JP2024508954A - ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法 - Google Patents

ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法 Download PDF

Info

Publication number
JP2024508954A
JP2024508954A JP2023554352A JP2023554352A JP2024508954A JP 2024508954 A JP2024508954 A JP 2024508954A JP 2023554352 A JP2023554352 A JP 2023554352A JP 2023554352 A JP2023554352 A JP 2023554352A JP 2024508954 A JP2024508954 A JP 2024508954A
Authority
JP
Japan
Prior art keywords
gas
pressure
container
regulator
pressure regulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023554352A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024508954A5 (https=
Inventor
エドワード イー. ジョーンズ,
ジョーゼフ アール. デプレ,
サラ エー. ウッツ,
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of JP2024508954A publication Critical patent/JP2024508954A/ja
Publication of JP2024508954A5 publication Critical patent/JP2024508954A5/ja
Priority to JP2025113429A priority Critical patent/JP2025169241A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/002Details of vessels or of the filling or discharging of vessels for vessels under pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/04Arrangement or mounting of valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C1/00Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C11/00Use of gas-solvents or gas-sorbents in vessels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01Shape
    • F17C2201/0104Shape cylindrical
    • F17C2201/0114Shape cylindrical with interiorly curved end-piece
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00Vessel construction, in particular geometry, arrangement or size
    • F17C2201/03Orientation
    • F17C2201/032Orientation with substantially vertical main axis
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338Pressure regulators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0382Constructional details of valves, regulators
    • F17C2205/0385Constructional details of valves, regulators in blocks or units
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388Arrangement of valves, regulators, filters
    • F17C2205/0391Arrangement of valves, regulators, filters inside the pressure vessel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388Arrangement of valves, regulators, filters
    • F17C2205/0394Arrangement of valves, regulators, filters in direct contact with the pressure vessel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/035High pressure (>10 bar)
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/036Very high pressure (>80 bar)
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/033Small pressure, e.g. for liquefied gas
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06Controlling or regulating of parameters as output values
    • F17C2250/0605Parameters
    • F17C2250/0626Pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06Controlling or regulating of parameters as output values
    • F17C2250/0689Methods for controlling or regulating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00Effects achieved by gas storage or gas handling
    • F17C2265/06Fluid distribution
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00Applications
    • F17C2270/05Applications for industrial use
    • F17C2270/0518Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Control Of Fluid Pressure (AREA)
JP2023554352A 2021-03-09 2022-03-08 ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法 Pending JP2024508954A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025113429A JP2025169241A (ja) 2021-03-09 2025-07-04 ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163158749P 2021-03-09 2021-03-09
US63/158,749 2021-03-09
PCT/US2022/019345 WO2022192260A1 (en) 2021-03-09 2022-03-08 Gas storage and dispensing container and a method of dispensing therefrom

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025113429A Division JP2025169241A (ja) 2021-03-09 2025-07-04 ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法

Publications (2)

Publication Number Publication Date
JP2024508954A true JP2024508954A (ja) 2024-02-28
JP2024508954A5 JP2024508954A5 (https=) 2024-12-25

Family

ID=83158063

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023554352A Pending JP2024508954A (ja) 2021-03-09 2022-03-08 ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法
JP2025113429A Pending JP2025169241A (ja) 2021-03-09 2025-07-04 ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025113429A Pending JP2025169241A (ja) 2021-03-09 2025-07-04 ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法

Country Status (6)

Country Link
US (1) US12422100B2 (https=)
JP (2) JP2024508954A (https=)
KR (1) KR102930031B1 (https=)
CN (2) CN115046126B (https=)
TW (1) TWI813195B (https=)
WO (1) WO2022192260A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022192260A1 (en) 2021-03-09 2022-09-15 Entegris, Inc. Gas storage and dispensing container and a method of dispensing therefrom
CN120693481A (zh) * 2023-01-24 2025-09-23 恩特格里斯公司 压力调节器
LU504746B1 (en) * 2023-07-14 2025-01-14 Rotarex S A Device for gas cylinder with shut-off valve, refill valve and pressure reducer in the gas cylinder

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6257000B1 (en) * 2000-03-22 2001-07-10 Luping Wang Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
JP2016506252A (ja) * 2012-11-09 2016-03-03 ビーイー・エアロスペース・インコーポレーテッドB/E Aerospace, Inc. 航空機洗面所酸素源
JP2018009702A (ja) * 2012-09-21 2018-01-18 インテグリス・インコーポレーテッド 圧力調整流体貯蔵および送達容器の耐スパイク圧力管理
US20200088352A1 (en) * 2018-09-13 2020-03-19 Entegris, Inc. Adsorbent-based, mechanically-regulated gas storage and delivery vessel
US20200284364A1 (en) * 2018-03-28 2020-09-10 Temc Co., Ltd. Cylinder comprising fluid pressure adjustment valve having improved storage capability

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6660063B2 (en) * 1998-03-27 2003-12-09 Advanced Technology Materials, Inc Sorbent-based gas storage and delivery system
US6343476B1 (en) * 1998-04-28 2002-02-05 Advanced Technology Materials, Inc. Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
US6360546B1 (en) 2000-08-10 2002-03-26 Advanced Technology Materials, Inc. Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
US6959724B2 (en) 2002-07-01 2005-11-01 Praxair Technology, Inc. Multiple regulator vacuum delivery valve assembly
WO2009079218A2 (en) 2007-12-06 2009-06-25 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Integrated valve regulator assembly and system for the controlled storage and dispensing of a hazardous material
US9128491B2 (en) 2008-10-21 2015-09-08 Luxembourg Patent Company S.A. Regulator for corrosive gas tapping in under-atmospheric conditions
US20190078696A1 (en) 2015-07-09 2019-03-14 Entegris, Inc. Fluid supply package
LU93059B1 (en) 2016-05-09 2017-12-22 Luxembourg Patent Co Gas cylinder valve with a connected sensing unit
US11086341B2 (en) 2017-11-29 2021-08-10 Parker-Hannifin Corporation Variable venturi assist pressure regulator
KR102037372B1 (ko) 2018-03-28 2019-10-28 태광후지킨 주식회사 실린더용 유체압력조정밸브체
WO2022192260A1 (en) 2021-03-09 2022-09-15 Entegris, Inc. Gas storage and dispensing container and a method of dispensing therefrom

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6257000B1 (en) * 2000-03-22 2001-07-10 Luping Wang Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
JP2018009702A (ja) * 2012-09-21 2018-01-18 インテグリス・インコーポレーテッド 圧力調整流体貯蔵および送達容器の耐スパイク圧力管理
JP2016506252A (ja) * 2012-11-09 2016-03-03 ビーイー・エアロスペース・インコーポレーテッドB/E Aerospace, Inc. 航空機洗面所酸素源
US20200284364A1 (en) * 2018-03-28 2020-09-10 Temc Co., Ltd. Cylinder comprising fluid pressure adjustment valve having improved storage capability
US20200088352A1 (en) * 2018-09-13 2020-03-19 Entegris, Inc. Adsorbent-based, mechanically-regulated gas storage and delivery vessel

Also Published As

Publication number Publication date
KR20230154465A (ko) 2023-11-08
TW202242299A (zh) 2022-11-01
KR102930031B1 (ko) 2026-02-26
CN115046126A (zh) 2022-09-13
CN115046126B (zh) 2026-03-20
WO2022192260A1 (en) 2022-09-15
US12422100B2 (en) 2025-09-23
JP2025169241A (ja) 2025-11-12
US20220290812A1 (en) 2022-09-15
CN217875276U (zh) 2022-11-22
TWI813195B (zh) 2023-08-21

Similar Documents

Publication Publication Date Title
JP2025169241A (ja) ガス保管計量分配コンテナおよび当該ガス保管計量分配コンテナからの計量分配の方法
JP4279191B2 (ja) 気体化合物の貯蔵と送出のシステム
US6540819B2 (en) Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US5707424A (en) Process system with integrated gas storage and delivery unit
KR100416424B1 (ko) 유체 저장 및 분배 시스템
EP0854749B1 (en) Fluid storage and delivery system comprising high work capacity physical sorbent
WO2003097215A1 (en) Sorbent-based gas storage and delivery system
JP2003532034A (ja) 収着剤ベースのガス貯蔵及び供給システムを備えるガスキャビネットアセンブリ
CN106536377A (zh) 压力调节式流体储存与施配容器的基于吸附剂的压力稳定
JP2021535989A (ja) 機械的に調節された吸着剤ベースのガス貯蔵送出容器
US7160359B2 (en) Built in purifier for reactive gases
JP2024508954A5 (https=)
JP7602629B2 (ja) ゼオライト系吸着剤を使用してGeH4を貯蔵するための貯蔵送出容器
CN114728264B (zh) 利用高性能结构改性颗粒碳吸附剂的掺杂剂流体储存和分配系统
US11692671B2 (en) Apparatus and method for dispensing gas from a storage vessel
US20230227309A1 (en) STORAGE AND DELIVERY VESSEL FOR STORING GeH4, USING A ZEOLITIC ADSORBENT
KR100582876B1 (ko) 대용량의 가스 저장 및 분배 장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231130

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231130

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240917

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20241217

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20250311

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250704