JP2505068Y2 - Package structure of semiconductor device - Google Patents

Package structure of semiconductor device

Info

Publication number
JP2505068Y2
JP2505068Y2 JP1990113810U JP11381090U JP2505068Y2 JP 2505068 Y2 JP2505068 Y2 JP 2505068Y2 JP 1990113810 U JP1990113810 U JP 1990113810U JP 11381090 U JP11381090 U JP 11381090U JP 2505068 Y2 JP2505068 Y2 JP 2505068Y2
Authority
JP
Japan
Prior art keywords
metal base
adhesive
case
package
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990113810U
Other languages
Japanese (ja)
Other versions
JPH0470752U (en
Inventor
清志 飯田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP1990113810U priority Critical patent/JP2505068Y2/en
Publication of JPH0470752U publication Critical patent/JPH0470752U/ja
Application granted granted Critical
Publication of JP2505068Y2 publication Critical patent/JP2505068Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/163Connection portion, e.g. seal

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Description

【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、パワートランジスタ,サイリスタなどのモ
ジュールを対象とした半導体装置のパッケージ構造に関
する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a semiconductor device package structure for modules such as power transistors and thyristors.

〔従来の技術〕[Conventional technology]

まず、第3図に本考案の実施対象となる半導体装置の
構造を示す。図において、1は半導体素子、2は半導体
素子1をマウントした基板、3は外部導出端子、4はこ
れら各部品を組み込んだパッケージ、5はパッケージ4
内に充填して半導体素子1を封止するゲル状のシリコー
ン樹脂、6はその上部に注入したエポキシ樹脂である。
ここで、パッケージ4は放熱板を兼ねた金属ベース7
と、樹脂成形品として作られたケース枠8と、ケース蓋
9とを組合わせて構成されている。なお、第4図のよう
にケース枠8の下端側の内周縁に沿って段付溝8aを形成
し、この段付溝8aに金属ベース7の外周縁を嵌め合わせ
るようにした構造のものもある。
First, FIG. 3 shows the structure of a semiconductor device to which the present invention is applied. In the figure, 1 is a semiconductor element, 2 is a substrate on which the semiconductor element 1 is mounted, 3 is an external lead terminal, 4 is a package incorporating these components, and 5 is a package 4.
Gel-like silicone resin filled inside to seal the semiconductor element 1 is epoxy resin injected into the upper portion.
Here, the package 4 is a metal base 7 that also functions as a heat sink.
And a case frame 8 made as a resin molded product and a case lid 9 are combined. As shown in FIG. 4, a stepped groove 8a is formed along the inner peripheral edge on the lower end side of the case frame 8 and the outer peripheral edge of the metal base 7 is fitted into the stepped groove 8a. is there.

かかる半導体装置は次記のようにして組立てられる。
まず、半導体素子1をダイボンディングした基板2を金
属ベース7の上に接着し、続いてケース蓋9に装着した
外部導出端子3と半導体素子1,基板2の導体パターンと
の間を内部リードを介して半田付する。次に金属ベース
7の上にケース枠8を被せて接着剤10で両者間を接着し
た後に、ケース内にゲル状のシリコーン樹脂5を充填
し、さらにその上層側にエポキシ樹脂6を注入,硬化さ
せて樹脂封止する。
Such a semiconductor device is assembled as described below.
First, the substrate 2 to which the semiconductor element 1 is die-bonded is adhered onto the metal base 7, and then an internal lead is provided between the external lead-out terminal 3 mounted on the case lid 9 and the conductor pattern of the semiconductor element 1 and the substrate 2. Solder through. Next, after covering the metal base 7 with the case frame 8 and adhering the two with the adhesive 10, the gel silicone resin 5 is filled in the case, and the epoxy resin 6 is injected and cured on the upper layer side. And resin sealing.

ここで、金属ベース7にケース枠8を接着するには、
あらかじめケース枠8の接合面周域に沿ってディスペン
サより供給した合成樹脂系の接着剤10を線状に供給塗布
し、ケース枠8を金属ベース7の上に重ね合わせた上で
加圧力を加えて接着剤を接合面に押し広げ、この状態を
保持して接着剤を硬化させる。
Here, in order to bond the case frame 8 to the metal base 7,
The synthetic resin adhesive 10 supplied from a dispenser in advance along the peripheral area of the joint surface of the case frame 8 is linearly applied and applied, and the case frame 8 is superposed on the metal base 7 and a pressing force is applied. Then, the adhesive is spread over the joint surface and held in this state to cure the adhesive.

〔考案が解決しようとする課題〕[Problems to be solved by the device]

ところで、前記の方法で組立てたパッケージは、接合
不良が基でパッケージ内に充填したゲル状の封止樹脂が
金属ベースとケース枠との間の隙間を通して外側に漏れ
出ることがある。一方、このような接合不良を避けるた
めに接着剤を多少多めに塗布すると、逆に接着工程で加
圧力を加えた際に余剰の接着剤が接合面からパッケージ
の外周側にはみ出す。特に第4図のように、段付溝8aを
有する構造では、金属ベースの外周縁との接合部がある
ため、該接合部の接着剤は、接着工程での加圧力及び毛
細管現象の他に更に重力も働くため、第3図の構造に比
べて余剰の接着剤が接合面からパッケージの外周側には
み出しやすい。しかも外周にはみ出した接着剤は手作業
で拭き取る後始末の作業が必要となり、それだけ組立工
数が増える。
By the way, in the package assembled by the above method, the gel-like sealing resin filled in the package may leak to the outside through the gap between the metal base and the case frame due to defective bonding. On the other hand, if the adhesive is applied in a slightly larger amount in order to avoid such a bonding failure, conversely, when a pressure is applied in the bonding process, the excess adhesive protrudes from the bonding surface to the outer peripheral side of the package. In particular, as shown in FIG. 4, in the structure having the stepped groove 8a, since there is a joint with the outer peripheral edge of the metal base, the adhesive at the joint has a pressure force and a capillary phenomenon in the bonding step. Further, since gravity also acts, excess adhesive tends to protrude from the joint surface to the outer peripheral side of the package as compared with the structure shown in FIG. In addition, the adhesive protruding to the outer periphery requires a manual work of wiping off the adhesive, which increases the number of assembly steps.

本考案は上記の点にかんがみなされたものであり、接
着不良,接着剤のはみ出しなどを回避して金属ベースと
ケース枠との間を強固に接着できるようにした半導体装
置のパッケージ構造を提供することを目的とする。
The present invention has been made in view of the above points, and provides a package structure of a semiconductor device in which a metal base and a case frame can be firmly bonded to each other while avoiding poor adhesion, adhesive protrusion, and the like. The purpose is to

〔課題を解決するための手段〕[Means for solving the problem]

上記課題を解決するために、本考案のパッケージ構造
においては、両主面が平坦である金属ベースと接合する
ケースの接合面の全周に亙り前記金属ベースの主面上に
対向して接着剤溜となる凹溝と、前記凹溝より離隔して
前記金属ベースの外周縁に嵌合する凸状段部とを具備す
るものとする。
In order to solve the above-mentioned problems, in the package structure of the present invention, an adhesive agent is provided so as to face the main surface of the metal base over the entire circumference of the bonding surface of the case to be bonded to the metal base whose both main surfaces are flat. A concave groove serving as a reservoir and a convex step portion that is spaced apart from the concave groove and fits on the outer peripheral edge of the metal base are provided.

〔作用〕[Action]

上記の構成により、接合面に接着剤を供給塗布した
後、ケースと金属ベースとを重ね合わせて加圧力を加え
ると、接着剤は接合面の全域に押し広げられるととも
に、接着剤の余剰分は凹部に入り込んでここに溜る。し
かも凹溝は金属ベースの主面上に対向しており接着剤の
余剰分を上方に吸い上げる形となるので、金属ベースの
外周縁と凸状段部との接合部で下方へ落下しようとする
接着剤を表面張力で吸い上げることも同時に行う。した
がって、接着剤ははみ出しが殆ど発生せずに接合面全域
に均一に塗布される。しかも、凹部に入り込んだ接着剤
はその後に硬化してケースと結着し合うので、その投錨
効果で金属ベースとケースとの間の結合力を高めるよう
に働く。
With the above configuration, after the adhesive is supplied and applied to the joint surface, when the case and the metal base are overlapped and a pressure is applied, the adhesive is spread over the entire joint surface, and the surplus adhesive is It enters the recess and collects here. Moreover, since the concave groove is opposed to the main surface of the metal base and sucks the surplus adhesive agent upward, the groove tends to fall downward at the joint between the outer peripheral edge of the metal base and the convex step. At the same time, the adhesive is sucked up by surface tension. Therefore, the adhesive is applied uniformly over the entire joint surface with almost no protrusion. Moreover, since the adhesive that has entered the recess is cured and then bonded to the case, the anchoring effect works to increase the bonding force between the metal base and the case.

〔実施例〕〔Example〕

以下本考案の実施例を第1図の比較例と第2図の実施
例とにより説明する。なお、第1図,第2図はそれぞれ
第3図,第4図のパッケージ構造に対応した参考例と実
施例であり、各図において第3図,第4図と対応する同
一部材には同じ符号が付してある。
An embodiment of the present invention will be described below with reference to a comparative example shown in FIG. 1 and an embodiment shown in FIG. 1 and 2 are reference examples and embodiments corresponding to the package structures of FIGS. 3 and 4, respectively. The same members corresponding to those of FIGS. 3 and 4 are the same in each of the drawings. The reference numeral is attached.

すなわち、第1図,第2図においては、樹脂成形品と
して作られたケース枠8の接合面の中央部位には全周域
に沿って符号11で示す凹溝が形成されている。
That is, in FIGS. 1 and 2, a groove 11 is formed along the entire circumference at the central portion of the joint surface of the case frame 8 made as a resin molded product.

かかる構成で、接合面にディスペンサなどから接着剤
10を供給塗布した後に、ケース枠8を金属ベース7の上
に重ね合わせて加圧力を加えると接着剤10は接合面の全
域に押し広げられるとともに、余剰の接着剤は前記した
凹溝11に毛細管現象と表面張力とにより吸い上げられて
ここに溜る。したがって、接着剤10がパッケージの外周
側にはみ出すことは殆どなく、かつ接着剤の硬化後には
凹溝内に入り込んだ接着剤がケース枠8と強固に結着し
合って結合力を高める。
With such a configuration, an adhesive is applied to the bonding surface from a dispenser or the like.
When 10 is supplied and applied, the case frame 8 is superposed on the metal base 7 and a pressing force is applied, the adhesive 10 is spread over the entire joint surface, and the excess adhesive is spread over the concave groove 11 described above. It is sucked up by the capillary phenomenon and surface tension and accumulates here. Therefore, the adhesive 10 hardly squeezes out to the outer peripheral side of the package, and after the adhesive is hardened, the adhesive that has entered the concave groove firmly binds to the case frame 8 to enhance the bonding strength.

〔考案の効果〕[Effect of device]

以上述べたように、ケースの接合面に金属ベースの外
周縁に嵌合する凸状段部と接着剤溜となる凹溝とを離隔
して有する本考案のパッケージ構造によれば、パッケー
ジの組立てに際して接着工程の加圧力及び毛細管現象と
重力とによりパッケージから接着剤が不要にはみ出すの
を表面張力と毛細管現象とにより凹溝へ吸い上げて防止
しつつ、しかもケースと金属ベースとの間を強固に固着
することができて製品の信頼性が同上する他、従来構造
で問題となっていた接着剤のはみ出し分を拭き取る厄介
な作業が必要なく、組立工数の削減化が図れる。
As described above, according to the package structure of the present invention, which has the convex step portion that fits to the outer peripheral edge of the metal base and the concave groove that serves as the adhesive reservoir on the joint surface of the case, the package assembly is performed. At that time, the surface tension and the capillary phenomenon prevent the adhesive from unnecessarily squeezing out from the package due to the pressing force in the bonding process, the capillary phenomenon and gravity, and firmly prevent between the case and the metal base. In addition to the fact that the product can be fixed and the reliability of the product is the same, the troublesome work of wiping off the protruding portion of the adhesive, which has been a problem in the conventional structure, is unnecessary, and the number of assembling steps can be reduced.

【図面の簡単な説明】[Brief description of drawings]

第1図は参考例の要部構造を示す断面図、第2図は実施
例の要部構造を示す断面図、第3図は従来における半導
体装置全体の構成断面図、第4図は第3図と異なる従来
のバッケージ構造の部分断面図である。 1:半導体素子、4:パッケージ、5:ゲル状封止樹脂、7:金
属ベース、8:ケース枠、9:ケース蓋、10:接着剤、11:凹
溝。
FIG. 1 is a cross-sectional view showing a main part structure of a reference example, FIG. 2 is a cross-sectional view showing a main part structure of an embodiment, FIG. 3 is a cross-sectional view of a conventional semiconductor device as a whole, and FIG. It is a fragmentary sectional view of the conventional package structure different from a figure. 1: semiconductor element, 4: package, 5: gel sealing resin, 7: metal base, 8: case frame, 9: case lid, 10: adhesive, 11: groove.

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of utility model registration request] 【請求項1】半導体素子を搭載した金属ベースの上に絶
縁物で作られたケースを被せ、接着剤により両者間を接
合して組立て、該ケース内にゲル状の封止樹脂が封入さ
れてなる半導体装置のパッケージにおいて、両主面が平
坦である金属ベースと接合するケースの接合面の全周に
亙り前記金属ベースの主面上に対向して接着剤溜となる
凹溝と、前記凹溝より離隔して前記金属ベースの外周縁
に嵌合する凸状段部とを具備することを特徴とする半導
体装置のパッケージ構造。
1. A metal base on which a semiconductor element is mounted is covered with a case made of an insulating material, and the two are joined by an adhesive to assemble, and a gel sealing resin is enclosed in the case. In the package of the semiconductor device, a concave groove serving as an adhesive reservoir facing the main surface of the metal base over the entire circumference of the bonding surface of the case to be bonded to the metal base having both flat main surfaces, and the concave A package structure for a semiconductor device, comprising: a convex step portion which is spaced apart from a groove and fits into an outer peripheral edge of the metal base.
JP1990113810U 1990-10-30 1990-10-30 Package structure of semiconductor device Expired - Lifetime JP2505068Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990113810U JP2505068Y2 (en) 1990-10-30 1990-10-30 Package structure of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990113810U JP2505068Y2 (en) 1990-10-30 1990-10-30 Package structure of semiconductor device

Publications (2)

Publication Number Publication Date
JPH0470752U JPH0470752U (en) 1992-06-23
JP2505068Y2 true JP2505068Y2 (en) 1996-07-24

Family

ID=31861426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990113810U Expired - Lifetime JP2505068Y2 (en) 1990-10-30 1990-10-30 Package structure of semiconductor device

Country Status (1)

Country Link
JP (1) JP2505068Y2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4710194B2 (en) * 2001-08-03 2011-06-29 富士電機システムズ株式会社 Semiconductor device package
JP5373262B2 (en) * 2006-12-06 2013-12-18 株式会社デンソー Cap fixing method of semiconductor substrate
JP5548424B2 (en) * 2009-10-28 2014-07-16 株式会社指月電機製作所 Capacitor
JP5155352B2 (en) * 2010-03-25 2013-03-06 日本電波工業株式会社 Piezoelectric device
JP6699742B2 (en) * 2016-09-20 2020-05-27 三菱電機株式会社 Semiconductor device
JP2019096797A (en) * 2017-11-27 2019-06-20 三菱電機株式会社 Semiconductor device and power conversion apparatus
JP7145054B2 (en) * 2018-11-26 2022-09-30 京セラ株式会社 Semiconductor device package and semiconductor device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS553617A (en) * 1978-06-21 1980-01-11 Hitachi Ltd Metallic base for hybrid integrated circuit
JPS63100842U (en) * 1986-12-19 1988-06-30
JPH01165145A (en) * 1987-12-21 1989-06-29 Mitsubishi Electric Corp Semiconductor device
JP2809650B2 (en) * 1988-10-19 1998-10-15 株式会社東芝 Timing circuit

Also Published As

Publication number Publication date
JPH0470752U (en) 1992-06-23

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