JP2501706Y2 - Precision measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a precision measuring device for measuring the shape and dimension of a precision component.

[Prior Art] Conventionally, a measuring device including a probe has been used as a device for accurately measuring the outer shape of a precision component such as a turbine blade. For example, as shown in FIG.
In the movable frame 1 of the gate shape that can be moved (direction perpendicular to the paper surface),
A slider 2 is provided so as to be movable in a direction orthogonal to the moving direction of the movable frame 1 (direction of an arrow in the figure), and a probe 4 for measuring an object to be measured 3 is supported at a lower end portion of the slider 2 so as to be freely rotatable. There is a structure in which a vertically movable spindle 5 is provided.

[Problems to be solved by the invention] In fact, parts such as turbine blades have complicated shapes and are difficult to fix. Therefore, when measuring, as shown in FIG. A turbine blade or the like to be the object to be measured 3 is embedded and stabilized in a rectangular support block 6 (shown by a dashed line in FIG. 4) so that only a portion to be measured is exposed, and the support block 6 together with the measuring device The measurement was carried out while being fixed on the object support base 7.

However, in the above-mentioned conventional measuring device, the gate-shaped movable frame 1 interferes with the movement of the support block 6 placed on or lowered from the support base 7, and therefore the movable block 1 must be moved. In addition, when the movement of the DUT 3 is to be automated using a manipulator or the like, the movement of the movable frame 1 has been a factor that impedes the efficiency of the automation.

The present invention was devised to solve the above problems, and its purpose is to perform measurement of an object to be measured efficiently and to efficiently move the object to be measured on the object support base. An object of the present invention is to provide a measuring device which can be automated and can be easily automated.

[Means for Solving the Problem] A support block that exposes and supports only a measured portion of an object to be measured having a complicated three-dimensional shape, and a support table that is provided on a fixed table and supports the support block. A sensor for confirming the seating of the support block on the support base, and a sensor that is provided on the fixed base with the support base sandwiched between the support block and the support block, and is movable in opposite directions. A fixing device and a plurality of movable bases, which are provided on the fixed base with the support base sandwiched so as to be orthogonal to the fixed device, are movable in opposite directions, and are provided on the respective movable bases, respectively. Columns that are movable in a direction orthogonal to the moving direction of the movable table, and an elevating frame that is provided in each column so as to be able to ascend and descend and that supports a probe that is capable of rotating in the vertical and horizontal directions for detecting the object to be measured. And It is a gift.

[Operation] According to the above configuration, first, the object to be measured is placed on the support base and fixedly supported by the support base. When measuring an object to be measured, the movable table, the column, and the lifting frame are moved to operate the probe, and both probes simultaneously measure from both sides. As a result, measurement is performed efficiently, and
Since the movable table, column, and lifting frame are provided with the support table sandwiched between them, when moving the object to be measured on or off the support table, it is possible to move the movable table and column without moving them. It is efficient because the measurement object can be moved, and the movement can be easily automated.

Embodiment An embodiment of the present invention will be described with reference to the drawings.

1 and 2 are a perspective view and a front view showing a measuring device according to the present invention. In the figure, reference numeral 11 denotes a measuring device. The measuring device 11 is provided with a support base 13 for supporting the object 3 to be measured, which is formed in a cylindrical shape, at a substantially central portion on a fixed base 12. An object fixing device 14 for holding and fixing the object to be measured 3 placed on the supporting table 13 is movably provided on both sides of the supporting table 13 via a positioning actuator 15. ing.

Further, on the fixed base 12, movable bases 16 that are movable in opposite directions are provided on both sides of the support base 13 across the support base 13 from a direction orthogonal to the position of the object fixing device 14. These movable bases 16 are movably provided on a fixed base 12 and on guide rails 17 provided along the moving direction thereof, and are individually moved by an X-axis servomotor 18 in the direction of arrow X in the figure. It has become so.

A column 19 that is movable in a direction orthogonal to the moving direction of the movable table 16 is provided on the movable table 16. These columns 19 are movably provided on a guide rail 20 provided on the movable table 16 along the movement direction thereof, and Y
The axis servo motor 21 individually moves in the arrow Y direction in the drawing.

These columns 19 have probes for detecting the object to be measured 12.
An elevating frame 23 that supports 22 is provided so that it can be raised and lowered.
That is, in both columns 19, a screw member 24 is provided in the center along the vertical direction on the surfaces where the columns 19 face each other, and the guide members 25 are arranged parallel to each other across the screw member 24. A Z-axis servomotor 26 that drives the screw member 24 is provided on the upper portion of the column 19. The elevating frame 23 is individually moved up and down along the guide member 25 in the arrow Z direction in the figure by a screw member 24 which is rotationally driven by a Z-axis servomotor 26.

A probe support portion 27 protruding in opposite directions is fixed to these lifting frames 23, and a spherical probe that rotatably supports the probe 22 horizontally and vertically is fixed to the support portion 27. A head 28 is provided.

A seating confirmation sensor 29 for confirming that the measured object 3 is seated on the support table 13 is provided on the fixed table 12.

In the figure, 30 and 30 are NC control devices having a controller 31 for controlling the respective operations of both probes 22, and these NC control devices 30 include the device to be measured fixing device 14 described above.
A controller 32 for controlling the driving of the positioning actuator 15 is provided. Also, 33 and 33 are arithmetic units,
It is provided corresponding to the probe 22, stores the shape of the part to be measured, and compares the stored value with the measured value of the measured object 12 measured by the probe 22, and displays the measured value. A linear scale counter 34 is provided.

Further, reference numeral 35 is an air unit for supplying compressed air as a power source for the positioning actuator 15 and the like.

 Next, the operation of this embodiment will be described.

First, as shown in FIG. 4, the master piece is embedded in the support block 6 so that it can be mounted on the support base 13 in a stable state. Is operated to measure a plurality of required points on the master piece, and the measured values are stored in the arithmetic unit 33.

Next, similarly to the master piece, the measured object 3 is embedded in the support block 6, placed on the support base 13, clamped and fixed by the measured object fixing device 14, and the shape of the measured object 3 is measured by both probes 22. To measure. At this time, the movable table 16, the column 19, and the elevating frame 23 are moved in the X, Y, and Z directions, respectively, so that the probes 22 come into contact with desired measurement points of the object to be measured 3 and the object 3 to be measured. To measure. That is, the measurement is performed at the same position as the measurement point of the master piece described above. Further, the measured value is input to the arithmetic unit 33, and the arithmetic unit 33 compares and calculates with the measured value of the master piece to calculate the error of the DUT 3.
Input to NC controller 30.

On the other hand, the NC control device 30 stores the input measured value and controls the operation of a processing device (not shown) based on the measured value to process the object 3 to be measured and finish it into a product.

Further, at the time of the above measurement, since the operations of the movable table 16, the column 19, the elevating frame 23 and the probe 22 are controlled by the NC controller 30, the shape of the DUT 3 is measured numerically and accurately,
Since the measured value is compared and calculated with the reference value stored in the calculation device 33, the error from the reference value can be accurately grasped.

In addition, the support base 13 that supports the DUT 3 is sandwiched between the movable base.
Since the column 19 and the elevating frame 23 are provided, the DUT 3 can be placed on the support table 13 without moving the movable table 16, the column 19, etc. Since the seating confirmation sensor 29 confirms the seating of the measured object 3 and the NC controller 30 controls the operation of the measured object fixing device 14 that clamps and fixes the measured object 3, the measured object 3 is measured. The movement of 3 is easy and efficient.

Furthermore, in the above description, an example of measuring the absolute positions of the X, Y, and Z axes has been shown, but the relative positions may be measured by operating both probes 22 individually.

[Effects of the Invention] In summary, the present invention exhibits the following excellent effects.

(1) Since two probes simultaneously measure the object to be measured, the measurement efficiency is excellent.

(2) The movable table and column that move the probe are
Since the support base that supports the object to be measured is sandwiched between them, the object to be measured on the support base can be easily removed without moving the movable table, the column, and the like.

(3) Since the probe itself is rotatable in the vertical and horizontal directions, it is easy to probe even an object to be measured having a complicated shape, and by combining with the effect of (2) above, It is easier to remove the measurement object.

(4) Since the operation of the object-to-be-measured fixing device for holding and fixing the object to be measured is controlled by the NC control device, the movement of the object to be measured can be easily automated and the measurement efficiency is excellent.

[Brief description of drawings]

1 is a perspective view showing an entire embodiment of the present invention, FIG. 2 is a front view thereof, FIG. 3 is a schematic view showing a conventional example, and FIG. 4 is a schematic view showing a support block for holding an object to be measured. It is a perspective view. In the figure, 3 is an object to be measured, 11 is a measuring device, 12 is a fixed base, 13 is a support base, 16 is a movable base, 19 is a column, 22 is a probe, and 23 is a lifting frame.

Claims (1)

(57) [Scope of utility model registration request] 1. A support block which exposes and supports only a measured portion of an object to be measured having a complicated three-dimensional shape, and a support table which is provided on a fixed table and supports the support block.
A sensor for confirming the seating of the support block on the support base, and provided on the fixed base across the support base,
A fixing device that holds and fixes the support block, and is movable in opposite directions, and the supporting base is sandwiched between the fixing device so as to be orthogonal to the fixing device, and the fixing device is provided on the fixing base and moves in opposite directions. A plurality of free movable tables, columns provided on the respective movable tables and movable in a direction orthogonal to the moving direction of the respective movable tables, and vertically movable columns provided to the columns, respectively. A precision measuring device, comprising: a lifting frame that supports a probe that can be swiveled in the vertical and horizontal directions.