JP2024543727A - 複数のコイル間でダイレクトドライブ無線周波数信号生成器から電流をスプリットするための装置および方法 - Google Patents
複数のコイル間でダイレクトドライブ無線周波数信号生成器から電流をスプリットするための装置および方法 Download PDFInfo
- Publication number
- JP2024543727A JP2024543727A JP2024534453A JP2024534453A JP2024543727A JP 2024543727 A JP2024543727 A JP 2024543727A JP 2024534453 A JP2024534453 A JP 2024534453A JP 2024534453 A JP2024534453 A JP 2024534453A JP 2024543727 A JP2024543727 A JP 2024543727A
- Authority
- JP
- Japan
- Prior art keywords
- radio frequency
- coil
- frequency power
- output terminal
- input terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/01—Frequency selective two-port networks
- H03H7/0115—Frequency selective two-port networks comprising only inductors and capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202163291307P | 2021-12-17 | 2021-12-17 | |
| US63/291,307 | 2021-12-17 | ||
| PCT/US2022/052563 WO2023114143A1 (en) | 2021-12-17 | 2022-12-12 | Apparatus and method for splitting current from direct-drive radiofrequency signal generator between multiple coils |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024543727A true JP2024543727A (ja) | 2024-11-22 |
| JP2024543727A5 JP2024543727A5 (enExample) | 2025-11-26 |
Family
ID=86773346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024534453A Pending JP2024543727A (ja) | 2021-12-17 | 2022-12-12 | 複数のコイル間でダイレクトドライブ無線周波数信号生成器から電流をスプリットするための装置および方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20250174431A1 (enExample) |
| JP (1) | JP2024543727A (enExample) |
| KR (1) | KR20240115350A (enExample) |
| WO (1) | WO2023114143A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024534990A (ja) * | 2021-09-17 | 2024-09-26 | ラム リサーチ コーポレーション | ダイレクトドライブ無線周波電源に対するコイルの対称的結合 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5800532B2 (ja) * | 2011-03-03 | 2015-10-28 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
| TW201405627A (zh) * | 2012-07-20 | 2014-02-01 | Applied Materials Inc | 具有同軸ｒｆ饋送及同軸遮罩之對稱的感應性耦合電漿源 |
| KR101522891B1 (ko) * | 2014-04-29 | 2015-05-27 | 세메스 주식회사 | 플라즈마 발생 유닛 및 그를 포함하는 기판 처리 장치 |
| US10297422B2 (en) * | 2015-11-04 | 2019-05-21 | Lam Research Corporation | Systems and methods for calibrating conversion models and performing position conversions of variable capacitors in match networks of plasma processing systems |
| KR101817210B1 (ko) * | 2016-08-01 | 2018-01-15 | 세메스 주식회사 | 플라즈마 발생 장치, 그를 포함하는 기판 처리 장치, 및 그 제어 방법 |
-
2022
- 2022-12-12 US US18/715,676 patent/US20250174431A1/en active Pending
- 2022-12-12 WO PCT/US2022/052563 patent/WO2023114143A1/en not_active Ceased
- 2022-12-12 KR KR1020247023912A patent/KR20240115350A/ko active Pending
- 2022-12-12 JP JP2024534453A patent/JP2024543727A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20250174431A1 (en) | 2025-05-29 |
| WO2023114143A1 (en) | 2023-06-22 |
| KR20240115350A (ko) | 2024-07-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20251117 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20251117 |