JP2023509480A5 - - Google Patents

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Publication number
JP2023509480A5
JP2023509480A5 JP2022541623A JP2022541623A JP2023509480A5 JP 2023509480 A5 JP2023509480 A5 JP 2023509480A5 JP 2022541623 A JP2022541623 A JP 2022541623A JP 2022541623 A JP2022541623 A JP 2022541623A JP 2023509480 A5 JP2023509480 A5 JP 2023509480A5
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target
measurement target
design rule
overlay error
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JP7535115B2 (ja
JP2023509480A (ja
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JP2022541623A 2020-01-07 2021-01-06 軟ｘ線スキャタロメトリに依拠するオーバレイ計測方法及びシステム Active JP7535115B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US202062958089P 2020-01-07 2020-01-07
US62/958,089 2020-01-07
US17/137,840 US11698251B2 (en) 2020-01-07 2020-12-30 Methods and systems for overlay measurement based on soft X-ray Scatterometry
US17/137,840 2020-12-30
PCT/US2021/012236 WO2021141933A1 (en) 2020-01-07 2021-01-06 Methods and systems for overlay measurement based on soft x-ray scatterometry

Publications (3)

Publication Number Publication Date
JP2023509480A JP2023509480A (ja) 2023-03-08
JP2023509480A5 true JP2023509480A5 (https=) 2023-12-12
JP7535115B2 JP7535115B2 (ja) 2024-08-15

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JP2022541623A Active JP7535115B2 (ja) 2020-01-07 2021-01-06 軟ｘ線スキャタロメトリに依拠するオーバレイ計測方法及びシステム

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US (1) US11698251B2 (https=)
EP (1) EP4078244A4 (https=)
JP (1) JP7535115B2 (https=)
KR (1) KR102748447B1 (https=)
CN (1) CN114981686B (https=)
IL (1) IL294469B2 (https=)
TW (1) TWI861336B (https=)
WO (1) WO2021141933A1 (https=)

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