JPH01284375A - Cfc liquid spraying type in-liquid cleaning device - Google Patents

Abstract

PURPOSE:To prevent the diffusion of a chlorofluorocarbon(CFC) liquid and to improve cleaning power by immersing a work into the CFC liquid in a cleaning tank and injecting the CFC liquid by injection nozzles to the cleaning part of the work. CONSTITUTION:A setting base 6 on which the work is set is lowered and the entire of the work is immersed into the CFC liquid R of the cleaning tank 3. The respective connecting ports on the rear surface of the setting base 6 and the respective liquid supply ports 21 in the bottom of the tank are connected. A pump for liquid injection is driven and the CFC liquid is supplied through a debris recovering tank to the supply ports 21 from which the liquid is supplied to respective liquid reservoirs. The CFC liquid is sprayed from the respective liquid injection nozzles disposed to the reservoir ports toward the cleaning part opposite to the respective cleaning parts of the work. The CFC liquid injected from the injection nozzles are concentrated without dispersing toward the cleaning part by this constitution, by which the CFC liquid is concentrated to the cleaning parts. The cleaning power is thus improved and the consumption of the CFC liquid is reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a submerged cleaning device of the fluorocarbon spray type used for cleaning workpieces such as semiconductors, electronic films, or die-cast parts.

(B) Conventional technology Conventionally, the above-mentioned fluorocarbon cleaning equipment for cleaning workpieces has been used to remove fluorocarbon chips, abrasives, etc. that have adhered to the inside of the workpiece or screw holes during the cutting process. The workpiece is supplied to the cleaning position in the center of the cleaning chamber where the steam is diffused.
There is a fluorocarbon liquid cleaning device that sprays fluorocarbon liquid toward the inside of a workpiece, a screw hole, etc. from a spray nozzle disposed on the side of the cleaning position, and uses a jet of this fluorocarbon liquid to remove chips and the like stuck to the workpiece.

(c) Problems to be Solved by the Invention However, since the above-mentioned fluorocarbon liquid cleaning device performs the cleaning process on the workpiece in the fluorocarbon vapor in the center of the cleaning chamber, a portion of the fluorocarbon liquid injected from the injection nozzle is The fluorocarbons diffuse into the cleaning chamber, making it difficult to spray the fluorocarbon solution concentrated on the cleaning portion of the workpiece, and the cleaning ability of the jet of fluorocarbon solution is reduced.

In addition, a large amount of fluorocarbon liquid must be used to prevent the reduction in cleaning performance due to diffusion, which results in large consumption and loss of fluorocarbon liquid during cleaning, resulting in an increase in costs. .

This invention has a unique configuration in which the workpiece is cleaned by spraying the workpiece in a fluorocarbon solution, thereby making it possible to reliably remove chips, abrasives, etc. that are firmly attached to the workpiece.
Furthermore, the present invention aims to provide a submerged cleaning device for spraying a fluorocarbon solution that can reduce consumption and loss of the fluorocarbon solution and perform cleaning processing efficiently.

(d) Means for Solving Problems The fluorocarbon liquid spraying type submerged cleaning device of the present invention is a fluorocarbon liquid spraying type cleaning device that sprays fluorocarbon liquid onto the cleaning portion of a workpiece for cleaning treatment. , comprising a cleaning tank storing a predetermined amount of fluorocarbon solution that allows the workpiece to be immersed, and a liquid injection nozzle that sprays the fluorocarbon solution toward the cleaning portion of the workpiece immersed in the fluorocarbon solution in the cleaning tank. It is the composition.

(E) Function This invention sprays a fluorocarbon liquid from a liquid injection nozzle toward cleaning parts such as holes and screw holes of the workpiece after immersing the workpiece in a fluorocarbon liquid stored in a cleaning tank. As a result, the fluorocarbon liquid penetrates into the microscopic gaps between the workpiece and chips, degreases the abrasives, etc. adhering to the fixed surface, and makes it easy to separate them from each other. J! Impact and vibration are applied to the chips, etc. to separate them and remove them, and the undistributed chips, etc. are polished out of the workpiece along the jet of fluorocarbon liquid.

(F) Effects of the Invention According to this invention, since the fluorocarbon liquid is sprayed onto the workpiece in the fluorocarbon liquid stored in the cleaning tank, the fluorocarbon liquid sprayed from the injection nozzle does not spread, preventing holes and screws in the workpiece. Since the jet of fluorocarbon liquid concentrates on the parts to be cleaned such as holes, consumption and loss of fluorocarbon liquid during cleaning are extremely small, and the jet of fluorocarbon liquid does not hit the parts to be cleaned such as holes, etc. Due to the impact and vibration caused by this, it is possible to reliably separate and remove chips that are not firmly attached and easily peeled off particles remaining in screw holes, improving cleaning ability and ensuring efficient cleaning. Can be processed.

(g) Examples of the invention An embodiment of the present invention will be described in detail below based on the drawings.

The drawing shows a submerged cleaning device 1 that sprays fluorocarbon liquid, and in Fig. 1, this submerged cleaning device 1 that sprays fluorocarbon liquid has its upper surface opened into the inside of a cleaning chamber 2 that is maintained in an airtight state. A predetermined amount of fluorocarbon liquid R (R113) is stored in this cleaning tank 3 as a cleaning liquid, and a workpiece 4 is set on a setting table 6 of a workpiece supply device 5, and the cleaning tank 3 is equipped with a cleaning tank 3.
The workpiece 4 is immersed in the Freon liquid R of
Cleaning treatment is performed by spraying Freon solution R onto the cleaning i1 portion.

In the above-mentioned work supply device 5, the slider 8 is slidably engaged with each of two guide shafts 7.7 vertically arranged along the inner wall surface of the cleaning tank 3.

The slider 8 described above has an elevating chain 10 installed between each sprocket 9 and 9 which are pivotally supported on the ceiling of the cleaning chamber 2 and the wall below the liquid level of the cleaning tank 3, and one end of the elevating chain 10 is A drive chain 14 is connected between a sprocket 11 fixed to the slider 8 and coaxially with the sprocket 9 on the ceiling, and a sprocket 13 of a drive motor 12 (with 3 motors) fixed to the side. The set table 6 fixed to the slider 8 can be moved by rotating the lifting chain 10 in the forward and reverse directions using the driving force of the drive motor 12.
It moves up and down to a workpiece cleaning position where it is immersed in the fluorocarbon solution R in the cleaning tank 3, and to a workpiece set position above the cleaning tank 3.

A cover body 15 is attached to the upper part of the slider 8 mentioned above, and each guide shaft 7,
The lid body 15 is slidably engaged on the top of the cleaning tank 3, and the lid body 15 is operated by an air cylinder 16 installed above the cleaning tank 3 to perform the cleaning H! The slider 8 moves up and down to a lower limit sealed position that fits into the 1m0 section of the upper surface of the slider 8, and an upper limit open position that allows the slider 8 to move up and down.

The aforementioned set table 6 is fixed on a table 17 that is pivotally supported at the lower front side of the slider 8, and is held horizontally by a vibrating air cylinder 18 that is pivotally attached to the upper end of the table 17.

As shown in FIGS. 2 and 3, on the above-mentioned setting table 6, the workpiece 4 (indicated by the imaginary line in the figure) is placed in a fixed position on two sides, and the workpiece 4 is placed in a fixed position on each side. Each liquid injection nozzle 20 is disposed in each liquid reservoir 19 fixed on the set table 6 so as to face each surface of the workpiece 4.

The liquid jet nozzles 20 are arranged corresponding to the positions and numbers of cleaning parts such as holes and screw holes 4a opened on each surface of the workpiece 4, and are arranged in accordance with the positions and numbers of cleaning parts such as holes and screw holes 4a opened on each surface of the workpiece 4, and as shown in FIG. As shown in A,
The nozzle tip is placed close to each cleaning portion at a predetermined interval, and the spray direction is set toward the center of each cleaning portion.

By lowering the set table 6 to the workpiece cleaning position of the cleaning tank 3, each of the above-mentioned liquid injection nozzles 20... is connected to each liquid supply boat 21 installed at the bottom of the tank and the lower surface of the set table 6. Each connection boat 22, which is opened in communication with each liquid reservoir 19, is fitted and connected.

A distillation tank 24 with a heater 23 installed at the bottom of the tank is installed at the back of the cleaning tank 3 described above. is supplied to a steam tank 26 formed by the fluorocarbon liquid R stored in the cleaning tank 3 and a cooling jacket 25 disposed on the peripheral wall above the fluorocarbon liquid R.

As shown in FIG. 4, the above-mentioned cleaning tank 3fF1 section is provided with a chip collection tank 27 for collecting chips, etc.
The bottoms of the chip collection tank 27 and the cleaning tank 3 are connected to the chip collection path 2.
8, and a plurality of rows of chip collection nozzles 29 are arranged at the bottom of the chip collection path 28 and the cleaning tank 3 toward the chip collection tank 27 side.

The above-mentioned chip collection WI27 houses a cylindrical filter 30 inside the tank, and a cooling jacket 31 is arranged on the peripheral wall above the fluorocarbon liquid R stored in the chip collection 4!27. A tube body 32 is fitted into the opening on the upper surface of the tank to seal it.

The fluorocarbon iR stored in this chip collection tank 27 is collected by connecting a circulation path 34 connected to the chamber side via a valve 33 to the suction side of a liquid injection pump 35.
A filter 37 is connected to the discharge side of the filter 37 via a valve 36, and a circulation path 39 connected to the filter 37 via a valve 38 is connected to each valve 41, 42, 43, etc. of the injection switching unit 40. The above-mentioned liquid supply boats 21 are respectively connected to each other via the above-mentioned liquid supply boats 21.

On the other hand, the circulation path 45 connected to the tank side via the valve 44 is connected to the suction side of a circulation pump 46, and the circulating fluorocarbon liquid R is supplied to the discharge side of the circulation pump 46 at a rate of 20%.
A heat exchanger 48 is connected via a valve 47 to maintain the temperature below 10°C, preferably 10 to 15°C, and a circulation path 49 connected to this heat exchanger 48 is branched into a plurality of lines to maintain the temperature at 10 to 15°C. They are connected to the chip collection nozzles 29, respectively.

In the upper part of the above-mentioned distillation tank 24, for example, 12% of fluorocarbon vapor is added.
A cooling coil 50 for cooling to ~0° C. is disposed on the side of the cooling jacket 25 described above.

Each cooling jacket 25, 31 and cooling coil 50 described above
is composed of an evaporator 52 of a refrigerator 51, which will be described later, but a chiller (chilled water generator) may be used instead of the refrigerator 51 as long as the coil surface temperature is maintained at approximately 12 to 0°C. good.

This refrigerator 51 uses Freon R-11 and R-12 for cold tofu.
Using R-22 etc., this refrigerator 51 has a pressure of '1m tR5
A condenser 54, a liquid receiver 55, and a liquid solenoid valve 5 are installed on the discharge side of 3.
6 and the aforementioned evaporator 52 are connected through an expansion valve 57 as an expansion R mechanism, and the rear part of the evaporator 52 is connected to the suction side of a compressor 53 through an accumulator 58. .

The fluorocarbon liquid R cooled by the cooling coil 50 mentioned above is dripped into a dripping tank 59 at the bottom of the coil, and a circulation path 61 is connected to the bottom of this dripping tank 59 via a valve 60, and this circulation path 61 is used for water separation. It is connected to the tank 62.

In the fluorocarbon liquid R supplied to the water separation Wt62, water having a specific gravity lower than that of the fluorocarbon liquid R floats to the top of the tank and is periodically discharged from the drain passage 64 connected to the side of the tank via a valve 63. The fluorocarbon liquid R accumulated at the bottom of the tank overflows and is temporarily stored in the fiIff 165, and then a part of the fluorocarbon liquid R is returned to the cleaning tank 3 via the circulation path 66 connected to the side of the tank. The fluorocarbon liquid R in the cleaning tank 3 overflows and is supplied to the distillation tank 24.

In addition, a part of the liquid R in the air tank 17 is preliminarily pumped through a circulation path 68 connected to the bottom of the II tank 65 via a valve 67.
A circulation path 71 is connected to the discharge side of the circulation pump 69 via a valve 70, and this circulation path 71 is connected to the steam cleaning position of the steam tank 26 via a valve 72. It is connected to each finishing cleaning nozzle 73 . . . provided therein.

The operation of the illustrated embodiment will be described below assuming that it is constructed as described above.

First, the workpiece 4 is set on the setting table 6 that is stopped at the workpiece setting position above the cleaning tank 3, and then the workpiece feeding device 5 is driven to lower the setting table 6, and the fluorocarbon liquid R in the cleaning tank 3 is removed.
The entire workpiece 4 is immersed in the tank, and at the same time each connection boat 22 on the top of the set table 6 and each liquid supply boat 21 on the bottom of the tank are immersed.
...and connect by fitting.

Next, the liquid injection bonder 35 is driven to suck out the fluorocarbon from the chip collection tank 27. &R is supplied to each liquid supply boat 21 .

The fluorocarbon liquid R supplied to each of the liquid reservoirs 19... is jetted from each liquid injection nozzle 20... arranged opposite to each cleaning portion of the workpiece 4, and It is sprayed towards each cleaning area of 4.

That is, as shown in FIG. 5A, for example, by spraying the fluorocarbon liquid R toward the screw hole 4a of the workpiece 4, the fluorocarbon liquid R with a small surface tension will interact with the screw hole 4a of the workpiece 4 and chips, etc. Fluorocarbon liquid R penetrates into the ultra-fine gaps and removes abrasives etc. attached to the fixed surface, making it easy to separate from each other.
Since the impact and vibration caused by the jet of the fluorocarbon liquid R are applied to the chips by using the specific gravity of the fluorocarbon liquid R, even the chips and the like that are firmly stuck can be easily separated and removed.

In addition, easily peelable debris remaining in the screw hole 4a is separated and removed by the jet of fluorocarbon liquid R, and as shown in the figure, the separated and removed chips, debris, etc. are carried along the jet of fluorocarbon liquid R. It is discharged from the outside of the screw hole 4a.

Next, by the switching operation of the injection switching unit 40, the Freon liquid R is sequentially switched and supplied to each liquid injection nozzle 20 at a position corresponding to each surface of the workpiece 4 to clean each blood line of the workpiece 4. Perform processing.

Note that even if the screw hole 4a of the workpiece 4 and the injection position of the liquid injection nozzle 20 are slightly misaligned as shown in C,
If the fluorocarbon liquid R is sprayed toward the inside of the screw hole 4a, the fluorocarbon liquid R is injected from the liquid injection nozzle 20.
The jet flow can flow through the screw hole 4a in one direction to separate and remove stuck chips and the like.

After the cleaning process in the liquid, the workpiece feeding device 5 is driven to raise the setting table 6, and the workpiece 4 set on the setting table 6 is passed through the fluorocarbon vapor supplied to the steam tank 26 to be steamed. Along with cleaning, finish cleaning nozzle 73.73
A jet of the fluorocarbon liquid R is sprayed to wash away chips and the like adhering to the outer surface of the workpiece 4.

Next, after stopping the setting table 6 at the work setting position above the cleaning tank 3, the vibration air cylinder 18 is driven to
is vibrated to shake off the fluorocarbon solution R adhering to the workpiece 4 and the setting table 6 onto the cleaning willow 3, and the workpiece 4 is supplied to the next process.

Since the workpiece 4 is cleaned in the fluorocarbon liquid R in this way, the fluorocarbon liquid R sprayed from each liquid injection nozzle 20 does not spread and is not applied to the cleaning parts such as the screw holes 4a of the workpiece 4. The jet stream of Freon liquid R concentrates on it, and the Freon liquid R disappears during cleaning: f! The amount and loss are extremely small.
Furthermore, the fluorocarbon liquid R
The impact and vibration caused by the jet flow can reliably separate and remove firmly adhered chips and debris remaining in the screw holes, resulting in efficient cleaning.

Note that the present invention is not limited to the configuration of the above-described embodiment.

For example, while temporarily stopping or moving the workpiece 4 to be cleaned, the fluorocarbon liquid R is sequentially sprayed to the workpiece cleaning position opposite to the injection position of the liquid injection nozzle 20 disposed in the fluorocarbon liquid R in the cleaning tank 3, and the cleaning process is performed. You may also do this.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention. Fig. 1 is a longitudinal cross-sectional side view of a submerged cleaning device for spraying fluorocarbon liquid, Fig. 2 is a system diagram of the submerged cleaning device, and Fig. 3 is an enlarged plan view of the set table. FIG. 4 is a longitudinal sectional side view of the setting table shown in FIG. 3, and FIG. R... Freon liquid 1... Submerged cleaning device 2...
Cleaning room 3...Cleaning tank 4...Work
4a...Screw hole 5...Work supply device 6...Scent stand 20...Liquid injection nozzle 21...Liquid supply port 2
2...Connection boat R/Freon liquid 1st doctor 1
・Liquid Sokori Kirito Keto 2...Seikiriki 2b White n αtoq (DU-(N へ(ト)(へ)

Claims (1)

[Claims] (1) A fluorocarbon spray type cleaning device that sprays a fluorocarbon solution onto the cleaning portion of a workpiece for cleaning, comprising: a cleaning tank storing a predetermined amount of fluorocarbon solution in which the workpiece can be immersed; and the cleaning device. A fluorocarbon liquid spray type submerged cleaning device equipped with a liquid injection nozzle that sprays fluorocarbon liquid toward a cleaning part of a workpiece immersed in a fluorocarbon liquid in a tank.