JP2023177801A - Decompression cleaning device - Google Patents

Decompression cleaning device Download PDF

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JP2023177801A
JP2023177801A JP2022090673A JP2022090673A JP2023177801A JP 2023177801 A JP2023177801 A JP 2023177801A JP 2022090673 A JP2022090673 A JP 2022090673A JP 2022090673 A JP2022090673 A JP 2022090673A JP 2023177801 A JP2023177801 A JP 2023177801A
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cleaning
tank
cleaned
reduced pressure
steam
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JP7246111B1 (en
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正英 内野
Masahide Uchino
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Japan Field Co Ltd
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Abstract

To improve cleaning efficiency of a cleaned object by preventing accumulation of dirt on a cleaning base.SOLUTION: A decompression cleaning device includes a plate-like cleaning base 7 on which a cleaned object 32 inside decompression tank 1 can be mounted, wherein the cleaning base 7 is vertically slidable inside the decompression tank 1 by a drive mechanism, a circumference 8 of the cleaning base 7 is brought into contact with an inner peripheral surface 33 of the decompression tank 1 and thereby a space in the decompression tank 1 can be airtightly separated into a top face 4 side and a bottom face 3 side, the inside of an isolation chamber 10 formed of the top face 4 side of the decompression tank 1 and the cleaning base 7 can be decompressed by a decompression mechanism 26 connected to the decompression tank 1, and a vibration mechanism 11 for vibrating the cleaning base 7 is provided on a bottom face side of the cleaning base 7.SELECTED DRAWING: Figure 1

Description

本発明は、洗浄溶剤にて機械部品、電子部品、医療機器等の被洗浄物を、減圧槽内にて液洗浄、蒸気洗浄、及び乾燥するための減圧洗浄装置に係るものである。 The present invention relates to a vacuum cleaning device for liquid cleaning, steam cleaning, and drying of mechanical parts, electronic components, medical equipment, and other objects to be cleaned using a cleaning solvent in a vacuum tank.

特開2015-202463号公報 1995年にフロン113や1.1.1-トリクロロエタンが世界的に製造禁止となり、その代替溶剤として、可燃性の石油系溶剤が広く使用されている。しかし、石油系溶剤は沸点が高く、また可燃性であることから、安全性を考慮して酸素のほとんどない雰囲気下での洗浄を可能とする様々な減圧洗浄装置が開発されている。JP, 2015-202463, A In 1995, the production of Freon 113 and 1.1.1-trichloroethane was banned worldwide, and flammable petroleum-based solvents are widely used as alternative solvents. However, petroleum solvents have a high boiling point and are flammable, so in consideration of safety, various vacuum cleaning devices have been developed that enable cleaning in an atmosphere with almost no oxygen.

このような減圧洗浄装置のうち、特許文献1に示す如く、液槽内に上下動可能な載置台を備え、当該載置台に被洗浄物を載置するとともに、当該槽内に洗浄液を貯留し、当該洗浄液にて液洗浄を行うとともに、当該洗浄液よりも上方に被洗浄物を移動させた状態で、蒸気洗浄や減圧乾燥を行う洗浄装置が公知となっている。そして当該洗浄装置の減圧乾燥は、上記載置台と槽の天面側とにより乾燥室を構成し、この乾燥室内を減圧して行うものである。 Among such reduced pressure cleaning devices, as shown in Patent Document 1, a mounting table that is movable up and down is provided in a liquid tank, an object to be cleaned is placed on the mounting table, and a cleaning liquid is stored in the tank. 2. Description of the Related Art There is a known cleaning device that performs liquid cleaning with the cleaning liquid and also performs steam cleaning or reduced pressure drying while moving the object to be cleaned above the cleaning liquid. The vacuum drying of the cleaning device is performed by forming a drying chamber by the above-mentioned mounting table and the top side of the tank, and reducing the pressure inside this drying chamber.

しかしながら、上記特許文献1の洗浄台には、常に被洗浄物が載置された状態で各洗浄を行うことから、被洗浄物から脱落した汚れが当該洗浄台上に堆積するものとなる。そのため、乾燥室を形成する際には、これら洗浄台上に堆積した汚れによって当該乾燥室内の密閉度が低下するものとなり、当該乾燥室内の減圧が困難となるとともに、洗浄台上の汚れの分まで乾燥が行われるため乾燥時間が長くなり、減圧乾燥の効率が低下するという問題が生じる。 However, since each cleaning is performed with the object to be cleaned always placed on the washing table of Patent Document 1, dirt that falls off from the object to be cleaned is deposited on the washing table. Therefore, when forming a drying chamber, the dirt accumulated on the washing table will reduce the airtightness of the drying chamber, making it difficult to reduce the pressure inside the drying chamber, and the dirt on the washing table will be removed. Since the drying is performed until the end of the drying process, the drying time becomes longer and there arises a problem that the efficiency of vacuum drying decreases.

そこで本願では上述の如き課題を解決しようとするものであって、洗浄台上の汚れの堆積を防止することにより被洗浄物の洗浄効率を向上させようとするものである。 Therefore, the present application attempts to solve the above-mentioned problems, and aims to improve the cleaning efficiency of objects to be cleaned by preventing the accumulation of dirt on the cleaning table.

本願発明は上述の如き課題を解決するため、減圧槽内に被洗浄物を載置可能な板状の洗浄台を設け、当該洗浄台を、駆動機構により減圧槽の内部で上下動に摺動可能とし、当該洗浄台の周縁を上記減圧槽の内周面に密着させることにより、当該減圧槽内の空間を天面側と底面側とに気密的に分離可能とし、上記減圧槽の天面側と上記洗浄台とで形成された隔離室内を、上記減圧槽に接続された減圧機構にて減圧可能とするとともに、上記洗浄台の底面側には、当該洗浄台を振動させるための振動機構を設けたものである。 In order to solve the above-mentioned problems, the present invention provides a plate-shaped washing table on which objects to be cleaned can be placed in a reduced pressure tank, and the washing table is slid up and down inside the reduced pressure tank by a drive mechanism. By making the periphery of the washing stand in close contact with the inner peripheral surface of the decompression tank, the space inside the decompression tank can be airtightly separated into a top side and a bottom side. The interior of the isolation chamber formed by the side and the washing table can be depressurized by a decompression mechanism connected to the decompression tank, and a vibration mechanism for vibrating the washing table is provided on the bottom side of the washing table. It has been established.

また上記振動機構は、上記減圧槽内に収納した洗浄液中、あるは当該減圧槽内に発生させた洗浄蒸気中で作動可能とするものであっても良い。このように上記振動機構を液洗浄や蒸気洗浄中で作動させることにより、液洗浄時や蒸気洗浄時においても、上記洗浄台上の被洗浄物から離脱した汚れを当該洗浄台から下方に落下させて除去することができる。 Further, the vibration mechanism may be operable in a cleaning liquid stored in the vacuum tank or in cleaning steam generated in the vacuum tank. By operating the vibrating mechanism during liquid cleaning or steam cleaning in this way, dirt separated from the object to be cleaned on the washing table can be caused to fall downward from the washing table even during liquid cleaning or steam cleaning. It can be removed by

また、上記減圧槽には洗浄液が貯留され、当該洗浄液にて被洗浄物の液洗浄を可能とし、上記洗浄台に載置された被洗浄物を上記洗浄液の液面よりも上方に配置した状態で、当該被洗浄物の蒸気洗浄を可能とするとともに、上記被洗浄物を上記隔離室内に配置することにより、当該被洗浄物の減圧乾燥を可能としたものであっても良い。 Further, a cleaning liquid is stored in the vacuum tank, and the cleaning liquid can be used to wash the object to be cleaned, and the object to be cleaned, which is placed on the washing table, is placed above the level of the cleaning liquid. In this case, the object to be cleaned may be steam-cleaned, and the object to be cleaned may be placed in the isolation chamber, so that the object to be cleaned can be dried under reduced pressure.

また、上記隔離室は、上記減圧槽に設けられた加熱機構によって一定温度の加熱状態を維持可能とするものであってもよく、上記減圧槽の底部側は、当該減圧槽に設けた冷却機構によって一定温度の冷却状態を維持可能とするものであってもよい。これにより、隔離室内で乾燥を行う際には常に加熱状態とすることができるとともに、底部側で液洗浄を行う際には常に洗浄液を冷却状態とすることができるため、槽内全体を都度加熱したり冷却したりする必要がなく、熱エネルギーの損失を抑えながら一つの槽内で被洗浄物の液洗浄や減圧乾燥を効率よく行うことができる。 Further, the isolation chamber may be capable of maintaining a heated state at a constant temperature by a heating mechanism provided in the reduced pressure tank, and the bottom side of the reduced pressure tank is provided with a cooling mechanism provided in the reduced pressure tank. It may also be possible to maintain a cooling state at a constant temperature. This makes it possible to always keep the cleaning liquid in a heated state when drying in the isolation chamber, and to keep the cleaning liquid in a cooled state when cleaning the bottom side, so the entire tank is heated each time. There is no need for cleaning or cooling, and it is possible to efficiently perform liquid cleaning and vacuum drying of items to be cleaned in one tank while suppressing loss of thermal energy.

また、上記減圧槽とは別体に、当該減圧槽に洗浄蒸気を送り込むための蒸気発生槽を設けるとともに、上記減圧槽の天面側には、当該減圧槽及び/または上記隔離室を減圧可能とする減圧機構を接続したものであってもよい。 In addition, a steam generation tank for sending cleaning steam to the vacuum tank is provided separately from the vacuum tank, and the top side of the vacuum tank is equipped with a tank that can depressurize the tank and/or the isolation room. It may also be connected to a pressure reducing mechanism.

また、上記洗浄液は、沸点が100℃以上の可燃性溶剤であってもよく、上記振動機構は、電気式若しくはエアー式のバイブレーター、又は超音波振動子であってもよい。 Further, the cleaning liquid may be a flammable solvent with a boiling point of 100° C. or higher, and the vibration mechanism may be an electric or air vibrator, or an ultrasonic vibrator.

本発明は上記の如く構成したものであって、洗浄台の底面側には振動機構を設けているため、当該振動機構を作動させることにより、上記洗浄台に堆積した切削くず、プレスくず、あるいは切粉等の被洗浄物から離脱した汚れを、上記振動機構による振動により当該洗浄台から落下させて除去することが可能となる。 The present invention is configured as described above, and since a vibration mechanism is provided on the bottom side of the cleaning table, by operating the vibration mechanism, cutting waste, press waste, or It becomes possible to remove dirt, such as chips, separated from the object to be cleaned by dropping it from the cleaning table by vibration by the vibration mechanism.

そのため、当該洗浄台を摺動させて隔離室を形成する際に、当該洗浄台上の周縁には汚れが堆積していないため、当該周縁と減圧槽の内周面とを良好な状態で密着させることが可能となる。従って、上記隔離室内の密閉度を高めることができるため、当該隔離室の減圧作業を円滑に行うことができる。更に、当該隔離室内には被洗浄物以外の汚れが堆積していないため、当該被洗浄物の減圧乾燥のみの乾燥が行われるものとなることから、乾燥作業を短時間で効率的に行うことが可能となる。 Therefore, when the washing table is slid to form an isolation chamber, dirt is not deposited on the periphery of the washing table, so the periphery and the inner circumferential surface of the decompression tank are kept in close contact with each other. It becomes possible to do so. Therefore, since the degree of sealing in the isolation chamber can be increased, depressurization of the isolation chamber can be performed smoothly. Furthermore, since there is no dirt accumulated in the isolation room other than the items to be cleaned, only vacuum drying of the items to be cleaned is performed, so the drying work can be carried out efficiently in a short time. becomes possible.

本願発明を示す実施例1において、液洗浄時の概念図。FIG. 2 is a conceptual diagram at the time of liquid cleaning in Example 1 showing the present invention. 実施例1において、蒸気洗浄時の概念図。In Example 1, a conceptual diagram at the time of steam cleaning. 実施例1において、減圧乾燥時の概念図。In Example 1, a conceptual diagram at the time of reduced pressure drying. 従来例の概念図。A conceptual diagram of a conventional example.

本願発明の実施例1を図1に於いて説明すると、(1)は減圧槽であって、内部を減圧可能とするとともに、中央部には周方向に段部(2)を設け、底面(3)側より天面 (4)側の内径を狭く形成している。また上記減圧槽(1)は、減圧管(5)を通じて減圧ポンプ(6)に接続されている。 Embodiment 1 of the present invention will be explained with reference to FIG. 1. (1) is a depressurizing tank, which is capable of reducing the pressure inside, and has a stepped part (2) in the circumferential direction in the center, and a bottom surface ( The inner diameter of the top surface (4) side is narrower than that of the 3) side. Further, the pressure reduction tank (1) is connected to a pressure reduction pump (6) through a pressure reduction pipe (5).

そしてこの減圧槽(1)の内部には、平板状の洗浄台(7)を設けている。この洗浄台(7)は、駆動機構(図示せず。)により減圧槽(1)内の底部から上記段部(2)までの間を上下動に任意に摺動可能としている。そして、当該洗浄台(7)を上方に摺動させて上記減圧槽(1)の段部(2)の内周面(33)に当該洗浄台(7)の周縁(8)を当接密着させることにより、上記減圧槽(1)の天面(4)側と当該洗浄台(7)とにより、密閉された隔離室(10)を形成することができる。 A flat plate-shaped washing table (7) is provided inside the decompression tank (1). This washing stand (7) can be freely slid up and down between the bottom of the decompression tank (1) and the stepped part (2) by a drive mechanism (not shown). Then, slide the washing table (7) upward and bring the periphery (8) of the washing table (7) into close contact with the inner peripheral surface (33) of the step (2) of the decompression tank (1). By doing so, a sealed isolation chamber (10) can be formed by the top surface (4) side of the decompression tank (1) and the washing table (7).

また当該洗浄台(7)の底面には、当該洗浄台(7)を振動させるための振動機構(11)として、電動式のバイブレーターを接続配置している。尚、本実施例では電気式のバイブレーターを使用しているが、他の異なる実施例ではこれに限らず、エアー式のバイブレーター又は超音波振動子を使用することも可能である。また上記減圧槽(1)には、上記段部(2)から天面(4)にかけて加熱機構(12)を被覆配置するとともに、当該減圧槽(1)の底面(3)側には、被洗浄物(32)の液洗浄を行うための洗浄溶剤(30)を収納している。また当該減圧槽(1)の底面(3)側には、当該減圧槽(1)に収納された洗浄液(27)を冷却するための冷却機構(図示せず。)が設けられている。そして上記加熱機構(12)及び冷却機構は、それぞれ一定温度の加熱状態及び冷却状態を維持可能としている。 Furthermore, an electric vibrator is connected to the bottom of the washing table (7) as a vibration mechanism (11) for vibrating the washing table (7). Although an electric vibrator is used in this embodiment, the present invention is not limited to this, and an air vibrator or an ultrasonic vibrator may also be used in other different embodiments. In addition, a heating mechanism (12) is disposed covering the vacuum tank (1) from the stepped portion (2) to the top surface (4), and a heating mechanism (12) is provided on the bottom surface (3) side of the vacuum tank (1). Contains a cleaning solvent (30) for liquid cleaning of the cleaning object (32). Further, a cooling mechanism (not shown) for cooling the cleaning liquid (27) stored in the vacuum tank (1) is provided on the bottom (3) side of the vacuum tank (1). The heating mechanism (12) and the cooling mechanism are capable of maintaining a heating state and a cooling state at a constant temperature, respectively.

そしてこの減圧槽(1)とは別に、洗浄溶剤(30)の蒸気発生槽(13)を設けている。この蒸気発生槽(13)は、その底部側において上記減圧槽(1)の底部側と第一配管(14)を通じて連通可能としている。尚、当該第一配管(14)には第一開閉弁(15)を設けている。 Separately from this pressure reducing tank (1), a steam generating tank (13) for cleaning solvent (30) is provided. The bottom side of the steam generation tank (13) can communicate with the bottom side of the pressure reducing tank (1) through a first pipe (14). Note that the first pipe (14) is provided with a first on-off valve (15).

また当該蒸気発生槽(13)の天面(20)と上記減圧槽(1)の天面(4)側とを、以下に説明する第二配管(16)及び第三配管(17)を通じて連通可能としている。即ち上記第二配管(16)は、その一端を上記減圧槽(1)に接続するとともに、他端を、冷却器(18)を通じて上記減圧ポンプ(6)に接続している。そして上記第二配管(16)から分岐した第三配管(17)の一端を、上記蒸気発生槽(13)の天面(20)に接続している。 In addition, the top surface (20) of the steam generation tank (13) and the top surface (4) side of the decompression tank (1) are communicated through the second piping (16) and third piping (17) described below. It is possible. That is, the second pipe (16) has one end connected to the decompression tank (1), and the other end connected to the decompression pump (6) through the cooler (18). One end of a third pipe (17) branched from the second pipe (16) is connected to the top surface (20) of the steam generation tank (13).

また、上記第二配管(16)には、第三配管(17)の分岐点(24)よりも上記減圧槽(1)側に第二開閉弁(21)を、また当該分岐点(24)よりも減圧ポンプ(6)側に第三開閉弁(22)を設けるとともに、上記第三配管(17)には第四開閉弁(23)を設けている。また当該蒸気発生槽(13)の底面側には、当該蒸気発生槽(13)内に収納した洗浄溶剤(30)を加熱して当該洗浄溶剤(30)の洗浄蒸気(31)を発生させるための加熱体(25)を設けている。尚、当該第二配管(16)、上記減圧管(5)、及び減圧ポンプ(6)により本実施例の減圧機構(26)を構成している。 The second pipe (16) also has a second on-off valve (21) located closer to the pressure reducing tank (1) than the branch point (24) of the third pipe (17), and A third on-off valve (22) is provided closer to the pressure reducing pump (6), and a fourth on-off valve (23) is provided on the third pipe (17). Also, on the bottom side of the steam generation tank (13), there is a device for heating the cleaning solvent (30) stored in the steam generation tank (13) to generate cleaning vapor (31) of the cleaning solvent (30). A heating element (25) is provided. Note that the second pipe (16), the pressure reduction pipe (5), and the pressure reduction pump (6) constitute the pressure reduction mechanism (26) of this embodiment.

また、上記減圧槽(1)には図1に示す如く、窒素ガスを供給するための供給配管(34)を設けている。そして当該供給配管(34)は第一供給配管(35)と第二供給配管(36)とに分岐し、上記第一供給配管(35)を上記減圧槽(1)の天面(4)側に接続するとともに上記第二供給配管(36)を上記段部(2)の下方に接続している。そして、上記第一供給配管(35)に第五開閉弁(37)を設けるとともに、上記第二供給配管(36)に第六開閉弁(38)を設けている。また上記減圧管(5)には第七開閉弁(40)を設けている。 Further, as shown in FIG. 1, the decompression tank (1) is provided with a supply pipe (34) for supplying nitrogen gas. The supply pipe (34) branches into a first supply pipe (35) and a second supply pipe (36), and the first supply pipe (35) is connected to the top surface (4) of the decompression tank (1). At the same time, the second supply pipe (36) is connected to the lower part of the step part (2). A fifth on-off valve (37) is provided on the first supply pipe (35), and a sixth on-off valve (38) is provided on the second supply pipe (36). Further, the pressure reducing pipe (5) is provided with a seventh on-off valve (40).

上記の如く構成した減圧洗浄装置を用いて被洗浄物(32)の洗浄方法について以下に説明する。まず、当該減圧槽(1)に洗浄液(27)を収納する。尚、本実施例では沸点約170℃の炭化水素系溶剤を洗浄液(27)として使用している。また、上記減圧槽(1)内の洗浄液(27)と同じ洗浄溶剤(30)を、上記蒸気発生槽(13)内に収納するとともに、上記蒸気発生槽(13)の加熱体(25)を作動するさせることにより、当該蒸気発生槽(13)内の洗浄溶剤(30)を加熱して洗浄蒸気(31)を発生させておく。 A method of cleaning an object to be cleaned (32) using the vacuum cleaning apparatus configured as described above will be described below. First, the cleaning liquid (27) is stored in the vacuum tank (1). In this example, a hydrocarbon solvent with a boiling point of about 170° C. is used as the cleaning liquid (27). Also, a cleaning solvent (30) that is the same as the cleaning liquid (27) in the decompression tank (1) is stored in the steam generation tank (13), and the heating element (25) of the steam generation tank (13) is heated. By operating, the cleaning solvent (30) in the steam generation tank (13) is heated to generate cleaning steam (31).

そして、以下の液洗浄を行う。即ち、第一開閉弁(15)、第二開閉弁(21)、第五開閉弁(37)、第六開閉弁(38)を閉弁するとともに、第三開閉弁(22)、第四開閉弁(23)を開弁する。この状態で図1に示す如く、上記減圧槽(1)内の洗浄台(7)に被洗浄物(32)を載置するとともに、当該洗浄台(7)を減圧槽(1)の底面(3)側に移動させて上記の如く減圧槽(1)の冷却機構により冷却された洗浄液(27)中に浸漬することにより、被洗浄物(32)の浸漬洗浄を行う。 Then, the following liquid cleaning is performed. That is, the first on-off valve (15), the second on-off valve (21), the fifth on-off valve (37), and the sixth on-off valve (38) are closed, and the third on-off valve (22) and the fourth on-off valve (22) are closed. Open valve (23). In this state, as shown in FIG. The object to be cleaned (32) is immersed in cleaning by moving it to the 3) side and immersing it in the cleaning liquid (27) cooled by the cooling mechanism of the reduced pressure tank (1) as described above.

またこの浸漬洗浄時には、上記の如く第三開閉弁(22)及び第四開閉弁(23)を開弁し、上記蒸気発生槽(13)内で発生させた洗浄蒸気(31)を、第三配管(17)及び分岐点(24)を通じて冷却器(18)によって冷却することにより、当該洗浄蒸気(31)の蒸留を行うことができる。 In addition, during this immersion cleaning, the third on-off valve (22) and the fourth on-off valve (23) are opened as described above, and the cleaning steam (31) generated in the steam generation tank (13) is transferred to the third on-off valve (22) and the fourth on-off valve (23). Distillation of the cleaning vapor (31) can be carried out by cooling it with a cooler (18) through the pipe (17) and the branch point (24).

そして、上記洗浄台(7)に設けた振動機構(11)を作動させて洗浄台(7)を振動させることにより、被洗浄物(32)から脱落してして洗浄台(7)上に堆積した汚れを、上記振動機構(11)の振動により更に当該洗浄台(7)から下方に落下させることが可能となる。 By activating the vibration mechanism (11) provided on the washing table (7) and vibrating the washing table (7), the object to be cleaned (32) falls off and lands on the washing table (7). The accumulated dirt can further fall downward from the washing table (7) by the vibration of the vibration mechanism (11).

次に、当該被洗浄物(32)の浸漬洗浄が終了した後、図2に示す如く上記洗浄台(7)を上記洗浄液(27)の液面(28)よりも上方に配置する。そして、上記第二開閉弁(21)、第四開閉弁(23)、第七開閉弁(40)を開弁するとともに第三開閉弁(22)を閉弁した状態で、減圧ポンプ(6)を作動させる。これにより、減圧管(5)及び第二配管(16)を通じて上記減圧槽(1)内を減圧状態とする。 Next, after the immersion cleaning of the object to be cleaned (32) is completed, the cleaning table (7) is placed above the liquid level (28) of the cleaning liquid (27) as shown in FIG. Then, with the second on-off valve (21), the fourth on-off valve (23), and the seventh on-off valve (40) opened and the third on-off valve (22) closed, the pressure reducing pump (6) is opened. Activate. As a result, the pressure inside the pressure reduction tank (1) is reduced through the pressure reduction pipe (5) and the second pipe (16).

このような状態において、蒸気発生槽(13)内にて発生させた洗浄溶剤(30)の洗浄蒸気(31)が、第三配管(17)及び第二配管(16)を通じて減圧槽(1)内に流入する。これにより、減圧槽(1)内に洗浄蒸気(31)が収納され、当該洗浄蒸気(31)によって被洗浄物(32)の蒸気洗浄が行われる。この蒸気洗浄時にも、上記浸漬洗浄時と同様に洗浄台(7)の振動機構(11)を作動させて洗浄台(7)を振動させることにより、上記洗浄により上記被洗浄物(32)から脱落した汚れを当該洗浄台(7)から下方に落とすことができるため、当該洗浄台(7)上の汚れの堆積を防ぐことが可能となる。 In such a state, the cleaning vapor (31) of the cleaning solvent (30) generated in the steam generation tank (13) flows through the third pipe (17) and the second pipe (16) to the vacuum tank (1). flow inside. As a result, the cleaning steam (31) is stored in the reduced pressure tank (1), and the object to be cleaned (32) is steam-cleaned by the cleaning steam (31). During this steam cleaning, the vibration mechanism (11) of the cleaning table (7) is activated to vibrate the cleaning table (7) in the same way as in the case of immersion cleaning. Since the fallen dirt can be dropped downward from the washing table (7), it is possible to prevent dirt from accumulating on the washing table (7).

そして蒸気洗浄の終了時には、第四開閉弁(23)を閉弁して蒸気発生槽(13)からの減圧槽(1)への洗浄蒸気(31)の供給を停止するとともに、上記洗浄台(7)を更に上方に摺動させて、上記減圧槽(1)の段部(2)の内周面(33)に当該洗浄台(7)の周縁(8)を当接密着させる。これにより、上記減圧槽(1)の天面(4)側と当該洗浄台(7)とにより密閉された隔離室(10)が形成されるとともに、図3に示す如く、当該隔離室(10)内に上記被洗浄物(32)が配置された状態となる。 At the end of steam cleaning, the fourth on-off valve (23) is closed to stop the supply of cleaning steam (31) from the steam generation tank (13) to the decompression tank (1), and the cleaning table ( 7) further upwards to bring the periphery (8) of the washing table (7) into close contact with the inner circumferential surface (33) of the stepped portion (2) of the decompression tank (1). As a result, a sealed isolation chamber (10) is formed by the top surface (4) of the decompression tank (1) and the cleaning table (7), and as shown in FIG. ) The object to be cleaned (32) is placed in the space.

上記の如く隔離室(10)を形成することにより、上記被洗浄物(32)を当該隔離室(10)の密閉された狭い空間内に配置することができる。また、上記の如く浸漬洗浄時及び/または蒸気洗浄時に洗浄台(7)の振動機構(11)を作動させて当該洗浄台(7)に堆積した汚れを除去していることから、当該洗浄台(7)に汚れがほとんど残留していない状態となる。 By forming the isolation chamber (10) as described above, the object to be cleaned (32) can be placed in a narrow, sealed space of the isolation chamber (10). In addition, as mentioned above, during immersion cleaning and/or steam cleaning, the vibration mechanism (11) of the cleaning table (7) is operated to remove dirt accumulated on the cleaning table (7). (7) Almost no dirt remains.

尚、被洗浄物(32)の汚れが少ない場合は、浸漬洗浄時に振動機構(11)による洗浄台(7)からの汚れの除去を行うのみで蒸気洗浄時には当該振動機構(11)による汚れの除去を行わなくても良いが、汚れが多い場合は浸漬洗浄時のみならず蒸気洗浄時においても振動機構(11)による洗浄台(7)からの汚れの除去を行った方が、より効果的である。 If the object to be cleaned (32) is not very dirty, only the vibration mechanism (11) is used to remove the stain from the washing table (7) during immersion cleaning, and the vibration mechanism (11) is used to remove the stain during steam cleaning. It is not necessary to remove the dirt, but if there is a lot of dirt, it is more effective to remove the dirt from the washing table (7) using the vibration mechanism (11) not only during immersion cleaning but also during steam cleaning. It is.

これにより、上記減圧槽(1)の段部(2)の内周面(33)と当該洗浄台(7)の周縁(8)とをより確実に密着させることが可能となるため、当該隔離室(10)をより密閉度の高いものとすることができることから、上記当該隔離室(10)の減圧のために余分なエネルギーを必要としない。また、第二開閉弁(21)と第三開閉弁(22)とを開弁するとともに、第七開閉弁(40)を閉弁した状態で減圧ポンプ(6)を作動させることにより、隔離室(10)内の減圧度を更に上げることが可能となる。更に、洗浄台(7)に汚れがほとんど残っていないため、当該汚れの部分まで乾燥が行われることがなく乾燥時間をより早く効率的に行うことができる。 This makes it possible to more reliably bring the inner peripheral surface (33) of the stepped portion (2) of the decompression tank (1) into close contact with the peripheral edge (8) of the washing table (7). Since the chamber (10) can be made more airtight, no extra energy is required to reduce the pressure in the isolation chamber (10). In addition, by opening the second on-off valve (21) and the third on-off valve (22) and operating the pressure reducing pump (6) with the seventh on-off valve (40) closed, (10) It becomes possible to further increase the degree of reduced pressure. Furthermore, since there is almost no dirt left on the washing stand (7), the dirty parts are not dried, making it possible to dry more quickly and efficiently.

また、図3に示す如く、上記隔離室(10)の外周には加熱機構(12)が被覆されているため、当該隔離室(10)は常時加熱された状態とすることができる。よって、当該隔離室(10)の内壁に洗浄蒸気(31)が接触しても、当該内壁にて洗浄蒸気(31)の凝縮液化が生じにくいものとなる。 Furthermore, as shown in FIG. 3, since the outer periphery of the isolation chamber (10) is covered with a heating mechanism (12), the isolation chamber (10) can be kept in a heated state at all times. Therefore, even if the cleaning steam (31) comes into contact with the inner wall of the isolation chamber (10), the cleaning steam (31) is unlikely to condense and liquefy on the inner wall.

よって、上記隔離室(10)の内壁に洗浄蒸気(31)の凝縮液が付着しないため、当該隔離室(10)内の被洗浄物(32)のみが乾燥対象となることから、乾燥時間をより短いものとすることができる。また、上記の如く沸点の高い洗浄溶剤(30)を減圧下の上記隔離室(10)内で乾燥するため、100℃付近の低い温度で安全に乾燥作業を行うことができる。 Therefore, since the condensate of the cleaning steam (31) does not adhere to the inner wall of the isolation chamber (10), only the object to be cleaned (32) in the isolation chamber (10) is to be dried, so the drying time is reduced. It can be made shorter. Further, since the cleaning solvent (30) having a high boiling point is dried in the isolated chamber (10) under reduced pressure as described above, the drying work can be safely performed at a low temperature of around 100°C.

そして、全ての洗浄工程が終了した後に、上記減圧槽(1)内の減圧状態を解除する。即ち、まず第六開閉弁(38)を開弁することにより、当該第六開閉弁(38)を通じて窒素ガスが上記減圧槽(1)内に流入し、当該減圧槽(1)内の隔離室(10)以外の空間の減圧状態が解除される。その後、上記第五開閉弁(37)を開弁することにより、当該上記第五開閉弁(37)を通じて上記隔離室(10)内に窒素ガスが流入し、当該隔離室(10)内の空間の減圧状態が解除される。これにより、上記減圧槽(1)全体の減圧状態が解除され、本実施例における洗浄の全ての工程が終了するものとなる。 After all the cleaning steps are completed, the reduced pressure state in the reduced pressure tank (1) is released. That is, by first opening the sixth on-off valve (38), nitrogen gas flows into the decompression tank (1) through the sixth on-off valve (38), and the isolation chamber in the decompression tank (1) is The reduced pressure state in spaces other than (10) is released. Thereafter, by opening the fifth on-off valve (37), nitrogen gas flows into the isolation chamber (10) through the fifth on-off valve (37), and the space inside the isolation chamber (10) is The reduced pressure state is released. As a result, the reduced pressure state of the entire reduced pressure tank (1) is released, and all cleaning steps in this embodiment are completed.

1 減圧槽
3 底面
4 天面
7 洗浄台
8 周縁
10 隔離室
11 振動機構
12 加熱機構
13 蒸気発生槽
26 減圧機構
27 洗浄液
28 液面
31 洗浄蒸気
32 被洗浄物
33 内周面
1 Decompression tank 3 Bottom surface 4 Top surface 7 Washing table 8 Periphery 10 Isolation chamber 11 Vibration mechanism 12 Heating mechanism 13 Steam generation tank 26 Decompression mechanism 27 Cleaning liquid 28 Liquid surface 31 Cleaning steam 32 Object to be cleaned 33 Inner peripheral surface

本発明は、洗浄溶剤にて機械部品、電子部品、医療機器等の被洗浄物を、減圧槽内にて液洗浄、蒸気洗浄、及び乾燥するための減圧洗浄装置に係るものである。 The present invention relates to a vacuum cleaning device for liquid cleaning, steam cleaning, and drying of mechanical parts, electronic components, medical equipment, and other objects to be cleaned using a cleaning solvent in a vacuum tank.

特開2015-202463号公報 1995年にフロン113や1.1.1-トリクロロエタンが世界的に製造禁止となり、その代替溶剤として、可燃性の石油系溶剤が広く使用されている。しかし、石油系溶剤は沸点が高く、また可燃性であることから、安全性を考慮して酸素のほとんどない雰囲気下での洗浄を可能とする様々な減圧洗浄装置が開発されている。JP, 2015-202463, A In 1995, the production of Freon 113 and 1.1.1-trichloroethane was banned worldwide, and flammable petroleum-based solvents are widely used as alternative solvents. However, petroleum solvents have a high boiling point and are flammable, so in consideration of safety, various vacuum cleaning devices have been developed that enable cleaning in an atmosphere with almost no oxygen.

このような減圧洗浄装置のうち、特許文献1に示す如く、液槽内に上下動可能な載置台を備え、当該載置台に被洗浄物を載置するとともに、当該槽内に洗浄液を貯留し、当該洗浄液にて液洗浄を行うとともに、当該洗浄液よりも上方に被洗浄物を移動させた状態で、蒸気洗浄や減圧乾燥を行う洗浄装置が公知となっている。そして当該洗浄装置の減圧乾燥は、上記載置台と槽の天面側とにより乾燥室を構成し、この乾燥室内を減圧して行うものである。 Among such reduced pressure cleaning devices, as shown in Patent Document 1, a mounting table that is movable up and down is provided in a liquid tank, an object to be cleaned is placed on the mounting table, and a cleaning liquid is stored in the tank. 2. Description of the Related Art There is a known cleaning device that performs liquid cleaning with the cleaning liquid and also performs steam cleaning or reduced pressure drying while moving the object to be cleaned above the cleaning liquid. The vacuum drying of the cleaning device is performed by forming a drying chamber by the above-mentioned mounting table and the top side of the tank, and reducing the pressure inside this drying chamber.

しかしながら、上記特許文献1の洗浄台には、常に被洗浄物が載置された状態で各洗浄を行うことから、被洗浄物から脱落した汚れが当該洗浄台上に堆積するものとなる。そのため、乾燥室を形成する際には、これら洗浄台上に堆積した汚れによって当該乾燥室内の密閉度が低下するものとなり、当該乾燥室内の減圧が困難となるとともに、洗浄台上の汚れの分まで乾燥が行われるため乾燥時間が長くなり、減圧乾燥の効率が低下するという問題が生じる。 However, since each cleaning is performed with the object to be cleaned always placed on the washing table of Patent Document 1, dirt that falls off from the object to be cleaned is deposited on the washing table. Therefore, when forming a drying chamber, the dirt accumulated on the washing table will reduce the airtightness of the drying chamber, making it difficult to reduce the pressure inside the drying chamber, and the dirt on the washing table will be removed. Since the drying is performed until the end of the drying process, the drying time becomes longer and there arises a problem that the efficiency of vacuum drying decreases.

そこで本願では上述の如き課題を解決しようとするものであって、洗浄台上の汚れの堆積を防止することにより被洗浄物の洗浄効率を向上させようとするものである。 Therefore, the present application attempts to solve the above-mentioned problems, and aims to improve the cleaning efficiency of objects to be cleaned by preventing the accumulation of dirt on the cleaning table.

本願発明は上述の如き課題を解決するため、減圧槽内に被洗浄物を載置可能な板状の洗浄台を設け、当該洗浄台を、駆動機構により減圧槽の内部で上下動に摺動可能とし、当該洗浄台の周縁を上記減圧槽の内周面に密着させることにより、当該減圧槽内の空間を天面側と底面側とに気密的に分離可能とし、上記減圧槽の天面側と上記洗浄台とで形成された隔離室内を、上記減圧槽に接続された減圧機構にて減圧可能とするとともに、上記洗浄台の底面側には、当該洗浄台を振動させることにより、洗浄台に堆積した汚れを当該洗浄台から落下させて除去するための振動機構を設けたものである。 In order to solve the above-mentioned problems, the present invention provides a plate-shaped washing table on which objects to be cleaned can be placed in a reduced pressure tank, and slides the washing table up and down inside the reduced pressure tank by a drive mechanism. By making the periphery of the washing stand in close contact with the inner peripheral surface of the decompression tank, the space inside the decompression tank can be airtightly separated into a top side and a bottom side. The inside of the isolation chamber formed by the side and the washing table can be depressurized by a pressure reducing mechanism connected to the pressure reducing tank, and the bottom side of the washing table is made to vibrate. A vibration mechanism is provided to remove dirt accumulated on the washing table by dropping it from the washing table .

また上記振動機構は、上記減圧槽内に収納した洗浄液中、あるいは当該減圧槽内に発生させた洗浄蒸気中で作動可能とするものであっても良い。このように上記振動機構を液洗浄や蒸気洗浄中で作動させることにより、液洗浄時や蒸気洗浄時においても、上記洗浄台上の被洗浄物から離脱した汚れを当該洗浄台から下方に落下させて除去することができる。 Further, the vibration mechanism may be operable in a cleaning liquid stored in the vacuum tank or in cleaning steam generated in the vacuum tank. By operating the vibrating mechanism during liquid cleaning or steam cleaning in this way, dirt separated from the object to be cleaned on the washing table can be caused to fall downward from the washing table even during liquid cleaning or steam cleaning. It can be removed by

また、上記減圧槽には洗浄液が貯留され、当該洗浄液にて被洗浄物の液洗浄を可能とし、上記洗浄台に載置された被洗浄物を上記洗浄液の液面よりも上方に配置した状態で、当該被洗浄物の蒸気洗浄を可能とするとともに、上記被洗浄物を上記隔離室内に配置することにより、当該被洗浄物の減圧乾燥を可能としたものであっても良い。 Further, a cleaning liquid is stored in the vacuum tank, and the cleaning liquid can be used to wash the object to be cleaned, and the object to be cleaned, which is placed on the washing table, is placed above the level of the cleaning liquid. In this case, the object to be cleaned may be steam-cleaned, and the object to be cleaned may be placed in the isolation chamber, so that the object to be cleaned can be dried under reduced pressure.

また、上記隔離室は、上記減圧槽に設けられた加熱機構によって一定温度の加熱状態を維持可能とするものであってもよく、上記減圧槽の底部側は、当該減圧槽に設けた冷却機構によって一定温度の冷却状態を維持可能とするものであってもよい。これにより、隔離室内で乾燥を行う際には常に加熱状態とすることができるとともに、底部側で液洗浄を行う際には常に洗浄液を冷却状態とすることができるため、槽内全体を都度加熱したり冷却したりする必要がなく、熱エネルギーの損失を抑えながら一つの槽内で被洗浄物の液洗浄や減圧乾燥を効率よく行うことができる。 Further, the isolation chamber may be capable of maintaining a heated state at a constant temperature by a heating mechanism provided in the reduced pressure tank, and the bottom side of the reduced pressure tank is provided with a cooling mechanism provided in the reduced pressure tank. It may also be possible to maintain a cooling state at a constant temperature. This makes it possible to always keep the cleaning liquid in a heated state when drying in the isolation chamber, and to keep the cleaning liquid in a cooled state when cleaning the bottom side, so the entire tank is heated each time. There is no need for cleaning or cooling, and it is possible to efficiently perform liquid cleaning and vacuum drying of items to be cleaned in one tank while suppressing loss of thermal energy.

また、上記減圧槽とは別体に、当該減圧槽に洗浄蒸気を送り込むための蒸気発生槽を設けるとともに、上記減圧槽の天面側には、当該減圧槽及び/または上記隔離室を減圧可能とする減圧機構を接続したものであってもよい。 In addition, a steam generation tank for sending cleaning steam to the vacuum tank is provided separately from the vacuum tank, and the top side of the vacuum tank is equipped with a tank that can depressurize the tank and/or the isolation room. It may also be connected to a pressure reducing mechanism.

また、上記洗浄液は、沸点が100℃以上の可燃性溶剤であってもよく、上記振動機構は、電気式若しくはエアー式のバイブレーター、又は超音波振動子であってもよい。 Further, the cleaning liquid may be a flammable solvent with a boiling point of 100° C. or higher, and the vibration mechanism may be an electric or air vibrator, or an ultrasonic vibrator.

本発明は上記の如く構成したものであって、洗浄台の底面側には振動機構を設けているため、当該振動機構を作動させることにより、上記洗浄台に堆積した切削くず、プレスくず、あるいは切粉等の被洗浄物から離脱した汚れを、上記振動機構による振動により当該洗浄台から落下させて除去することが可能となる。 The present invention is configured as described above, and since a vibration mechanism is provided on the bottom side of the cleaning table, by operating the vibration mechanism, cutting waste, press waste, or It becomes possible to remove dirt, such as chips, separated from the object to be cleaned by dropping it from the cleaning table by vibration by the vibration mechanism.

そのため、当該洗浄台を摺動させて隔離室を形成する際に、当該洗浄台上の周縁には汚れが堆積していないため、当該周縁と減圧槽の内周面とを良好な状態で密着させることが可能となる。従って、上記隔離室内の密閉度を高めることができるため、当該隔離室の減圧作業を円滑に行うことができる。更に、当該隔離室内には被洗浄物以外の汚れが堆積していないため、当該被洗浄物の減圧乾燥のみの乾燥が行われるものとなることから、乾燥作業を短時間で効率的に行うことが可能となる。 Therefore, when the washing table is slid to form an isolation chamber, dirt is not deposited on the periphery of the washing table, so the periphery and the inner circumferential surface of the decompression tank are kept in close contact with each other. It becomes possible to do so. Therefore, since the degree of sealing in the isolation chamber can be increased, depressurization of the isolation chamber can be performed smoothly. Furthermore, since there is no dirt accumulated in the isolation room other than the items to be cleaned, only vacuum drying of the items to be cleaned is performed, so the drying work can be carried out efficiently in a short time. becomes possible.

本願発明を示す実施例1において、液洗浄時の概念図。FIG. 2 is a conceptual diagram at the time of liquid cleaning in Example 1 showing the present invention. 実施例1において、蒸気洗浄時の概念図。In Example 1, a conceptual diagram at the time of steam cleaning. 実施例1において、減圧乾燥時の概念図。In Example 1, a conceptual diagram at the time of reduced pressure drying. 従来例の概念図。A conceptual diagram of a conventional example.

本願発明の実施例1を図1に於いて説明すると、(1)は減圧槽であって、内部を減圧可能とするとともに、中央部には周方向に段部(2)を設け、底面(3)側より天面 (4)側の内径を狭く形成している。また上記減圧槽(1)は、減圧管(5)を通じて減圧ポンプ(6)に接続されている。 Embodiment 1 of the present invention will be explained with reference to FIG. 1. (1) is a depressurizing tank, which is capable of reducing the pressure inside, and has a stepped part (2) in the circumferential direction in the center, and a bottom surface ( The inner diameter of the top surface (4) side is narrower than that of the 3) side. Further, the pressure reduction tank (1) is connected to a pressure reduction pump (6) through a pressure reduction pipe (5).

そしてこの減圧槽(1)の内部には、平板状の洗浄台(7)を設けている。この洗浄台(7)は、駆動機構(図示せず。)により減圧槽(1)内の底部から上記段部(2)までの間を上下動に任意に摺動可能としている。そして、当該洗浄台(7)を上方に摺動させて上記減圧槽(1)の段部(2)の内周面(33)に当該洗浄台(7)の周縁(8)を当接密着させることにより、上記減圧槽(1)の天面(4)側と当該洗浄台(7)とにより、密閉された隔離室(10)を形成することができる。 A flat plate-shaped washing table (7) is provided inside the decompression tank (1). This washing stand (7) can be freely slid up and down between the bottom of the decompression tank (1) and the stepped part (2) by a drive mechanism (not shown). Then, slide the washing table (7) upward and bring the periphery (8) of the washing table (7) into close contact with the inner peripheral surface (33) of the step (2) of the decompression tank (1). By doing so, a sealed isolation chamber (10) can be formed by the top surface (4) side of the decompression tank (1) and the washing table (7).

また当該洗浄台(7)の底面には、当該洗浄台(7)を振動させるための振動機構(11)として、電動式のバイブレーターを接続配置している。尚、本実施例では電気式のバイブレーターを使用しているが、他の異なる実施例ではこれに限らず、エアー式のバイブレーター又は超音波振動子を使用することも可能である。また上記減圧槽(1)には、上記段部(2)から天面(4)にかけて加熱機構(12)を被覆配置するとともに、当該減圧槽(1)の底面(3)側には、被洗浄物(32)の液洗浄を行うための洗浄溶剤(30)を収納している。また当該減圧槽(1)の底面(3)側には、当該減圧槽(1)に収納された洗浄液(27)を冷却するための冷却機構(図示せず。)が設けられている。そして上記加熱機構(12)及び冷却機構は、それぞれ一定温度の加熱状態及び冷却状態を維持可能としている。 Furthermore, an electric vibrator is connected to the bottom of the washing table (7) as a vibration mechanism (11) for vibrating the washing table (7). Although an electric vibrator is used in this embodiment, the present invention is not limited to this, and an air vibrator or an ultrasonic vibrator may also be used in other different embodiments. In addition, a heating mechanism (12) is disposed covering the vacuum tank (1) from the stepped portion (2) to the top surface (4), and a heating mechanism (12) is provided on the bottom surface (3) side of the vacuum tank (1). Contains a cleaning solvent (30) for liquid cleaning of the cleaning object (32). Further, a cooling mechanism (not shown) for cooling the cleaning liquid (27) stored in the vacuum tank (1) is provided on the bottom (3) side of the vacuum tank (1). The heating mechanism (12) and the cooling mechanism are capable of maintaining a heating state and a cooling state at a constant temperature, respectively.

そしてこの減圧槽(1)とは別に、洗浄溶剤(30)の蒸気発生槽(13)を設けている。この蒸気発生槽(13)は、その底部側において上記減圧槽(1)の底部側と第一配管(14)を通じて連通可能としている。尚、当該第一配管(14)には第一開閉弁(15)を設けている。 Separately from this pressure reducing tank (1), a steam generating tank (13) for cleaning solvent (30) is provided. The bottom side of the steam generation tank (13) can communicate with the bottom side of the pressure reducing tank (1) through a first pipe (14). Note that the first pipe (14) is provided with a first on-off valve (15).

また当該蒸気発生槽(13)の天面(20)と上記減圧槽(1)の天面(4)側とを、以下に説明する第二配管(16)及び第三配管(17)を通じて連通可能としている。即ち上記第二配管(16)は、その一端を上記減圧槽(1)に接続するとともに、他端を、冷却器(18)を通じて上記減圧ポンプ(6)に接続している。そして上記第二配管(16)から分岐した第三配管(17)の一端を、上記蒸気発生槽(13)の天面(20)に接続している。 In addition, the top surface (20) of the steam generation tank (13) and the top surface (4) side of the decompression tank (1) are communicated through the second piping (16) and third piping (17) described below. It is possible. That is, the second pipe (16) has one end connected to the decompression tank (1), and the other end connected to the decompression pump (6) through the cooler (18). One end of a third pipe (17) branched from the second pipe (16) is connected to the top surface (20) of the steam generation tank (13).

また、上記第二配管(16)には、第三配管(17)の分岐点(24)よりも上記減圧槽(1)側に第二開閉弁(21)を、また当該分岐点(24)よりも減圧ポンプ(6)側に第三開閉弁(22)を設けるとともに、上記第三配管(17)には第四開閉弁(23)を設けている。また当該蒸気発生槽(13)の底面側には、当該蒸気発生槽(13)内に収納した洗浄溶剤(30)を加熱して当該洗浄溶剤(30)の洗浄蒸気(31)を発生させるための加熱体(25)を設けている。尚、当該第二配管(16)、上記減圧管(5)、及び減圧ポンプ(6)により本実施例の減圧機構(26)を構成している。 The second pipe (16) also has a second on-off valve (21) located closer to the pressure reducing tank (1) than the branch point (24) of the third pipe (17), and A third on-off valve (22) is provided closer to the pressure reducing pump (6), and a fourth on-off valve (23) is provided on the third pipe (17). Also, on the bottom side of the steam generation tank (13), there is a device for heating the cleaning solvent (30) stored in the steam generation tank (13) to generate cleaning vapor (31) of the cleaning solvent (30). A heating element (25) is provided. Note that the second pipe (16), the pressure reduction pipe (5), and the pressure reduction pump (6) constitute the pressure reduction mechanism (26) of this embodiment.

また、上記減圧槽(1)には図1に示す如く、窒素ガスを供給するための供給配管(34)を設けている。そして当該供給配管(34)は第一供給配管(35)と第二供給配管(36)とに分岐し、上記第一供給配管(35)を上記減圧槽(1)の天面(4)側に接続するとともに上記第二供給配管(36)を上記段部(2)の下方に接続している。そして、上記第一供給配管(35)に第五開閉弁(37)を設けるとともに、上記第二供給配管(36)に第六開閉弁(38)を設けている。また上記減圧管(5)には第七開閉弁(40)を設けている。 Further, as shown in FIG. 1, the decompression tank (1) is provided with a supply pipe (34) for supplying nitrogen gas. The supply pipe (34) branches into a first supply pipe (35) and a second supply pipe (36), and the first supply pipe (35) is connected to the top surface (4) of the decompression tank (1). At the same time, the second supply pipe (36) is connected to the lower part of the step part (2). A fifth on-off valve (37) is provided on the first supply pipe (35), and a sixth on-off valve (38) is provided on the second supply pipe (36). Further, the pressure reducing pipe (5) is provided with a seventh on-off valve (40).

上記の如く構成した減圧洗浄装置を用いて被洗浄物(32)の洗浄方法について以下に説明する。まず、当該減圧槽(1)に洗浄液(27)を収納する。尚、本実施例では沸点約170℃の炭化水素系溶剤を洗浄液(27)として使用している。また、上記減圧槽(1)内の洗浄液(27)と同じ洗浄溶剤(30)を、上記蒸気発生槽(13)内に収納するとともに、上記蒸気発生槽(13)の加熱体(25)を作動するさせることにより、当該蒸気発生槽(13)内の洗浄溶剤(30)を加熱して洗浄蒸気(31)を発生させておく。 A method of cleaning an object to be cleaned (32) using the vacuum cleaning apparatus configured as described above will be described below. First, the cleaning liquid (27) is stored in the vacuum tank (1). In this example, a hydrocarbon solvent with a boiling point of about 170° C. is used as the cleaning liquid (27). Also, a cleaning solvent (30) that is the same as the cleaning liquid (27) in the decompression tank (1) is stored in the steam generation tank (13), and the heating element (25) of the steam generation tank (13) is heated. By operating, the cleaning solvent (30) in the steam generation tank (13) is heated to generate cleaning steam (31).

そして、以下の液洗浄を行う。即ち、第一開閉弁(15)、第二開閉弁(21)、第五開閉弁(37)、第六開閉弁(38)を閉弁するとともに、第三開閉弁(22)、第四開閉弁(23)を開弁する。この状態で図1に示す如く、上記減圧槽(1)内の洗浄台(7)に被洗浄物(32)を載置するとともに、当該洗浄台(7)を減圧槽(1)の底面(3)側に移動させて上記の如く減圧槽(1)の冷却機構により冷却された洗浄液(27)中に浸漬することにより、被洗浄物(32)の浸漬洗浄を行う。 Then, the following liquid cleaning is performed. That is, the first on-off valve (15), the second on-off valve (21), the fifth on-off valve (37), and the sixth on-off valve (38) are closed, and the third on-off valve (22) and the fourth on-off valve (22) are closed. Open valve (23). In this state, as shown in FIG. The object to be cleaned (32) is immersed in cleaning by moving it to the 3) side and immersing it in the cleaning liquid (27) cooled by the cooling mechanism of the reduced pressure tank (1) as described above.

またこの浸漬洗浄時には、上記の如く第三開閉弁(22)及び第四開閉弁(23)を開弁し、上記蒸気発生槽(13)内で発生させた洗浄蒸気(31)を、第三配管(17)及び分岐点(24)を通じて冷却器(18)によって冷却することにより、当該洗浄蒸気(31)の蒸留を行うことができる。 In addition, during this immersion cleaning, the third on-off valve (22) and the fourth on-off valve (23) are opened as described above, and the cleaning steam (31) generated in the steam generation tank (13) is transferred to the third on-off valve (22) and the fourth on-off valve (23). Distillation of the cleaning vapor (31) can be carried out by cooling it with a cooler (18) through the pipe (17) and the branch point (24).

そして、上記洗浄台(7)に設けた振動機構(11)を作動させて洗浄台(7)を振動させることにより、被洗浄物(32)から脱落してして洗浄台(7)上に堆積した汚れを、上記振動機構(11)の振動により更に当該洗浄台(7)から下方に落下させることが可能となる。 By activating the vibration mechanism (11) provided on the washing table (7) and vibrating the washing table (7), the object to be cleaned (32) falls off and lands on the washing table (7). The accumulated dirt can further fall downward from the washing table (7) by the vibration of the vibration mechanism (11).

次に、当該被洗浄物(32)の浸漬洗浄が終了した後、図2に示す如く上記洗浄台(7)を上記洗浄液(27)の液面(28)よりも上方に配置する。そして、上記第二開閉弁(21)、第四開閉弁(23)、第七開閉弁(40)を開弁するとともに第三開閉弁(22)を閉弁した状態で、減圧ポンプ(6)を作動させる。これにより、減圧管(5)及び第二配管(16)を通じて上記減圧槽(1)内を減圧状態とする。 Next, after the immersion cleaning of the object to be cleaned (32) is completed, the cleaning table (7) is placed above the liquid level (28) of the cleaning liquid (27) as shown in FIG. Then, with the second on-off valve (21), the fourth on-off valve (23), and the seventh on-off valve (40) opened and the third on-off valve (22) closed, the pressure reducing pump (6) is opened. Activate. As a result, the pressure inside the pressure reduction tank (1) is reduced through the pressure reduction pipe (5) and the second pipe (16).

このような状態において、蒸気発生槽(13)内にて発生させた洗浄溶剤(30)の洗浄蒸気(31)が、第三配管(17)及び第二配管(16)を通じて減圧槽(1)内に流入する。これにより、減圧槽(1)内に洗浄蒸気(31)が収納され、当該洗浄蒸気(31)によって被洗浄物(32)の蒸気洗浄が行われる。この蒸気洗浄時にも、上記浸漬洗浄時と同様に洗浄台(7)の振動機構(11)を作動させて洗浄台(7)を振動させることにより、上記洗浄により上記被洗浄物(32)から脱落した汚れを当該洗浄台(7)から下方に落とすことができるため、当該洗浄台(7)上の汚れの堆積を防ぐことが可能となる。 In such a state, the cleaning vapor (31) of the cleaning solvent (30) generated in the steam generation tank (13) flows through the third pipe (17) and the second pipe (16) to the vacuum tank (1). flow inside. As a result, the cleaning steam (31) is stored in the reduced pressure tank (1), and the object to be cleaned (32) is steam-cleaned by the cleaning steam (31). During this steam cleaning, the vibration mechanism (11) of the cleaning table (7) is activated to vibrate the cleaning table (7) in the same way as in the case of immersion cleaning. Since the fallen dirt can be dropped downward from the washing table (7), it is possible to prevent dirt from accumulating on the washing table (7).

そして蒸気洗浄の終了時には、第四開閉弁(23)を閉弁して蒸気発生槽(13)からの減圧槽(1)への洗浄蒸気(31)の供給を停止するとともに、上記洗浄台(7)を更に上方に摺動させて、上記減圧槽(1)の段部(2)の内周面(33)に当該洗浄台(7)の周縁(8)を当接密着させる。これにより、上記減圧槽(1)の天面(4)側と当該洗浄台(7)とにより密閉された隔離室(10)が形成されるとともに、図3に示す如く、当該隔離室(10)内に上記被洗浄物(32)が配置された状態となる。 At the end of steam cleaning, the fourth on-off valve (23) is closed to stop the supply of cleaning steam (31) from the steam generation tank (13) to the decompression tank (1), and the cleaning table ( 7) further upwards to bring the periphery (8) of the washing table (7) into close contact with the inner circumferential surface (33) of the stepped portion (2) of the decompression tank (1). As a result, a sealed isolation chamber (10) is formed by the top surface (4) of the decompression tank (1) and the cleaning table (7), and as shown in FIG. ) The object to be cleaned (32) is placed in the space.

上記の如く隔離室(10)を形成することにより、上記被洗浄物(32)を当該隔離室(10)の密閉された狭い空間内に配置することができる。また、上記の如く浸漬洗浄時及び/または蒸気洗浄時に洗浄台(7)の振動機構(11)を作動させて当該洗浄台(7)に堆積した汚れを除去していることから、当該洗浄台(7)に汚れがほとんど残留していない状態となる。 By forming the isolation chamber (10) as described above, the object to be cleaned (32) can be placed in a narrow, sealed space of the isolation chamber (10). In addition, as mentioned above, during immersion cleaning and/or steam cleaning, the vibration mechanism (11) of the cleaning table (7) is operated to remove dirt accumulated on the cleaning table (7). (7) Almost no dirt remains.

尚、被洗浄物(32)の汚れが少ない場合は、浸漬洗浄時に振動機構(11)による洗浄台(7)からの汚れの除去を行うのみで蒸気洗浄時には当該振動機構(11)による汚れの除去を行わなくても良いが、汚れが多い場合は浸漬洗浄時のみならず蒸気洗浄時においても振動機構(11)による洗浄台(7)からの汚れの除去を行った方が、より効果的である。 If the object to be cleaned (32) is not very dirty, only the vibration mechanism (11) is used to remove the stain from the washing table (7) during immersion cleaning, and the vibration mechanism (11) is used to remove the stain during steam cleaning. It is not necessary to remove the dirt, but if there is a lot of dirt, it is more effective to remove the dirt from the washing table (7) using the vibration mechanism (11) not only during immersion cleaning but also during steam cleaning. It is.

これにより、上記減圧槽(1)の段部(2)の内周面(33)と当該洗浄台(7)の周縁(8)とをより確実に密着させることが可能となるため、当該隔離室(10)をより密閉度の高いものとすることができることから、上記当該隔離室(10)の減圧のために余分なエネルギーを必要としない。また、第二開閉弁(21)と第三開閉弁(22)とを開弁するとともに、第七開閉弁(40)を閉弁した状態で減圧ポンプ(6)を作動させることにより、隔離室(10)内の減圧度を更に上げることが可能となる。更に、洗浄台(7)に汚れがほとんど残っていないため、当該汚れの部分まで乾燥が行われることがなく乾燥時間をより早く効率的に行うことができる。 This makes it possible to more reliably bring the inner peripheral surface (33) of the stepped portion (2) of the decompression tank (1) into close contact with the peripheral edge (8) of the washing table (7). Since the chamber (10) can be made more airtight, no extra energy is required to reduce the pressure in the isolation chamber (10). In addition, by opening the second on-off valve (21) and the third on-off valve (22) and operating the pressure reducing pump (6) with the seventh on-off valve (40) closed, (10) It becomes possible to further increase the degree of reduced pressure. Furthermore, since there is almost no dirt left on the washing stand (7), the dirty parts are not dried, making it possible to dry more quickly and efficiently.

また、図3に示す如く、上記隔離室(10)の外周には加熱機構(12)が被覆されているため、当該隔離室(10)は常時加熱された状態とすることができる。よって、当該隔離室(10)の内壁に洗浄蒸気(31)が接触しても、当該内壁にて洗浄蒸気(31)の凝縮液化が生じにくいものとなる。 Furthermore, as shown in FIG. 3, since the outer periphery of the isolation chamber (10) is covered with a heating mechanism (12), the isolation chamber (10) can be kept in a heated state at all times. Therefore, even if the cleaning steam (31) comes into contact with the inner wall of the isolation chamber (10), the cleaning steam (31) is unlikely to condense and liquefy on the inner wall.

よって、上記隔離室(10)の内壁に洗浄蒸気(31)の凝縮液が付着しないため、当該隔離室(10)内の被洗浄物(32)のみが乾燥対象となることから、乾燥時間をより短いものとすることができる。また、上記の如く沸点の高い洗浄溶剤(30)を減圧下の上記隔離室(10)内で乾燥するため、100℃付近の低い温度で安全に乾燥作業を行うことができる。 Therefore, since the condensate of the cleaning steam (31) does not adhere to the inner wall of the isolation chamber (10), only the object to be cleaned (32) in the isolation chamber (10) is to be dried, so the drying time is reduced. It can be made shorter. Further, since the cleaning solvent (30) having a high boiling point is dried in the isolated chamber (10) under reduced pressure as described above, the drying work can be safely performed at a low temperature of around 100°C.

そして、全ての洗浄工程が終了した後に、上記減圧槽(1)内の減圧状態を解除する。即ち、まず第六開閉弁(38)を開弁することにより、当該第六開閉弁(38)を通じて窒素ガスが上記減圧槽(1)内に流入し、当該減圧槽(1)内の隔離室(10)以外の空間の減圧状態が解除される。その後、上記第五開閉弁(37)を開弁することにより、当該上記第五開閉弁(37)を通じて上記隔離室(10)内に窒素ガスが流入し、当該隔離室(10)内の空間の減圧状態が解除される。これにより、上記減圧槽(1)全体の減圧状態が解除され、本実施例における洗浄の全ての工程が終了するものとなる。 After all the cleaning steps are completed, the reduced pressure state in the reduced pressure tank (1) is released. That is, by first opening the sixth on-off valve (38), nitrogen gas flows into the decompression tank (1) through the sixth on-off valve (38), and the isolation chamber in the decompression tank (1) is The reduced pressure state in spaces other than (10) is released. Thereafter, by opening the fifth on-off valve (37), nitrogen gas flows into the isolation chamber (10) through the fifth on-off valve (37), and the space inside the isolation chamber (10) is The reduced pressure state is released. As a result, the reduced pressure state of the entire reduced pressure tank (1) is released, and all cleaning steps in this embodiment are completed.

1 減圧槽
3 底面
4 天面
7 洗浄台
8 周縁
10 隔離室
11 振動機構
12 加熱機構
13 蒸気発生槽
26 減圧機構
27 洗浄液
28 液面
31 洗浄蒸気
32 被洗浄物
33 内周面
1 Decompression tank 3 Bottom surface 4 Top surface 7 Washing table 8 Periphery 10 Isolation chamber 11 Vibration mechanism 12 Heating mechanism 13 Steam generation tank 26 Decompression mechanism 27 Cleaning liquid 28 Liquid surface 31 Cleaning steam 32 Object to be cleaned 33 Inner peripheral surface

本発明は、洗浄溶剤にて機械部品、電子部品、医療機器等の被洗浄物を、減圧槽内にて液洗浄、蒸気洗浄、及び乾燥するための減圧洗浄装置に係るものである。 The present invention relates to a vacuum cleaning device for liquid cleaning, steam cleaning, and drying of mechanical parts, electronic components, medical equipment, and other objects to be cleaned using a cleaning solvent in a vacuum tank.

特開2015-202463号公報 1995年にフロン113や1.1.1-トリクロロエタンが世界的に製造禁止となり、その代替溶剤として、可燃性の石油系溶剤が広く使用されている。しかし、石油系溶剤は沸点が高く、また可燃性であることから、安全性を考慮して酸素のほとんどない雰囲気下での洗浄を可能とする様々な減圧洗浄装置が開発されている。JP, 2015-202463, A In 1995, the production of Freon 113 and 1.1.1-trichloroethane was banned worldwide, and flammable petroleum-based solvents are widely used as alternative solvents. However, petroleum solvents have a high boiling point and are flammable, so in consideration of safety, various vacuum cleaning devices have been developed that enable cleaning in an atmosphere with almost no oxygen.

このような減圧洗浄装置のうち、特許文献1に示す如く、液槽内に上下動可能な載置台を備え、当該載置台に被洗浄物を載置するとともに、当該槽内に洗浄液を貯留し、当該洗浄液にて液洗浄を行うとともに、当該洗浄液よりも上方に被洗浄物を移動させた状態で、蒸気洗浄や減圧乾燥を行う洗浄装置が公知となっている。そして当該洗浄装置の減圧乾燥は、上記載置台と槽の天面側とにより乾燥室を構成し、この乾燥室内を減圧して行うものである。 Among such reduced pressure cleaning devices, as shown in Patent Document 1, a mounting table that is movable up and down is provided in a liquid tank, an object to be cleaned is placed on the mounting table, and a cleaning liquid is stored in the tank. 2. Description of the Related Art There is a known cleaning device that performs liquid cleaning with the cleaning liquid and also performs steam cleaning or reduced pressure drying while moving the object to be cleaned above the cleaning liquid. The vacuum drying of the cleaning device is performed by forming a drying chamber by the above-mentioned mounting table and the top side of the tank, and reducing the pressure inside this drying chamber.

しかしながら、上記特許文献1の洗浄台には、常に被洗浄物が載置された状態で各洗浄を行うことから、被洗浄物から脱落した汚れが当該洗浄台上に堆積するものとなる。そのため、乾燥室を形成する際には、これら洗浄台上に堆積した汚れによって当該乾燥室内の密閉度が低下するものとなり、当該乾燥室内の減圧が困難となるとともに、洗浄台上の汚れの分まで乾燥が行われるため乾燥時間が長くなり、減圧乾燥の効率が低下するという問題が生じる。 However, since each cleaning is performed with the object to be cleaned always placed on the washing table of Patent Document 1, dirt that falls off from the object to be cleaned is deposited on the washing table. Therefore, when forming a drying chamber, the dirt accumulated on the washing table will reduce the airtightness of the drying chamber, making it difficult to reduce the pressure inside the drying chamber, and the dirt on the washing table will be removed. Since the drying is performed until the end of the drying process, the drying time becomes longer and there arises a problem that the efficiency of vacuum drying decreases.

そこで本願では上述の如き課題を解決しようとするものであって、洗浄台上の汚れの堆積を防止することにより被洗浄物の洗浄効率を向上させようとするものである。 Therefore, the present application attempts to solve the above-mentioned problems, and aims to improve the cleaning efficiency of objects to be cleaned by preventing the accumulation of dirt on the cleaning table.

本願発明は上述の如き課題を解決するため、減圧槽内に被洗浄物を載置可能な平板状の洗浄台を設け、当該洗浄台を、駆動機構により減圧槽の内部で上下動に摺動可能とし、当該洗浄台の周縁を上記減圧槽の内周面に密着させることにより、当該減圧槽内の空間を天面側と底面側とに気密的に分離可能とし、上記減圧槽の天面側と上記洗浄台とで形成された隔離室内を、上記減圧槽に接続された減圧機構にて減圧可能とするとともに、上記洗浄台の底面側には、当該洗浄台を振動させることにより、洗浄台に堆積した汚れを当該洗浄台から落下させて除去するための振動機構を設けたものである。 In order to solve the above-mentioned problems, the present invention provides a flat plate -shaped washing stand on which objects to be cleaned can be placed in a reduced pressure tank, and the washing stand is slid up and down inside the reduced pressure tank by a drive mechanism. By making the periphery of the washing stand in close contact with the inner peripheral surface of the decompression tank, the space inside the decompression tank can be airtightly separated into a top side and a bottom side. The inside of the isolation chamber formed by the side and the washing table can be depressurized by a pressure reducing mechanism connected to the pressure reducing tank, and the bottom side of the washing table can be cleaned by vibrating the washing table. A vibration mechanism is provided to remove dirt accumulated on the washing table by dropping it from the washing table.

また上記振動機構は、上記減圧槽内に収納した洗浄液中、あるいは当該減圧槽内に発生させた洗浄蒸気中で作動可能とするものであっても良い。このように上記振動機構を液洗浄や蒸気洗浄中で作動させることにより、液洗浄時や蒸気洗浄時においても、上記洗浄台上の被洗浄物から離脱した汚れを当該洗浄台から下方に落下させて除去することができる。 Further, the vibration mechanism may be operable in a cleaning liquid stored in the vacuum tank or in cleaning steam generated in the vacuum tank. By operating the vibrating mechanism during liquid cleaning or steam cleaning in this way, dirt separated from the object to be cleaned on the washing table can be caused to fall downward from the washing table even during liquid cleaning or steam cleaning. It can be removed by

また、上記減圧槽には洗浄液が貯留され、当該洗浄液にて被洗浄物の液洗浄を可能とし、上記洗浄台に載置された被洗浄物を上記洗浄液の液面よりも上方に配置した状態で、当該被洗浄物の蒸気洗浄を可能とするとともに、上記被洗浄物を上記隔離室内に配置することにより、当該被洗浄物の減圧乾燥を可能としたものであっても良い。 Further, a cleaning liquid is stored in the vacuum tank, and the cleaning liquid can be used to wash the object to be cleaned, and the object to be cleaned, which is placed on the washing table, is placed above the level of the cleaning liquid. In this case, the object to be cleaned may be steam-cleaned, and the object to be cleaned may be placed in the isolation chamber, so that the object to be cleaned can be dried under reduced pressure.

また、上記隔離室は、上記減圧槽に設けられた加熱機構によって一定温度の加熱状態を維持可能とするものであってもよく、上記減圧槽の底部側は、当該減圧槽に設けた冷却機構によって一定温度の冷却状態を維持可能とするものであってもよい。これにより、隔離室内で乾燥を行う際には常に加熱状態とすることができるとともに、底部側で液洗浄を行う際には常に洗浄液を冷却状態とすることができるため、槽内全体を都度加熱したり冷却したりする必要がなく、熱エネルギーの損失を抑えながら一つの槽内で被洗浄物の液洗浄や減圧乾燥を効率よく行うことができる。 Further, the isolation chamber may be capable of maintaining a heated state at a constant temperature by a heating mechanism provided in the reduced pressure tank, and the bottom side of the reduced pressure tank is provided with a cooling mechanism provided in the reduced pressure tank. It may also be possible to maintain a cooling state at a constant temperature. This makes it possible to always keep the cleaning liquid in a heated state when drying in the isolation chamber, and to keep the cleaning liquid in a cooled state when cleaning the bottom side, so the entire tank is heated each time. There is no need for cleaning or cooling, and it is possible to efficiently perform liquid cleaning and vacuum drying of items to be cleaned in one tank while suppressing loss of thermal energy.

また、上記減圧槽とは別体に、当該減圧槽に洗浄蒸気を送り込むための蒸気発生槽を設けるとともに、上記減圧槽の天面側には、当該減圧槽及び/または上記隔離室を減圧可能とする減圧機構を接続したものであってもよい。 In addition, a steam generation tank for sending cleaning steam to the vacuum tank is provided separately from the vacuum tank, and the top side of the vacuum tank is equipped with a tank that can depressurize the tank and/or the isolation room. It may also be connected to a pressure reducing mechanism.

また、上記洗浄液は、沸点が100℃以上の可燃性溶剤であってもよく、上記振動機構は、電気式若しくはエアー式のバイブレーター、又は超音波振動子であってもよい。 Further, the cleaning liquid may be a flammable solvent with a boiling point of 100° C. or higher, and the vibration mechanism may be an electric or air vibrator, or an ultrasonic vibrator.

本発明は上記の如く構成したものであって、洗浄台の底面側には振動機構を設けているため、当該振動機構を作動させることにより、上記洗浄台に堆積した切削くず、プレスくず、あるいは切粉等の被洗浄物から離脱した汚れを、上記振動機構による振動により当該洗浄台から落下させて除去することが可能となる。 The present invention is configured as described above, and since a vibration mechanism is provided on the bottom side of the cleaning table, by operating the vibration mechanism, cutting waste, press waste, or It becomes possible to remove dirt, such as chips, separated from the object to be cleaned by dropping it from the cleaning table by vibration by the vibration mechanism.

そのため、当該洗浄台を摺動させて隔離室を形成する際に、当該洗浄台上の周縁には汚れが堆積していないため、当該周縁と減圧槽の内周面とを良好な状態で密着させることが可能となる。従って、上記隔離室内の密閉度を高めることができるため、当該隔離室の減圧作業を円滑に行うことができる。更に、当該隔離室内には被洗浄物以外の汚れが堆積していないため、当該被洗浄物の減圧乾燥のみの乾燥が行われるものとなることから、乾燥作業を短時間で効率的に行うことが可能となる。 Therefore, when the washing table is slid to form an isolation chamber, dirt is not deposited on the periphery of the washing table, so the periphery and the inner circumferential surface of the decompression tank are kept in close contact with each other. It becomes possible to do so. Therefore, since the degree of sealing in the isolation chamber can be increased, depressurization of the isolation chamber can be performed smoothly. Furthermore, since there is no dirt accumulated in the isolation room other than the items to be cleaned, only vacuum drying of the items to be cleaned is performed, so the drying work can be carried out efficiently in a short time. becomes possible.

本願発明を示す実施例1において、液洗浄時の概念図。FIG. 2 is a conceptual diagram at the time of liquid cleaning in Example 1 showing the present invention. 実施例1において、蒸気洗浄時の概念図。In Example 1, a conceptual diagram at the time of steam cleaning. 実施例1において、減圧乾燥時の概念図。In Example 1, a conceptual diagram at the time of reduced pressure drying. 従来例の概念図。A conceptual diagram of a conventional example.

本願発明の実施例1を図1に於いて説明すると、(1)は減圧槽であって、内部を減圧可能とするとともに、中央部には周方向に段部(2)を設け、底面(3)側より天面 (4)側の内径を狭く形成している。また上記減圧槽(1)は、減圧管(5)を通じて減圧ポンプ(6)に接続されている。 Embodiment 1 of the present invention will be explained with reference to FIG. 1. (1) is a depressurizing tank, which is capable of reducing the pressure inside, and has a stepped part (2) in the circumferential direction in the center, and a bottom surface ( The inner diameter of the top surface (4) side is narrower than that of the 3) side. Further, the pressure reduction tank (1) is connected to a pressure reduction pump (6) through a pressure reduction pipe (5).

そしてこの減圧槽(1)の内部には、平板状の洗浄台(7)を設けている。この洗浄台(7)は、駆動機構(図示せず。)により減圧槽(1)内の底部から上記段部(2)までの間を上下動に任意に摺動可能としている。そして、当該洗浄台(7)を上方に摺動させて上記減圧槽(1)の段部(2)の内周面(33)に当該洗浄台(7)の周縁(8)を当接密着させることにより、上記減圧槽(1)の天面(4)側と当該洗浄台(7)とにより、密閉された隔離室(10)を形成することができる。 A flat plate-shaped washing table (7) is provided inside the decompression tank (1). This washing stand (7) can be freely slid up and down between the bottom of the decompression tank (1) and the stepped part (2) by a drive mechanism (not shown). Then, slide the washing table (7) upward and bring the periphery (8) of the washing table (7) into close contact with the inner peripheral surface (33) of the step (2) of the decompression tank (1). By doing so, a sealed isolation chamber (10) can be formed by the top surface (4) side of the decompression tank (1) and the washing table (7).

また当該洗浄台(7)の底面には、当該洗浄台(7)を振動させるための振動機構(11)として、電動式のバイブレーターを接続配置している。尚、本実施例では電気式のバイブレーターを使用しているが、他の異なる実施例ではこれに限らず、エアー式のバイブレーター又は超音波振動子を使用することも可能である。また上記減圧槽(1)には、上記段部(2)から天面(4)にかけて加熱機構(12)を被覆配置するとともに、当該減圧槽(1)の底面(3)側には、被洗浄物(32)の液洗浄を行うための洗浄溶剤(30)を収納している。また当該減圧槽(1)の底面(3)側には、当該減圧槽(1)に収納された洗浄液(27)を冷却するための冷却機構(図示せず。)が設けられている。そして上記加熱機構(12)及び冷却機構は、それぞれ一定温度の加熱状態及び冷却状態を維持可能としている。 Furthermore, an electric vibrator is connected to the bottom of the washing table (7) as a vibration mechanism (11) for vibrating the washing table (7). Although an electric vibrator is used in this embodiment, the present invention is not limited to this, and an air vibrator or an ultrasonic vibrator may also be used in other different embodiments. In addition, a heating mechanism (12) is disposed covering the vacuum tank (1) from the stepped portion (2) to the top surface (4), and a heating mechanism (12) is provided on the bottom surface (3) side of the vacuum tank (1). Contains a cleaning solvent (30) for liquid cleaning of the cleaning object (32). Further, a cooling mechanism (not shown) for cooling the cleaning liquid (27) stored in the vacuum tank (1) is provided on the bottom (3) side of the vacuum tank (1). The heating mechanism (12) and the cooling mechanism are capable of maintaining a heating state and a cooling state at a constant temperature, respectively.

そしてこの減圧槽(1)とは別に、洗浄溶剤(30)の蒸気発生槽(13)を設けている。この蒸気発生槽(13)は、その底部側において上記減圧槽(1)の底部側と第一配管(14)を通じて連通可能としている。尚、当該第一配管(14)には第一開閉弁(15)を設けている。 Separately from this pressure reducing tank (1), a steam generating tank (13) for cleaning solvent (30) is provided. The bottom side of the steam generation tank (13) can communicate with the bottom side of the pressure reducing tank (1) through a first pipe (14). Note that the first pipe (14) is provided with a first on-off valve (15).

また当該蒸気発生槽(13)の天面(20)と上記減圧槽(1)の天面(4)側とを、以下に説明する第二配管(16)及び第三配管(17)を通じて連通可能としている。即ち上記第二配管(16)は、その一端を上記減圧槽(1)に接続するとともに、他端を、冷却器(18)を通じて上記減圧ポンプ(6)に接続している。そして上記第二配管(16)から分岐した第三配管(17)の一端を、上記蒸気発生槽(13)の天面(20)に接続している。 In addition, the top surface (20) of the steam generation tank (13) and the top surface (4) side of the decompression tank (1) are communicated through the second piping (16) and third piping (17) described below. It is possible. That is, the second pipe (16) has one end connected to the decompression tank (1), and the other end connected to the decompression pump (6) through the cooler (18). One end of a third pipe (17) branched from the second pipe (16) is connected to the top surface (20) of the steam generation tank (13).

また、上記第二配管(16)には、第三配管(17)の分岐点(24)よりも上記減圧槽(1)側に第二開閉弁(21)を、また当該分岐点(24)よりも減圧ポンプ(6)側に第三開閉弁(22)を設けるとともに、上記第三配管(17)には第四開閉弁(23)を設けている。また当該蒸気発生槽(13)の底面側には、当該蒸気発生槽(13)内に収納した洗浄溶剤(30)を加熱して当該洗浄溶剤(30)の洗浄蒸気(31)を発生させるための加熱体(25)を設けている。尚、当該第二配管(16)、上記減圧管(5)、及び減圧ポンプ(6)により本実施例の減圧機構(26)を構成している。 The second pipe (16) also has a second on-off valve (21) located closer to the pressure reducing tank (1) than the branch point (24) of the third pipe (17), and A third on-off valve (22) is provided closer to the pressure reducing pump (6), and a fourth on-off valve (23) is provided on the third pipe (17). Also, on the bottom side of the steam generation tank (13), there is a device for heating the cleaning solvent (30) stored in the steam generation tank (13) to generate cleaning vapor (31) of the cleaning solvent (30). A heating element (25) is provided. Note that the second pipe (16), the pressure reduction pipe (5), and the pressure reduction pump (6) constitute the pressure reduction mechanism (26) of this embodiment.

また、上記減圧槽(1)には図1に示す如く、窒素ガスを供給するための供給配管(34)を設けている。そして当該供給配管(34)は第一供給配管(35)と第二供給配管(36)とに分岐し、上記第一供給配管(35)を上記減圧槽(1)の天面(4)側に接続するとともに上記第二供給配管(36)を上記段部(2)の下方に接続している。そして、上記第一供給配管(35)に第五開閉弁(37)を設けるとともに、上記第二供給配管(36)に第六開閉弁(38)を設けている。また上記減圧管(5)には第七開閉弁(40)を設けている。 Further, as shown in FIG. 1, the decompression tank (1) is provided with a supply pipe (34) for supplying nitrogen gas. The supply pipe (34) branches into a first supply pipe (35) and a second supply pipe (36), and the first supply pipe (35) is connected to the top surface (4) of the decompression tank (1). At the same time, the second supply pipe (36) is connected to the lower part of the step part (2). A fifth on-off valve (37) is provided on the first supply pipe (35), and a sixth on-off valve (38) is provided on the second supply pipe (36). Further, the pressure reducing pipe (5) is provided with a seventh on-off valve (40).

上記の如く構成した減圧洗浄装置を用いて被洗浄物(32)の洗浄方法について以下に説明する。まず、当該減圧槽(1)に洗浄液(27)を収納する。尚、本実施例では沸点約170℃の炭化水素系溶剤を洗浄液(27)として使用している。また、上記減圧槽(1)内の洗浄液(27)と同じ洗浄溶剤(30)を、上記蒸気発生槽(13)内に収納するとともに、上記蒸気発生槽(13)の加熱体(25)を作動するさせることにより、当該蒸気発生槽(13)内の洗浄溶剤(30)を加熱して洗浄蒸気(31)を発生させておく。 A method of cleaning an object to be cleaned (32) using the vacuum cleaning apparatus configured as described above will be described below. First, the cleaning liquid (27) is stored in the vacuum tank (1). In this example, a hydrocarbon solvent with a boiling point of about 170° C. is used as the cleaning liquid (27). Also, a cleaning solvent (30) that is the same as the cleaning liquid (27) in the decompression tank (1) is stored in the steam generation tank (13), and the heating element (25) of the steam generation tank (13) is heated. By operating, the cleaning solvent (30) in the steam generation tank (13) is heated to generate cleaning steam (31).

そして、以下の液洗浄を行う。即ち、第一開閉弁(15)、第二開閉弁(21)、第五開閉弁(37)、第六開閉弁(38)を閉弁するとともに、第三開閉弁(22)、第四開閉弁(23)を開弁する。この状態で図1に示す如く、上記減圧槽(1)内の洗浄台(7)に被洗浄物(32)を載置するとともに、当該洗浄台(7)を減圧槽(1)の底面(3)側に移動させて上記の如く減圧槽(1)の冷却機構により冷却された洗浄液(27)中に浸漬することにより、被洗浄物(32)の浸漬洗浄を行う。 Then, perform the following liquid cleaning. That is, the first on-off valve (15), the second on-off valve (21), the fifth on-off valve (37), and the sixth on-off valve (38) are closed, and the third on-off valve (22) and the fourth on-off valve (22) are closed. Open valve (23). In this state, as shown in FIG. The object to be cleaned (32) is immersed in cleaning by moving it to the 3) side and immersing it in the cleaning liquid (27) cooled by the cooling mechanism of the reduced pressure tank (1) as described above.

またこの浸漬洗浄時には、上記の如く第三開閉弁(22)及び第四開閉弁(23)を開弁し、上記蒸気発生槽(13)内で発生させた洗浄蒸気(31)を、第三配管(17)及び分岐点(24)を通じて冷却器(18)によって冷却することにより、当該洗浄蒸気(31)の蒸留を行うことができる。 In addition, during this immersion cleaning, the third on-off valve (22) and the fourth on-off valve (23) are opened as described above, and the cleaning steam (31) generated in the steam generation tank (13) is transferred to the third on-off valve (22) and the fourth on-off valve (23). Distillation of the cleaning vapor (31) can be carried out by cooling it with a cooler (18) through the pipe (17) and the branch point (24).

そして、上記洗浄台(7)に設けた振動機構(11)を作動させて洗浄台(7)を振動させることにより、被洗浄物(32)から脱落してして洗浄台(7)上に堆積した汚れを、上記振動機構(11)の振動により更に当該洗浄台(7)から下方に落下させることが可能となる。 By activating the vibration mechanism (11) provided on the washing table (7) and vibrating the washing table (7), the object to be cleaned (32) falls off and lands on the washing table (7). The accumulated dirt can further fall downward from the washing table (7) by the vibration of the vibration mechanism (11).

次に、当該被洗浄物(32)の浸漬洗浄が終了した後、図2に示す如く上記洗浄台(7)を上記洗浄液(27)の液面(28)よりも上方に配置する。そして、上記第二開閉弁(21)、第四開閉弁(23)、第七開閉弁(40)を開弁するとともに第三開閉弁(22)を閉弁した状態で、減圧ポンプ(6)を作動させる。これにより、減圧管(5)及び第二配管(16)を通じて上記減圧槽(1)内を減圧状態とする。 Next, after the immersion cleaning of the object to be cleaned (32) is completed, the cleaning table (7) is placed above the liquid level (28) of the cleaning liquid (27) as shown in FIG. Then, with the second on-off valve (21), the fourth on-off valve (23), and the seventh on-off valve (40) opened and the third on-off valve (22) closed, the pressure reducing pump (6) is opened. Activate. As a result, the pressure inside the pressure reduction tank (1) is reduced through the pressure reduction pipe (5) and the second pipe (16).

このような状態において、蒸気発生槽(13)内にて発生させた洗浄溶剤(30)の洗浄蒸気(31)が、第三配管(17)及び第二配管(16)を通じて減圧槽(1)内に流入する。これにより、減圧槽(1)内に洗浄蒸気(31)が収納され、当該洗浄蒸気(31)によって被洗浄物(32)の蒸気洗浄が行われる。この蒸気洗浄時にも、上記浸漬洗浄時と同様に洗浄台(7)の振動機構(11)を作動させて洗浄台(7)を振動させることにより、上記洗浄により上記被洗浄物(32)から脱落した汚れを当該洗浄台(7)から下方に落とすことができるため、当該洗浄台(7)上の汚れの堆積を防ぐことが可能となる。 In such a state, the cleaning vapor (31) of the cleaning solvent (30) generated in the steam generation tank (13) flows through the third pipe (17) and the second pipe (16) to the vacuum tank (1). flow inside. As a result, the cleaning steam (31) is stored in the reduced pressure tank (1), and the object to be cleaned (32) is steam-cleaned by the cleaning steam (31). During this steam cleaning, the vibration mechanism (11) of the cleaning table (7) is activated to vibrate the cleaning table (7) in the same way as in the case of immersion cleaning. Since the fallen dirt can be dropped downward from the washing table (7), it is possible to prevent dirt from accumulating on the washing table (7).

そして蒸気洗浄の終了時には、第四開閉弁(23)を閉弁して蒸気発生槽(13)からの減圧槽(1)への洗浄蒸気(31)の供給を停止するとともに、上記洗浄台(7)を更に上方に摺動させて、上記減圧槽(1)の段部(2)の内周面(33)に当該洗浄台(7)の周縁(8)を当接密着させる。これにより、上記減圧槽(1)の天面(4)側と当該洗浄台(7)とにより密閉された隔離室(10)が形成されるとともに、図3に示す如く、当該隔離室(10)内に上記被洗浄物(32)が配置された状態となる。 At the end of steam cleaning, the fourth on-off valve (23) is closed to stop the supply of cleaning steam (31) from the steam generation tank (13) to the decompression tank (1), and the cleaning table ( 7) further upwards to bring the periphery (8) of the washing table (7) into close contact with the inner circumferential surface (33) of the stepped portion (2) of the decompression tank (1). As a result, a sealed isolation chamber (10) is formed by the top surface (4) of the decompression tank (1) and the cleaning table (7), and as shown in FIG. ) The object to be cleaned (32) is placed in the space.

上記の如く隔離室(10)を形成することにより、上記被洗浄物(32)を当該隔離室(10)の密閉された狭い空間内に配置することができる。また、上記の如く浸漬洗浄時及び/または蒸気洗浄時に洗浄台(7)の振動機構(11)を作動させて当該洗浄台(7)に堆積した汚れを除去していることから、当該洗浄台(7)に汚れがほとんど残留していない状態となる。 By forming the isolation chamber (10) as described above, the object to be cleaned (32) can be placed in a narrow, sealed space of the isolation chamber (10). In addition, as mentioned above, during immersion cleaning and/or steam cleaning, the vibration mechanism (11) of the cleaning table (7) is operated to remove dirt accumulated on the cleaning table (7). (7) Almost no dirt remains.

尚、被洗浄物(32)の汚れが少ない場合は、浸漬洗浄時に振動機構(11)による洗浄台(7)からの汚れの除去を行うのみで蒸気洗浄時には当該振動機構(11)による汚れの除去を行わなくても良いが、汚れが多い場合は浸漬洗浄時のみならず蒸気洗浄時においても振動機構(11)による洗浄台(7)からの汚れの除去を行った方が、より効果的である。 If the object to be cleaned (32) is not very dirty, only the vibration mechanism (11) is used to remove the stain from the washing table (7) during immersion cleaning, and the vibration mechanism (11) is used to remove the stain during steam cleaning. It is not necessary to remove the dirt, but if there is a lot of dirt, it is more effective to remove the dirt from the washing table (7) using the vibration mechanism (11) not only during immersion cleaning but also during steam cleaning. It is.

これにより、上記減圧槽(1)の段部(2)の内周面(33)と当該洗浄台(7)の周縁(8)とをより確実に密着させることが可能となるため、当該隔離室(10)をより密閉度の高いものとすることができることから、上記当該隔離室(10)の減圧のために余分なエネルギーを必要としない。また、第二開閉弁(21)と第三開閉弁(22)とを開弁するとともに、第七開閉弁(40)を閉弁した状態で減圧ポンプ(6)を作動させることにより、隔離室(10)内の減圧度を更に上げることが可能となる。更に、洗浄台(7)に汚れがほとんど残っていないため、当該汚れの部分まで乾燥が行われることがなく乾燥時間をより早く効率的に行うことができる。 This makes it possible to more reliably bring the inner peripheral surface (33) of the stepped portion (2) of the decompression tank (1) into close contact with the peripheral edge (8) of the washing table (7). Since the chamber (10) can be made more airtight, no extra energy is required to reduce the pressure in the isolation chamber (10). In addition, by opening the second on-off valve (21) and the third on-off valve (22) and operating the pressure reducing pump (6) with the seventh on-off valve (40) closed, (10) It becomes possible to further increase the degree of reduced pressure. Furthermore, since there is almost no dirt left on the washing stand (7), the dirty parts are not dried, making it possible to dry more quickly and efficiently.

また、図3に示す如く、上記隔離室(10)の外周には加熱機構(12)が被覆されているため、当該隔離室(10)は常時加熱された状態とすることができる。よって、当該隔離室(10)の内壁に洗浄蒸気(31)が接触しても、当該内壁にて洗浄蒸気(31)の凝縮液化が生じにくいものとなる。 Furthermore, as shown in FIG. 3, since the outer periphery of the isolation chamber (10) is covered with a heating mechanism (12), the isolation chamber (10) can be kept in a heated state at all times. Therefore, even if the cleaning steam (31) comes into contact with the inner wall of the isolation chamber (10), the cleaning steam (31) is unlikely to condense and liquefy on the inner wall.

よって、上記隔離室(10)の内壁に洗浄蒸気(31)の凝縮液が付着しないため、当該隔離室(10)内の被洗浄物(32)のみが乾燥対象となることから、乾燥時間をより短いものとすることができる。また、上記の如く沸点の高い洗浄溶剤(30)を減圧下の上記隔離室(10)内で乾燥するため、100℃付近の低い温度で安全に乾燥作業を行うことができる。 Therefore, since the condensate of the cleaning steam (31) does not adhere to the inner wall of the isolation chamber (10), only the object to be cleaned (32) in the isolation chamber (10) is to be dried, so the drying time is reduced. It can be made shorter. Further, since the cleaning solvent (30) having a high boiling point is dried in the isolated chamber (10) under reduced pressure as described above, the drying work can be safely performed at a low temperature of around 100°C.

そして、全ての洗浄工程が終了した後に、上記減圧槽(1)内の減圧状態を解除する。即ち、まず第六開閉弁(38)を開弁することにより、当該第六開閉弁(38)を通じて窒素ガスが上記減圧槽(1)内に流入し、当該減圧槽(1)内の隔離室(10)以外の空間の減圧状態が解除される。その後、上記第五開閉弁(37)を開弁することにより、当該上記第五開閉弁(37)を通じて上記隔離室(10)内に窒素ガスが流入し、当該隔離室(10)内の空間の減圧状態が解除される。これにより、上記減圧槽(1)全体の減圧状態が解除され、本実施例における洗浄の全ての工程が終了するものとなる。 After all the cleaning steps are completed, the reduced pressure state in the reduced pressure tank (1) is released. That is, by first opening the sixth on-off valve (38), nitrogen gas flows into the decompression tank (1) through the sixth on-off valve (38), and the isolation chamber in the decompression tank (1) is The reduced pressure state in spaces other than (10) is released. Thereafter, by opening the fifth on-off valve (37), nitrogen gas flows into the isolation chamber (10) through the fifth on-off valve (37), and the space inside the isolation chamber (10) is The reduced pressure state is released. As a result, the reduced pressure state of the entire reduced pressure tank (1) is released, and all cleaning steps in this embodiment are completed.

1 減圧槽
3 底面
4 天面
7 洗浄台
8 周縁
10 隔離室
11 振動機構
12 加熱機構
13 蒸気発生槽
26 減圧機構
27 洗浄液
28 液面
31 洗浄蒸気
32 被洗浄物
33 内周面

1 Decompression tank 3 Bottom surface 4 Top surface 7 Washing table 8 Periphery 10 Isolation chamber 11 Vibration mechanism 12 Heating mechanism 13 Steam generation tank 26 Decompression mechanism 27 Cleaning liquid 28 Liquid surface 31 Cleaning steam 32 Object to be cleaned 33 Inner peripheral surface

Claims (7)

減圧槽内に被洗浄物を載置可能な板状の洗浄台を設け、当該洗浄台を、駆動機構により減圧槽の内部で上下動に摺動可能とし、当該洗浄台の周縁を上記減圧槽の内周面に密着させることにより、当該減圧槽内の空間を天面側と底面側とに気密的に分離可能とし、上記減圧槽の天面側と上記洗浄台とで形成された隔離室内を、上記減圧槽に接続された減圧機構にて減圧可能とするとともに、上記洗浄台の底面側には、当該洗浄台を振動させるための振動機構を設けたことを特徴とする減圧洗浄装置。 A plate-shaped washing stand on which objects to be cleaned can be placed is provided in the reduced pressure tank, and the washing stand can be slid up and down inside the reduced pressure tank by a drive mechanism, and the periphery of the washing stand is connected to the reduced pressure tank. By closely contacting the inner peripheral surface of the decompression tank, the space inside the decompression tank can be airtightly separated into the top side and the bottom side, and the isolation chamber formed by the top side of the decompression tank and the washing stand A reduced-pressure cleaning device, characterized in that the pressure can be reduced by a pressure-reducing mechanism connected to the reduced-pressure tank, and a vibration mechanism for vibrating the washing stand is provided on the bottom side of the washing stand. 上記振動機構は、上記減圧槽内に収納した洗浄液中、あるは当該減圧槽内に発生させた洗浄蒸気中で作動可能とすることを特徴とする請求項1の減圧洗浄装置。 2. The reduced pressure cleaning apparatus according to claim 1, wherein the vibration mechanism is operable in a cleaning liquid stored in the reduced pressure tank or in cleaning steam generated in the reduced pressure tank. 上記減圧槽には洗浄液が貯留され、当該洗浄液にて被洗浄物の液洗浄を可能とし、上記洗浄台に載置された被洗浄物を上記洗浄液の液面よりも上方に配置した状態で、当該被洗浄物の蒸気洗浄を可能とするとともに、上記被洗浄物を上記隔離室内に配置することにより、当該被洗浄物の減圧乾燥を可能としたことを特徴とする請求項1の減圧洗浄装置。 A cleaning liquid is stored in the reduced pressure tank, and the cleaning liquid can be used to wash the object to be cleaned, and the object to be cleaned, which is placed on the washing table, is placed above the level of the cleaning liquid, 2. The vacuum cleaning apparatus according to claim 1, wherein the vacuum cleaning apparatus enables steam cleaning of the object to be cleaned, and also enables vacuum drying of the object by arranging the object to be cleaned in the isolation chamber. . 上記隔離室は、上記減圧槽に設けた加熱機構によって一定温度の加熱状態を維持可能とすることを特徴とする請求項1の減圧洗浄装置。 2. The vacuum cleaning apparatus according to claim 1, wherein the isolation chamber can maintain a heated state at a constant temperature by a heating mechanism provided in the vacuum tank. 上記減圧槽とは別体に、当該減圧槽に洗浄蒸気を送り込むための蒸気発生槽を設けるとともに、上記減圧槽の天面側には、当該減圧槽及び/または上記隔離室を減圧可能とする減圧機構を接続したことを特徴とする請求項1の減圧洗浄装置。 Separately from the pressure reduction tank, a steam generation tank is provided to send cleaning steam to the pressure reduction tank, and on the top side of the pressure reduction tank, the pressure reduction tank and/or the isolation room can be depressurized. 2. The reduced pressure cleaning device according to claim 1, further comprising a reduced pressure mechanism connected thereto. 上記洗浄液は、沸点が100℃以上の可燃性溶剤であることを特徴とする請求項1の減圧洗浄装置。 2. The vacuum cleaning apparatus according to claim 1, wherein the cleaning liquid is a flammable solvent having a boiling point of 100° C. or higher. 上記振動機構は、電気式若しくはエアー式のバイブレーター、又は超音波振動子であることを特徴とする請求項1の減圧洗浄装置。 2. The reduced pressure cleaning device according to claim 1, wherein the vibration mechanism is an electric or air vibrator, or an ultrasonic vibrator.
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JPH01284375A (en) * 1988-05-09 1989-11-15 Otsuka Giken Kogyo Kk Cfc liquid spraying type in-liquid cleaning device
JPH06254516A (en) * 1993-03-08 1994-09-13 Japan Field Kk Cleaning device
JPH07227581A (en) * 1993-04-07 1995-08-29 Marusan Shokai:Kk Vacuum-cleaning and drying method and device therefor
JPH08318233A (en) * 1995-05-23 1996-12-03 Sansha Electric Mfg Co Ltd Vacuum washing and drying apparatus
JPH09276809A (en) * 1996-04-15 1997-10-28 Japan Field Kk Washing apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01284375A (en) * 1988-05-09 1989-11-15 Otsuka Giken Kogyo Kk Cfc liquid spraying type in-liquid cleaning device
JPH06254516A (en) * 1993-03-08 1994-09-13 Japan Field Kk Cleaning device
JPH07227581A (en) * 1993-04-07 1995-08-29 Marusan Shokai:Kk Vacuum-cleaning and drying method and device therefor
JPH08318233A (en) * 1995-05-23 1996-12-03 Sansha Electric Mfg Co Ltd Vacuum washing and drying apparatus
JPH09276809A (en) * 1996-04-15 1997-10-28 Japan Field Kk Washing apparatus

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