JP2024520040A - 流体制御システム - Google Patents
流体制御システム Download PDFInfo
- Publication number
- JP2024520040A JP2024520040A JP2023572961A JP2023572961A JP2024520040A JP 2024520040 A JP2024520040 A JP 2024520040A JP 2023572961 A JP2023572961 A JP 2023572961A JP 2023572961 A JP2023572961 A JP 2023572961A JP 2024520040 A JP2024520040 A JP 2024520040A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- vacuum
- control system
- fluid control
- switching valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
- F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
- F15B11/028—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the actuating force
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0878—Assembly of modular units
- F15B13/0896—Assembly of modular units using different types or sizes of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0817—Multiblock manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0821—Attachment or sealing of modular units to each other
- F15B13/0825—Attachment or sealing of modular units to each other the modular elements being mounted on a common member, e.g. on a rail
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/086—Sensing means, e.g. pressure sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/04—Special measures taken in connection with the properties of the fluid
- F15B21/048—Arrangements for compressed air preparation, e.g. comprising air driers, air condensers, filters, lubricators or pressure regulators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/30—Directional control
- F15B2211/305—Directional control characterised by the type of valves
- F15B2211/3056—Assemblies of multiple valves
- F15B2211/30565—Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve
- F15B2211/30575—Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve in a Wheatstone Bridge arrangement (also half bridges)
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/50—Pressure control
- F15B2211/505—Pressure control characterised by the type of pressure control means
- F15B2211/50554—Pressure control characterised by the type of pressure control means the pressure control means controlling a pressure downstream of the pressure control means, e.g. pressure reducing valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/60—Circuit components or control therefor
- F15B2211/63—Electronic controllers
- F15B2211/6303—Electronic controllers using input signals
- F15B2211/6306—Electronic controllers using input signals representing a pressure
- F15B2211/6313—Electronic controllers using input signals representing a pressure the pressure being a load pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/60—Circuit components or control therefor
- F15B2211/665—Methods of control using electronic components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/60—Circuit components or control therefor
- F15B2211/665—Methods of control using electronic components
- F15B2211/6653—Pressure control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/80—Other types of control related to particular problems or conditions
- F15B2211/885—Control specific to the type of fluid, e.g. specific to magnetorheological fluid
- F15B2211/8855—Compressible fluids, e.g. specific to pneumatics
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/80—Other types of control related to particular problems or conditions
- F15B2211/89—Control specific for achieving vacuum or "negative pressure"
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B5/00—Transducers converting variations of physical quantities, e.g. expressed by variations in positions of members, into fluid-pressure variations or vice versa; Varying fluid pressure as a function of variations of a plurality of fluid pressures or variations of other quantities
- F15B5/006—Transducers converting variations of physical quantities, e.g. expressed by variations in positions of members, into fluid-pressure variations or vice versa; Varying fluid pressure as a function of variations of a plurality of fluid pressures or variations of other quantities with electrical means, e.g. electropneumatic transducer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
- F16K31/0603—Multiple-way valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Valve Housings (AREA)
- Fluid-Pressure Circuits (AREA)
- Control Of Fluid Pressure (AREA)
- Multiple-Way Valves (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/328,379 | 2021-05-24 | ||
| US17/328,379 US12140241B2 (en) | 2021-05-24 | 2021-05-24 | Fluid control system |
| PCT/EP2022/063035 WO2022248249A1 (en) | 2021-05-24 | 2022-05-13 | Pneumatic control system for providing compressed air and vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024520040A true JP2024520040A (ja) | 2024-05-21 |
| JP2024520040A5 JP2024520040A5 (enExample) | 2025-05-20 |
Family
ID=82016320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023572961A Pending JP2024520040A (ja) | 2021-05-24 | 2022-05-13 | 流体制御システム |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12140241B2 (enExample) |
| JP (1) | JP2024520040A (enExample) |
| KR (1) | KR20240013149A (enExample) |
| CN (1) | CN117480325A (enExample) |
| WO (1) | WO2022248249A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20250112799A (ko) * | 2022-11-30 | 2025-07-24 | 생츄어리 코그니티브 시스템즈 코포레이션 | 소형화된 유압 밸브, 및 로봇 시스템에서의 소형화된 유압 밸브의 적용 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04272501A (ja) * | 1991-02-22 | 1992-09-29 | Smc Corp | 空気圧機器の異機種間複合集合体 |
| US20160216713A1 (en) * | 2011-08-20 | 2016-07-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| CN106239371A (zh) * | 2016-09-26 | 2016-12-21 | 天津华海清科机电科技有限公司 | 修整器进气系统以及抛光机 |
| WO2017110066A1 (ja) * | 2015-12-25 | 2017-06-29 | 株式会社フジキン | 流量制御装置および流量制御装置を用いる異常検知方法 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5605179A (en) * | 1995-03-17 | 1997-02-25 | Insync Systems, Inc. | Integrated gas panel |
| KR100232112B1 (ko) * | 1996-01-05 | 1999-12-01 | 아마노 시게루 | 가스공급유닛 |
| JP3650859B2 (ja) * | 1996-06-25 | 2005-05-25 | 忠弘 大見 | 遮断開放器およびこれを備えた流体制御装置 |
| US6293310B1 (en) * | 1996-10-30 | 2001-09-25 | Unit Instruments, Inc. | Gas panel |
| US5836355A (en) * | 1996-12-03 | 1998-11-17 | Insync Systems, Inc. | Building blocks for integrated gas panel |
| JP3326683B2 (ja) * | 1997-09-24 | 2002-09-24 | 株式会社フジキン | ボルト抜止め装置 |
| JP4378553B2 (ja) * | 1997-10-13 | 2009-12-09 | 忠弘 大見 | 流体制御装置 |
| JP3360133B2 (ja) * | 1998-11-11 | 2002-12-24 | 株式会社フジキン | 流体制御装置用継手部材およびその製造方法 |
| US6095184A (en) * | 1999-06-30 | 2000-08-01 | Mac Valves Inc. | Pressure regulator with integrated control valve, adjustable downstream pressure build and quick exhaust |
| JP2002349797A (ja) * | 2001-05-23 | 2002-12-04 | Fujikin Inc | 流体制御装置 |
| DE10242969B3 (de) * | 2002-09-17 | 2004-04-29 | Festo Ag & Co. | Pneumatische Anordnung mit mehreren Wartungsmodulen zur Druckluftaufbereitung |
| US6772784B1 (en) * | 2003-04-11 | 2004-08-10 | Mac Valves, Inc. | Proportional pressure regulator having positive and negative pressure delivery capability |
| EP3064242A1 (en) * | 2003-04-28 | 2016-09-07 | Advanced Circulatory Systems Inc. | Ventilator and methods for treating head trauma and low blood circulation |
| US7051749B2 (en) * | 2003-11-24 | 2006-05-30 | Advanced Technology Materials, Inc. | Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications |
| US8104516B2 (en) * | 2006-06-02 | 2012-01-31 | Ckd Corporation | Gas supply unit and gas supply system |
| US7806143B2 (en) * | 2007-06-11 | 2010-10-05 | Lam Research Corporation | Flexible manifold for integrated gas system gas panels |
| US7784497B2 (en) * | 2007-07-12 | 2010-08-31 | Eriksson Mark L | MSM component and associated gas panel assembly |
| US8322380B2 (en) * | 2007-10-12 | 2012-12-04 | Lam Research Corporation | Universal fluid flow adaptor |
| CN101910706B (zh) * | 2007-12-27 | 2013-11-13 | 朗姆研究公司 | 短蚀刻配方的气体传输延迟解决方案 |
| CN101984038B (zh) * | 2010-09-10 | 2013-04-03 | 北京航空航天大学 | 一种用于微小生物体的气动微操作装置 |
| US9690301B2 (en) * | 2012-09-10 | 2017-06-27 | Reno Technologies, Inc. | Pressure based mass flow controller |
| US9188989B1 (en) * | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
| US20160041564A1 (en) * | 2012-08-20 | 2016-02-11 | Daniel T. Mudd | Reverse flow mode for regulating pressure of an accumulated volume with fast upstream bleed down |
| US9448564B2 (en) * | 2013-02-15 | 2016-09-20 | Reno Technologies, Inc. | Gas delivery system for outputting fast square waves of process gas during semiconductor processing |
| JP5665793B2 (ja) * | 2012-04-26 | 2015-02-04 | 株式会社フジキン | 可変オリフィス型圧力制御式流量制御器 |
| JP5753831B2 (ja) * | 2012-11-29 | 2015-07-22 | 株式会社フジキン | 流体制御装置 |
| JP5775110B2 (ja) * | 2013-03-26 | 2015-09-09 | 株式会社フジキン | 流量制御装置用の流量制御弁 |
| JP6321972B2 (ja) * | 2014-01-21 | 2018-05-09 | 株式会社フジキン | 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法 |
| US10605274B2 (en) * | 2015-06-09 | 2020-03-31 | Festo Ag & Co. Kg | Valve arrangement |
| WO2017033757A1 (ja) * | 2015-08-26 | 2017-03-02 | 株式会社フジキン | 分流システム |
| US10679880B2 (en) * | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
| US10303189B2 (en) * | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
-
2021
- 2021-05-24 US US17/328,379 patent/US12140241B2/en active Active
-
2022
- 2022-05-13 JP JP2023572961A patent/JP2024520040A/ja active Pending
- 2022-05-13 KR KR1020237043759A patent/KR20240013149A/ko active Pending
- 2022-05-13 CN CN202280037029.XA patent/CN117480325A/zh active Pending
- 2022-05-13 WO PCT/EP2022/063035 patent/WO2022248249A1/en not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04272501A (ja) * | 1991-02-22 | 1992-09-29 | Smc Corp | 空気圧機器の異機種間複合集合体 |
| US20160216713A1 (en) * | 2011-08-20 | 2016-07-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| WO2017110066A1 (ja) * | 2015-12-25 | 2017-06-29 | 株式会社フジキン | 流量制御装置および流量制御装置を用いる異常検知方法 |
| CN106239371A (zh) * | 2016-09-26 | 2016-12-21 | 天津华海清科机电科技有限公司 | 修整器进气系统以及抛光机 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20220372997A1 (en) | 2022-11-24 |
| KR20240013149A (ko) | 2024-01-30 |
| US12140241B2 (en) | 2024-11-12 |
| CN117480325A (zh) | 2024-01-30 |
| WO2022248249A1 (en) | 2022-12-01 |
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