JP2024038963A - 太陽電池および光起電力モジュール - Google Patents
太陽電池および光起電力モジュール Download PDFInfo
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- 239000000758 substrate Substances 0.000 claims abstract description 276
- 229910052751 metal Inorganic materials 0.000 claims abstract description 55
- 239000002184 metal Substances 0.000 claims abstract description 55
- 238000002161 passivation Methods 0.000 claims description 47
- 229910052755 nonmetal Inorganic materials 0.000 claims description 26
- 238000009792 diffusion process Methods 0.000 claims description 21
- 238000007789 sealing Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 abstract description 10
- 239000010410 layer Substances 0.000 description 167
- 230000001965 increasing effect Effects 0.000 description 38
- 239000000969 carrier Substances 0.000 description 35
- 238000006243 chemical reaction Methods 0.000 description 18
- 238000010521 absorption reaction Methods 0.000 description 17
- 238000005215 recombination Methods 0.000 description 15
- 230000006798 recombination Effects 0.000 description 15
- 230000007547 defect Effects 0.000 description 10
- 230000003071 parasitic effect Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000006388 chemical passivation reaction Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000005038 ethylene vinyl acetate Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920006124 polyolefin elastomer Polymers 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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Abstract
【解決手段】太陽電池は、対向する前面および裏面を有し、前面が金属パターン領域を備える基板と、金属パターン領域に位置する第1ピラミッド構造11と、基板100の裏面に設けられたプラットフォーム突起構造13であって、第1ドーピング導電層120のドーピング元素タイプは基板100のドーピング元素タイプと同じである第1トンネル層110および第1ドーピング導電層120と、第2ドーピング導電層140のドーピング元素タイプは第1ドーピング導電層120のドーピング元素タイプと異なる第2トンネル層130および第2ドーピング導電層140と、を含む。
【選択図】図1
Description
Claims (20)
- 対向する前面および裏面を有し、前面が金属パターン領域を備える基板と、
前記金属パターン領域に位置する第1ピラミッド構造と、
前記基板の裏面に設けられたプラットフォーム突起構造であって、ここで、前記第1ピラミッド構造の高さ寸法が前記プラットフォーム突起構造の高さ寸法より大きく、かつ、前記第1ピラミッド構造のボトム一次元寸法が前記プラットフォーム突起構造のボトム一次元寸法より小さいプラットフォーム突起構造と、
前記金属パターン領域における基板の前面部分に位置し、かつ前記基板から離れる方向に設置された第1トンネル層および第1ドーピング導電層であって、前記第1ドーピング導電層のドーピング元素タイプは前記基板のドーピング元素タイプと同じである第1トンネル層および第1ドーピング導電層と、
前記基板の裏面に位置し、かつ前記基板から離れる方向に設置された第2トンネル層および第2ドーピング導電層であって、前記第2ドーピング導電層のドーピング元素タイプは前記第1ドーピング導電層のドーピング元素タイプと異なる第2トンネル層および第2ドーピング導電層と、を含む、
ことを特徴とする太陽電池。 - 前記第1ピラミッド構造のボトム一次元寸法は0.7μm~3μmであり、前記第1ピラミッド構造のトップからボトムまでの高さ寸法は0.5μm~3.2μmである、
ことを特徴とする請求項1に記載の太陽電池。 - 前記第1ピラミッド構造の斜辺と前記第1ピラミッド構造のボトムとの夾角は30°~70°である、
ことを特徴とする請求項2に記載の太陽電池。 - 前記第1ピラミッド構造の斜辺の長さは1.2μm~2.5μmである、
ことを特徴とする請求項3に記載の太陽電池。 - 前記プラットフォーム突起構造のボトム一次元寸法は6μm~10μmであり、前記プラットフォーム突起構造のトップからボトムまでの高さ寸法は0.2μm~0.4μmである、
ことを特徴とする請求項1に記載の太陽電池。 - 前記プラットフォーム突起構造の斜辺と前記プラットフォーム突起構造のボトムとの夾角は10°~50°である、
ことを特徴とする請求項5に記載の太陽電池。 - 前記プラットフォーム突起構造の斜辺の長さは0.3μm~2.3μmである、
ことを特徴とする請求項6に記載の太陽電池。 - さらに前記金属パターン領域に位置する第2ピラミッド構造を含み、前記第1ピラミッド構造の前記金属パターン領域における基板の前面部分に占める面積割合は前記第2ピラミッド構造の前記金属パターン領域における基板の前面部分に占める面積割合より大きく、前記第2ピラミッド構造の斜辺と前記第2ピラミッド構造のボトムとの夾角は40°~70°である、
ことを特徴とする請求項6に記載の太陽電池。 - 前記第2ピラミッド構造のボトム一次元寸法は1μm以下であり、前記第2ピラミッド構造のトップからボトムまでの高さ寸法は1.2μm以下である、
ことを特徴とする請求項8に記載の太陽電池。 - 前記基板の前面はさらに非金属パターン領域を含み、前記太陽電池は、前記非金属パターン領域に位置する第3ピラミッド構造と第4ピラミッド構造を備え、前記第3ピラミッド構造のボトム寸法は前記第4ピラミッド構造のボトム寸法より大きく、前記第3ピラミッド構造の非金属パターン領域における基板の前面部分に占める面積割合は、前記第1ピラミッド構造の金属パターン領域における基板の前面部分に占める面積割合より小さい、
ことを特徴とする請求項1に記載の太陽電池。 - 前記第3ピラミッド構造の斜辺と前記第3ピラミッド構造のボトムとの夾角は35°~65°であり、前記第4ピラミッド構造の斜辺と前記第4ピラミッド構造のボトムとの夾角は40°~65°である、
ことを特徴とする請求項10に記載の太陽電池。 - 前記第3ピラミッド構造の斜辺の長さは1.2μm~2.5μmであり、前記第4ピラミッド構造の斜辺の長さは0.5μm~1.2μmである、
ことを特徴とする請求項11に記載の太陽電池。 - 前記非金属パターン領域における基板の前面部分の反射率は0.8%~2%であり、前記基板の裏面の反射率は14%~15%である、
ことを特徴とする請求項12に記載の太陽電池。 - さらに第1パッシベーション層を含み、前記第1パッシベーション層の第1部分は前記第1ドーピング導電層の前記基板から離れた表面に位置し、前記第1パッシベーション層の第2部分は前記非金属パターン領域が向かう前面に位置する、
ことを特徴とする請求項13に記載の太陽電池。 - 前記第1パッシベーション層の第1部分は前記第1パッシベーション層の第2部分と面一ではない、
ことを特徴とする請求項14に記載の太陽電池。 - さらに第2パッシベーション層を含み、前記第2パッシベーション層は前記第2ドーピング導電層の前記基板から離れた表面に位置する、
ことを特徴とする請求項1に記載の太陽電池。 - さらに第1電極を含み、前記第1電極は前記金属パターン領域に設けられ、前記第1ドーピング導電層と電気的に接続される、
ことを特徴とする請求項1に記載の太陽電池。 - さらに拡散領域を含み、前記拡散領域は前記金属パターン領域が向かう前記基板に位置し、前記拡散領域のトップは前記第1トンネル層と接触し、前記拡散領域のドーピング元素濃度が前記基板のドーピング元素濃度より大きい、
ことを特徴とする請求項1に記載の太陽電池。 - 前記基板はN型シリコン基板である、
ことを特徴とする請求項1に記載の太陽電池。 - 請求項1~19のいずれか1項に記載の太陽電池を接続してなるセルストリングと、
前記セルストリングの表面を覆うための封止層と、
前記封止層の前記セルストリングから離れた表面を覆うためのカバープレートと、を含む、
ことを特徴とする光起電力モジュール。
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US11791426B1 (en) | 2023-10-17 |
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DE202023101202U1 (de) | 2023-05-22 |
CN117238987A (zh) | 2023-12-15 |
AU2022246370B1 (en) | 2023-09-07 |
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US20240088312A1 (en) | 2024-03-14 |
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