JP2024534854A5 - - Google Patents

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Publication number
JP2024534854A5
JP2024534854A5 JP2024513299A JP2024513299A JP2024534854A5 JP 2024534854 A5 JP2024534854 A5 JP 2024534854A5 JP 2024513299 A JP2024513299 A JP 2024513299A JP 2024513299 A JP2024513299 A JP 2024513299A JP 2024534854 A5 JP2024534854 A5 JP 2024534854A5
Authority
JP
Japan
Prior art keywords
arms
helical
inertial sensor
central anchor
proof mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024513299A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024534854A (ja
Filing date
Publication date
Priority claimed from GB2112239.5A external-priority patent/GB2610209A/en
Application filed filed Critical
Publication of JP2024534854A publication Critical patent/JP2024534854A/ja
Publication of JP2024534854A5 publication Critical patent/JP2024534854A5/ja
Pending legal-status Critical Current

Links

JP2024513299A 2021-08-26 2022-08-19 慣性センサおよび方法 Pending JP2024534854A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2112239.5A GB2610209A (en) 2021-08-26 2021-08-26 Inertial sensor and method
GB2112239.5 2021-08-26
PCT/GB2022/052152 WO2023026026A1 (en) 2021-08-26 2022-08-19 Inertial sensor and method

Publications (2)

Publication Number Publication Date
JP2024534854A JP2024534854A (ja) 2024-09-26
JP2024534854A5 true JP2024534854A5 (https=) 2025-08-19

Family

ID=77999576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024513299A Pending JP2024534854A (ja) 2021-08-26 2022-08-19 慣性センサおよび方法

Country Status (5)

Country Link
US (1) US20240369361A1 (https=)
EP (1) EP4392740B1 (https=)
JP (1) JP2024534854A (https=)
GB (1) GB2610209A (https=)
WO (1) WO2023026026A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7658928B2 (ja) * 2022-02-24 2025-04-08 株式会社東芝 センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5450751A (en) * 1993-05-04 1995-09-19 General Motors Corporation Microstructure for vibratory gyroscope
CN1985149B (zh) 2004-07-12 2010-11-03 住友精密工业株式会社 角速度传感器
GB2547415A (en) * 2016-02-09 2017-08-23 Atlantic Inertial Systems Ltd Inertial sensors
US10655964B2 (en) * 2017-08-08 2020-05-19 Hrl Laboratories, Llc High quality factor MEMS silicon flower-of-life vibratory gyroscope

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