JP2023152629A5 - - Google Patents
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- Publication number
- JP2023152629A5 JP2023152629A5 JP2022180830A JP2022180830A JP2023152629A5 JP 2023152629 A5 JP2023152629 A5 JP 2023152629A5 JP 2022180830 A JP2022180830 A JP 2022180830A JP 2022180830 A JP2022180830 A JP 2022180830A JP 2023152629 A5 JP2023152629 A5 JP 2023152629A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- carbon atoms
- propynyl
- propenyl
- butyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000004432 carbon atom Chemical group C* 0.000 description 7
- 125000006017 1-propenyl group Chemical group 0.000 description 2
- 125000000530 1-propynyl group Chemical group [H]C([H])([H])C#C* 0.000 description 2
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 2
- 125000001494 2-propynyl group Chemical group [H]C#CC([H])([H])* 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 125000000304 alkynyl group Chemical group 0.000 description 2
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 2
- 125000000480 butynyl group Chemical group [*]C#CC([H])([H])C([H])([H])[H] 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 125000006038 hexenyl group Chemical group 0.000 description 2
- 125000005980 hexynyl group Chemical group 0.000 description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 description 2
- 125000002255 pentenyl group Chemical group C(=CCCC)* 0.000 description 2
- 125000005981 pentynyl group Chemical group 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18/126,158 US20230314944A1 (en) | 2022-03-30 | 2023-03-24 | Positive resist composition and pattern forming process |
| TW112111417A TWI823806B (zh) | 2022-03-30 | 2023-03-27 | 正型阻劑材料及圖案形成方法 |
| KR1020230039669A KR20230141545A (ko) | 2022-03-30 | 2023-03-27 | 포지티브형 레지스트 재료 및 패턴 형성 방법 |
| CN202310311665.3A CN116893576A (zh) | 2022-03-30 | 2023-03-28 | 正型抗蚀剂材料及图案形成方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022056309 | 2022-03-30 | ||
| JP2022056309 | 2022-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023152629A JP2023152629A (ja) | 2023-10-17 |
| JP2023152629A5 true JP2023152629A5 (ko) | 2024-01-25 |
Family
ID=88349419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022180830A Pending JP2023152629A (ja) | 2022-03-30 | 2022-11-11 | ポジ型レジスト材料及びパターン形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023152629A (ko) |
-
2022
- 2022-11-11 JP JP2022180830A patent/JP2023152629A/ja active Pending
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