JP2024070355A - Tape application device - Google Patents

Abstract

[Problem] To provide a tape application device that can apply tape to a workpiece while applying the same tension to the tape every time. [Solution] A tape application device 2 includes a holding table 4 that holds the workpiece, a tape feed shaft 6 that rotates while supporting the axis of a rolled tape Tr equipped with a release paper P, a tape application roller 8 that presses the tape T against the workpiece held on the holding table 4 to apply it, a take-up roller 10 that winds up the release paper P, a guide roller 12 that guides the release paper P to the take-up roller 10, and a control means 14. In order for the tape feed shaft 6 to maintain a predetermined tension, the control means 14 measures the rotation angle of the tape feed shaft 6 relative to the amount of rolled tape Tr fed out, finds the radius of the rolled tape Tr, and controls "radius x tension = torque of the tape feed shaft." [Selected Figure] Figure 1

Description

The present invention relates to a tape application device that applies tape to a workpiece.

The wafer has a surface on which a device area, into which multiple devices such as ICs and LSIs are partitioned by planned division lines, and a peripheral excess area surrounding the device area, and the back surface is ground to the desired thickness. After that, the wafer is divided into individual device chips using a dicing machine and a laser processing machine, and each divided device chip is used in electrical equipment such as mobile phones and personal computers.

The applicant has also proposed a technology in which, in order to facilitate the transportation of the ground wafer, a ring-shaped reinforcing portion is left on the back surface corresponding to the peripheral excess area, and the wafer is subjected to a specified processing, after which a dicing tape is attached to the back surface of the wafer and the wafer is supported by a frame, and the ring-shaped reinforcing portion is then removed from the wafer (see Patent Document 1).

Furthermore, since it is difficult to attach a dicing tape to the back surface of a wafer with a ring-shaped reinforcing portion formed on the outer periphery and to integrate it with a frame, and it is also difficult to cut the ring-shaped reinforcing portion and remove it from the device region, resulting in poor productivity, the applicant developed a processing device that removes the reinforcing portion from a wafer with a ring-shaped reinforcing portion formed in a convex shape on the back surface of the outer periphery excess region (see Patent Document 2).

JP 2010-62375 A JP 2022-19392 A

However, there is a problem in that it is difficult to apply the same tension to the tape every time in the tape application means that is disposed on top of the frame table that constitutes the processing device and applies the tape to the frame. If the tape tension differs depending on the frame, there is a risk that chips will occur in the devices when the wafer, which is housed in the opening of the frame via the tape, is divided into individual devices, reducing the quality of the device chips.

The objective of the present invention is to provide a tape application device that can apply tape to a workpiece while applying the same tension to the tape every time.

According to the present invention, there is provided a tape application device that solves the above problems.
"A tape application device for applying tape to a workpiece,
A holding table for holding the workpiece;
a tape feed shaft that rotates and supports the axis of a roll of tape provided with a release paper;
a tape application roller for pressing the tape against the work held on the holding table to apply the tape;
a take-up roller for taking up the release paper;
a guide roller for guiding the release paper to the take-up roller;
and a control means,
The control means measures the rotation angle of the tape feed shaft relative to the amount of the rolled tape fed out so that the tape feed shaft maintains a predetermined tension, calculates the radius of the rolled tape, and controls "radius x tension = torque of the tape feed shaft."

The tape application device of the present invention comprises:
A holding table for holding the workpiece;
a tape feed shaft that rotates and supports the axis of a roll of tape provided with a release paper;
a tape application roller for pressing the tape against the work held on the holding table to apply the tape;
a take-up roller for taking up the release paper;
a guide roller for guiding the release paper to the take-up roller;
and a control means,
In order to maintain a specified tension on the tape feed shaft, the control means measures the rotation angle of the tape feed shaft relative to the amount of the rolled tape fed, calculates the radius of the rolled tape, and controls ``radius x tension = torque of the tape feed shaft''.Therefore, even if the radius of the rolled tape becomes smaller, the tape can be applied to the workpiece with the same tension applied to the tape each time.

1 is a perspective view of a tape application device constructed in accordance with the present invention; FIG. 2 is a development view of the rolled tape shown in FIG. 1 . FIG. 2 is a schematic diagram showing a state in which a frame is held on the holding table shown in FIG. 1 . 4 is a schematic diagram showing a state in which the tape and the release paper are fed out from the roll tape shown in FIG. 3 . FIG. 4 is a schematic diagram showing a state in which tension is applied to the tape and release paper from the tape feed shaft. FIG. 4 is a schematic diagram showing the state in which peeling of the tape from the release paper has begun. FIG. 13 is a schematic diagram showing a state in which tape is attached to a frame. FIG. 13 is a schematic diagram showing the state after tape application to the frame is completed.

Below, a preferred embodiment of the tape application device according to the present invention will be described with reference to the drawings.

(Tape application device 2)
Referring to Figure 1, the tape application device, generally designated by the reference symbol 2, includes a holding table 4 for holding a workpiece, a tape feed shaft 6 which rotates and supports the axis of a rolled tape Tr provided with a release paper P, a tape application roller 8 which presses the tape T against the workpiece held on the holding table 4 to apply it, a take-up roller 10 which winds up the release paper P, a guide roller 12 which guides the release paper P to the take-up roller 10, and a control means 14 which controls the operation of the tape application device 2.

(Holding table 4)
The upper surface of the holding table 4 is provided with a plurality of suction holes 4a for suction-holding the workpiece, and the suction holes 4a are connected to a suction means (not shown). The plurality of suction holes 4a are arranged in a ring shape at intervals in the circumferential direction. In the holding table 4, the suction means generates a suction force in the suction holes 4a, so that the workpiece placed on the upper surface of the holding table 4 is suction-held.

Figure 1 shows an annular frame F as an example of a workpiece that is suction-held by the holding table 4. The frame F has a circular opening Fa in the center that accommodates a disk-shaped wafer (not shown). The workpiece to which the tape T is attached may also be a wafer.

(Tape feed shaft 6)
1, the tape feed shaft 6 supports the axis of a roll of tape Tr equipped with a release paper P. A torque applying means 16 that applies torque to the roll of tape Tr is attached to the tape feed shaft 6. The torque applying means 16 has a torque applying motor 16a connected to the tape feed shaft 6, and an encoder (not shown) that detects the rotation angle of the tape feed shaft 6.

(Rolled tape Tr)
2 shows a development view of the rolled tape Tr supported by the tape feed shaft 6. The rolled tape Tr has a band-shaped release paper P and a plurality of circular pieces of tape T attached to one side of the release paper P at intervals L in the longitudinal direction of the release paper P. The interval L is the center distance between two adjacent pieces of tape T.

Tape T may be an adhesive tape with an adhesive layer (glue layer) on one side, or a thermocompression sheet without an adhesive layer. A thermocompression sheet is a sheet of thermoplastic synthetic resin (e.g., polyolefin resin) that softens or melts and exerts adhesive power when heated to a temperature close to its melting point. When tape T is a thermocompression sheet, at least one of the holding table 4 or the tape application roller 8 is provided with a heating means for heating tape T to a temperature at which it softens or melts.

(Tape application roller 8)
1, the tape application roller 8 is rotatably supported by a bracket 18. This bracket 18 also rotatably supports a feed roller 20 that feeds out the tape T together with the release paper P from the rolled tape Tr supported by the tape feed shaft 6. The tape application roller 8 and the feed roller 20 are disposed at a distance from each other in the Y-axis direction.

Although not shown, bracket moving means is attached to the bracket 18 for moving the bracket 18 in the Y-axis direction. The moving means may, for example, have a ball screw connected to the bracket 18 and extending in the Y-axis direction, and a motor for rotating the ball screw. When the bracket 18 is moved by the bracket moving means, the tape application roller 8 and the feed roller 20 move (roll) in the Y-axis direction while rotating.

The Y-axis direction is the direction indicated by the arrow Y in FIG. 1. The X-axis direction indicated by the arrow X in FIG. 1 is the direction perpendicular to the Y-axis direction, and the Z-axis direction indicated by the arrow Z in FIG. 1 is the up-down direction perpendicular to the X-axis and Y-axis directions. The XY plane defined by the X-axis and Y-axis directions is substantially horizontal.

(Winding roller 10)
After the tape T has been applied to the workpiece, the take-up roller 10 takes up the release paper P from which the tape T has been peeled off. A take-up motor 22 that rotates the take-up roller 10 is attached to the take-up roller 10.

(Guide roller 12)
The guide roller 12 is disposed between the tape application roller 8 and the take-up roller 10. In the illustrated embodiment, a pair of guide rollers 12 is provided, and one of the guide rollers 12 is connected to a guide motor 24 that rotates the one guide roller 12. When one guide roller 12 is rotated by the guide motor 24, the other guide roller 12 also rotates in conjunction with the other guide roller 12. As a result, the release paper P sandwiched between the pair of guide rollers 12 is guided to the take-up roller 10.

(Control means 14)
The control means 14 is composed of a computer having a processor and a memory, and controls the operation of the torque applying means 16, the take-up motor 22, the guide motor 24, and the bracket moving means. In addition, the control means 14 receives the detection result of the encoder of the torque applying means 16 (the rotation angle of the tape feed shaft 6).

In order to maintain a constant tension H of the tape feed shaft 6, the control means 14 determines the radius R of the rolled tape Tr based on the detection result of the encoder (the rotation angle of the tape feed shaft 6),
"Radius R x tension H = torque Trq of tape feed shaft 6"
The control is designed to:

(Tape application method)
Next, a method for applying the tape T to the frame F as a workpiece using the above-mentioned tape application device 2 will be described.

(Holding process)
First, a holding step is performed in which the frame F is held on the upper surface of the holding table 4. In the holding step, after the frame F is placed on the upper surface of the holding table 4, suction force is generated in the suction holes 4a of the holding table 4, and the frame F is suction-held on the upper surface of the holding table 4. When the frame F is placed on the holding table 4, the tape application roller 8 and the feed roller 20 are positioned in their initial positions (positions shown in FIG. 3) on the tape feed shaft 6 side.

(Feeding process)
After the holding step, a delivery step is carried out in which the tape T and the release paper P are delivered from the rolled tape Tr.

In the feeding process, the control means 14 operates the bracket moving means to move the feed roller 20 in the Y-axis direction to a feed position (position shown in FIG. 4) a predetermined distance away from the initial position. This causes the release paper P to be fed out from the rolled tape Tr by a predetermined feed amount L, which corresponds to the center-to-center distance L of the tape T.

In the feeding process, the torque applying motor 16a allows the tape feed shaft 6 to rotate, and the winding motor 22 is controlled by the control means 14 to prevent the winding roller 10 from rotating. Therefore, the tape T and release paper P are fed out from the rolled tape Tr supported by the tape feed shaft 6, while the release paper P wound around the winding roller 10 is not pulled back toward the holding table 4.

(Radius calculation process)
During the feeding step, a radius calculation step is also performed in which the rotation angle θ of the tape feeding shaft 6 relative to the feed amount L of the rolled tape Tr is measured to obtain the radius R of the rolled tape Tr.

As described above, the control means 14 receives the rotation angle θ of the tape feed shaft 6 from the encoder of the torque applying means 16. Therefore, the control means 14 uses the feed amount L (constant value) of the rolled tape Tr when the feed roller 20 is moved from the initial position to the feed position and the rotation angle θ of the tape feed shaft 6 to calculate the radius R of the rolled tape Tr supported by the tape feed shaft 6 from the following formula 1.
R θ = L
R = L / θ (Equation 1)

Since the feed amount L is set to a constant value, by detecting the rotation angle θ of the tape feed shaft 6, the radius R of the rolled tape Tr at the time when the rotation angle θ is detected can be calculated.

(Torque calculation process)
After the radius calculation step is performed, a torque calculation step is performed in which the torque Trq applied from the torque applying motor 16a to the tape feed shaft 6 when the tape T is adhered to the frame F is calculated using the following equation 2.
Trq = R H
Trq=(L/θ)·H (Equation 2)

H in Equation 2 is the tension applied by the tape feed shaft 6 to the released release paper P and tape T (see Figure 5).

(Attachment process)
After the torque calculation step, a bonding step is performed in which the tape T fed from the rolled tape Tr is bonded to the frame F.

In the bonding process, signals are output from the control means 14 to the winding motor 22, the guide motor 24, the bracket moving means, and the torque applying motor 16a. Then, as shown in Figures 5 and 6, the release paper P fed from the rolled tape Tr is guided by the pair of guide rollers 12 and wound up by the winding roller 10.

In addition, the bracket moving means is actuated by a signal output from the control means 14 to the bracket moving means, and the tape application roller 8 and the feed roller 20 move from the feed position toward the initial position. As a result, as shown in FIG. 6, the tape T is gradually peeled off from the release paper P fed from the rolled tape Tr, and as shown in FIG. 7, the peeled tape T is pressed against the frame F on the holding table 4 by the tape application roller 8 and adhered thereto.

Furthermore, in the bonding process, the torque Trq calculated in the torque calculation process is applied from the torque applying motor 16a to the tape feed shaft 6 by a signal output from the control means 14 to the torque applying motor 16a. Specifically, a controlled torque Trq is applied to the tape feed shaft 6 so that the tape feed shaft 6 maintains a predetermined tension H, that is, the same tension H is applied to the tape T every time.

As described above, since the feed amount L is constant, the torque Trq applied to the tape feed shaft 6 is controlled according to the rotation angle θ of the tape T (i.e., the radius R of the rolled tape Tr) so that the same tension H is applied to the tape T every time (see Equation 2).

In this way, the tape application roller 8 is rolled toward the initial position in the direction shown by the arrow H in Figures 5 to 7 while applying a predetermined tension H to the released release paper P and tape T. As a result, as shown in Figure 8, when the tape application roller 8 is positioned at the initial position, the tape T peeled off from the release paper P can be applied to the frame F with the predetermined tension H.

Unlike the embodiment described above, if a constant torque is applied to the tape feed shaft 6 each time, as is clear from the above formula 2, the tension H applied to the tape T increases as the radius R of the rolled tape Tr decreases.

However, in the illustrated embodiment of the tape application device 2, the radius R of the rolled tape Tr is calculated from the rotation angle θ of the rolled tape Tr when a predetermined feed amount L of tape T is fed from the tape feed shaft 6, and the torque Trq (torque corresponding to the radius R of the rolled tape Tr) calculated from the above formula 2 is applied to the tape feed shaft 6. Therefore, even if the radius R of the rolled tape Tr becomes smaller, the tape T can be applied to the frame F (work) with the same tension H applied to the fed tape T each time.

When the tape T is a thermocompression sheet, the temperature of the upper surface of the holding table 4 or the temperature of the outer peripheral surface of the tape application roller 8 is adjusted to a temperature at which the tape T softens or melts, and then the tape application roller 8 is rolled toward the initial position while applying a predetermined tension H to the released release paper P and tape T, so that the tape T peeled off from the release paper P can be thermocompressed to the frame F with the predetermined tension H.

When the adhering process is completed, the suction force of the holding table 4 is released, and the frame F with the tape T attached is transported from the holding table 4. The above-mentioned holding process, feeding process, radius calculation process, torque calculation process, and adhering process are then repeated to sequentially adhere the tape T to multiple frames F.

As described above, with the tape application device 2 of the illustrated embodiment, even if the radius R of the rolled tape Tr becomes smaller, the tape T can be applied to the frame F (work) with the same tension H applied to the tape T fed out each time.

2: Tape application device 4: Holding table 6: Tape feed shaft 8: Tape application roller 10: Take-up roller 12: Guide roller 14: Control means P: Release paper T: Tape Tr: Rolled tape Trq: Torque

Claims (1)

A tape application device for applying tape to a workpiece, comprising:
A holding table for holding the workpiece;
a tape feed shaft that rotates and supports the axis of a roll of tape provided with a release paper;
a tape application roller for pressing the tape against the work held on the holding table to apply the tape;
a take-up roller for taking up the release paper;
a guide roller for guiding the release paper to the take-up roller;
and a control means,
The control means of this tape application device measures the rotation angle of the tape feed shaft relative to the amount of the rolled tape fed out, calculates the radius of the rolled tape, and controls ``radius x tension = torque of the tape feed shaft'' in order to maintain a predetermined tension on the tape feed shaft.

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