JP2024064788A - Substrate processing apparatus, substrate processing method, and chamber cleaning method - Google Patents

Abstract

[Problem] To provide a substrate processing apparatus, a substrate processing method, and a chamber cleaning method capable of reducing contamination of a substrate caused by a chemical atmosphere. [Solution] A substrate processing apparatus (100) includes a chamber (201), a blower mechanism (3), a substrate holding unit (4), a substrate rotating unit (5), a first mixed liquid ejection unit (6), and a first superheated water steam blower (31). Substrate processing is performed in the chamber (201). The blower mechanism (3) blows air into the chamber (201). The substrate holding unit (4) holds a substrate (W) in the chamber (201). The substrate rotating unit (5) rotates the substrate (W) held by the substrate holding unit (4). The first mixed liquid ejection unit (6) ejects a first mixed liquid (SPM) of sulfuric acid and hydrogen peroxide toward the substrate (W) rotated by the substrate rotating unit (5). The first superheated water steam blower (31) is located between the blower mechanism (3) and the substrate (W) held by the substrate holding unit (4). The first superheated water steam blower (31) blows superheated water steam into the chamber (201). [Selected figure] Figure 2

Description

The present invention relates to a substrate processing apparatus, a substrate processing method, and a chamber cleaning method.

Single-wafer substrate processing equipment is known that processes substrates by discharging a chemical solution from a nozzle toward the substrate. When the chemical solution is discharged from the nozzle, a chemical solution atmosphere containing chemical solution components is generated near the substrate. A chemical solution atmosphere is also generated near the substrate when the chemical solution collides with a chuck pin or a cup. In particular, when SPM (sulfuric acid/hydrogen peroxide mixture) at 100°C or higher is discharged from the nozzle, the water contained in the SPM evaporates, causing droplets and mist of the SPM to spray from the nozzle. In some cases, fumes (smoke-like gas) are generated from the substrate due to the reaction between the SPM and the resist.

Most of the chemical atmosphere is sent into the cup by the downflow of clean air created in the chamber and the suction force of the exhaust equipment. However, some of the chemical atmosphere may diffuse into the space outside the cup and adhere to the substrate after drying. Some of the chemical atmosphere may also adhere to components placed above the substrate or to the inner wall surfaces of the chamber. In this case, there is a risk of the substrate becoming contaminated.

Patent Document 1 discloses a substrate processing apparatus that sprays water into a chamber to generate a mist in the chamber, and combines the water particles contained in the mist with the chemical particles contained in the chemical atmosphere. The combination of the water particles and the chemical particles makes it difficult for the chemical particles to float, and as a result, the diffusion of the chemical atmosphere is suppressed.

JP 2016-12629 A

However, if mist is generated inside the chamber, the moisture contained in the mist can lower the temperature of the substrate, potentially reducing the efficiency of resist stripping using SPM. Therefore, there is room for further improvement in technology for reducing substrate contamination caused by the chemical atmosphere.

The present invention has been made in consideration of the above problems, and its purpose is to provide a substrate processing apparatus, a substrate processing method, and a chamber cleaning method that can reduce contamination of substrates caused by a chemical atmosphere.

According to one aspect of the present invention, a substrate processing apparatus includes a chamber, a blowing mechanism, a substrate holding unit, a substrate rotating unit, a first mixed liquid discharge unit, and a first superheated water steam blowing unit. Substrate processing is performed in the chamber. The blowing mechanism blows air into the chamber. The substrate holding unit holds a substrate in the chamber. The substrate rotating unit rotates the substrate held by the substrate holding unit. The first mixed liquid discharge unit is located in the chamber. The first mixed liquid discharge unit discharges a first mixed liquid, which is a mixture of sulfuric acid and hydrogen peroxide, toward the substrate rotated by the substrate rotating unit. The first superheated water steam blowing unit is located between the blowing mechanism and the substrate held by the substrate holding unit. The first superheated water steam blowing unit blows superheated water steam into the chamber.

In one embodiment, the substrate processing apparatus further includes a control unit. The control unit controls the ejection of the first mixed liquid from the first mixed liquid ejection unit and the ejection of the superheated steam from the first superheated steam blowing unit. The control unit causes the first superheated steam blowing unit to eject the superheated steam when ejecting the first mixed liquid.

In one embodiment, the substrate processing apparatus further includes a liquid receiving section and a second superheated steam blowing section. The liquid receiving section receives the first mixed liquid discharged from the substrate rotated by the substrate rotating section. The second superheated steam blowing section is supported by the liquid receiving section. The second superheated steam blowing section blows the superheated steam toward the substrate held by the substrate holding section.

In one embodiment, the control unit further controls the blowing of the superheated water steam from the second superheated water steam blowing unit and the rotation of the substrate by the substrate rotation unit. The control unit controls the rotation speed of the substrate when the first mixed liquid is discharged to form a liquid film of the first mixed liquid on the upper surface of the substrate. The control unit stops the discharge of the first mixed liquid and controls the rotation speed of the substrate to form a puddle state in which the liquid film is supported on the upper surface of the substrate. The control unit blows the superheated water steam from the first superheated water steam blowing unit and the second superheated water steam blowing unit when the puddle state is formed.

In one embodiment, the second superheated steam blowing section includes an upper superheated steam blowing section and a lower superheated steam blowing section. The upper superheated steam blowing section blows the superheated steam toward the upper surface of the substrate held by the substrate holding section. The lower superheated steam blowing section blows the superheated steam toward the lower surface of the substrate held by the substrate holding section.

In one embodiment, the first mixed liquid discharge unit exclusively discharges the first mixed liquid and hydrogen peroxide solution. The control unit further controls the discharge of the hydrogen peroxide solution from the first mixed liquid discharge unit. The control unit stops the blowing of the superheated water vapor when the hydrogen peroxide solution is discharged.

In one embodiment, the first mixed liquid discharge unit exclusively discharges the first mixed liquid and hydrogen peroxide solution. The control unit further controls the discharge of the hydrogen peroxide solution from the first mixed liquid discharge unit. When discharging the first mixed liquid, the control unit causes the first superheated water steam blowing unit to blow the superheated water steam at a first flow rate. When discharging the hydrogen peroxide solution, the control unit causes the first superheated water steam blowing unit to blow the superheated water steam at a second flow rate smaller than the first flow rate.

In one embodiment, the substrate processing apparatus further includes a second mixed liquid discharge unit. The second mixed liquid discharge unit discharges a second mixed liquid of ammonia water, hydrogen peroxide solution, and pure water toward the substrate rotated by the substrate rotation unit. The control unit further controls the discharge of the second mixed liquid from the second mixed liquid discharge unit. The control unit blows out the superheated water vapor when discharging the second mixed liquid.

In one embodiment, the substrate processing apparatus further includes a rinsing liquid ejection unit and a water vapor blowing unit. The rinsing liquid ejection unit ejects rinsing liquid toward the substrate rotated by the substrate rotation unit. The water vapor blowing unit is located between the air blowing mechanism and the substrate held by the substrate holding unit. The water vapor blowing unit blows water vapor into the chamber. The control unit further controls the ejection of the rinsing liquid from the rinsing liquid ejection unit and the blowing of the water vapor from the water vapor blowing unit. The control unit blows the water vapor when the rinsing liquid is ejected.

In one embodiment, the control unit further controls the rotation of the substrate by the substrate rotation unit. The control unit performs a drying process after stopping the ejection of the rinsing liquid. The drying process refers to a process of controlling the rotation speed of the substrate to remove the rinsing liquid from the upper surface of the substrate and dry the upper surface of the substrate. The control unit stops the ejection of the water vapor when the drying process is performed.

In one embodiment, the substrate processing apparatus further includes a third superheated steam blowing section and a water vapor blowing section. The third superheated steam blowing section blows superheated steam toward the inner wall surface of the chamber. The water vapor blowing section is located between the blowing mechanism and the substrate holding section. The water vapor blowing section blows water vapor into the chamber. The control section further controls the blowing of the water vapor from the water vapor blowing section and the blowing of the superheated water vapor from the third superheated steam blowing section. The control section causes the water vapor to be blown from the water vapor blowing section and the superheated water vapor to be blown from the third superheated steam blowing section when cleaning the inside of the chamber.

According to another aspect of the present invention, the substrate processing method includes a holding step of holding a substrate in a chamber by a substrate holding part, and a step of blowing superheated steam into the chamber from a first superheated steam blowing part located between the blowing mechanism and the substrate held by the substrate holding part while air is being blown into the chamber by the blowing mechanism.

In one embodiment, the substrate processing method further includes a first mixed liquid ejection step of rotating the substrate held by the substrate holder and ejecting a first mixed liquid, which is a mixture of sulfuric acid and hydrogen peroxide, toward the rotating substrate. When ejecting the first mixed liquid, the superheated steam is ejected from the first superheated steam ejection part.

In one embodiment, the substrate processing method further includes a puddle step of stopping the discharge of the first mixed liquid and controlling the rotation speed of the substrate to form a puddle state in which a liquid film of the first mixed liquid is supported on the upper surface of the substrate. When the puddle state is formed, the superheated water steam is blown from the first superheated water steam blowing part, and the superheated water steam is blown from the second superheated water steam blowing part toward the substrate held by the substrate holding part. The second superheated water steam blowing part is supported by a liquid receiving part that receives the first mixed liquid discharged from the rotating substrate.

In one embodiment, the second superheated steam blowing section includes an upper superheated steam blowing section and a lower superheated steam blowing section. The upper superheated steam blowing section blows the superheated steam toward the upper surface of the substrate held by the substrate holding section. The lower superheated steam blowing section blows the superheated steam toward the lower surface of the substrate held by the substrate holding section.

In one embodiment, the substrate processing method further includes an extrusion step of ejecting hydrogen peroxide toward the rotating substrate to eject a liquid film of the first liquid mixture from the upper surface of the substrate. When ejecting the hydrogen peroxide, the ejection of the superheated water vapor is stopped.

In one embodiment, the substrate processing method further includes an extrusion step of ejecting hydrogen peroxide toward the rotating substrate to eject a liquid film of the first liquid mixture from the upper surface of the substrate. When ejecting the first liquid mixture, the superheated water steam is ejected from the first superheated water steam ejection part at a first flow rate. When ejecting the hydrogen peroxide, the superheated water steam is ejected from the first superheated water steam ejection part at a second flow rate smaller than the first flow rate.

In one embodiment, the substrate processing method further includes a second mixed liquid ejection step of ejecting a second mixed liquid, which is a mixture of ammonia water, hydrogen peroxide, and pure water, toward the rotating substrate while the substrate held by the substrate holder is rotated. The superheated water steam is ejected from the first superheated water steam ejection part when the second mixed liquid is ejected.

In one embodiment, the substrate processing method further includes the steps of blowing water vapor into the chamber from a water vapor blowing section located between the air blowing mechanism and the substrate held by the substrate holding section while air is being blown into the chamber by the air blowing mechanism, and ejecting a rinsing liquid toward the rotating substrate while the substrate held by the substrate holding section is being rotated. The water vapor is ejected from the water vapor blowing section when the rinsing liquid is ejected.

In one embodiment, the substrate processing method further includes a drying step in which, after the ejection of the rinsing liquid is stopped, the rotation speed of the substrate is controlled to remove the rinsing liquid from the upper surface of the substrate and dry the upper surface of the substrate. During the drying step, the ejection of the water vapor is stopped.

According to yet another aspect of the present invention, a chamber cleaning method includes a step of cleaning the inside of a chamber in which substrate processing is performed. When cleaning the inside of the chamber, superheated steam is blown toward an inner wall surface of the chamber, and steam is blown into the chamber from a steam blowing unit located between a blowing mechanism that blows air into the chamber and a substrate holding unit that holds a substrate in the chamber.

The substrate processing apparatus, substrate processing method, and chamber cleaning method according to the present invention can reduce contamination of substrates caused by chemical atmospheres.

1 is a schematic plan view of a substrate processing apparatus according to an embodiment of the present invention; 1 is a cross-sectional view illustrating a schematic configuration of a substrate processing section included in a substrate processing apparatus according to an embodiment of the present invention. 11 is another cross-sectional view showing a schematic configuration of a substrate processing section included in the substrate processing apparatus according to the embodiment of the present invention. FIG. 11 is another cross-sectional view showing a schematic configuration of a substrate processing section included in the substrate processing apparatus according to the embodiment of the present invention. FIG. 1 is a diagram showing a configuration of a substrate processing apparatus according to an embodiment of the present invention; 2 is a diagram showing a configuration of a first chemical liquid supply unit included in the substrate processing apparatus according to the embodiment of the present invention; 2 is a flowchart showing a substrate processing method according to an embodiment of the present invention. 2 is a flowchart showing a substrate treatment and a water vapor treatment included in a substrate treatment method according to an embodiment of the present invention. FIG. 2 is a diagram illustrating a substrate processing section during pre-heating. FIG. 2 is a diagram showing a schematic view of a substrate processing section during SPM processing. FIG. 2 is a diagram illustrating a substrate processing section during puddle processing. 1 is a diagram showing a substrate processing section when processing a substrate with hydrogen peroxide solution; FIG. 2 is a diagram illustrating a substrate processing section during a rinsing process. FIG. 2 is a diagram showing a schematic view of a substrate processing section when a substrate is processed by SC1; FIG. 2 is a diagram illustrating a substrate processing section during a drying process. FIG. 2 is a diagram showing a schematic view of a substrate processing section when the inside of a chamber is cleaned; 11 is a cross-sectional view illustrating a schematic configuration of a substrate processing section included in a modified example of a substrate processing apparatus according to an embodiment of the present invention. FIG.

Below, embodiments of the substrate processing apparatus, substrate processing method, and chamber cleaning method of the present invention will be described with reference to the drawings (FIGS. 1 to 17). However, the present invention is not limited to the following embodiments, and can be implemented in various aspects without departing from the gist of the present invention. Note that where explanations overlap, they may be omitted as appropriate. Also, in the drawings, the same or equivalent parts are given the same reference symbols, and explanations will not be repeated.

In the substrate processing apparatus, substrate processing method, and chamber cleaning method according to the present invention, the "substrate" to be processed can be a semiconductor wafer, a glass substrate for a photomask, a glass substrate for a liquid crystal display, a glass substrate for a plasma display, a substrate for an FED (Field Emission Display), a substrate for an optical disk, a substrate for a magnetic disk, or a substrate for a magneto-optical disk. In the following, an embodiment of the present invention will be described mainly using a case where a disk-shaped semiconductor wafer is the substrate to be processed, but the substrate processing apparatus, substrate processing method, and chamber cleaning method according to the present invention can be similarly applied to various substrates other than the semiconductor wafers described above. The shape of the substrate is not limited to a disk shape, and the substrate processing apparatus, substrate processing method, and chamber cleaning method according to the present invention can be applied to substrates of various shapes.

First, the substrate processing apparatus 100 of this embodiment will be described with reference to FIG. 1. FIG. 1 is a schematic diagram of the substrate processing apparatus 100 of this embodiment. More specifically, FIG. 1 is a schematic plan view of the substrate processing apparatus 100 of this embodiment. The substrate processing apparatus 100 processes substrates W with a processing liquid. More specifically, the substrate processing apparatus 100 is a single-wafer type apparatus, and processes substrates W one by one.

As shown in FIG. 1, the substrate processing apparatus 100 includes a plurality of substrate processing units 2, a fluid cabinet 10A, a plurality of fluid boxes 10B, a plurality of load ports LP, an indexer robot IR, a center robot CR, and a control device 101.

Each load port LP accommodates a stack of multiple substrates W. In this embodiment, each unprocessed substrate W (substrate W before processing) has an unwanted resist mask (resist film) attached to it.

The indexer robot IR transports substrates W between the load port LP and the center robot CR. The center robot CR transports substrates W between the indexer robot IR and the substrate processing unit 2. Note that a placement stage (path) on which substrates W are temporarily placed may be provided between the indexer robot IR and the center robot CR, and the device may be configured to indirectly transfer substrates W between the indexer robot IR and the center robot CR via the placement stage.

The multiple substrate processing units 2 form multiple towers TW (four towers TW in FIG. 1). The multiple towers TW are arranged to surround the center robot CR in a plan view. Each tower TW includes multiple substrate processing units 2 (three substrate processing units 2 in FIG. 1) stacked one above the other.

The fluid cabinet 10A contains a fluid. The fluid includes a processing liquid. Each of the fluid boxes 10B corresponds to one of the multiple towers TW. The processing liquid in the fluid cabinet 10A is supplied to all of the substrate processing units 2 included in the tower TW corresponding to the fluid box 10B via one of the fluid boxes 10B.

The processing liquid includes sulfuric acid (H ₂ SO ₄ ), hydrogen peroxide (H ₂ O ₂ ), ammonia water (NH ₄ OH), and a rinse liquid. In this embodiment, the rinse liquid is pure water. The pure water is, for example, deionized water (DIW). The rinse liquid may be, for example, carbonated water, electrolytic ionized water, hydrogen water, ozone water, ammonia water, or diluted hydrochloric acid (for example, hydrochloric acid having a concentration of about 10 ppm to 100 ppm). If the rinse liquid is not pure water, the fluid in the fluid cabinet 10A further includes pure water.

Each of the substrate processing units 2 supplies processing liquid to the upper surface of the substrate W. Specifically, the substrate processing unit 2 supplies a sulfuric acid/hydrogen peroxide mixture (SPM), hydrogen peroxide, rinse liquid, and SC1 to the substrate W in the following order: SPM, hydrogen peroxide, rinse liquid, SC1, rinse liquid. The sulfuric acid/hydrogen peroxide mixture is a mixture of sulfuric acid and hydrogen peroxide. SC1 is a mixture of ammonia water, hydrogen peroxide, and pure water.

When SPM is supplied to the upper surface of the substrate W, the resist film (organic matter) is peeled off from the upper surface of the substrate W, and the resist film is removed from the upper surface of the substrate W. When SC1 is supplied to the upper surface of the substrate W, particles adhering to the upper surface of the substrate W are removed. More specifically, the hydrogen peroxide contained in SC1 oxidizes silicon on the main surface of the substrate W, the silicon oxide is etched by ammonia, and various particles are removed by lift-off. Thus, SC1 peels off and removes resist film residue and insoluble particles.

The control device 101 controls the operation of each part of the substrate processing apparatus 100. For example, the control device 101 controls the load port LP, the indexer robot IR, the center robot CR, and the substrate processing unit 2. The control device 101 includes a control unit 102 and a memory unit 103.

The control unit 102 controls the operation of each part of the substrate processing apparatus 100 based on various information stored in the memory unit 103. The control unit 102 has, for example, a processor. The control unit 102 may have a CPU (Central Processing Unit) or an MPU (Micro Processing Unit) as the processor. Alternatively, the control unit 102 may have a general-purpose computing device or a dedicated computing device.

The memory unit 103 stores various information for controlling the operation of the substrate processing apparatus 100. For example, the memory unit 103 stores data and computer programs. The data includes various recipe data. The recipe data includes, for example, a process recipe. The process recipe is data that specifies the procedure for substrate processing. Specifically, the process recipe specifies the execution order of a series of processes included in the substrate processing, the content of each process, and the conditions (parameter setting values) for each process.

The storage unit 103 has a main storage device. The main storage device is, for example, a semiconductor memory. The storage unit 103 may further have an auxiliary storage device. The auxiliary storage device includes, for example, at least one of a semiconductor memory and a hard disk drive. The storage unit 103 may include removable media.

Next, the substrate processing apparatus 100 of this embodiment will be described with reference to Figures 1 to 3. Figure 2 is a cross-sectional view that shows a schematic configuration of the substrate processing section 2 included in the substrate processing apparatus 100 of this embodiment. Figure 3 is another cross-sectional view that shows a schematic configuration of the substrate processing section 2 included in the substrate processing apparatus 100 of this embodiment. In particular, Figure 3 shows the inside of the substrate processing section 2 as viewed from above.

As shown in FIG. 2, the substrate processing unit 2 includes a blower mechanism 3, a chamber 201, a baffle plate 204, a spin chuck 4, a spin motor unit 5, a first nozzle 6, a first nozzle movement mechanism 61, a second nozzle 7, a second nozzle movement mechanism 71, a third nozzle 8, a liquid receiving unit 9, a substrate heating unit 20, and an exhaust duct 206. The substrate processing apparatus 100 also includes a first chemical liquid supply unit 62, a second chemical liquid supply unit 72, and a rinsing liquid supply unit 82.

The control device 101 (control unit 102) controls the blower mechanism 3, the spin chuck 4, the spin motor unit 5, the first nozzle moving mechanism 61, the second nozzle moving mechanism 71, the liquid receiving unit 9, the substrate heating unit 20, the first chemical liquid supply unit 62, the second chemical liquid supply unit 72, and the rinsing liquid supply unit 82.

The chamber 201 has a generally box-like shape. More specifically, the chamber 201 has an upper wall 202, a side wall 203, and a lower wall 205. The chamber 201 accommodates the substrate W, the baffle plate 204, the spin chuck 4, the spin motor unit 5, the first nozzle 6, the first nozzle movement mechanism 61, the second nozzle 7, the second nozzle movement mechanism 71, the third nozzle 8, the liquid receiving unit 9, part of the substrate heating unit 20, part of the exhaust duct 206, part of the first chemical liquid supply unit 62, part of the second chemical liquid supply unit 72, and part of the rinsing liquid supply unit 82. The substrate W is loaded into the chamber 201 and processed in the chamber 201. That is, the substrate processing is performed in the chamber 201.

The blower mechanism 3 is disposed outside the chamber 201. More specifically, the blower mechanism 3 is disposed above the chamber 201 (upper wall 202) and faces the outer wall surface of the upper wall 202. The blower mechanism 3 may be installed on the outer wall surface of the upper wall 202. In particular, the chamber 201 has an air outlet 202a that penetrates the upper wall 202 in the vertical direction, and the blower mechanism 3 is disposed above the air outlet 202a. The air outlet 202a is formed, for example, at a position that overlaps with the substrate W in a planar view.

The blower mechanism 3 blows air into the chamber 201. More specifically, the blower mechanism 3 draws in air from the clean room in which the substrate processing apparatus 100 is installed, and blows the air into the chamber 201 through the air outlet 202a. More specifically, the blower mechanism 3 has blades, an electric motor, and a filter. The blades rotate to draw in air from the clean room and blow the air toward the air outlet 202a. The electric motor rotates the blades. The filter filters the air sent by the rotating blades. As a result, air purified by the filter is blown into the chamber 201. The blower mechanism 3 is, for example, a fan filter unit (FFU).

The rectifying plate 204 is disposed within the chamber 201. More specifically, the rectifying plate 204 is held in a horizontal position. Thus, the rectifying plate 204 extends along a horizontal plane. For example, the rectifying plate 204 is supported by the side wall 203. The rectifying plate 204 divides the internal space of the chamber 201 into a lower space 2a and an upper space 2b. The upper space 2b is a space above the lower space 2a.

More specifically, the baffle plate 204 is disposed at the upper portion of the chamber 201 and faces the inner wall surface of the upper wall 202. Specifically, the baffle plate 204 is disposed above the members used for substrate processing in the chamber 201. Therefore, the substrate processing is performed in the lower space 2a. In other words, the lower space 2a is the processing space. The members used for substrate processing include the spin chuck 4, the spin motor unit 5, the first nozzle 6, the first nozzle movement mechanism 61, the second nozzle 7, the second nozzle movement mechanism 71, the third nozzle 8, the liquid receiving unit 9, and the substrate heating unit 20.

The straightening vane 204 straightens the air sent from the blower mechanism 3 into the chamber 201. More specifically, the straightening vane 204 straightens the air sent from the blower mechanism 3 to the upper space 2b, generating a downflow in the lower space 2a (treatment space).

More specifically, the straightening plate 204 has a large number of through holes 204a. Each of the through holes 204a penetrates the straightening plate 204 in the thickness direction of the straightening plate 204. For example, each of the through holes 204a extends in the vertical direction. The large number of through holes 204a are formed throughout the straightening plate 204. The air outlet 202a of the upper wall 202 connects the outside of the chamber 201 to the upper space 2b. The air blown from the blowing mechanism 3 diffuses within the upper space 2b and fills the upper space 2b. The air filling the upper space 2b passes through the large number of through holes 204a and flows into the lower space 2a from the entire area of the straightening plate 204. As a result, a downward air current (downflow) that flows downward from the entire area of the straightening plate 204 is generated in the lower space 2a.

The electric motor of the blower mechanism 3 is controlled by the control device 101 (control unit 102). The control device 101 (control unit 102) may, for example, control the electric motor of the blower mechanism 3 to constantly generate a downflow in the lower space 2a (treatment space).

The spin chuck 4 holds the substrate W in the lower space 2a of the chamber 201. The spin chuck 4 is an example of a substrate holding unit. More specifically, the spin chuck 4 holds the substrate W in a horizontal position. As shown in FIG. 2, the spin chuck 4 may have a spin base 41 and multiple chuck members 42.

The spin base 41 is approximately disk-shaped and supports multiple chuck members 42 in a horizontal position. The multiple chuck members 42 are arranged on the peripheral portion of the spin base 41. The multiple chuck members 42 clamp the peripheral portion of the substrate W. The multiple chuck members 42 hold the substrate W in a horizontal position. The operation of the multiple chuck members 42 is controlled by the control device 101 (control unit 102).

The spin motor unit 5 rotates the substrate W held by the spin chuck 4. The spin motor unit 5 is an example of a substrate rotation unit. More specifically, the spin motor unit 5 rotates the substrate W and the spin chuck 4 together around a first rotation axis AX1 that extends vertically. The control device 101 (control unit 102) controls the rotation of the substrate W by the spin motor unit 5.

More specifically, the first rotation axis AX1 passes through the center of the spin base 41. The multiple chuck members 42 are arranged so that the center of the substrate W coincides with the center of the spin base 41. Therefore, the substrate W rotates around the center of the substrate W as the center of rotation.

As shown in FIG. 2, the spin motor unit 5 may have a shaft 51 and a motor body 52. The shaft 51 is coupled to the spin base 41. The motor body 52 rotates the shaft 51. As a result, the spin base 41 rotates. The operation of the motor body 52 is controlled by the control device 101 (control unit 102).

The first nozzle 6 is located in the lower space 2a of the chamber 201, and exclusively ejects SPM and hydrogen peroxide solution toward the substrate W rotated by the spin motor unit 5. The first nozzle 6 is an example of a first mixed liquid ejection unit. When SPM is ejected onto the top surface of the substrate W during rotation, a liquid film of SPM is formed on the top surface of the substrate W. Similarly, when hydrogen peroxide solution is ejected onto the top surface of the substrate W during rotation, a liquid film of hydrogen peroxide solution is formed on the top surface of the substrate W.

The ejection of SPM from the first nozzle 6 and the ejection of hydrogen peroxide from the first nozzle 6 are controlled by the control device 101 (control unit 102). Specifically, the control device 101 (control unit 102) controls the ejection of SPM from the first nozzle 6 and the ejection of hydrogen peroxide from the first nozzle 6 by controlling the first chemical liquid supply unit 62.

The first chemical supply unit 62 exclusively supplies SPM and hydrogen peroxide to the first nozzle 6. As shown in FIG. 2, the first chemical supply unit 62 may have a first chemical supply pipe 621, a first component on-off valve 631, and a second component on-off valve 632. A portion of the first chemical supply pipe 621 is housed within the chamber 201. The first component on-off valve 631 and the second component on-off valve 632 are housed in the fluid box 10B described with reference to FIG. 1.

The first chemical supply pipe 621 exclusively supplies SPM and hydrogen peroxide to the first nozzle 6. Specifically, the first chemical supply pipe 621 is a tubular member that circulates SPM and hydrogen peroxide to the first nozzle 6.

More specifically, the first chemical supply pipe 621 includes a first pipe 621a and a second pipe 621b. One end of the first pipe 621a is connected to the first nozzle 6. The second pipe 621b is connected to the first pipe 621a. Sulfuric acid flows into the first pipe 621a. Hydrogen peroxide flows into the second pipe 621b.

The first component on-off valve 631 is disposed in the first pipe 621a. Specifically, the first component on-off valve 631 is disposed upstream of the connection point CP between the first pipe 621a and the second pipe 621b. The second component on-off valve 632 is disposed in the second pipe 621b.

The first component opening/closing valve 631 and the second component opening/closing valve 632 can be switched between an open state and a closed state. The control device 101 (control unit 102) controls the opening and closing operations of the first component opening/closing valve 631 and the second component opening/closing valve 632. The actuators of the first component opening/closing valve 631 and the second component opening/closing valve 632 are, for example, pneumatic actuators or electric actuators.

When supplying SPM to the substrate W, the control device 101 (control unit 102) opens the first component on-off valve 631 and the second component on-off valve 632. When the first component on-off valve 631 and the second component on-off valve 632 are opened, sulfuric acid flows through the first pipe 621a toward the first nozzle 6, and hydrogen peroxide flows through the second pipe 621b toward the connection point CP. As a result, the sulfuric acid and hydrogen peroxide mix at the connection point CP to generate SPM. The SPM flows through the first pipe 621a toward the first nozzle 6, and is ejected from the first nozzle 6 toward the substrate W.

When supplying hydrogen peroxide to the substrate W, the control device 101 (control unit 102) closes the first component on-off valve 631 and opens the second component on-off valve 632. When the first component on-off valve 631 is closed and the second component on-off valve 632 is opened, the flow of sulfuric acid through the first pipe 621a stops, and hydrogen peroxide flows through the second pipe 621b toward the connection point CP. As a result, the hydrogen peroxide that has flowed into the first pipe 621a flows through the first pipe 621a toward the first nozzle 6, and the hydrogen peroxide is ejected from the first nozzle 6 toward the substrate W.

When the control device 101 (control unit 102) stops the ejection of SPM and hydrogen peroxide solution from the first nozzle 6, it closes the first component opening/closing valve 631 and the second component opening/closing valve 632. When the first component opening/closing valve 631 and the second component opening/closing valve 632 are closed, the flow of sulfuric acid through the first pipe 621a stops, and the flow of hydrogen peroxide solution through the second pipe 621b stops.

The second nozzle 7 is located in the lower space 2a of the chamber 201, and ejects SC1 toward the substrate W rotated by the spin motor unit 5. The second nozzle 7 is an example of a second mixed liquid ejection unit. The ejection of SC1 from the second nozzle 7 is controlled by the control device 101 (control unit 102). Specifically, the control device 101 (control unit 102) controls the ejection of SC1 from the second nozzle 7 by controlling the second chemical liquid supply unit 72.

The second chemical liquid supply unit 72 supplies SC1 to the second nozzle 7. As shown in FIG. 2, the second chemical liquid supply unit 72 may have a second chemical liquid supply pipe 721 and a chemical liquid opening/closing valve 731. A portion of the second chemical liquid supply pipe 721 is housed in the chamber 201. The chemical liquid opening/closing valve 731 is housed in the fluid box 10B described with reference to FIG. 1.

The second chemical supply pipe 721 supplies SC1 to the second nozzle 7. Specifically, the second chemical supply pipe 721 is a tubular member that allows SC1 to flow to the second nozzle 7.

The chemical solution on-off valve 731 is interposed in the second chemical solution supply pipe 721. The chemical solution on-off valve 731 can be switched between an open state and a closed state. The control device 101 (control unit 102) controls the opening and closing operation of the chemical solution on-off valve 731. The chemical solution on-off valve 731 is, for example, a pneumatic actuator or an electric actuator.

The control device 101 (control unit 102) opens the chemical liquid on-off valve 731 when supplying SC1 to the substrate W. When the chemical liquid on-off valve 731 is opened, SC1 flows through the second chemical liquid supply pipe 721 toward the second nozzle 7. As a result, SC1 is ejected from the second nozzle 7 toward the substrate W.

When the control device 101 (control unit 102) stops the discharge of SC1 from the second nozzle 7, it closes the chemical solution opening/closing valve 731. When the chemical solution opening/closing valve 731 is closed, the flow of SC1 through the second chemical solution supply pipe 721 is stopped.

The third nozzle 8 is located in the lower space 2a of the chamber 201, and ejects the rinsing liquid toward the substrate W rotated by the spin motor unit 5. The third nozzle 8 is an example of a rinsing liquid ejection unit. The ejection of the rinsing liquid from the third nozzle 8 is controlled by the control device 101 (control unit 102). Specifically, the control device 101 (control unit 102) controls the ejection of the rinsing liquid from the third nozzle 8 by controlling the rinsing liquid supply unit 82.

The rinse liquid supply unit 82 supplies rinse liquid to the third nozzle 8. As shown in FIG. 2, the rinse liquid supply unit 82 may have a rinse liquid supply pipe 821 and a rinse liquid opening/closing valve 831. A portion of the rinse liquid supply pipe 821 is housed in the chamber 201. The rinse liquid opening/closing valve 831 is housed in the fluid box 10B described with reference to FIG. 1.

The rinse liquid supply pipe 821 supplies rinse liquid to the third nozzle 8. Specifically, the rinse liquid supply pipe 821 is a tubular member that distributes the rinse liquid to the third nozzle 8.

The rinse liquid opening/closing valve 831 is disposed in the rinse liquid supply pipe 821. The rinse liquid opening/closing valve 831 can be switched between an open state and a closed state. The control device 101 (control unit 102) controls the opening and closing operation of the rinse liquid opening/closing valve 831. The rinse liquid opening/closing valve 831 is, for example, a pneumatic actuator or an electric actuator.

The control device 101 (control unit 102) opens the rinse liquid opening/closing valve 831 when supplying rinse liquid to the substrate W. When the rinse liquid opening/closing valve 831 is opened, the rinse liquid flows through the rinse liquid supply pipe 821 toward the third nozzle 8. As a result, the rinse liquid is ejected from the third nozzle 8 toward the substrate W.

When the control device 101 (control unit 102) stops the discharge of the rinse liquid from the third nozzle 8, it closes the rinse liquid opening/closing valve 831. When the rinse liquid opening/closing valve 831 is closed, the flow of the rinse liquid through the rinse liquid supply pipe 821 stops.

The first nozzle moving mechanism 61 moves the first nozzle 6 along a horizontal plane. The operation of the first nozzle moving mechanism 61 is controlled by the control device 101 (control unit 102). More specifically, the first nozzle moving mechanism 61 moves the first nozzle 6 between the first evacuation area and the processing position. The first evacuation area is an area outside the spin chuck 4. For example, the first evacuation area may be an area outside the liquid receiving unit 9. Figure 3 shows the first nozzle 6 moved to the first evacuation area.

In this embodiment, the processing position of the first nozzle 6 is a position facing the center of the substrate W. The first nozzle 6 exclusively ejects SPM and hydrogen peroxide solution from the processing position toward the substrate W. As shown in FIG. 3, the first nozzle movement mechanism 61 moves the first nozzle 6 horizontally along an arc-shaped trajectory that passes through the center of the substrate W.

Specifically, as shown in FIG. 2, the first nozzle movement mechanism 61 may have a first nozzle arm 611, a first nozzle base 612, and a first nozzle movement part 613. The first nozzle base 612 extends vertically. The base end of the first nozzle arm 611 is connected to the first nozzle base 612. The first nozzle arm 611 extends horizontally from the first nozzle base 612.

The first nozzle arm 611 supports the first nozzle 6. The first nozzle 6 protrudes vertically downward from the first nozzle arm 611. The first nozzle 6 may be disposed at the tip of the first nozzle arm 611.

The first nozzle moving unit 613 rotates the first nozzle base 612 around the second rotation axis AX2 extending in the vertical direction. As a result, the first nozzle 6 moves around the first nozzle base 612 in the circumferential direction around the second rotation axis AX2. The first nozzle moving unit 613 is controlled by the control device 101 (control unit 102). The first nozzle moving unit 613 may include, for example, a ball screw mechanism and an electric motor that provides a driving force to the ball screw mechanism.

The second nozzle moving mechanism 71 moves the second nozzle 7 along a horizontal plane. The operation of the second nozzle moving mechanism 71 is controlled by the control device 101 (control unit 102). More specifically, the second nozzle moving mechanism 71 moves the second nozzle 7 between a position facing the center of the substrate W and the second evacuation area. The second evacuation area is an area outside the spin chuck 4. For example, the second evacuation area may be an area outside the liquid receiving portion 9. Figure 3 shows the second nozzle 7 moved to the second evacuation area.

In this embodiment, the second nozzle 7 ejects SC1 toward the substrate W while moving between a position facing the center of the substrate W and a position facing the peripheral edge of the substrate W. The second nozzle 7 is a so-called scan nozzle. As shown in FIG. 3, the second nozzle moving mechanism 71 moves the second nozzle 7 horizontally along an arc-shaped trajectory that passes through the center of the substrate W.

As shown in FIG. 2, the second nozzle movement mechanism 71 may have a second nozzle arm 711, a second nozzle base 712, and a second nozzle movement part 713. The configuration of the second nozzle movement mechanism 71 is substantially the same as that of the first nozzle movement mechanism 61, and therefore a description thereof will be omitted.

The liquid receiving unit 9 receives the processing liquid (SPM, hydrogen peroxide, rinse liquid, and SC1) discharged from the substrate W rotated by the spin motor unit 5. As shown in FIG. 2, the liquid receiving unit 9 may have a guard 91 and a guard lifting unit 94.

The guard 91 is generally cylindrical and surrounds the substrate W held by the spin chuck 4. The guard 91 receives the processing liquid discharged from the substrate W. More specifically, the guard 91 receives the processing liquid that splashes from the rotating substrate W.

2, the guard 91 may include a cylindrical guide portion 92 and a cylindrical inclined portion 93. The inclined portion 93 extends obliquely upward toward the first rotation axis AX1. The guide portion 92 extends downward from the lower end of the inclined portion 93. The inclined portion 93 includes an annular upper end 9a. The upper end 9a has an inner diameter larger than the substrate W and the spin base 41. The upper end 9a of the inclined portion 93 corresponds to the upper end of the guard 91. Hereinafter, the upper end 9a of the inclined portion 93 may be referred to as the upper end 9a of the guard 91. As shown in FIG. 3, the upper end 9a surrounds the substrate W and the spin base 41 in a plan view.

The guard lifting unit 94 raises and lowers the guard 91 between a first lower position shown by a two-dot chain line in FIG. 2 and a first upper position shown by a solid line in FIG. 2. Here, the first lower position indicates a position where the upper end 9a of the guard 91 is positioned below the substrate W. The first upper position indicates a position where the upper end 9a of the guard 91 is positioned above the substrate W. The guard lifting unit 94 is controlled by the control device 101 (control unit 102). The guard lifting unit 94 may include, for example, a ball screw mechanism and an electric motor that provides a driving force to the ball screw mechanism.

For example, the control device 101 (control unit 102) moves the guard 91 from the first lower position to the first upper position after the substrate W is held by the spin chuck 4. By disposing the guard 91 at the first upper position, the guard 91 can receive processing liquid splashed from the substrate W. In addition, the control device 101 (control unit 102) moves the guard 91 from the first upper position to the first lower position when the substrate W is unloaded from the chamber 201. By disposing the guard 91 at the first lower position, the substrate W can be transferred between the center robot CR and the spin chuck 4 described with reference to FIG. 1.

The exhaust duct 206 exhausts the gas in the chamber 201 to the outside of the chamber 201. Specifically, the gas in the exhaust duct 206 is constantly sucked in by an exhaust system (not shown) installed in the factory where the substrate processing apparatus 100 is installed. The upstream end of the exhaust duct 206 is disposed below the spin base 41. The gas inside the guard 91 is sucked to the upstream end of the exhaust duct 206 by the suction force of the exhaust system transmitted through the exhaust duct 206. The gas floating in the space above the guard 91 is sucked to the inside of the upper end 9a of the guard 91 by the suction force transmitted from the exhaust duct 206 to the inside of the guard 91. As a result, the gas in the chamber 201 is exhausted to the outside of the chamber 201 through the inside of the guard 91. At that time, the gas in the chamber 201 passes near the peripheral portion of the substrate W held by the spin chuck 4.

The substrate heating unit 20 heats the substrate W held by the spin chuck 4. For example, as shown in FIG. 2, the substrate heating unit 20 may have a heating member 21, a lifting shaft 22, a power supply unit 23, and a heater lifting unit 24.

The heating member 21 is generally disk-shaped and is located between the substrate W held by the chuck member 42 and the spin base 41. A heater is embedded in the heating member 21. The heater includes, for example, a resistor. The power supply unit 23 applies electricity to the heater embedded in the heating member 21 to heat the heating member 21. The power supply unit 23 is controlled by the control device 101 (control unit 102).

The lifting shaft 22 is a generally rod-shaped member that extends generally vertically. The lifting shaft 22 is coupled to the heating member 21. The heater lifting unit 24 raises and lowers the heating member 21 by raising and lowering the lifting shaft 22. Specifically, the heater lifting unit 24 raises and lowers the heating member 21 between the lower surface of the substrate W held by the chuck member 42 and the upper surface of the spin base 41. The heater lifting unit 24 is controlled by the control device 101 (control unit 102). The heater lifting unit 24 may include, for example, a ball screw mechanism and an electric motor that provides a driving force to the ball screw mechanism.

Next, the substrate processing apparatus 100 of this embodiment will be described with reference to FIG. 3. As shown in FIG. 3, the chamber 201 further has a shutter 207. In addition, a loading/unloading port 203a is formed in the side wall 203 of the chamber 201. The shutter 207 is movable between a position where the loading/unloading port 203a is opened and a position where the loading/unloading port 203a is closed. The operation of the shutter 207 is controlled by the control device 101 (control unit 102).

The loading/unloading port 203a is an opening that communicates between the inside and outside of the chamber 201. The center robot CR described with reference to FIG. 1 loads the substrate W into the lower space 2a of the chamber 201 through the loading/unloading port 203a when the shutter 207 opens the loading/unloading port 203a. The center robot CR described with reference to FIG. 1 unloads the substrate W from the inside of the chamber 201 to the outside through the loading/unloading port 203a when the shutter 207 opens the loading/unloading port 203a. For example, the control device 101 (control unit 102) closes the shutter 207 after the substrate W is transferred from the center robot CR to the spin chuck 4 and the hand of the center robot CR is retracted to the outside of the chamber 201.

Next, the substrate processing apparatus 100 of this embodiment will be further described with reference to FIG. 2. As shown in FIG. 2, the substrate processing unit 2 further includes a first blowing section 31, a second blowing section 32, a third blowing section 33, and a fourth blowing section 34.

The first blowing section 31 is located between the blowing mechanism 3 and the substrate W held by the spin chuck 4, and blows out superheated water steam into the lower space 2a of the chamber 201. The first blowing section 31 is an example of a first superheated water steam blowing section. The blowing out of superheated water steam from the first blowing section 31 is controlled by the control device 101 (control section 102). Note that superheated water steam is generated by heating water vapor. Therefore, the temperature of superheated water steam is higher than that of water vapor. Specifically, the temperature at the time of generation of water vapor is 100°C, and the temperature at the time of generation of superheated water steam is higher than 100°C.

The superheated water steam blown out from the first blowing section 31 flows with the air in the chamber 201 due to the downflow and the suction force from the exhaust duct 206. Therefore, the superheated water steam is drawn to the inside of the upper end 9a of the guard 91. At that time, the superheated water steam passes near the peripheral portion of the substrate W held by the spin chuck 4. As a result, the superheated water steam suppresses a decrease in the temperature of the peripheral portion of the substrate W.

In this embodiment, the first blowing section 31 is disposed above the first nozzle 6. For example, as shown in FIG. 2, the first blowing section 31 may be supported by the straightening plate 204. For example, the first blowing section 31 is fixed to the straightening plate 204 via a bracket. In addition, in a plan view, the first blowing section 31 is located outside the substrate W held by the spin chuck 4. Therefore, even if water droplets drip from the first blowing section 31, the water droplets are unlikely to fall onto the substrate W. For example, the first blowing section 31 may be disposed at a position overlapping with the liquid receiving section 9 in a plan view.

The first blowing section 31 blows out superheated water steam, for example, when the substrate W is being processed by SPM. That is, the control device 101 (control section 102) causes the first blowing section 31 to blow out superheated water steam when SPM is being ejected from the first nozzle 6. Hereinafter, substrate processing by SPM may be referred to as "SPM processing."

As already explained, the SPM is discharged from the first nozzle 6 toward the center of the substrate W. Therefore, the temperature of the peripheral portion of the substrate W, which is far from the center of the substrate W, is more likely to drop than that of the center of the substrate W. Therefore, it is not easy to peel off the resist film adhering to the peripheral portion of the substrate W, and the time of the SPM processing must be set to a relatively long time. In contrast, according to this embodiment, the temperature drop of the peripheral portion of the substrate W can be suppressed by the superheated water vapor, so that the resist film adhering to the peripheral portion of the substrate W can be easily peeled off. Therefore, the time of the SPM processing can be set to a relatively short time, and the efficiency of resist peeling by SPM can be improved. As a result, the amount of SPM used in substrate processing can be reduced.

During SPM processing, a chemical atmosphere is generated from the first nozzle 6, the substrate W, etc. In contrast, according to this embodiment, the superheated water vapor can suppress the diffusion of the chemical atmosphere. Therefore, contamination of the substrate W caused by the chemical atmosphere can be reduced. Specifically, the downflow causes droplets contained in the superheated water vapor to collide with the chemical components floating in the lower space 2a of the chamber 201, and the chemical components are accelerated downward. As a result, the chemical components are sucked to the inside of the upper end 9a of the guard 91 by the suction force transmitted from the exhaust duct 206 to the inside of the guard 91, and are exhausted to the outside of the chamber 201 through the inside of the guard 91 together with the gas in the chamber 201.

In particular, in this embodiment, the first blowing section 31 is disposed above the first nozzle 6. Therefore, compared to a configuration in which the first blowing section 31 is disposed below the first nozzle 6, the diffusion of the chemical liquid atmosphere generated from the first nozzle 6 can be more efficiently suppressed.

Furthermore, according to this embodiment, the superheated steam can be used to apply heat to components around the substrate W, such as the liquid receiving section 9, the spin chuck 4, and the spin motor section 5, thereby increasing the temperature of the components around the substrate W. As a result, the temperature of the substrate W is less likely to decrease. This further improves the efficiency of resist stripping by SPM.

In addition, according to this embodiment, the first blowing section 31 is disposed at a position relatively far from the first nozzle 6. Therefore, the superheated steam is less likely to be attracted to the SPM discharged from the first nozzle 6. As a result, the superheated steam is less likely to be unevenly distributed within the lower space 2a, and the superheated steam can efficiently heat the components disposed in the lower space 2a of the chamber 201.

In addition, superheated steam contains a small amount of moisture. Therefore, when the moisture contained in the superheated steam comes into contact with the SPM and reacts with the SPM, the heat generated can be used to suppress a decrease in the temperature of the substrate W.

In addition, by supplying superheated steam, the humidity in the lower space 2a of the chamber 201 increases. As a result, SPM spreads more easily on the upper surface of the substrate W, making it possible to process the substrate W efficiently.

The second blowing section 32 is supported by the liquid receiving section 9 and blows out superheated water steam toward the substrate W held by the spin chuck 4. The second blowing section 32 is an example of a second superheated water steam blowing section. Specifically, the second blowing section 32 is supported by the guard 91. For example, the second blowing section 32 is fixed to the guard 91 via a bracket. The blowing of superheated water steam from the second blowing section 32 is controlled by the control device 101 (control section 102).

According to this embodiment, superheated water vapor can be supplied toward the substrate W from a position relatively close to the substrate W. Therefore, the temperature of the substrate W is less likely to drop, and the efficiency of resist stripping by SPM can be further improved. In addition, the diffusion of the chemical atmosphere generated from the substrate W can be efficiently suppressed.

In this embodiment, as shown in FIG. 2, the second blowing section 32 includes an upper blowing section 32a and a lower blowing section 32b. The upper blowing section 32a blows superheated water steam toward the upper surface of the substrate W held by the spin chuck 4. The lower blowing section 32b blows superheated water steam toward the lower surface of the substrate W held by the spin chuck 4. The upper blowing section 32a is an example of an upper superheated water steam blowing section. The lower blowing section 32b is an example of a lower superheated water steam blowing section.

Specifically, the upper blowing section 32a is fixed to the top of the outer peripheral surface of the inclined section 93. In other words, the upper blowing section 32a is supported near the upper end 9a of the guard 91. The lower blowing section 32b is fixed to the inner peripheral surface of the guard 91. For example, the lower blowing section 32b may be fixed to the inner peripheral surface of the guide section 92.

According to this embodiment, superheated water vapor can be supplied toward both the upper and lower surfaces of the substrate W. This makes it more difficult for the temperature of the substrate W to drop, further improving the efficiency of resist stripping by SPM. In addition, superheated water vapor can be supplied toward the upper surface of the substrate W from a position relatively close to the substrate W. This makes it possible to efficiently suppress the diffusion of the chemical atmosphere generated from the substrate W.

Furthermore, according to this embodiment, the upper blowing section 32a is disposed at the top of the outer peripheral surface of the inclined section 93, so that gas (including superheated steam) is drawn from the space above the guard 91 to the inside of the upper end 9a of the guard 91 without being obstructed by the upper blowing section 32a.

The third blowing section 33 blows out superheated steam toward the inner wall surface of the chamber 201. The third blowing section 33 is an example of a third superheated steam blowing section. In this embodiment, the third blowing section 33 blows out superheated steam toward the inner wall surface of the side wall 203. The blowing out of superheated steam from the third blowing section 33 is controlled by the control device 101 (control section 102). The control device 101 (control section 102) causes the third blowing section 33 to blow out superheated steam when cleaning the inside of the chamber 201.

After the inside of the chamber 201 is cleaned, a process is performed to dry the inside of the chamber 201. For example, an inert gas such as nitrogen gas is supplied to the inside of the chamber 201 to dry the inside of the chamber 201. The cleaned chamber 201 is used for substrate processing after the inside of the chamber 201 has dried.

However, when cleaning the inside of the chamber 201, a large amount of pure water is used. Therefore, the inside of the chamber 201 is difficult to dry after cleaning. In contrast, according to this embodiment, when cleaning the inside of the chamber 201, superheated steam is supplied from the third blowing section 33 toward the inner wall surface of the chamber 201, so that the inner wall surface of the chamber 201 is easily dried. Therefore, the inside of the chamber 201 can be dried efficiently.

The cleaning of the inside of the chamber 201 may be performed, for example, every time the substrate processing section 2 processes a predetermined number of substrates W (e.g., 24 substrates). Alternatively, the cleaning of the inside of the chamber 201 may be performed every time a predetermined time has elapsed.

The fourth blowing section 34 is located between the blowing mechanism 3 and the substrate W held by the spin chuck 4, and blows water vapor into the lower space 2a of the chamber 201. The fourth blowing section 34 is an example of a water vapor blowing section. The blowing of water vapor from the fourth blowing section 34 is controlled by the control device 101 (control section 102). As already explained, water vapor has a lower temperature than superheated water vapor. Furthermore, water vapor has a higher moisture content and larger droplets than superheated water vapor. The water vapor supplied from the fourth blowing section 34 may be a mist.

In this embodiment, the fourth blowing section 34 is disposed above the first nozzle 6. For example, as shown in FIG. 2, the fourth blowing section 34 may be supported by the straightening plate 204. For example, the fourth blowing section 34 is fixed to the straightening plate 204 via a bracket. In addition, in a plan view, the fourth blowing section 34 is located outside the substrate W held by the spin chuck 4. Therefore, even if water droplets drip from the fourth blowing section 34, the water droplets are unlikely to fall onto the substrate W. For example, the fourth blowing section 34 may be disposed at a position overlapping with the liquid receiving section 9 in a plan view.

The fourth blowing section 34 blows out water vapor, for example, when the substrate W is being treated with a rinsing liquid. That is, the control device 101 (control section 102) causes the fourth blowing section 34 to blow out water vapor when a rinsing liquid is being ejected from the third nozzle 8. Hereinafter, substrate treatment with a rinsing liquid may be referred to as a "rinsing process."

According to this embodiment, the water vapor can further suppress the diffusion of the chemical atmosphere. Specifically, as already described, the water vapor droplets are larger than the superheated water vapor droplets. Therefore, the water vapor droplets are more likely to collide with the chemical components than the superheated water vapor. Therefore, the chemical components can be efficiently discharged outside the chamber 201 by the suction force transmitted from the exhaust duct 206 to the inside of the guard 91. In addition, a part of the chemical components collided with the water vapor droplets adheres to the liquid film of the rinsing liquid formed on the upper surface of the substrate W and is discharged from the substrate W together with the rinsing liquid. As a result, the chemical components are discharged outside the chamber 201 together with the rinsing liquid. In particular, during the rinsing process, the chemical atmosphere is relatively unlikely to be generated. In other words, during the rinsing process, the chemical atmosphere is unlikely to increase. Therefore, by supplying water vapor to the lower space 2a of the chamber 201 during the rinsing process, the diffusion of the chemical atmosphere can be more efficiently suppressed.

Next, the upper blowing section 32a will be described with reference to FIG. 3. As shown in FIG. 3, the upper blowing section 32a is annular and extends along the upper end 9a of the guard 91. The upper blowing section 32a is a tubular member, and superheated water steam flows inside the upper blowing section 32a. At least one blowing port (not shown) is formed on the inner periphery of the upper blowing section 32a. The blowing port is an opening, and the superheated water steam flowing through the upper blowing section 32a is blown out of the blowing port of the upper blowing section 32a toward the top surface of the substrate W.

The configuration of the lower blowing section 32b is the same as that of the upper blowing section 32a. Specifically, the lower blowing section 32b is annular and extends along the inner circumferential surface of the guard 91. The lower blowing section 32b is a tubular member, and superheated water steam flows inside the lower blowing section 32b. At least one blowing port (not shown) is formed on the inner circumferential side of the lower blowing section 32b. The blowing port is an opening, and the superheated water steam flowing through the lower blowing section 32b is blown out of the blowing port of the lower blowing section 32b toward the underside of the substrate W.

According to this embodiment, since the upper blowing section 32a has a circular ring shape, by forming multiple blowing ports in the upper blowing section 32a, superheated water steam can be supplied to the upper surface of the substrate W from multiple directions. Therefore, a decrease in the temperature of the substrate W can be efficiently suppressed. However, the number of blowing ports in the upper blowing section 32a may be one.

Similarly, because the lower blowing section 32b has a circular ring shape, by forming multiple blowing ports in the lower blowing section 32b, superheated water steam can be supplied to the underside of the substrate W from multiple directions. Therefore, a decrease in the temperature of the substrate W can be efficiently suppressed. However, the number of blowing ports in the lower blowing section 32b may be one.

Furthermore, according to this embodiment, the configuration of the substrate processing apparatus 100 is simpler than, for example, the case where the upper blowing section 32a is formed by a plurality of nozzles arranged along a circumference, and the substrate processing apparatus 100 is easier to manufacture. Similarly, the configuration of the substrate processing apparatus 100 is simpler than, for example, the case where the lower blowing section 32b is formed by a plurality of nozzles arranged along a circumference, and the substrate processing apparatus 100 is easier to manufacture. However, the upper blowing section 32a may be formed by at least one nozzle. Similarly, the lower blowing section 32b may be formed by at least one nozzle.

Next, the substrate processing apparatus 100 of this embodiment will be described with reference to FIG. 4. FIG. 4 is another cross-sectional view that shows a schematic configuration of the substrate processing section 2 included in the substrate processing apparatus 100 of this embodiment. In detail, FIG. 4 shows the inside of the substrate processing section 2 as viewed from below.

As shown in FIG. 4, the first blowing section 31 is annular. The first blowing section 31 is a tubular member, and superheated steam flows through the inside of the first blowing section 31. At least one blowing outlet (not shown) is formed on the underside of the first blowing section 31. The blowing outlet is an opening, and the superheated steam flowing through the first blowing section 31 is blown out downward from the blowing outlet of the first blowing section 31.

The configuration of the fourth blowing section 34 is the same as that of the first blowing section 31. Specifically, the fourth blowing section 34 is annular. The fourth blowing section 34 is a tubular member, and water vapor flows through the interior of the fourth blowing section 34. At least one blowing outlet (not shown) is formed on the underside of the fourth blowing section 34. The blowing outlet is an opening, and water vapor flowing through the fourth blowing section 34 is blown out downward from the blowing outlet of the fourth blowing section 34.

According to this embodiment, since the first blowing section 31 is annular, by forming multiple blowing outlets in the first blowing section 31, it is possible to supply superheated steam evenly to the lower space 2a of the chamber 201. However, the number of blowing outlets in the first blowing section 31 may be one.

Similarly, since the fourth blowing section 34 has a circular ring shape, by forming multiple blowing outlets in the fourth blowing section 34, water vapor can be supplied evenly to the lower space 2a of the chamber 201. However, the number of blowing outlets in the fourth blowing section 34 may be one.

Furthermore, according to this embodiment, the configuration of the substrate processing apparatus 100 is simpler than, for example, the first blowing section 31 being configured with multiple nozzles, making it easier to manufacture the substrate processing apparatus 100. Similarly, the configuration of the substrate processing apparatus 100 is simpler than, for example, the fourth blowing section 34 being configured with multiple nozzles, making it easier to manufacture the substrate processing apparatus 100. However, the first blowing section 31 may be configured with at least one nozzle. Similarly, the fourth blowing section 34 may be configured with at least one nozzle.

In this embodiment, the fourth blowing section 34 is disposed inside the first blowing section 31, but the fourth blowing section 34 may be disposed outside the first blowing section 31. In addition, when the first blowing section 31 and the fourth blowing section 34 are each configured with a plurality of nozzles, for example, the nozzles of the first blowing section 31 and the nozzles of the fourth blowing section 34 may be disposed alternately along the circumference.

As shown in FIG. 4, the third blowing section 33 extends along the side wall 203 of the chamber 201. The third blowing section 33 is a tubular member, and the superheated steam flows inside the third blowing section 33. At least one blowing outlet (not shown) is formed in the third blowing section 33. The blowing outlet is an opening. Specifically, the blowing outlet of the third blowing section 33 opens toward the inner surface of the side wall 203. The superheated steam flowing through the third blowing section 33 is blown out from the blowing outlet of the third blowing section 33 toward the side wall 203 of the chamber 201.

According to this embodiment, since the third blowing section 33 extends along the side wall 203 of the chamber 201, by forming multiple blowing outlets in the third blowing section 33, it is possible to supply superheated steam evenly to the inner circumferential surface of the side wall 203. However, the number of blowing outlets in the third blowing section 33 may be one.

In addition, according to this embodiment, the configuration of the substrate processing apparatus 100 is simpler than when the third blowing section 33 is configured with multiple nozzles arranged along the side wall 203 of the chamber 201, for example, and the substrate processing apparatus 100 is easier to manufacture. However, the third blowing section 33 may be configured with at least one nozzle.

Next, the substrate processing apparatus 100 of this embodiment will be further described with reference to Figures 4 and 5. Figure 5 is a diagram showing the configuration of the substrate processing apparatus 100 of this embodiment. As shown in Figure 4, the substrate processing apparatus 100 further includes a water vapor supply unit 300. The water vapor supply unit 300 supplies superheated water vapor to the first blowing unit 31 and the third blowing unit 33. The water vapor supply unit 300 also supplies water vapor to the fourth blowing unit 34. Furthermore, as shown in Figure 5, the water vapor supply unit 300 supplies superheated water vapor to the second blowing unit 32 (upper blowing unit 32a and lower blowing unit 32b).

As shown in FIG. 4, the water vapor supply unit 300 has a water vapor generation unit 300A, a first water vapor pipe 311, a first superheated steam valve 312, a first flow control valve 313, and a superheated steam generation heater 303. As shown in FIG. 5, the water vapor supply unit 300 further has a second water vapor pipe 321 and a second superheated steam valve 322. As shown in FIG. 4, the water vapor supply unit 300 further has a third water vapor pipe 331, a third superheated steam valve 332, a fourth water vapor pipe 341, a water vapor valve 342, and a second flow control valve 343.

The steam generating unit 300A is housed in the fluid cabinet 10A described with reference to FIG. 1. The first superheated steam valve 312, the first flow control valve 313, the superheated steam generating heater 303, the second superheated steam valve 322, the third superheated steam valve 332, the steam valve 342, and the second flow control valve 343 are housed in the fluid box 10B described with reference to FIG. 1. The first steam pipe 311, the second steam pipe 321, the third steam pipe 331, and a portion of the fourth steam pipe 341 are housed in the chamber 201.

The water vapor generating unit 300A generates water vapor. As shown in FIG. 4, the water vapor generated from the water vapor generating unit 300A flows into the first water vapor pipe 311 and the fourth water vapor pipe 341. Specifically, the water vapor generating unit 300A has a storage unit 301 and a water vapor generating heater 302. The storage unit 301 stores pure water. The water vapor generating heater 302 heats the pure water stored in the storage unit 301 to generate water vapor. One end of the first water vapor pipe 311 and one end of the fourth water vapor pipe 341 are connected to the storage unit 301. The operation of the water vapor generating heater 302 is controlled by the control device 101 (control unit 102).

The other end of the first steam pipe 311 is connected to the first blowing section 31. The first steam pipe 311 is provided with a first superheated steam valve 312, a first flow control valve 313, and a superheated steam generation heater 303.

The first steam pipe 311 is a tubular member through which steam and superheated steam flow. The superheated steam generation heater 303 heats the steam that flows from the storage section 301 into the first steam pipe 311 to generate superheated steam. The superheated steam flows through the first steam pipe 311 and flows into the first blowing section 31.

The first superheated steam valve 312 is an opening/closing valve that can be switched between an open state and a closed state. The control device 101 (control unit 102) controls the opening/closing operation of the first superheated steam valve 312. The actuator of the first superheated steam valve 312 is, for example, a pneumatic actuator or an electric actuator. When the first superheated steam valve 312 opens, superheated steam flows through the first steam pipe 311 to the first blowing section 31, and superheated steam is supplied to the first blowing section 31. When the first superheated steam valve 312 closes, the supply of superheated steam to the first blowing section 31 stops.

The first flow control valve 313 controls the flow rate of superheated steam flowing through the first steam pipe 311. Specifically, the opening degree of the first flow control valve 313 can be controlled, and the flow rate of superheated steam flowing through the first steam pipe 311 corresponds to the opening degree of the first flow control valve 313. The actuator of the first flow control valve 313 is, for example, an electric actuator. The first flow control valve 313 may be, for example, a motor needle valve. The opening degree of the first flow control valve 313 is controlled by the control device 101 (control unit 102).

As shown in FIG. 5, one end of the second water vapor pipe 321 is connected to the first water vapor pipe 311 downstream of the superheated steam generation heater 303. The other end of the second water vapor pipe 321 is connected to the second blowing section 32. The second water vapor pipe 321 is a tubular member, and superheated water vapor flows from the first water vapor pipe 311 into the second water vapor pipe 321. The superheated water vapor flows through the second water vapor pipe 321 and flows into the second blowing section 32.

The second superheated steam valve 322 is interposed in the second steam pipe 321. The second superheated steam valve 322 is an opening/closing valve that can be switched between an open state and a closed state. The control device 101 (control unit 102) controls the opening/closing operation of the second superheated steam valve 322. The actuator of the second superheated steam valve 322 is, for example, an air actuator or an electric actuator. When the second superheated steam valve 322 opens, superheated steam flows through the second steam pipe 321 to the second blowing section 32, and superheated steam is supplied to the second blowing section 32. When the second superheated steam valve 322 closes, the supply of superheated steam to the second blowing section 32 stops.

In this embodiment, the second steam pipe 321 includes a first pipe 321a and a second pipe 321b. The second superheated steam valve 322 includes a first valve 322a and a second valve 322b.

One end of the first pipe 321a of the second water vapor pipe 321 is connected to the first water vapor pipe 311 downstream of the superheated steam generation heater 303. The other end of the first pipe 321a of the second water vapor pipe 321 is connected to the upper blowing section 32a. The superheated water vapor that flows from the first water vapor pipe 311 into the first pipe 321a of the second water vapor pipe 321 flows through the first pipe 321a of the second water vapor pipe 321 and flows into the upper blowing section 32a.

The first valve 322a is interposed in the first pipe 321a of the second steam pipe 321. When the first valve 322a is opened, superheated steam flows through the first pipe 321a of the second steam pipe 321 to the upper blowing section 32a, and the superheated steam is supplied to the upper blowing section 32a. When the first valve 322a is closed, the supply of superheated steam to the upper blowing section 32a is stopped.

One end of the second pipe 321b of the second water vapor pipe 321 is connected to the first pipe 321a of the second water vapor pipe 321 upstream of the first valve 322a. The other end of the second pipe 321b of the second water vapor pipe 321 is connected to the lower blowing section 32b. The superheated water vapor that flows from the first pipe 321a of the second water vapor pipe 321 to the second pipe 321b of the second water vapor pipe 321 flows through the second pipe 321b of the second water vapor pipe 321 and flows into the lower blowing section 32b.

The second valve 322b is interposed in the second pipe 321b of the second steam pipe 321. When the second valve 322b is opened, superheated steam flows through the second pipe 321b of the second steam pipe 321 to the lower blowing section 32b, and the superheated steam is supplied to the lower blowing section 32b. When the second valve 322b is closed, the supply of superheated steam to the lower blowing section 32b is stopped.

As shown in FIG. 4, one end of the third water vapor pipe 331 is connected to the first water vapor pipe 311 downstream of the superheated steam generation heater 303. The other end of the third water vapor pipe 331 is connected to the third blowing section 33. The third water vapor pipe 331 is a tubular member, and superheated water vapor flows from the first water vapor pipe 311 into the third water vapor pipe 331. The superheated water vapor flows through the third water vapor pipe 331 and flows into the third blowing section 33.

The third superheated steam valve 332 is interposed in the third steam pipe 331. The third superheated steam valve 332 is an opening/closing valve that can be switched between an open state and a closed state. The control device 101 (control unit 102) controls the opening/closing operation of the third superheated steam valve 332. The actuator of the third superheated steam valve 332 is, for example, an air actuator or an electric actuator. When the third superheated steam valve 332 opens, superheated steam flows through the third steam pipe 331 to the third blowing section 33, and superheated steam is supplied to the third blowing section 33. When the third superheated steam valve 332 closes, the supply of superheated steam to the third blowing section 33 stops.

The other end of the fourth water vapor pipe 341 is connected to the fourth blowing section 34. A water vapor valve 342 and a second flow control valve 343 are interposed in the fourth water vapor pipe 341.

The fourth water vapor pipe 341 is a tubular member through which water vapor flows. Water vapor that flows from the storage section 301 into the fourth water vapor pipe 341 flows through the fourth water vapor pipe 341 and flows into the fourth blowing section 34.

The water vapor valve 342 is an opening/closing valve that can be switched between an open state and a closed state. The control device 101 (control unit 102) controls the opening and closing operation of the water vapor valve 342. The actuator of the water vapor valve 342 is, for example, a pneumatic actuator or an electric actuator. When the water vapor valve 342 opens, water vapor flows through the fourth water vapor pipe 341 to the fourth blowing section 34, and water vapor is supplied to the fourth blowing section 34. When the water vapor valve 342 closes, the supply of water vapor to the fourth blowing section 34 stops.

The second flow control valve 343 controls the flow rate of water vapor flowing through the fourth water vapor pipe 341. Specifically, the opening degree of the second flow control valve 343 can be controlled, and the flow rate of water vapor flowing through the fourth water vapor pipe 341 is a value according to the opening degree of the second flow control valve 343. The actuator of the second flow control valve 343 is, for example, an electric actuator. The second flow control valve 343 may be, for example, a motor needle valve. The opening degree of the second flow control valve 343 is controlled by the control device 101 (control unit 102).

Next, the first chemical liquid supply unit 62 will be described with reference to FIG. 6. FIG. 6 is a diagram showing the configuration of the first chemical liquid supply unit 62 included in the substrate processing apparatus 100 of this embodiment. As shown in FIG. 6, the first chemical liquid supply unit 62 may further include a heater 643 in addition to the first chemical liquid supply pipe 621, the first component opening and closing valve 631, and the second component opening and closing valve 632 described with reference to FIG. 2. The heater 643 is interposed in the first pipe 621a of the first chemical liquid supply pipe 621. For example, the heater 643 is interposed in the first pipe 621a of the first chemical liquid supply pipe 621 downstream of the first component opening and closing valve 631. The heater 643 heats the sulfuric acid flowing through the first pipe 621a of the first chemical liquid supply pipe 621.

Next, the substrate processing method of this embodiment will be described with reference to Figures 1 to 7. The substrate processing method of this embodiment is executed, for example, by the substrate processing apparatus 100 described with reference to Figures 1 to 6. Figure 7 is a flowchart showing the substrate processing method of this embodiment. In detail, Figure 7 shows the flow of processing by the control device 101 (control unit 102).

As shown in FIG. 7, the substrate processing method of this embodiment includes steps S1 to S6. As described with reference to FIG. 2, while the process shown in FIG. 7 is being performed, the control device 101 (control unit 102) controls the blower mechanism 3 to blow air into the chamber 201. Therefore, a downflow is generated in the lower space 2a of the chamber 201.

When the process shown in FIG. 7 is started, the control device 101 (control unit 102) first controls the center robot CR to load the substrate W into the lower space 2a of the chamber 201 (step S1). The control device 101 (control unit 102) controls the spin chuck 4 to hold the substrate W loaded by the center robot CR (step S2). As a result, the spin chuck 4 holds the substrate W in the chamber 201.

When the spin chuck 4 holds the substrate W, the control device 101 (control unit 102) controls the substrate processing unit 2 to perform substrate processing (step S3). Specifically, the control device 101 (control unit 102) controls the substrate processing unit 2 to supply SPM, hydrogen peroxide, rinsing liquid, and SC1 to the substrate W in the following order: SPM, hydrogen peroxide, rinsing liquid, SC1, rinsing liquid.

Furthermore, the control device 101 (control unit 102) causes the substrate processing unit 2 to perform steam processing in parallel with the substrate processing (step S4). For example, the control device 101 (control unit 102) causes the first blowing unit 31 to blow superheated steam into the lower space 2a of the chamber 201 while air is being blown into the chamber 201 by the blowing mechanism 3. Specifically, the control device 101 (control unit 102) causes the first blowing unit 31 to blow superheated steam during SPM processing.

When the substrate processing is completed, the control device 101 (control unit 102) controls the spin chuck 4 to release its hold on the substrate W (step S5). When the spin chuck 4 releases its hold on the substrate W, the control device 101 (control unit 102) controls the center robot CR to unload the substrate W from the chamber 201 (step S6). As a result, the process shown in FIG. 7 is completed.

Next, the substrate processing (step S3) and water vapor processing (step S4) shown in FIG. 7 will be described with reference to FIGS. 1 to 15. FIG. 8 is a flow chart showing the substrate processing (step S3) and water vapor processing (step S4) included in the substrate processing method of this embodiment. FIG. 9 is a diagram showing the substrate processing section 2 during pre-heating. FIG. 10 is a diagram showing the substrate processing section 2 during SPM processing. FIG. 11 is a diagram showing the substrate processing section 2 during puddle processing. FIG. 12 is a diagram showing the substrate processing section 2 during processing of a substrate W with hydrogen peroxide solution. FIG. 13 is a diagram showing the substrate processing section 2 during rinsing processing. FIG. 14 is a diagram showing the substrate processing section 2 during processing of a substrate W with SC1. FIG. 15 is a diagram showing the substrate processing section 2 during drying processing.

As shown in FIG. 8, when substrate processing is started, the control device 101 (control unit 102) first controls the substrate heating unit 20 to heat the substrate W (step S31). In other words, the temperature of the substrate W is raised before the SPM processing is performed. By raising the temperature of the substrate W in advance, the efficiency of resist film stripping by SPM is improved.

More specifically, as shown in FIG. 9, the control device 101 (control unit 102) controls the power supply unit 23 to energize the heater embedded in the heating member 21. As a result, the heating member 21 is heated. The control device 101 (control unit 102) also controls the heater lift unit 24 to lift the heating member 21 from the second lower position to the second upper position.

The second lower position is a position where the heating member 21 is close to the upper surface of the spin base 41. The second lower position may be a position where the heating member 21 is in contact with the upper surface of the spin base 41. The second upper position is a position where the heating member 21 is close to the lower surface of the substrate W. When the heating member 21 is placed in the second upper position, the substrate W is heated by radiant heat from the heating member 21. Note that superheated water vapor and water vapor are not supplied to the lower space 2a of the chamber 201 during pre-heating.

The control device 101 (control unit 102) preheats the substrate W for a predetermined time, and then controls the spin motor unit 5 to start rotation of the substrate W held by the spin chuck 4 (see FIG. 10). The control device 101 (control unit 102) also controls the first nozzle moving mechanism 61 to move the first nozzle 6 to the processing position. More specifically, the first nozzle 6 moves to a position opposite the center of the substrate W (see FIG. 10).

When the rotation speed of the substrate W reaches a predetermined rotation speed, the control device 101 (control unit 102) controls the first chemical liquid supply unit 62 to eject SPM from the first nozzle 6 toward the rotating substrate W (step S32). As a result, as shown in FIG. 10, SPM is supplied to the upper surface of the rotating substrate W, and a liquid film of SPM is formed on the upper surface of the substrate W. In other words, the control device 101 (control unit 102) controls the rotation speed of the substrate W when ejecting SPM to form a liquid film of SPM on the upper surface of the substrate W.

Furthermore, the control device 101 (control unit 102) performs a first superheated steam treatment when discharging the SPM (step S41). Specifically, as shown in FIG. 10, the control device 101 (control unit 102) controls the steam supply unit 300 described with reference to FIG. 4 and FIG. 5 to blow out superheated steam from the first blowing unit 31. As a result, as already described, it is possible to improve the efficiency of resist stripping by the SPM. In addition, the superheated steam can suppress the diffusion of the chemical atmosphere.

The timing at which the first blowing section 31 starts blowing out the superheated steam may be before the start of the ejection of the SPM, or may be the same timing as the start of the ejection of the SPM. Alternatively, the timing at which the first blowing section 31 starts blowing out the superheated steam may be after the start of the ejection of the SPM. The control device 101 (control section 102) may cause the first blowing section 31 to blow out the superheated steam continuously or intermittently.

The control device 101 (control unit 102) may cause the first blowing unit 31 to blow superheated steam only before the ejection of SPM starts, or may cause the first blowing unit 31 to blow superheated steam only when the ejection of SPM starts. Alternatively, the control device 101 (control unit 102) may cause the first blowing unit 31 to blow superheated steam for a period between the start and end of ejection of SPM, which is shorter than the period between the start and end of ejection of SPM.

As shown in FIG. 10, the control device 101 (control unit 102) may control the heater lifting unit 24 to lower the heating member 21 from the second upper position to the second lower position before starting to eject the SPM.

After a predetermined time has elapsed since the start of the discharge of SPM, the control device 101 (control unit 102) controls the first chemical liquid supply unit 62 to stop the discharge of SPM. Then, the control device 101 (control unit 102) controls the rotation speed of the substrate W by the spin motor unit 5 to form a paddle state in which the SPM liquid film is supported on the upper surface of the substrate W (step S33). For example, the control device 101 (control unit 102) may stop the rotation of the substrate W to form the paddle state (see FIG. 11). Alternatively, the control device 101 (control unit 102) may rotate the substrate W at a low speed to form the paddle state. By forming the paddle state, the efficiency of resist stripping by SPM can be improved.

The control device 101 (control unit 102) performs the second superheated steam treatment when the puddle state is formed (during the puddle treatment) (step S42). Specifically, as shown in FIG. 11, the control device 101 (control unit 102) controls the steam supply unit 300 described with reference to FIG. 4 and FIG. 5 to blow superheated steam from the first blowing unit 31 and to blow superheated steam from the second blowing unit 32 (upper blowing unit 32a and lower blowing unit 32b). That is, while continuing to supply superheated steam from the first blowing unit 31, the second blowing unit 32 blows superheated steam toward the substrate W held by the spin chuck 4. This improves the efficiency of resist stripping by SPM, as already described. Furthermore, the superheated steam can suppress the diffusion of the chemical atmosphere.

In addition, because a liquid film of SPM is formed on the upper surface of the substrate W, the temperature of the substrate W cannot be directly raised from the upper surface side of the substrate W. In contrast, in this embodiment, during puddle processing, superheated water steam is supplied from the lower blowing section 32b toward the lower surface of the substrate W. Therefore, the temperature of the substrate W can be directly raised by the superheated water steam. This allows the resist film to be stripped more efficiently.

As shown in FIG. 11, when the puddle state is formed, the control device 101 (control unit 102) may control the heater lifting unit 24 to raise the heating member 21 from the second lower position to the second upper position, thereby heating the substrate W with the heating member 21.

When a predetermined time has elapsed since the start of the formation of the paddle state, the control device 101 (control unit 102) controls the spin motor unit 5 to start rotating the substrate W held by the spin chuck 4 (see FIG. 12). Alternatively, when a predetermined time has elapsed since the start of the formation of the paddle state, the control device 101 (control unit 102) controls the spin motor unit 5 to increase the rotation speed of the substrate W.

When the rotation speed of the substrate W reaches a predetermined rotation speed, the control device 101 (control unit 102) controls the first chemical liquid supply unit 62 to eject hydrogen peroxide solution from the first nozzle 6 toward the rotating substrate W (step S34). As a result, as shown in FIG. 12, hydrogen peroxide solution is supplied to the upper surface of the rotating substrate W, and a liquid film of hydrogen peroxide solution is formed on the upper surface of the substrate W. That is, the control device 101 (control unit 102) controls the rotation speed of the substrate W when ejecting hydrogen peroxide solution, to form a liquid film of hydrogen peroxide solution on the upper surface of the substrate W. In more detail, the hydrogen peroxide solution expels SPM from the upper surface of the substrate W, and the liquid film of SPM is replaced with a liquid film of hydrogen peroxide solution.

The control device 101 (control unit 102) performs the third superheated steam treatment when discharging the hydrogen peroxide solution (step S43). Specifically, as shown in FIG. 12, the control device 101 (control unit 102) controls the steam supply unit 300 described with reference to FIG. 4 and FIG. 5 to stop the supply of superheated steam from the second blowing unit 32 (upper blowing unit 32a and lower blowing unit 32b) and reduce the flow rate of superheated steam blown out from the first blowing unit 31.

Specifically, the control device 101 (control unit 102) blows superheated water steam from the first blowing unit 31 at a first flow rate during SPM processing and paddle processing, and blows superheated water steam from the first blowing unit 31 at a second flow rate that is smaller than the first flow rate when hydrogen peroxide is discharged. The control device 101 (control unit 102) adjusts the flow rate of superheated water steam by controlling the first flow control valve 313 shown in FIG. 4.

As shown in FIG. 12, the control device 101 (control unit 102) may heat the substrate W using the heating member 21 when discharging the hydrogen peroxide solution.

Hydrogen peroxide has the potential to oxidize the substrate W. In particular, the higher the temperature of the hydrogen peroxide, the more easily the substrate W is oxidized. Furthermore, the higher the temperature of the substrate W, the more easily the substrate W is oxidized. In contrast, according to this embodiment, the amount of superheated water steam supplied to the lower space 2a of the chamber 201 when the hydrogen peroxide is ejected can be reduced. As a result, the increase in temperature of the hydrogen peroxide due to the superheated water steam is suppressed, and the temperature of the substrate W is more likely to decrease, so that oxidation of the substrate W due to the hydrogen peroxide can be suppressed.

In addition, when hydrogen peroxide is ejected, a large amount of fumes are generated from the substrate W. Furthermore, when hydrogen peroxide is ejected, fumes are likely to be generated from the ejection port of the first nozzle 6. According to this embodiment, the diffusion of fumes can be suppressed by supplying superheated water vapor when hydrogen peroxide is ejected.

When hydrogen peroxide is ejected, the hydrogen peroxide is ejected at room temperature toward the substrate W on which a high-temperature SPM liquid film has been formed. As a result, a temperature gradient occurs within the surface of the substrate W, causing the substrate W to vibrate. In contrast, according to this embodiment, the temperature gradient can be suppressed by supplying superheated water vapor when the hydrogen peroxide is ejected. Therefore, vibration of the substrate W can be suppressed.

After a predetermined time has elapsed since the start of the discharge of hydrogen peroxide solution, the control device 101 (control unit 102) controls the first chemical liquid supply unit 62 to stop the discharge of hydrogen peroxide solution. The control device 101 (control unit 102) also controls the first nozzle movement mechanism 61 to retract the first nozzle 6 to the first retraction area.

After retracting the first nozzle 6 to the first retraction area, the control device 101 (control unit 102) rotates the substrate W held by the spin chuck 4, and controls the rinse liquid supply unit 82 to eject rinse liquid from the third nozzle 8 toward the rotating substrate W (step S35). As a result, as shown in FIG. 13, rinse liquid is supplied to the upper surface of the rotating substrate W, and a liquid film of rinse liquid is formed on the upper surface of the substrate W. That is, the control device 101 (control unit 102) controls the rotation speed of the substrate W when ejecting the rinse liquid, and forms a liquid film of rinse liquid on the upper surface of the substrate W. In more detail, hydrogen peroxide is discharged from the upper surface of the substrate W by the rinse liquid, and the liquid film of hydrogen peroxide is replaced with a liquid film of rinse liquid.

When the rinsing liquid is discharged, the control device 101 (control unit 102) supplies water vapor to the lower space 2a of the chamber 201 while air is being blown into the lower space 2a of the chamber 201 by the blower mechanism 3 (step S44). Specifically, as shown in FIG. 13, the control device 101 (control unit 102) controls the water vapor supply unit 300 described with reference to FIGS. 4 and 5 to blow water vapor from the fourth blowing unit 34. Note that, when superheated water vapor is supplied from the first blowing unit 31 when hydrogen peroxide solution is discharged (step S34), the control device 101 (control unit 102) controls the water vapor supply unit 300 described with reference to FIGS. 4 and 5 to stop the supply of superheated water vapor from the first blowing unit 31 when the rinsing liquid is discharged.

According to this embodiment, as already explained, by supplying water vapor to the lower space 2a of the chamber 201 during the rinsing process, the diffusion of the chemical atmosphere can be more efficiently suppressed. As shown in FIG. 13, the control device 101 (control unit 102) may control the heater lifting unit 24 to lower the heating member 21 from the second upper position to the second lower position before starting to eject the rinsing liquid. This makes it difficult for the rinsing liquid to evaporate from the upper surface of the substrate W.

After a predetermined time has elapsed since the start of the discharge of the rinsing liquid, the control device 101 (control unit 102) controls the rinsing liquid supply unit 82 to stop the discharge of the rinsing liquid. After stopping the discharge of the rinsing liquid, the control device 101 (control unit 102) controls the second nozzle movement mechanism 71 to move the second nozzle 7 from the second evacuation area to a position facing the center of the substrate W.

When the second nozzle 7 moves to a position facing the center of the substrate W, the control device 101 (control unit 102) controls the second chemical liquid supply unit 72 and the second nozzle movement mechanism 71 to perform a half scan process while rotating the substrate W held by the spin chuck 4. Specifically, while moving the second nozzle 7 from a position facing the center of the substrate W to a position facing the peripheral edge of the substrate W, SC1 is ejected from the second nozzle 7 toward the rotating substrate W (step S36). As a result, the rinse liquid is discharged from the top surface of the substrate W by the SC1, and the substrate W is processed by the SC1.

The control device 101 (control unit 102) performs the fourth superheated steam process when SC1 is discharged (step S45). Specifically, as shown in FIG. 14, the control device 101 (control unit 102) controls the steam supply unit 300 described with reference to FIG. 4 and FIG. 5 to blow out superheated steam from the first blowing unit 31.

Since SC1 is supplied to the substrate W by half scan processing, the central region of the substrate W becomes easily dried while the second nozzle 7 moves from a position facing the center of the substrate W to a position facing the peripheral portion of the substrate W. Similarly, the peripheral portion of the substrate W becomes easily dried while the second nozzle 7 moves from a position facing the peripheral portion of the substrate W to a position facing the center of the substrate W. In contrast, according to the present embodiment, since superheated water vapor is supplied when SC1 is ejected, the humidity in the lower space 2a can be kept high. Therefore, the substrate W becomes less likely to dry when SC1 is ejected. Note that, as shown in FIG. 14, the heating member 21 is positioned at the second lower position when SC1 is ejected. Therefore, drying of the substrate W can be further suppressed.

In addition, according to this embodiment, superheated steam is supplied when SC1 is discharged, so the temperature of SC1 supplied to the upper surface of the substrate W can be increased. As a result, the main surface of the substrate W becomes susceptible to oxidation by SC1.

Incidentally, since the substrate W is easily dried when SC1 is discharged, the control device 101 (control unit 102) may control the blower mechanism 3 to weaken the wind speed of the downflow. By weakening the wind speed of the downflow, the substrate W becomes less likely to dry.

After a predetermined time has elapsed since the start of the discharge of SC1, the control device 101 (control unit 102) controls the second chemical liquid supply unit 72 to stop the discharge of SC1. The control device 101 (control unit 102) also controls the second nozzle movement mechanism 71 to retract the second nozzle 7 to the second retraction area.

The control device 101 (control unit 102) retracts the second nozzle 7 to the second retraction area, and then, as in step S36, causes the third nozzle 8 to eject the rinsing liquid toward the rotating substrate W (step S37). As a result, the SC1 is discharged from the top surface of the substrate W by the rinsing liquid, and a liquid film of the rinsing liquid is formed on the top surface of the substrate W.

When the rinsing liquid is discharged, the control device 101 (control unit 102) supplies water vapor to the lower space 2a of the chamber 201 (step S46), similar to step S44. Also, when the rinsing liquid is discharged, the control device 101 (control unit 102) controls the water vapor supply unit 300 described with reference to Figures 4 and 5 to stop the supply of superheated water vapor from the first blowing unit 31.

According to this embodiment, as already described, the chemical atmosphere can be reduced by supplying water vapor when the rinsing liquid is discharged. Furthermore, the temperature of the rinsing liquid can be increased by the water vapor.

If the downflow wind speed is weakened when SC1 is discharged, the control device 101 (control unit 102) controls the blower mechanism 3 to restore the downflow wind speed when the rinsing liquid is discharged.

After a predetermined time has elapsed since the start of the discharge of the rinsing liquid, the control device 101 (control unit 102) controls the rinsing liquid supply unit 82 to stop the discharge of the rinsing liquid. After stopping the discharge of the rinsing liquid, the control device 101 (control unit 102) controls the rotation speed of the substrate W by the spin motor unit 5 to perform a drying process to remove the rinsing liquid from the upper surface of the substrate W and dry the upper surface of the substrate W (step S38). As a result, the process shown in FIG. 8 is completed.

Specifically, the control device 101 (control unit 102) controls the spin motor unit 5 to rotate the substrate W at high speed. By rotating the substrate W at high speed, the rinsing liquid adhering to the substrate W is shaken off and the substrate W is dried. Also, as shown in FIG. 15, during the drying process, the control device 101 (control unit 102) controls the water vapor supply unit 300 described with reference to FIG. 4 and FIG. 5 to stop blowing water vapor from the fourth blowing unit 34.

According to this embodiment, since water vapor and superheated steam are not supplied to the lower space 2a of the chamber 201 during the drying process, the humidity in the chamber 201 can be reduced compared to when water vapor or superheated steam is supplied. Therefore, the substrate W can be dried efficiently.

Furthermore, according to this embodiment, when the rinsing liquid is discharged (step S37), water vapor is supplied to raise the temperature of the rinsing liquid. As a result, the rinsing liquid is more easily evaporated during the drying process, and the substrate W can be dried efficiently.

Next, the chamber cleaning method of this embodiment will be described with reference to FIG. 16. FIG. 16 is a schematic diagram showing the substrate processing unit 2 when cleaning the inside of the chamber 201.

The chamber cleaning method of this embodiment includes a process of cleaning the inside of the chamber 201. As shown in FIG. 16, the control device 101 (control unit 102) controls the water vapor supply unit 300 described with reference to FIGS. 4 and 5 to blow water vapor from the fourth blowing unit 34 into the lower space 2a of the chamber 201 and blow superheated water vapor from the third blowing unit 33 toward the inner wall surface of the side wall 203.

According to this embodiment, when cleaning the inside of the chamber 201, water vapor is supplied to the lower space 2a of the chamber 201, so that the components of the drug solution floating in the lower space 2a of the chamber 201 can be efficiently discharged to the outside of the chamber 201. Also, as already explained, when cleaning the inside of the chamber 201, superheated water vapor is supplied from the third blowing section 33 toward the inner wall surface of the chamber 201, so that the inner wall surface of the chamber 201 tends to dry. Therefore, the inside of the chamber 201 can be efficiently dried.

The flow rate of water vapor supplied from the fourth blowing section 34 when cleaning the inside of the chamber 201 may be greater than the flow rate of water vapor supplied from the fourth blowing section 34 during the rinsing process (steps S35 and S36). By increasing the flow rate of water vapor, the chemical solution components can be more efficiently discharged to the outside of the chamber 201. The control device 101 (control section 102) adjusts the flow rate of water vapor by controlling the second flow control valve 343 shown in FIG. 4.

Next, a modified example of the substrate processing apparatus 100 of this embodiment will be described with reference to FIG. 17. FIG. 17 is a cross-sectional view that shows a schematic configuration of the substrate processing unit 2 included in the modified example of the substrate processing apparatus 100 of this embodiment.

As shown in FIG. 17, the substrate processing apparatus 100 may include a blocking unit 400. The blocking unit 400 may include a disk-shaped blocking plate 401, a support shaft 402, a support arm 403, and a lifting unit 404.

The blocking plate 401 is disposed between the straightening plate 204 and the spin chuck 4. Therefore, the blocking plate 401 is disposed above the substrate W held by the spin chuck 4 and faces the substrate W held by the spin chuck 4. The diameter of the blocking plate 401 is larger than the diameter of the substrate W.

The blocking plate 401 is supported in a horizontal position by a support shaft 402. The support shaft 402 may extend, for example, in a substantially vertical direction. The support shaft 402 is supported by a support arm 403.

The support arm 403 extends horizontally above the blocking plate 401. The lifting unit 404 of the blocking unit 400 moves the support arm 403 vertically. That is, the lifting unit 404 of the blocking unit 400 lifts and lowers the support arm 403. The lifting and lowering of the support arm 403 lifts and lowers the blocking plate 401. The lifting and lowering unit 404 of the blocking unit 400 is controlled by the control device 101 (control unit 102). The lifting and lowering unit 404 may include, for example, a ball screw mechanism and an electric motor that provides a driving force to the ball screw mechanism. Specifically, the lifting and lowering unit 404 of the blocking unit 400 lifts and lowers the blocking plate 401 between the third upper position and the third lower position.

When the blocking plate 401 is placed in the third lower position, the gap between the substrate W held by the spin chuck 4 and the blocking plate 401 becomes large enough that the first nozzle 6 and the second nozzle 7 cannot enter between the substrate W held by the spin chuck 4 and the blocking plate 401. The control device 101 (control unit 102) may place the blocking plate 401 in the third lower position, for example, during drying processing of the substrate W (step S38 in FIG. 8).

When the blocking plate 401 is placed in the third upper position, the gap between the substrate W held by the spin chuck 4 and the blocking plate 401 becomes large enough for the first nozzle 6 and the second nozzle 7 to enter between the substrate W held by the spin chuck 4 and the blocking plate 401. The control device 101 (control unit 102) may place the blocking plate 401 in the third upper position, for example, from the SPM process (step S32 in FIG. 8) to the rinsing process (step S37 in FIG. 8) before the drying process (step S38 in FIG. 8).

When the substrate processing apparatus 100 is equipped with a blocking section 400, it is preferable that the diameters of the first blowing section 31 and the fourth blowing section 34 are larger than the diameter of the blocking plate 401.

The above describes embodiments of the present invention with reference to the drawings (FIGS. 1 to 17). However, the present invention is not limited to the above embodiments, and can be implemented in various aspects without departing from the gist of the present invention. In addition, the components disclosed in the above embodiments can be modified as appropriate. For example, a component among all the components shown in one embodiment may be added to a component of another embodiment, or some of all the components shown in one embodiment may be deleted from the embodiment.

The drawings are primarily schematic illustrations of each component to facilitate understanding of the invention, and the thickness, length, number, spacing, etc. of each component shown may differ from the actual configuration due to the convenience of creating the drawings. Furthermore, the configuration of each component shown in the above embodiment is merely an example and is not particularly limited, and it goes without saying that various modifications are possible within a range that does not substantially deviate from the effects of the present invention.

For example, in the embodiment described with reference to Figures 1 to 17, the spin chuck 4 is a clamping type chuck in which multiple chuck members 42 contact the peripheral edge surface of the substrate W, but the method of holding the substrate W is not particularly limited as long as it can hold the substrate W horizontally. For example, the spin chuck 4 may be a vacuum type chuck or a Bernoulli type chuck.

In the embodiment described with reference to Figures 1 to 17, the control device 101 (control unit 102) reduces the flow rate of superheated steam blown out from the first blowing unit 31 when hydrogen peroxide is discharged, but the control device 101 (control unit 102) may stop the blowing of superheated steam from the first blowing unit 31 when hydrogen peroxide is discharged.

In the embodiment described with reference to Figures 1 to 17, the substrate heating unit 20 heats the substrate W with a heater, but the material used by the substrate heating unit 20 to heat the substrate W is not particularly limited as long as it is a material capable of heating the substrate W. For example, the substrate heating unit 20 may heat the substrate W by laser irradiation or light irradiation.

In the embodiment described with reference to Figures 1 to 17, the substrate processing apparatus 100 is provided with a substrate heating section 20, but the substrate heating section 20 may be omitted. In this case, pre-heating may be performed by blowing superheated steam from the second blowing section 32.

In addition, in the embodiment described with reference to Figures 1 to 17, water vapor is supplied when the rinsing liquid is ejected, but the supply of water vapor when the rinsing liquid is ejected may be omitted.

In the embodiment described with reference to Figures 1 to 17, the first blowing section 31 is annular, but the shape of the first blowing section 31 is not particularly limited. For example, the first blowing section 31 may be rectangular, annular, or serpentine. Similarly, when the first blowing section 31 is formed by multiple nozzles, the shape of the arrangement of the multiple nozzles is not particularly limited.

Similarly, in the embodiment described with reference to Figures 1 to 17, the fourth blowing section 34 was annular, but the shape of the fourth blowing section 34 is not particularly limited. Similarly, when the fourth blowing section 34 is formed by multiple nozzles, the shape of the arrangement of the multiple nozzles is not particularly limited.

In addition, in the embodiment described with reference to Figures 1 to 17, paddle processing was performed, but paddle processing may be omitted.

In the embodiment described with reference to Figures 1 to 17, the second blowing section 32 includes an upper blowing section 32a and a lower blowing section 32b, but the second blowing section 32 may include only one of the upper blowing section 32a and the lower blowing section 32b.

In the embodiment described with reference to Figures 1 to 17, the substrate processing apparatus 100 includes the fourth blowing section 34, but the fourth blowing section 34 may be omitted. In this case, the superheated steam generating heater 303 may be controlled to supply superheated steam and water vapor exclusively from the first blowing section 31.

In the embodiment described with reference to Figs. 1 to 17, the first blowing section 31 is disposed below the straightening plate 204, but the first blowing section 31 may be disposed above the straightening plate 204. That is, the first blowing section 31 may be disposed in the upper space 2b. In this case, the first blowing section 31 is disposed in a position where it can blow superheated steam into the lower space 2a through the through-hole 204a of the straightening plate 204. The third blowing section 33 and the fourth blowing section 34 may also be disposed above the straightening plate 204.

In the embodiment described with reference to Figures 1 to 17, water vapor is supplied when cleaning the inside of the chamber 201, but superheated water vapor may be supplied when cleaning the inside of the chamber 201. By raising the temperature of the components placed inside the chamber 201 with the superheated water vapor, it becomes easier to clean the components placed inside the chamber 201.

The present invention is useful for substrate processing devices and has industrial applicability.

2: Substrate processing unit 3: Blowing mechanism 4: Spin chuck 5: Spin motor unit 6: First nozzle 7: Second nozzle 8: Third nozzle 9: Liquid receiving unit 31: First blowing unit 32: Second blowing unit 32a: Upper blowing unit 32b: Lower blowing unit 33: Third blowing unit 34: Fourth blowing unit 62: First chemical liquid supply unit 72: Second chemical liquid supply unit 82: Rinse liquid supply unit 100: Substrate processing apparatus 101: Control device 102: Control unit 103: Memory unit 201: Chamber 203: Side wall 300: Water vapor supply unit W: Substrate

Claims (21)

a chamber in which substrate processing takes place;
A blowing mechanism that blows air into the chamber;
a substrate holder that holds a substrate in the chamber;
a substrate rotation unit that rotates the substrate held by the substrate holding unit;
a first mixed liquid discharge unit that is located within the chamber and that discharges a first mixed liquid obtained by mixing sulfuric acid and hydrogen peroxide toward the substrate rotated by the substrate rotation unit;
a first superheated steam blowing unit located between the blowing mechanism and the substrate held by the substrate holding unit, the first superheated steam blowing unit blowing superheated steam into the chamber. a control unit that controls the discharge of the first mixed liquid from the first mixed liquid discharge unit and the blowing of the superheated steam from the first superheated steam blowing unit,
The substrate processing apparatus according to claim 1 , wherein the control unit causes the first superheated steam blowing unit to blow out the superheated steam when the first mixed liquid is discharged. a liquid receiving portion that receives the first liquid mixture discharged from the substrate rotated by the substrate rotating portion;
The substrate processing apparatus according to claim 1 , further comprising: a second superheated steam blowing section supported by the liquid receiving section and configured to blow out the superheated steam toward the substrate held by the substrate holding section. a liquid receiving portion that receives the first liquid mixture discharged from the substrate rotated by the substrate rotating portion;
a second superheated steam blowing unit supported by the liquid receiving unit and configured to blow out the superheated steam toward the substrate held by the substrate holding unit,
the control unit further controls the blowing of the superheated steam from the second superheated steam blowing unit and the rotation of the substrate by the substrate rotation unit,
the control unit controls a rotation speed of the substrate when the first mixed liquid is discharged to form a liquid film of the first mixed liquid on an upper surface of the substrate;
the control unit stops discharging the first mixed liquid and controls a rotation speed of the substrate to form a puddle state in which the liquid film is supported on the upper surface of the substrate;
The substrate processing apparatus according to claim 2 , wherein the control unit causes the first superheated steam blowing part and the second superheated steam blowing part to blow out the superheated steam when the puddle state is formed. The second superheated steam blowing section is
an upper superheated steam blowing section that blows the superheated steam toward an upper surface of the substrate held by the substrate holding section;
The substrate processing apparatus according to claim 3 or 4, further comprising: a lower superheated steam blowing section that blows the superheated steam toward a lower surface of the substrate held by the substrate holding section. the first mixed liquid discharge unit exclusively discharges the first mixed liquid and hydrogen peroxide solution;
The control unit further controls the discharge of the hydrogen peroxide solution from the first mixed liquid discharge unit,
The substrate processing apparatus according to claim 2 , wherein the control unit stops blowing out the superheated steam when the hydrogen peroxide solution is being discharged. the first mixed liquid discharge unit exclusively discharges the first mixed liquid and hydrogen peroxide solution;
The control unit further controls the discharge of the hydrogen peroxide solution from the first mixed liquid discharge unit,
the control unit causes the first superheated steam blowing unit to blow the superheated steam at a first flow rate when the first mixed liquid is discharged;
The substrate processing apparatus according to claim 2 , wherein the control unit, when discharging the hydrogen peroxide solution, causes the first superheated steam blowing unit to blow the superheated steam at a second flow rate smaller than the first flow rate. a second mixed liquid discharge unit that discharges a second mixed liquid obtained by mixing ammonia water, hydrogen peroxide solution, and pure water toward the substrate rotated by the substrate rotation unit,
the control unit further controls the discharge of the second mixed liquid from the second mixed liquid discharge unit,
The substrate processing apparatus according to claim 2 , wherein the control unit causes the superheated steam to be ejected when the second mixed liquid is discharged. a rinse liquid discharge unit that discharges a rinse liquid toward the substrate rotated by the substrate rotation unit;
a water vapor blowing unit located between the blowing mechanism and the substrate held by the substrate holding unit, the water vapor blowing unit blowing water vapor into the chamber,
the control unit further controls the discharge of the rinsing liquid from the rinsing liquid discharge unit and the blowing of the water vapor from the water vapor blowing unit,
The substrate processing apparatus according to claim 2 , wherein the control unit causes the water vapor to be ejected when the rinsing liquid is ejected. The control unit further controls the rotation of the substrate by the substrate rotation unit,
the control unit, after stopping the discharge of the rinsing liquid, controls a rotation speed of the substrate to perform a drying process of removing the rinsing liquid from the upper surface of the substrate and drying the upper surface of the substrate;
The substrate processing apparatus according to claim 9 , wherein the control unit stops blowing out the water vapor when the drying process is performed. a third superheated steam blowing section that blows out superheated steam toward an inner wall surface of the chamber;
a water vapor blowing unit located between the blowing mechanism and the substrate holding unit and configured to blow water vapor into the chamber,
The control unit further controls the blowing of the water steam from the water steam blowing unit and the blowing of the superheated steam from the third superheated steam blowing unit,
The substrate processing apparatus according to claim 2 , wherein the control unit causes the water vapor to be blown out from the water vapor blowing part and the superheated steam to be blown out from the third superheated steam blowing part when cleaning the inside of the chamber. a holding step of holding the substrate in the chamber by the substrate holding part;
and blowing superheated steam into the chamber from a first superheated steam blowing section located between the blowing mechanism and the substrate held by the substrate holding section while air is being blown into the chamber by the blowing mechanism. a first mixed liquid ejection step of rotating the substrate held by the substrate holder and ejecting a first mixed liquid, which is a mixture of sulfuric acid and hydrogen peroxide solution, toward the substrate being rotated;
The substrate processing method according to claim 12 , wherein the superheated steam is blown out from the first superheated steam blowing part when the first liquid mixture is discharged. a puddle step of stopping the discharge of the first mixed liquid and controlling a rotation speed of the substrate to form a puddle state in which a liquid film of the first mixed liquid is supported on the upper surface of the substrate,
When the puddle state is formed, the superheated steam is blown out from the first superheated steam blowing part, and the superheated steam is blown out from the second superheated steam blowing part toward the substrate held by the substrate holding part,
The substrate processing method according to claim 13 , wherein the second superheated steam blowing part is supported by a liquid receiving part that receives the first liquid mixture discharged from the rotating substrate. The second superheated steam blowing section is
an upper superheated steam blowing section that blows the superheated steam toward an upper surface of the substrate held by the substrate holding section;
The substrate processing method according to claim 14 , further comprising: a lower superheated steam blowing section that blows the superheated steam toward a lower surface of the substrate held by the substrate holding section. The method further includes an extrusion step of ejecting a liquid film of the first liquid mixture from an upper surface of the substrate by ejecting hydrogen peroxide solution toward the substrate while the substrate is rotating;
16. The substrate processing method according to claim 14, wherein blowing of the superheated steam is stopped when the hydrogen peroxide solution is being discharged. The method further includes an extrusion step of ejecting a liquid film of the first liquid mixture from an upper surface of the substrate by ejecting hydrogen peroxide solution toward the substrate while the substrate is rotating;
When the first mixed liquid is discharged, the superheated steam is blown out from the first superheated steam blowing portion at a first flow rate;
16. The substrate processing method according to claim 14, wherein, when the hydrogen peroxide solution is discharged, the superheated steam is discharged from the first superheated steam discharge part at a second flow rate smaller than the first flow rate. a second mixed liquid ejection step of ejecting a second mixed liquid, which is a mixture of ammonia water, hydrogen peroxide, and pure water, toward the rotating substrate while rotating the substrate held by the substrate holder;
The substrate processing method according to claim 12 , wherein the superheated steam is blown out from the first superheated steam blowing part when the second mixed liquid is discharged. blowing water vapor into the chamber from a water vapor blowing unit located between the blowing mechanism and the substrate held by the substrate holder while air is being blown into the chamber by the blowing mechanism;
and discharging a rinse liquid toward the rotating substrate while rotating the substrate held by the substrate holder,
The substrate processing method according to claim 12 , wherein the water vapor is blown out from the water vapor blowing part when the rinsing liquid is discharged. a drying step of controlling a rotation speed of the substrate after stopping the discharge of the rinsing liquid to remove the rinsing liquid from the upper surface of the substrate and dry the upper surface of the substrate;
The substrate processing method according to claim 19 , wherein blowing of the water vapor is stopped during the drying step. Cleaning the inside of a chamber in which substrate processing is performed;
A chamber cleaning method, in which, when cleaning the inside of the chamber, superheated steam is blown toward an inner wall surface of the chamber, and steam is blown into the chamber from a steam blowing section located between a blowing mechanism that blows air into the chamber and a substrate holding section that holds a substrate in the chamber.

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