GB2610209A - Inertial sensor and method - Google Patents

Inertial sensor and method Download PDF

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Publication number
GB2610209A
GB2610209A GB2112239.5A GB202112239A GB2610209A GB 2610209 A GB2610209 A GB 2610209A GB 202112239 A GB202112239 A GB 202112239A GB 2610209 A GB2610209 A GB 2610209A
Authority
GB
United Kingdom
Prior art keywords
inertial sensor
arms
proof mass
sensor according
spiral arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB2112239.5A
Other languages
English (en)
Other versions
GB202112239D0 (en
Inventor
Parajuli Madan
Seshia Ashwin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Enterprise Ltd
Original Assignee
Cambridge Enterprise Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Enterprise Ltd filed Critical Cambridge Enterprise Ltd
Priority to GB2112239.5A priority Critical patent/GB2610209A/en
Publication of GB202112239D0 publication Critical patent/GB202112239D0/en
Priority to JP2024513299A priority patent/JP2024534854A/ja
Priority to US18/686,706 priority patent/US20240369361A1/en
Priority to EP22765185.8A priority patent/EP4392740B1/en
Priority to PCT/GB2022/052152 priority patent/WO2023026026A1/en
Publication of GB2610209A publication Critical patent/GB2610209A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Navigation (AREA)
  • Micromachines (AREA)
GB2112239.5A 2021-08-26 2021-08-26 Inertial sensor and method Pending GB2610209A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB2112239.5A GB2610209A (en) 2021-08-26 2021-08-26 Inertial sensor and method
JP2024513299A JP2024534854A (ja) 2021-08-26 2022-08-19 慣性センサおよび方法
US18/686,706 US20240369361A1 (en) 2021-08-26 2022-08-19 Inertial sensor and method
EP22765185.8A EP4392740B1 (en) 2021-08-26 2022-08-19 Inertial sensor and method
PCT/GB2022/052152 WO2023026026A1 (en) 2021-08-26 2022-08-19 Inertial sensor and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2112239.5A GB2610209A (en) 2021-08-26 2021-08-26 Inertial sensor and method

Publications (2)

Publication Number Publication Date
GB202112239D0 GB202112239D0 (en) 2021-10-13
GB2610209A true GB2610209A (en) 2023-03-01

Family

ID=77999576

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2112239.5A Pending GB2610209A (en) 2021-08-26 2021-08-26 Inertial sensor and method

Country Status (5)

Country Link
US (1) US20240369361A1 (https=)
EP (1) EP4392740B1 (https=)
JP (1) JP2024534854A (https=)
GB (1) GB2610209A (https=)
WO (1) WO2023026026A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7658928B2 (ja) * 2022-02-24 2025-04-08 株式会社東芝 センサ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5450751A (en) * 1993-05-04 1995-09-19 General Motors Corporation Microstructure for vibratory gyroscope
US7637156B2 (en) 2004-07-12 2009-12-29 Sumitomo Precision Products Angular velocity sensor with vibrator having ring portion and electrodes positioned inside and outside the ring portion
US20170227572A1 (en) * 2016-02-09 2017-08-10 Atlantic Inertial Systems, Limited Inertial sensors
US20200256676A1 (en) * 2017-08-08 2020-08-13 Hrl Laboratories, Llc High quality factor mems silicon flower-of-life vibratory gyroscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5450751A (en) * 1993-05-04 1995-09-19 General Motors Corporation Microstructure for vibratory gyroscope
US7637156B2 (en) 2004-07-12 2009-12-29 Sumitomo Precision Products Angular velocity sensor with vibrator having ring portion and electrodes positioned inside and outside the ring portion
US20170227572A1 (en) * 2016-02-09 2017-08-10 Atlantic Inertial Systems, Limited Inertial sensors
US20200256676A1 (en) * 2017-08-08 2020-08-13 Hrl Laboratories, Llc High quality factor mems silicon flower-of-life vibratory gyroscope

Also Published As

Publication number Publication date
GB202112239D0 (en) 2021-10-13
EP4392740B1 (en) 2025-06-11
US20240369361A1 (en) 2024-11-07
JP2024534854A (ja) 2024-09-26
WO2023026026A1 (en) 2023-03-02
EP4392740A1 (en) 2024-07-03

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