JP2024534854A - 慣性センサおよび方法 - Google Patents

慣性センサおよび方法 Download PDF

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Publication number
JP2024534854A
JP2024534854A JP2024513299A JP2024513299A JP2024534854A JP 2024534854 A JP2024534854 A JP 2024534854A JP 2024513299 A JP2024513299 A JP 2024513299A JP 2024513299 A JP2024513299 A JP 2024513299A JP 2024534854 A JP2024534854 A JP 2024534854A
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JP
Japan
Prior art keywords
inertial sensor
proof mass
arms
sensor according
spiral arms
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Pending
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JP2024513299A
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English (en)
Japanese (ja)
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JP2024534854A5 (https=
Inventor
パラジュリ，マダン
セシア，アシュウィン
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Silicon Microgravity Ltd
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Silicon Microgravity Ltd
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Application filed by Silicon Microgravity Ltd filed Critical Silicon Microgravity Ltd
Publication of JP2024534854A publication Critical patent/JP2024534854A/ja
Publication of JP2024534854A5 publication Critical patent/JP2024534854A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Navigation (AREA)
  • Micromachines (AREA)
JP2024513299A 2021-08-26 2022-08-19 慣性センサおよび方法 Pending JP2024534854A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2112239.5A GB2610209A (en) 2021-08-26 2021-08-26 Inertial sensor and method
GB2112239.5 2021-08-26
PCT/GB2022/052152 WO2023026026A1 (en) 2021-08-26 2022-08-19 Inertial sensor and method

Publications (2)

Publication Number Publication Date
JP2024534854A true JP2024534854A (ja) 2024-09-26
JP2024534854A5 JP2024534854A5 (https=) 2025-08-19

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ID=77999576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024513299A Pending JP2024534854A (ja) 2021-08-26 2022-08-19 慣性センサおよび方法

Country Status (5)

Country Link
US (1) US20240369361A1 (https=)
EP (1) EP4392740B1 (https=)
JP (1) JP2024534854A (https=)
GB (1) GB2610209A (https=)
WO (1) WO2023026026A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7658928B2 (ja) * 2022-02-24 2025-04-08 株式会社東芝 センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5450751A (en) * 1993-05-04 1995-09-19 General Motors Corporation Microstructure for vibratory gyroscope
CN1985149B (zh) 2004-07-12 2010-11-03 住友精密工业株式会社 角速度传感器
GB2547415A (en) * 2016-02-09 2017-08-23 Atlantic Inertial Systems Ltd Inertial sensors
US10655964B2 (en) * 2017-08-08 2020-05-19 Hrl Laboratories, Llc High quality factor MEMS silicon flower-of-life vibratory gyroscope

Also Published As

Publication number Publication date
GB202112239D0 (en) 2021-10-13
EP4392740B1 (en) 2025-06-11
US20240369361A1 (en) 2024-11-07
GB2610209A (en) 2023-03-01
WO2023026026A1 (en) 2023-03-02
EP4392740A1 (en) 2024-07-03

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