JP2023537606A - 作業面上に規定のレーザラインを生成するための装置 - Google Patents
作業面上に規定のレーザラインを生成するための装置 Download PDFInfo
- Publication number
- JP2023537606A JP2023537606A JP2023510377A JP2023510377A JP2023537606A JP 2023537606 A JP2023537606 A JP 2023537606A JP 2023510377 A JP2023510377 A JP 2023510377A JP 2023510377 A JP2023510377 A JP 2023510377A JP 2023537606 A JP2023537606 A JP 2023537606A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- assembly
- optical assembly
- profile
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 128
- 238000005286 illumination Methods 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
- 230000004075 alteration Effects 0.000 claims description 12
- 230000005855 radiation Effects 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Lenses (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102020121440.5 | 2020-08-14 | ||
DE102020121440.5A DE102020121440A1 (de) | 2020-08-14 | 2020-08-14 | Vorrichtung zum Erzeugen einer definierten Laserlinie auf einer Arbeitsebene |
PCT/EP2021/071651 WO2022033923A1 (de) | 2020-08-14 | 2021-08-03 | Vorrichtung zum erzeugen einer definierten laserlinie auf einer arbeitsebene |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2023537606A true JP2023537606A (ja) | 2023-09-04 |
Family
ID=77317034
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023510377A Pending JP2023537606A (ja) | 2020-08-14 | 2021-08-03 | 作業面上に規定のレーザラインを生成するための装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2023537606A (ko) |
KR (1) | KR20230048546A (ko) |
CN (1) | CN116033993A (ko) |
DE (1) | DE102020121440A1 (ko) |
WO (1) | WO2022033923A1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116184681B (zh) * | 2023-04-27 | 2023-08-04 | 成都莱普科技股份有限公司 | 二氧化碳激光的光束整形设备以及光束整形方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008524662A (ja) | 2004-12-22 | 2008-07-10 | カール・ツアイス・レーザー・オプティクス・ゲーエムベーハー | 線ビームを生成するための光学照射系 |
DE202007018689U1 (de) * | 2006-08-18 | 2009-03-05 | Highyag Lasertechnologie Gmbh | Vorrichtung zur Stabilisierung der Fokuslage bei Optiken für Hochleistungs-Laserstrahlung zur Lasermaterialbearbeitung |
DE102007024700A1 (de) * | 2007-05-25 | 2008-12-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Materialbearbeitung mit Laserstrahlung sowie Vorrichtung zur Durchführung des Verfahrens |
JP2013193110A (ja) | 2012-03-21 | 2013-09-30 | Sumitomo Heavy Ind Ltd | レーザ加工装置及びレーザ加工方法 |
US10293436B2 (en) * | 2013-12-17 | 2019-05-21 | Corning Incorporated | Method for rapid laser drilling of holes in glass and products made therefrom |
US9873628B1 (en) * | 2014-12-02 | 2018-01-23 | Coherent Kaiserslautern GmbH | Filamentary cutting of brittle materials using a picosecond pulsed laser |
EP4331768A3 (en) | 2016-07-27 | 2024-04-24 | TRUMPF Laser GmbH | Laser line illumination |
WO2019040854A1 (en) * | 2017-08-25 | 2019-02-28 | Corning Incorporated | APPARATUS AND METHOD FOR LASER PROCESSING OF TRANSPARENT WORKPIECES USING AFOCAL BEAM ADJUSTMENT ASSEMBLY |
DE102018200078B4 (de) | 2018-01-04 | 2020-07-02 | Innovavent Gmbh | Optisches System und Verfahren zum Erzeugen einer Beleuchtungslinie |
-
2020
- 2020-08-14 DE DE102020121440.5A patent/DE102020121440A1/de active Pending
-
2021
- 2021-08-03 JP JP2023510377A patent/JP2023537606A/ja active Pending
- 2021-08-03 KR KR1020237008731A patent/KR20230048546A/ko unknown
- 2021-08-03 WO PCT/EP2021/071651 patent/WO2022033923A1/de active Application Filing
- 2021-08-03 CN CN202180055422.7A patent/CN116033993A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN116033993A (zh) | 2023-04-28 |
WO2022033923A1 (de) | 2022-02-17 |
DE102020121440A1 (de) | 2022-02-17 |
KR20230048546A (ko) | 2023-04-11 |
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