP63054631 A JP 63054631A JP 5463188 A JP5463188 A JP 5463188A JP 2512518 B2 JP2512518 B2 JP 2512518B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- signal
- flow
- pressure
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 22
- 238000001514 detection method Methods 0.000 claims description 18
- 230000002159 abnormal effect Effects 0.000 claims description 12
- 230000005856 abnormality Effects 0.000 claims description 12
- 238000005192 partition Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
- G01F1/3227—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters using fluidic oscillators
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Geophysics And Detection Of Objects (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、管路縮小部、噴出ノズル及び管路拡大部を
その順に流動方向に連ねて形成し、前記噴出ノズルと管
路拡大部の境界部に、一対の制御ノズルを、前記噴出ノ
ズルの噴出方向に対してほぼ直角方向に向かって、か
つ、相対向して形成し、前記両制御ノズル夫々と前記管
路拡大部の下流側を接続する一対の帰還流路を形成し、
前記噴出ノズルからの噴流の流動方向変化に起因する圧
力変化を検出するセンサーを設けたフルイディック流量
計に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention forms a pipe contracting portion, a jet nozzle, and a pipe expanding portion in that order in the flow direction to form the jet nozzle and the pipe expanding portion. A pair of control nozzles are formed in the boundary portion in a direction substantially perpendicular to the ejection direction of the ejection nozzle, and face each other, and the control nozzles and the downstream side of the conduit enlargement portion are formed. Forming a pair of return channels to connect,
The present invention relates to a fluidic flow meter provided with a sensor that detects a pressure change due to a change in the flow direction of a jet flow from the jet nozzle.
従来、圧力変化検出用センサーにおいて、第2図に示
すように圧力室を1枚の圧電膜(31)で第1圧力室(32
a)と第2圧力室(32b)に区画し、一方の帰還流路(7
a)と第1圧力室(32a)をかつ他方の帰還流路(7b)と
第2圧力室(32b)を各別の導圧路(13a),(13b)で
接続し、圧電膜(31)からの信号により噴出ノズル
(3)からの噴流の流量を測定する流量測定部(33)を
設けていた。Conventionally, in a pressure change detection sensor, as shown in FIG. 2, the pressure chamber is composed of a single piezoelectric film (31) and a first pressure chamber (32).
a) and the second pressure chamber (32b), and one of the return flow paths (7
a) and the first pressure chamber (32a) and the other return flow passage (7b) and the second pressure chamber (32b) are connected by separate pressure guide passages (13a) and (13b), respectively, and the piezoelectric film (31 ), A flow rate measuring section (33) for measuring the flow rate of the jet flow from the jet nozzle (3) is provided.
しかし、地震などに起因するセンサーの振動や輸送流
体の圧力変動によるノイズが圧電膜(31)からの信号に
入り、正確な流量測定ができない事態を生じる危険性が
あり、一層の改良の余地があった。However, there is a risk that noise due to sensor vibrations due to earthquakes and pressure fluctuations in the transport fluid will enter the signal from the piezoelectric film (31), making it impossible to accurately measure the flow rate, and there is room for further improvement. there were.
本発明の目的は、センサーの振動や輸送流体の圧力変
動による測定誤差がほとんど無い正確な流量測定を確実
に実行できるようにし、その上、そのための構成を有効
利用して、地震発生や輸送流体の異常圧力低下などの異
常事態発生を検知できるようにする点にある。An object of the present invention is to make it possible to reliably perform accurate flow rate measurement with almost no measurement error due to vibration of a sensor or pressure fluctuations of a transport fluid, and moreover, effectively utilize the configuration for that to generate an earthquake or transport fluid. It is to be able to detect the occurrence of abnormal situations such as abnormal pressure drop.
本発明の特徴構成は、噴出ノズルからの噴流の流動方
向変化に起因する圧力変化を検出するセンサーにおい
て、圧力室を第1及び第2圧電膜により中央室とその両
側の第1及び第2端部室に区画し、前記噴流の流動方向
変化を生じさせるための帰還流路の一方に接続した第1
導圧路を前記中央室と第1端部室に接続し、前記帰還流
路の他方に接続した第2導圧路を前記第2端部室に接続
し、前記第1端部室に臨む前記第1圧電膜からの第1信
号と、前記第2端部室に臨む前記第2圧電膜からの第2
信号との差信号に基いて前記噴出ノズルからの噴流の流
量を測定する流量検出部を設け、前記第1圧電膜からの
第1信号に基いて異常事態を検出する異常検出部を設け
たことにあり、その作用効果は次の通りである。According to a characteristic configuration of the present invention, in a sensor for detecting a pressure change caused by a change in a flow direction of a jet flow from an ejection nozzle, the pressure chamber is formed by the first and second piezoelectric films and the central chamber and first and second ends on both sides thereof. A first chamber connected to one of the return flow paths for dividing the flow direction of the jet flow
The first pressure passage is connected to the central chamber and the first end chamber, the second pressure passage connected to the other of the return flow passages is connected to the second end chamber, and faces the first end chamber. A first signal from the piezoelectric film and a second signal from the second piezoelectric film facing the second end chamber.
A flow rate detection unit for measuring the flow rate of the jet flow from the ejection nozzle based on a difference signal from the signal, and an abnormality detection unit for detecting an abnormal situation based on the first signal from the first piezoelectric film. And its effects are as follows.
つまり、第1導圧路に接続した中央室と第1端部室に
臨む第1圧電膜からの第1信号の起電力V1は、正常時に
は、輸送流体の圧力変動に伴うセンサーの振動に起因す
る起電力ΔV1となり、地震などの外部振動がセンサーに
加わった時には、外部振動に起因する起電力ΔV2と前記
圧力変動に伴う起電力ΔV1との和になり、第1導圧路の
圧力変動による起電力は発生しない。That is, the electromotive force V 1 of the first signal from the first piezoelectric film facing the central chamber and the first end chamber connected to the first pressure guiding path is normally caused by the vibration of the sensor due to the pressure fluctuation of the transport fluid. to electromotive force [Delta] V 1 becomes, when an external vibration such as an earthquake is applied to the sensor, the sum of the electromotive force [Delta] V 2 due to the external vibration and the electromotive force [Delta] V 1 caused by the pressure fluctuation, the first pressure introduction passage No electromotive force is generated due to pressure fluctuation.
他方、第1導圧路に接続した中央室と第2導圧路に接
続した第2圧電膜からの第2信号の起電力V2は、正常時
には、第1導圧路の圧力P1と第2導圧路の圧力P2の差に
比例した起電力Vpと前記圧力変動に伴う起電力ΔV1との
和になり、外部振動がセンサーに加わった時には、前記
起電力Vp,ΔV1,ΔV2の和になる。On the other hand, the electromotive force V 2 of the second signal from the central chamber connected to the first pressure guiding path and the second piezoelectric film connected to the second pressure guiding path is equal to the pressure P 1 of the first pressure guiding path in the normal state. The sum of the electromotive force Vp proportional to the difference in the pressure P 2 of the second pressure guiding path and the electromotive force ΔV 1 due to the pressure fluctuation, and when external vibration is applied to the sensor, the electromotive force Vp, ΔV 1 , It is the sum of ΔV 2 .
したがって、正常時に流量検出部で検知される起電力
は、第1信号と第2信号の差信号、つまり、 Vp=(Vp+ΔV1)−ΔV1 となり、圧力変動に伴う誤差のほとんどが無い正確な流
量測定を実現できる。Therefore, the electromotive force detected by the flow rate detector during normal operation is the difference signal between the first signal and the second signal, that is, Vp = (Vp + ΔV 1 ) −ΔV 1 , and there is almost no error due to pressure fluctuations. Flow rate measurement can be realized.
また、地震などによる外部振動がセンサーに加わった
時に流量検出部で検知される起電力は、 Vp=(Vp+ΔV1+ΔV2)−(ΔV1+ΔV2) となり、圧力変動及び外部振動に伴う誤差のほとんど無
い正確な流量測定を実現できる。Further, the electromotive force external vibration caused by an earthquake are detected by the flow rate detecting unit when applied to the sensor, Vp = (Vp + ΔV 1 + ΔV 2) - (ΔV 1 + ΔV 2) , and the error caused by the pressure fluctuations and external vibrations It is possible to realize accurate flow rate measurement that is rare.
さらに、異常検出部で検知される起電力は正常時にΔ
V1、地震などの外部振動が加わった時にΔV1+ΔV2、輸
送流体の圧力がΔV3だけ異常低下した時にΔV1−ΔV3と
なるから、異常検出部で検知する起電力に基づいて、地
震発生や輸送流体の異常圧力低下などの異常事態が発生
したか否かを容易確実に検知でき、例えば流体輸送の緊
急遮断などの適切な対策を講じられる。Furthermore, the electromotive force detected by the abnormality detection unit is Δ
V 1 is ΔV 1 + ΔV 2 when an external vibration such as an earthquake is applied, and ΔV 1 −ΔV 3 when the pressure of the transport fluid is abnormally decreased by ΔV 3 , so based on the electromotive force detected by the abnormality detection unit, It is possible to easily and surely detect whether or not an abnormal situation such as an earthquake occurrence or an abnormal pressure drop of the transportation fluid has occurred, and appropriate measures such as an emergency cutoff of fluid transportation can be taken.
その結果、外乱による測定誤差がほとんど無い正確な
流量測定を確実に実行できると共に、異常事態発生を検
知できる、性能面において一段と優れたフルイディック
流量計を提供できるようになった。As a result, it has become possible to provide a fluidic flow meter that is capable of reliably performing accurate flow rate measurement with almost no measurement error due to disturbance, and that is capable of detecting the occurrence of abnormal situations, and that is even more excellent in terms of performance.
次に第1図により実施例を示す。 Next, an embodiment is shown in FIG.
管(1)内に管路縮小部(2)及び噴出ノズル(3)
を形成する一対の第1流路形成部材(4a),(4b)を、
管中心軸芯(P)に対して対称的に配置し、管路縮小部
(2)の作用で噴出ノズル(3)に流体を円滑に導くと
共に、噴出ノズル(3)から管中心軸芯(P)とほぼ平
行に流体を噴出するように構成し、管路拡大部(5)、
一対の制御ノズル(6a),(6b)及び、管路拡大部
(5)の下流側と制御ノズル(6a),(6b)を各別に連
通する一対の帰還流路(7a),(7b)を区画形成する一
対の隔壁(8a),(8b)を管中心軸芯(P)に対して対
称的に配置し、一対の制御ノズル(6a),(6b)を、噴
出ノズル(3)の噴出方向に対してほぼ直角方向に向か
わせると共に相対向させてある。一対の隔壁(9a),
(9b)との協働で一対の排出路(10a),(10b)を形成
する隔壁(11)を、管路拡大部(5)の下流側を遮断す
る状態で設け、両排出路(10a),(10b)の入口を両帰
還流路(7a),(7b)の入口側に各別に連通させてあ
る。In the pipe (1), the pipe passage reducing portion (2) and the jet nozzle (3)
Forming a pair of first flow path forming members (4a), (4b),
The pipe central axis (P) is arranged symmetrically, the fluid is smoothly guided to the jet nozzle (3) by the action of the pipe channel contracting portion (2), and the pipe central axis (from the jet nozzle (3) ( P), so that the fluid is ejected almost in parallel with the pipe expanding portion (5),
A pair of control nozzles (6a), (6b), and a pair of return flow paths (7a), (7b) that communicate the control nozzles (6a), (6b) with the downstream side of the duct expansion part (5) separately. A pair of partition walls (8a) and (8b) for partitioning and forming are defined symmetrically with respect to the pipe center axis (P), and the pair of control nozzles (6a) and (6b) are connected to the ejection nozzle (3). They are directed almost at right angles to the ejection direction and face each other. A pair of partition walls (9a),
A partition wall (11) forming a pair of discharge passages (10a) and (10b) in cooperation with (9b) is provided in a state of blocking the downstream side of the expanded pipe portion (5), and both discharge passages (10a) are provided. ) And (10b) are communicated with the inlets of both return flow paths (7a) and (7b) separately.
つまり、噴出ノズル(3)からの流体噴出が開始され
ると、コアンダ効果によって噴出流体は一方の隔壁(8
a)に沿って流れ、そのためにその隔壁(8a)側に位置
する制御ノズル(6a)に帰還流路(7a)から大きな流体
エネルギーが付与されて、噴出流体が反対側の隔壁(8
b)に沿って流れるようになり、今度は反対側の制御ノ
ズル(6b)からの流体エネルギーによって噴出流体が初
めに沿った隔壁(8a)再び沿って流れるようになり、こ
のようにして、噴出ノズル(3)からの流体が隔壁(8
a),(8b)に対して交互に沿うように構成し、もっ
て、噴出流体量が増大する程短周期で、かつ、定量的相
関のある状態で噴出流体の流動方向が変化するように構
成してある。In other words, when the ejection of the fluid from the ejection nozzle (3) is started, the ejected fluid is discharged by one of the partition walls (8
a), so that a large amount of fluid energy is applied from the return flow path (7a) to the control nozzle (6a) located on the side of the partition wall (8a), so that the jetted fluid is ejected on the opposite side of the partition wall (8a).
b) and then the fluid energy from the opposite control nozzle (6b) causes the jetted fluid to flow again along the original partition (8a), thus The fluid from the nozzle (3) is
A) and (8b) are arranged alternately so that the flow direction of the ejected fluid changes in a shorter period and in a quantitatively correlated state as the ejected fluid amount increases. I am doing it.
管路拡大部(5)における流動方向切換安定化のため
のターゲット(12)を設け、測定流量範囲を例えば都市
ガスの家庭用ガスメータとして必要な150〜3,000l/hと
いうように大にしながら、流量測定における誤差を例え
ば都市ガスの家庭用ガスメータの検出公差内にできるよ
うに構成してある。A target (12) for stabilizing the flow direction switching in the expanded pipe section (5) is provided, and the measured flow rate range is increased to, for example, 150 to 3,000 l / h required as a household gas meter for city gas, The error in the flow rate measurement is configured to be within the detection tolerance of a household gas meter for city gas, for example.
両帰還流路(7a),(7b)に各別に連通させた第1及
び第2導圧路(13a),(13b)を、噴出ノズル(3)か
らの噴流の流動方向変化に起因する圧力変化を検出する
センサー(14)に接続してある。The pressure due to the change in the flow direction of the jet flow from the jet nozzle (3) is applied to the first and second pressure guiding passages (13a) and (13b), which are separately communicated with the both return flow passages (7a) and (7b). It is connected to a sensor (14) that detects changes.
センサー(14)において、圧力室を第1及び第2圧電
膜(15a),(15b)により中央室(16a)とその両側の
第1及び第2端部室(16b),(16c)とに区画し、第1
導圧路(13a)を中央室(16a)と第1端部室(16b)に
接続し、第2導圧路(13b)を第2端部室(16c)に接続
してある。In the sensor (14), the pressure chamber is divided into the central chamber (16a) and the first and second end chambers (16b) and (16c) on both sides thereof by the first and second piezoelectric films (15a) and (15b). And first
The pressure guiding path (13a) is connected to the central chamber (16a) and the first end chamber (16b), and the second pressure guiding path (13b) is connected to the second end chamber (16c).
中央室(16a)と第1端部室(16b)に臨む第1圧電膜
(15a)の表裏夫々からの信号の差信号を第1信号とし
て取出す第1減算回路(17a)、中央室(16a)と第2端
部室(16c)に臨む第2圧電膜(15b)の表裏夫々からの
信号の差信号を第2信号として取出す第2減算回路(17
b)を設け、第1及び第2減算回路(17a),(17b)に
流量検出部(18)を接続し、第1減算回路(17a)に異
常検出部(19)を接続してある。A first subtraction circuit (17a) for extracting as a first signal a difference signal between the front and back surfaces of the first piezoelectric film (15a) facing the central chamber (16a) and the first end chamber (16b), the central chamber (16a) And a second subtraction circuit (17) for taking out a difference signal of signals from the front and back of the second piezoelectric film (15b) facing the second end chamber (16c) as a second signal.
b) is provided, the flow rate detection unit (18) is connected to the first and second subtraction circuits (17a) and (17b), and the abnormality detection unit (19) is connected to the first subtraction circuit (17a).
流量検出部(18)に、第1信号と第2信号の差信号を
取出す第3減算回路(18a)、第3減算回路(18a)から
の正弦波状の波形信号の周波数から流量を算出して表示
する流量検知手段(18b)を設けてある。The flow rate detection unit (18) calculates the flow rate from the frequency of the sinusoidal waveform signal from the third subtraction circuit (18a) and the third subtraction circuit (18a) that extracts the difference signal between the first signal and the second signal. A flow rate detecting means (18b) for displaying is provided.
異常検出部(19)に、第1信号が第1設定器(20a)
による設定強度以上であることの検出に基づいて地震発
生を検知する第1判定手段(19a)、第1信号が第2設
定器(20b)による設定強度以下であることの検出に基
づいて輸送流体の異常圧力低下を検知する第2判定手段
(19b)、第1及び第2判定手段(19a),(19b)から
の情報に基づいて地震発生時及び輸送流体の異常圧力低
下時に遮断弁(21)を自動的に閉じ操作すると共に警報
器(22)を自動的に作動させる出力手段(19c)を設け
てある。The first signal is sent to the abnormality detector (19) as the first setting device (20a).
The first determination means (19a) for detecting the occurrence of an earthquake on the basis of the detection that the intensity is equal to or higher than the set intensity by the, and the transport fluid based on the detection that the first signal is equal to or lower than the intensity set by the second setter (20b) Of the shutoff valve (21) when an earthquake occurs and when the transport fluid has an abnormal pressure drop based on information from the second determining means (19b) for detecting the abnormal pressure drop of the first, second and first determining means (19a), (19b). ) Is automatically closed and an output device (19c) for automatically activating the alarm (22) is provided.
次に別実施例を説明する。 Next, another embodiment will be described.
フルイディック流量計の具体構造は適宜変更自在であ
り、例えば隔壁(8a),(8b),(11)の形状を適当に
変更したり、ターゲット(12)の形状や配置を適当に変
更したり、ターゲット(12)を省略する等が可能であ
る。The specific structure of the fluidic flowmeter can be changed as appropriate. For example, the shapes of the partition walls (8a), (8b), (11) can be changed appropriately, and the shape and arrangement of the target (12) can be changed appropriately. , The target (12) can be omitted.
流量検出部(18)や異常検出部(19)の具体構成は適
当に変更でき、例えば異常検出部(19)を第1信号の起
電力が表示されるだけにして、異常事態発生を人為的に
判定するように構成する等が可能である。The specific configurations of the flow rate detection unit (18) and the abnormality detection unit (19) can be appropriately changed, and for example, the abnormality detection unit (19) is only displayed with the electromotive force of the first signal so that the occurrence of the abnormal situation is artificially performed. It is possible to configure such as to determine.
流量計は、主として燃料ガスや水道等において工業用
や家庭用に利用するが、その用途に特定されない。The flow meter is mainly used for fuel gas, water supply, etc. for industrial and household purposes, but is not specified for its use.
尚、特許請求の範囲の項に図面との対照を便利にする
為に符号を記すが、該記入により本発明は添付図面の構
造に限定されるものではない。It should be noted that reference numerals are added to the claims for convenience of comparison with the drawings, but the present invention is not limited to the structures of the accompanying drawings by the entry.
第1図は本発明の実施例を示す概念図、第2図は従来例
の概念図である。 (2)……管路縮小部、(3)……噴出ノズル、(5)
……管路拡大部、(6a),(6b)……制御ノズル、(7
a),(7b)……帰還流路、(13a),(13b)……導圧
路、(14)……センサー、(15a),(15b)……圧電
膜、(16a)……中央室、(16b),(16c)……端部
室、(18)……流量検出部、(19)……異常検出部、
(19a),(19b)……判定手段、(19c)……出力手
段。FIG. 1 is a conceptual diagram showing an embodiment of the present invention, and FIG. 2 is a conceptual diagram of a conventional example. (2) …… Conduit reduction part, (3) …… Spout nozzle, (5)
…… Pipe expansion part, (6a), (6b) …… Control nozzle, (7
a), (7b) ... return flow path, (13a), (13b) ... pressure guiding path, (14) ... sensor, (15a), (15b) ... piezoelectric film, (16a) ... center Chamber, (16b), (16c) …… End chamber, (18) …… Flow rate detector, (19) …… Abnormality detector,
(19a), (19b) ... determination means, (19c) ... output means.
Claims (4)
管路拡大部(5)をその順に流動方向に連ねて形成し、
前記噴出ノズル(3)と管路拡大部(5)の境界部に、
一対の制御ノズル(6a),(6b)を、前記噴出ノズル
(3)の噴出方向に対してほぼ直角方向に向かって、か
つ、相対向して形成し、前記両制御ノズル(6a),(6
b)夫々と前記管路拡大部(5)の下流側を接続する一
対の帰還流路(7a),(7b)を形成し、前記噴出ノズル
(3)からの噴流の流動方向変化に起因する圧力変化を
検出するセンサー(14)を設けたフルイディック流量計
であって、前記センサー(14)において、圧力室を第1
及び第2圧電膜(15a),(15b)により中央室(16a)
とその両側の第1及び第2端部室(16b),(16c)とに
区画し、前記帰還流路の一方(7a)に接続した第1導圧
路(13a)を前記中央室(16a)と第1端部室(16b)に
接続し、前記帰還流路の他方(7b)に接続した第2導圧
路(13b)を前記第2端部室(16c)に接続し、前記第1
端部室(16b)に臨む前記第1圧電膜(15a)からの第1
信号と、前記第2端部室(16c)に臨む前記第2圧電膜
(15b)からの第2信号との差信号に基いて前記噴出ノ
ズル(3)からの噴流の流量を測定する流量検出部(1
8)を設け、前記第1圧電膜(15a)からの第1信号に基
いて異常事態を検出する異常検出部(19)を設けてある
フルイディック流量計。1. A pipe contracting portion (2), a jet nozzle (3) and a pipe expanding portion (5) are formed in that order in the flow direction,
At the boundary between the jet nozzle (3) and the enlarged pipe section (5),
A pair of control nozzles (6a), (6b) are formed in a direction substantially perpendicular to the ejection direction of the ejection nozzle (3) and face each other. 6
b) A pair of return flow paths (7a) and (7b) are formed to connect the downstream sides of the expanded pipe section (5) to each other, which is caused by a change in the flow direction of the jet flow from the jet nozzle (3). A fluidic flowmeter provided with a sensor (14) for detecting a pressure change, wherein the pressure chamber is a first chamber in the sensor (14).
And the central chamber (16a) by the second piezoelectric films (15a) and (15b)
And the first and second end chambers (16b) and (16c) on both sides thereof and the first pressure guiding passageway (13a) connected to one of the return passageways (7a) is connected to the central chamber (16a). And a second pressure guiding passageway (13b) connected to the other end (7b) of the return flow passage to the second end chamber (16c), and the first end chamber (16b) is connected to the first end chamber (16b).
The first from the first piezoelectric film (15a) facing the end chamber (16b)
A flow rate detector that measures the flow rate of the jet flow from the jet nozzle (3) based on the difference signal between the signal and the second signal from the second piezoelectric film (15b) facing the second end chamber (16c). (1
A fluidic flowmeter provided with 8) and an abnormality detecting section (19) for detecting an abnormal situation based on the first signal from the first piezoelectric film (15a).
第1信号検出に基いて地震発生を検知する第1判定手段
(19a)を有するものである請求項1記載のフルイディ
ック流量計。2. The fluidic flow rate according to claim 1, wherein the abnormality detection section (19) has a first determination means (19a) for detecting the occurrence of an earthquake on the basis of the detection of a first signal of a set intensity or more. Total.
第1信号検出に基いて輸送流体の異常圧力低下を検知す
る第2判定手段(19b)を有するものである請求項1又
は2記載のフルイディック流量計。3. The abnormality detecting section (19) has a second judging means (19b) for detecting an abnormal pressure drop of the transport fluid based on the detection of a first signal having a set intensity or less. The fluidic flowmeter described in 2.
基いて流体輸送を自動遮断する出力手段(19c)を設け
てある請求項2又は3記載のフルイディック流量計。4. The fluidic flow meter according to claim 2, wherein the abnormality detecting section (19) is provided with an output means (19c) for automatically interrupting fluid transportation based on the detection of an abnormal situation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63054631A JP2512518B2 (en) | 1988-03-08 | 1988-03-08 | Fluidic flow meter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63054631A JP2512518B2 (en) | 1988-03-08 | 1988-03-08 | Fluidic flow meter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01227925A JPH01227925A (en) | 1989-09-12 |
JP2512518B2 true JP2512518B2 (en) | 1996-07-03 |
Family
ID=12976103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63054631A Expired - Lifetime JP2512518B2 (en) | 1988-03-08 | 1988-03-08 | Fluidic flow meter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2512518B2 (en) |
-
1988
- 1988-03-08 JP JP63054631A patent/JP2512518B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01227925A (en) | 1989-09-12 |
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