JP2502335B2 - Inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Field of Industrial Application) The present invention mainly relates to an inspection device for visually inspecting a substrate to be inspected such as an LCD substrate which constitutes a liquid crystal display device.

(Prior Art) In general, a display of a liquid crystal screen (LCD) is inspected by visual inspection, and a supporting surface orthogonal to a gaze angle is required for this visual inspection. Therefore, the support surface is inclined, for example, along the gaze line visually observed in the horizontal direction from the conventional structure in which the support base moves only in the horizontal direction, for example,
There is a demand for a visual inspection device that inspects at a 45 ° inclination.

As shown in FIG. 5, the visual inspection apparatus has a ball screw (4) arranged so as to move the support base (3) along a base surface (2) orthogonal to the stare line (1). ing. Both ends of this ball screw (4) are rotatably fixed by a support body (5), and a pulse motor (6) interlocks with the end of this bow screw (4) to rotate the ball screw (4). It is provided in.

The pulse motor (6) is configured such that the pulse motor (6) is rotated by a command signal from the CPU (7) via a drive circuit. The ball screw (4) is screwed and coupled to the support base (3) by the rotation of the pulse motor (6). The support base (3) and the ball screw (4) for moving the support base (3) are provided so as to be inclined so as to be orthogonal to the gaze line (1). The load W of the tilted support base (3) acts in the direction of falling by the load of the component force Wcosθ that tilts in the tilt direction.

Further, at the opposite end of the pole screw (4), a rotation lock means (9) for locking the rotation of the ball screw (4) at the same time that the power is cut off is provided by, for example, an electromagnetic brake (10) D / A. It is generally provided with a converter (11).

(Problems to be Solved by the Invention) The electromagnetic brake (10) is a shaft for moving the support base (3) along the inclination direction, that is, a ball screw (4).
A member called an inner driver (12) is attached to the end of the. The inner driver (12) has a gear-shaped outer periphery, and the gear-shaped portion (12a) has a brake desk (13).
Is slidably inserted in the thrust direction.

That is, as shown in FIG. 4, the brake desk (13)
A gear-shaped gear hole (13a) is bored in the center of the brake disc (13), and the brake desk (13) is slid by pushing the armature (14). 13) and gear section (13a)
Since it is rotationally driven with an impact sound from the gap of the joint portion with, there is a drawback of noise generation.

The purpose of the present invention is to solve the above-mentioned conventional problems, the rotation of the pole screw that raises and lowers the support base of the substrate to be inspected can be reliably stopped by the electromagnetic brake, and the substrate to be inspected is Positioning and holding can be performed accurately at an angle, stable inspection is possible, and the electromagnetic brake does not generate rattling or noise even when the ball screw drive motor is operating or the power is cut off. An object is to provide an inspection device.

[Structure of Invention]

(Means for Solving the Problems) In order to achieve the above object, the present invention provides a support base for supporting a substrate to be inspected, and moving the support base up and down along the inclined base surface. The ball screw, the drive motor, and an electromagnetic brake that stops the rotation of the ball screw hold the substrate to be inspected together with the support at an oblique position at a predetermined position, and electrically connect the probe terminals arranged facing the substrate to be inspected. In a structure capable of visually inspecting the substrate to be inspected by making a physical contact with the boss member that fixes the brake disc portion of the electromagnetic brake to the Boyle screw and integrally fixed to the boss member and elastically deformed in the thrust direction. It is characterized in that it is composed of a possible brake disc and a friction body fixed to the peripheral portion of the brake disc.

(Operation) According to the inspection apparatus of the present invention having the above-described configuration, the substrate to be inspected is supported on the support base on the inclined base surface, and the ball screw is rotated by the drive motor in this state to move the support base up and down. If the board to be inspected is moved to a predetermined position together with the support base, the power supply to the drive motor is stopped and the electromagnetic brake presses the brake disc portion by its own spring force. As a result, the brake disc of the brake disc portion is elastically deformed in the thrust direction, and the friction body at the peripheral portion is pinched by the fixed portion, and the rotation of the ball screw is stopped by the frictional force. With this, the substrate to be inspected is restrained in a state where it does not drop by its own weight together with the supporting base, is diagonally positioned and held at a predetermined position, and the substrate to be inspected is electrically contacted with the probe terminal arranged facing the substrate to be inspected. It can be visually inspected.

Further, when the drive motor is operated to rotate the ball screw, the electromagnetic brake is excited to release the pressing force by the spring force, so that the brake disc of the brake disc portion elastically returns in the thrust direction. As a result, the friction body on the peripheral side surface of the brake disc is separated from the fixing member, and the brake is released.

Since the brake disc used in the brake disc portion of the electromagnetic brake can be elastically deformed in the thrust direction, the brake disc can be integrally provided with the ball screw and slid in the thrust direction as in the past. It does not require any gear meshing structure, and can reliably stop the rotation of the ball screw that raises and lowers the support base of the board to be inspected without rattling, and the board to be inspected can be accurately positioned and held diagonally, enabling stable inspection. In addition, noise is not generated from the electromagnetic brake even when the drive motor of the ball screw is operating or when the power supply is stopped.

(Embodiment) An embodiment of the inspection apparatus of the present invention will be described below with reference to FIGS.
It will be described with reference to the drawings. In the figure, the same components as those shown in FIG. 5 are designated by the same reference numerals to simplify the description.

First, as shown in FIG. 3, the inspection device (15) is composed of a loader section (16) for transferring an LCD board as an inspection target board and an inspection section (17) for inspecting the LCD board transferred from now on. There is.

The loader section (16) includes, for example, a cassette (18) that accommodates a large number of 5-inch square LCD substrates, and the cassette (18).
Take-out arm (19) to take out the LCD boards one by one,
An X-axis transport unit (20) having a moving body (20a) for receiving and transporting the LCD substrate taken out by the arm (19) after pre-aligning the LCD substrate is provided.

The movable body (20a) receives the LCD substrate and adsorbs it, and then the movable body (20a) itself stands up at an angle of 45 degrees and moves in the X-axis direction, so that the movable support (3a) is inclined. ), The LCD substrate is transferred onto the substrate, or the LCD substrate after the inspection is taken from the support base (3) and then returned to the inside of the cassette (18).

The inspection unit (17) is installed on the side of the loader unit (16) described above, and is supported along the inclination on the base surface (2) of the base (23) inclined at 45 degrees with respect to the horizontal plane. A table (3) is provided, and a head plate (21), which is a fixed table, is installed on the upper side of the support table (3), and a probe terminal (shown by reference numeral (21a) in FIG. 5) and a microscope (22 ) Is provided. Then, the probe terminal electrically contacts with the LCD substrate positioned and held on the supporting base (3) to bring the substrate into an energized state. The microscope (22) is for confirming the contact state of the probe terminal with the substrate and visually inspecting the pixels of the LCD substrate.

The support base (3) has the same inclination (45 degrees) as the base surface (2).
The ball screw (4) is installed so as to be able to move up and down along the inclination. The tilted support base (3) itself has a structure capable of adjusting and controlling in the X-axis direction, the Y-axis direction, and the rotation direction θ on the tilted surface, and is orthogonal to the X-axis and Y-axis directions. It is a structure in which movement control is possible in the Z-axis direction.

In addition, the ball screw (4) that supports the support base (3) so as to be able to move up and down along the slope includes a pair of upper and lower support bodies (5) (fifth) along the base surface (2) of the base (23). (See figure)
It is rotatably provided. A support base (3) is screwed to the ball screw (4). A drive motor (for example, a pulse motor) (6) for rotating the ball screw (4) is installed above, and the motor (6) is energized to operate to reciprocally rotate the ball screw (4), thereby supporting the support base. (3) Inclined base surface (2)
It is configured to move up and down along the top.

When the drive motor (6) of the ball screw (4) is stopped due to power interruption, not only the ball screw (4) is free to rotate and lacks controllability, but the support base (3) is lowered by its own weight W. Generate the force to try,
Since the support base (3) descends while rotating the ball screw (4), an electromagnetic brake (10) is provided at the lower end of the ball screw (4) in order to prevent this.

This electromagnetic brake (10) has a brake disc portion (rotating portion) (25) fixed to the end shaft portion of the ball screw (4) and the brake disc portion (25) as shown in the cross section in FIG. It is composed of a main body part (fixed part) (33) for braking.

The body portion (33) includes a field (29) fixedly provided on the lower surface side of a fixed bracket (24) having a thrust bearing (24a) for rotatably supporting the end shaft portion of the ball screw (4). , A coil spring (30) and an exciting coil (31) mounted in this field (29), and a field (2
The side plate (24) fixedly provided on the lower surface side of 9) via a plurality of studs (32) and between the side plate (24) and the field (29) slidably fitted to the studs (32). An armature (14) that reciprocates by pressing a coil spring (30) and attracting an exciting coil (31) is provided.

In addition, the brake disc section (25) as the rotating section
Is a boss member (26) fixed to the end shaft portion of the ball screw (4), a brake disc (27) integrally fixed to the boss member (26) and elastically deformable in the thrust direction, and a peripheral edge of the brake disc (27). It is composed of shoes (28a) and (28b) as friction bodies fixed to both side surfaces. The boss member (26) has a central hole of diameter 6 mm ^H7 as shown in Fig. 2 (b). Is fastened and fixed with a set screw (not shown) in a state of being fitted to the end shaft portion of the ball screw (4) so that the ball screw (4) is integrally rotated. The brake disc (27) is fixed to the upper stepped inner end of the boss member (26) by press-fitting and crimping the center hole.

This brake disc (27) has a diameter of 33 mm and a thickness of 0.2 m.
It is a circular disc made of stainless steel with a size of about m.
As shown by the imaginary line, in order to have elasticity so that it can be elastically deformed in the thrust direction, as shown in FIG. 2 (a), a large number of punched holes (27a) with a width of 2 mm and a length of 5 mm are radially formed. .

Disc-shaped brake disc (2 with this punched hole (27a)
Shoe (28a) as a friction body on both sides of the periphery of 7),
(28b) is stuck. This shoe (28a), (28
b) is an epoxy-based araltite (manufactured by Japan Swiss Ciba-Geigy Co., Ltd.), and has an annular shape with an outer diameter of 33 mm, an inner diameter of 25 mm, and a thickness of about 1 mm.

If the maximum braking load due to the friction of each of the shoes (28a) and (28b) is set to 6 kg, 6 kg × 2 = 12 kg because the friction bodies are provided on both sides of the brake disc (27).
If the load of the support base (3) at this time is Holds. From this, W = 17 kg is guided, and if the load of the support base (3) is 17 kg, the ball screw (4) can be braked without energizing the pulse motor (6). That is, the ball screw (4) is driven. When the pulse motor (6) is de-energized, the coil spring (30) provided in the field (29) causes the armature (14) to move in the direction of pushing the surface of the brake desk (27).

Since the armature (14) pushes the shoe (28a) of the brake desk (27), the brake desk (27) elastically deforms and the shoe (28b) fixed to the back surface of the brake desk (27) is the side plate. Be in contact with (24).

Further, the shoe (28b) on the back surface of the side plate (24) is pressed by the pushing pressure, and at the same time, the shoe (28a) fixed to the surface of the brake desk (27) is also pressed against the armature (14). It will be. Then, the rotational force due to the self-propelled ball screw (4) can be braked.

This is the end of the description of the structure and operation of the brake desk member (25).

 Next, the operation will be described.

Take out one LCD from the LCD cassette (18) by the loader section (16), and the LCD is tilted at an angle of 45 ° with respect to the horizontal direction. In this state, place the LCD on the support surface (3a) of the support base (3). It is conveyed in the X-axis direction to the position where it is placed and placed. In addition, the inspection department (1
In 7), the mounted LCD is supported on the supporting surface (3a) by, for example, vacuum suction, and the alignment of the LCD is executed by the XY table mechanism and the θ direction rotating mechanism, and the probe provided on the head plate (21). Terminal electrode (21a) is L
The LCD will be inspected by touching the electrodes of the CD.

The ball screw (4) of the drive shaft, which is moved along the inclination direction during the above operation, is rotated by the drive of the pulse motor (6). However, since the brake disc (27) fixed to the end of the ball screw (4) is integrated, noise does not occur even when the ball screw (4) rotates, and the support base (3) can be smoothly moved. )
Will move in the tilt direction. Also, due to a power outage
Even if the visual inspection device during driving is de-energized, the exciting coil (31) installed in the field (29) cannot adsorb the armature (14), and the coil spring (30) keeps the armature (14) in place. The brake desk (27) is pushed in through. Since the pushed brake desk (27) is an elastic body, it is elastically deformed in the thrust direction.

Further, the elastically deformed Bruky desk (27) is sandwiched between the back side shoe (28b) and the front side shoe (28a) via the side plate (24) by pressing of the armature (14), A frictional force is generated and the rotational force of the ball screw (4) can be braked. Therefore, the brake desk (2
Since an elastic member is used so that 7) elastically deforms in the thrust direction, the brake desk (2
Even if it acts to push in 7), the brake desk (27) is elastically deformed in the thrust direction only when this action is exerted, and the rotational force of the ball screw (4) can be absorbed.

The effect of the embodiment is that the brake desk (27) provided on the ball screw (4) is elastically deformed to brake when the power is cut off, and when the power is on, the ball screw (4) and the brake are braked. Since the desk (27) is integrated, the noise caused by the gap between the gear shape portion and the gear hole as in the conventional case is eliminated.

〔The invention's effect〕

Safety so that even if a power failure occurs during operation of the inspection device, or even if the power is accidentally turned off during operation of the inspection device, it will not drop due to the weight of the inspection device support table and damage the inspection device. And stable inspection is possible.

[Brief description of drawings]

FIG. 1 is an explanatory view for explaining the configuration of an embodiment of the inspection device of the present invention, FIGS. 2 (a) and 2 (b) are a top view and a sectional view for explaining the configuration of the brake desk of FIG. FIG. 3 is an external view for explaining the external appearance of an embodiment of a visual inspection device to which the present invention is applied, and FIG. 4 is an explanatory perspective view for explaining the configuration of a conventional brake desk and an inner driver,
FIG. 5 is an explanatory view for explaining the outline of a conventional visual inspection device. 3 ... Support base, 4 ... Ball screw 5 ... Support, 6 ... Pulse motor 7 ... CPU, 8 ... Drive circuit 9 ... Rotation lock means, 10 ... Electromagnetic brake 11 ... D / A Converter, 12 …… Inner driver 13 …… Brake desk, 13a …… Gear hole 14 …… Armature, 15 …… Visual inspection device 16 …… Loader section, 17 …… Inspection section 18 …… LCD cassette, 19 …… Take-out arm 20 …… X-axis transport part, 20a …… moving body 21 …… head plate, 21a …… probe terminal electrode 22 …… microscope, 23 …… base 24 …… side plate, 25 …… brake desk member 26 …… Boss member, 27 …… Brake desk 27a …… Gear shape part, 28 …… Frictional body (shu) 28a …… Front shoe, 28b …… Back shoe 29 …… Field, 30 …… Coil spring 31 …… Excitation coil

Claims (1)

(57) [Claims] 1. A support base for supporting a substrate to be inspected, a ball screw for moving the support base up and down along the inclined base surface, the drive motor, and rotation of the ball screw. An electromagnetic brake holds the board to be inspected together with the support at a predetermined position obliquely, and a probe terminal facing the board to be inspected is brought into electrical contact with the board to be inspected visually. In the inspection device described above, the brake disc portion of the electromagnetic brake is fixed to a boss member fixed to a ball screw, a brake disc integrally fixed to the boss member and elastically deformable in a thrust direction, and fixed to a peripheral portion of the brake disc. And a friction body.