JP2508424Y2 - 露光装置 - Google Patents

露光装置

Info

Publication number
JP2508424Y2
JP2508424Y2 JP1990125504U JP12550490U JP2508424Y2 JP 2508424 Y2 JP2508424 Y2 JP 2508424Y2 JP 1990125504 U JP1990125504 U JP 1990125504U JP 12550490 U JP12550490 U JP 12550490U JP 2508424 Y2 JP2508424 Y2 JP 2508424Y2
Authority
JP
Japan
Prior art keywords
transparent plate
work
positioning
pin
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990125504U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481149U (enrdf_load_stackoverflow
Inventor
一成 栄
稔 綿貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP1990125504U priority Critical patent/JP2508424Y2/ja
Publication of JPH0481149U publication Critical patent/JPH0481149U/ja
Application granted granted Critical
Publication of JP2508424Y2 publication Critical patent/JP2508424Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1990125504U 1990-11-28 1990-11-28 露光装置 Expired - Fee Related JP2508424Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990125504U JP2508424Y2 (ja) 1990-11-28 1990-11-28 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990125504U JP2508424Y2 (ja) 1990-11-28 1990-11-28 露光装置

Publications (2)

Publication Number Publication Date
JPH0481149U JPH0481149U (enrdf_load_stackoverflow) 1992-07-15
JP2508424Y2 true JP2508424Y2 (ja) 1996-08-21

Family

ID=31873099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990125504U Expired - Fee Related JP2508424Y2 (ja) 1990-11-28 1990-11-28 露光装置

Country Status (1)

Country Link
JP (1) JP2508424Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6051553U (ja) * 1983-09-16 1985-04-11 凸版印刷株式会社 自動作図装置
JPH02123940U (enrdf_load_stackoverflow) * 1989-03-23 1990-10-12

Also Published As

Publication number Publication date
JPH0481149U (enrdf_load_stackoverflow) 1992-07-15

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