JP2024027783A - 流体抵抗素子、流体制御装置、及び流体抵抗素子の製造方法 - Google Patents

流体抵抗素子、流体制御装置、及び流体抵抗素子の製造方法 Download PDF

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Publication number
JP2024027783A
JP2024027783A JP2022130880A JP2022130880A JP2024027783A JP 2024027783 A JP2024027783 A JP 2024027783A JP 2022130880 A JP2022130880 A JP 2022130880A JP 2022130880 A JP2022130880 A JP 2022130880A JP 2024027783 A JP2024027783 A JP 2024027783A
Authority
JP
Japan
Prior art keywords
flow path
resistance element
fluid
fluid resistance
forming member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022130880A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024027783A5 (enExample
Inventor
正樹 小林
Masaki Kobayashi
忠弘 安田
Tadahiro Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Stec Co Ltd
Original Assignee
Horiba Stec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Priority to JP2022130880A priority Critical patent/JP2024027783A/ja
Priority to KR1020230098625A priority patent/KR20240026085A/ko
Priority to TW112129000A priority patent/TW202409520A/zh
Priority to CN202310964369.3A priority patent/CN117588468A/zh
Priority to US18/446,668 priority patent/US20240060803A1/en
Publication of JP2024027783A publication Critical patent/JP2024027783A/ja
Publication of JP2024027783A5 publication Critical patent/JP2024027783A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
    • F15D1/00—Influencing flow of fluids
    • F15D1/02—Influencing flow of fluids in pipes or conduits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • F16L55/02—Energy absorbers; Noise absorbers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00—Arrangements for supervising or controlling working operations
    • F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D5/00—Protection or supervision of installations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/18—Supports or connecting means for meters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
  • Micromachines (AREA)
JP2022130880A 2022-08-19 2022-08-19 流体抵抗素子、流体制御装置、及び流体抵抗素子の製造方法 Pending JP2024027783A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2022130880A JP2024027783A (ja) 2022-08-19 2022-08-19 流体抵抗素子、流体制御装置、及び流体抵抗素子の製造方法
KR1020230098625A KR20240026085A (ko) 2022-08-19 2023-07-28 유체 저항 소자, 유체 제어 장치, 및 유체 저항 소자의 제조 방법
TW112129000A TW202409520A (zh) 2022-08-19 2023-08-02 流體阻力元件、流體控制裝置和流體阻力元件的製造方法
CN202310964369.3A CN117588468A (zh) 2022-08-19 2023-08-02 流体阻力元件、流体控制装置和流体阻力元件的制造方法
US18/446,668 US20240060803A1 (en) 2022-08-19 2023-08-09 Fluid resistance element, fluid controller, and method of manufacturing fluid resistance element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022130880A JP2024027783A (ja) 2022-08-19 2022-08-19 流体抵抗素子、流体制御装置、及び流体抵抗素子の製造方法

Publications (2)

Publication Number Publication Date
JP2024027783A true JP2024027783A (ja) 2024-03-01
JP2024027783A5 JP2024027783A5 (enExample) 2025-01-15

Family

ID=89907669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022130880A Pending JP2024027783A (ja) 2022-08-19 2022-08-19 流体抵抗素子、流体制御装置、及び流体抵抗素子の製造方法

Country Status (5)

Country Link
US (1) US20240060803A1 (enExample)
JP (1) JP2024027783A (enExample)
KR (1) KR20240026085A (enExample)
CN (1) CN117588468A (enExample)
TW (1) TW202409520A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20260083211A (ko) 2024-11-28 2026-06-05 이하라 사이언스 가부시키가이샤 유로 구조, 유체 측정 장치, 및, 유체 제어 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167527A (ja) * 1984-09-07 1986-04-07 Asahi Glass Co Ltd セラミツクス軸と金属軸との接合方法
JPH11325360A (ja) * 1998-05-08 1999-11-26 Koyo Seiko Co Ltd 管継手
WO2021095492A1 (ja) * 2019-11-15 2021-05-20 株式会社堀場エステック 流体抵抗素子及び流体制御装置
JP2021536577A (ja) * 2018-09-18 2021-12-27 スウェージロック カンパニー 流体監視モジュール構造

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6813964B1 (en) * 2003-05-21 2004-11-09 Hospira, Inc. Fluid flow measurement device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167527A (ja) * 1984-09-07 1986-04-07 Asahi Glass Co Ltd セラミツクス軸と金属軸との接合方法
JPH11325360A (ja) * 1998-05-08 1999-11-26 Koyo Seiko Co Ltd 管継手
JP2021536577A (ja) * 2018-09-18 2021-12-27 スウェージロック カンパニー 流体監視モジュール構造
WO2021095492A1 (ja) * 2019-11-15 2021-05-20 株式会社堀場エステック 流体抵抗素子及び流体制御装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20260083211A (ko) 2024-11-28 2026-06-05 이하라 사이언스 가부시키가이샤 유로 구조, 유체 측정 장치, 및, 유체 제어 장치

Also Published As

Publication number Publication date
TW202409520A (zh) 2024-03-01
CN117588468A (zh) 2024-02-23
KR20240026085A (ko) 2024-02-27
US20240060803A1 (en) 2024-02-22

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