JP2024543727A5 - - Google Patents

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Publication number
JP2024543727A5
JP2024543727A5 JP2024534453A JP2024534453A JP2024543727A5 JP 2024543727 A5 JP2024543727 A5 JP 2024543727A5 JP 2024534453 A JP2024534453 A JP 2024534453A JP 2024534453 A JP2024534453 A JP 2024534453A JP 2024543727 A5 JP2024543727 A5 JP 2024543727A5
Authority
JP
Japan
Prior art keywords
radio frequency
frequency power
power supply
output terminal
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024534453A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024543727A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2022/052563 external-priority patent/WO2023114143A1/en
Publication of JP2024543727A publication Critical patent/JP2024543727A/ja
Publication of JP2024543727A5 publication Critical patent/JP2024543727A5/ja
Pending legal-status Critical Current

Links

JP2024534453A 2021-12-17 2022-12-12 複数のコイル間でダイレクトドライブ無線周波数信号生成器から電流をスプリットするための装置および方法 Pending JP2024543727A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163291307P 2021-12-17 2021-12-17
US63/291,307 2021-12-17
PCT/US2022/052563 WO2023114143A1 (en) 2021-12-17 2022-12-12 Apparatus and method for splitting current from direct-drive radiofrequency signal generator between multiple coils

Publications (2)

Publication Number Publication Date
JP2024543727A JP2024543727A (ja) 2024-11-22
JP2024543727A5 true JP2024543727A5 (enExample) 2025-11-26

Family

ID=86773346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024534453A Pending JP2024543727A (ja) 2021-12-17 2022-12-12 複数のコイル間でダイレクトドライブ無線周波数信号生成器から電流をスプリットするための装置および方法

Country Status (4)

Country Link
US (1) US20250174431A1 (enExample)
JP (1) JP2024543727A (enExample)
KR (1) KR20240115350A (enExample)
WO (1) WO2023114143A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024534990A (ja) * 2021-09-17 2024-09-26 ラム リサーチ コーポレーション ダイレクトドライブ無線周波電源に対するコイルの対称的結合

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5800532B2 (ja) * 2011-03-03 2015-10-28 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
TW201405627A (zh) * 2012-07-20 2014-02-01 Applied Materials Inc 具有同軸ｒｆ饋送及同軸遮罩之對稱的感應性耦合電漿源
KR101522891B1 (ko) * 2014-04-29 2015-05-27 세메스 주식회사 플라즈마 발생 유닛 및 그를 포함하는 기판 처리 장치
US10297422B2 (en) * 2015-11-04 2019-05-21 Lam Research Corporation Systems and methods for calibrating conversion models and performing position conversions of variable capacitors in match networks of plasma processing systems
KR101817210B1 (ko) * 2016-08-01 2018-01-15 세메스 주식회사 플라즈마 발생 장치, 그를 포함하는 기판 처리 장치, 및 그 제어 방법

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