JP2023150384A - Black spot plate for ophthalmologic apparatus and manufacturing method thereof, and ophthalmologic apparatus - Google Patents

Abstract

To provide a black spot plate for ophthalmologic apparatus manufactured by a further simple method and capable of suppressing reflection at an interface between a substrate or another coating layer and the black point plate, and ophthalmologic apparatus using the black spot plate for preventing occurrence of ghost.SOLUTION: A black spot plate for ophthalmologic apparatus comprising a substrate layer, an antireflection layer composed of at least one layer provided on the substrate layer, and a light shielding layer provided as a small black spot on the antireflection layer, includes a first refractive index matching layer formed of a dielectric layer for preventing reflection of incident light from the antireflection layer, provided between the antireflection layer and the light shielding layer, and a second refractive index matching layer formed of a dielectric layer for preventing reflection of incident light from air, provided on the light shielding layer.SELECTED DRAWING: Figure 6

Description

The present invention relates to a sunspot plate for an ophthalmological apparatus used in an ophthalmological apparatus used for observing and photographing an eye to be examined, and an ophthalmological apparatus using the same.

An ophthalmological apparatus such as a fundus camera includes an illumination system that projects illumination light from an illumination light source onto the eye to be examined via an objective lens, and an observation means that reflects light of the illumination light from the eye to be examined through the objective lens and a photographic diaphragm. and an observation system and a photographing system that guide the camera to the photographing means.

In such ophthalmological equipment, the reflected light from the surface of the objective lens facing the subject's eye enters the observation and imaging systems as harmful light, causing flare and ghosting, making it impossible to clearly observe and photograph the fundus. .

Conventionally, various techniques have been developed to remove such harmful light. For example, Patent Document 1 discloses an ophthalmologic apparatus that is provided with a sunspot board in which a black paint layer is formed as small sunspots between a plurality of laminated substrates that can transmit light. According to this black spot board, the black spots overlap near the center when viewed from the optical axis direction of the illumination light source, and the illumination light in this area is blocked. This makes it possible to prevent ghosts and the like from occurring near the center of the objective lens.

Patent No. 3576645

However, in conventional methods for manufacturing sunspot plates, chemical means such as etching and physical means such as grinding have been used to form minute holes on the substrate to be filled with the black paint for the sunspots.

Formation of micropores by such means has the following problems. First, there are design constraints associated with the chemical and physical means described above, making it difficult to make the depth uniform throughout the micropores. Particularly with chemical means, if you try to make the micropores deeper than a certain level, you will need to melt for a long time, and as a result of the long dissolution, the bottom of the micropores may become uneven and cannot be made uniform. Ta. In addition, when manufacturing a plurality of sunspot plates, there were variations in the formation of micropores, resulting in poor reproducibility. Furthermore, it took time to measure the depth after forming the micropores. Furthermore, since the black paint is directly filled into the micropores of the substrate, the incident light from the substrate side may be reflected at the interface between the substrate and the black paint layer, depending on the difference in refractive index between the two.

Therefore, the present invention provides a sunspot plate that prevents the occurrence of flare and ghosts, which can be manufactured by a simpler method, and which suppresses reflection at the interface between the board and other coating layers. An object of the present invention is to provide a sunspot board for an ophthalmological device and an ophthalmological device using the same.

In order to achieve this object, the invention according to claim 1 provides a substrate layer, an antireflection layer formed of at least one layer provided on the substrate layer, and a small black dot provided on the antireflection layer. A sunspot plate for an ophthalmological device has a light-shielding layer, and a first refractive layer comprising a dielectric layer that prevents reflection of incident light from the anti-reflection layer is provided between the anti-reflection layer and the light-shielding layer. A second refractive index matching layer is provided on the light shielding layer, and the second refractive index matching layer is made of a dielectric layer that prevents reflection of incident light from the air.

The invention according to claim 2 provides an anti-reflection device comprising: a substrate layer; a light-shielding layer provided as small dots on the substrate layer; and at least one layer provided on the substrate layer covering the light-shielding layer. A sunspot plate for an ophthalmological device having a first refractive index matching layer between the substrate layer and the light shielding layer, the first refractive index matching layer being a dielectric layer that prevents reflection of incident light from the substrate layer. and a second refractive index matching layer made of a dielectric layer that prevents reflection of incident light from the antireflection layer is provided between the light shielding layer and the antireflection layer. .

The invention according to claim 3 provides a substrate layer, a light-shielding layer provided as a small dot on the substrate layer, an adhesive layer provided on the substrate layer covering the light-shielding layer, and the adhesive. A sunspot plate for an ophthalmological device has a substrate layer provided on the substrate layer, and a dielectric material between the substrate layer and the light shielding layer that prevents reflection of incident light from the substrate layer. A first refractive index matching layer is provided between the light shielding layer and the adhesive layer, and a second refractive index matching layer is provided between the light shielding layer and the adhesive layer, and the second refractive index matching layer is a dielectric layer that prevents reflection of incident light from the adhesive layer. It is characterized by having a layer.

The invention according to claim 4 is the invention according to any one of claims 1 to 3, wherein a thin metal layer formed of the same material as the light shielding layer is provided in the at least one refractive index matching layer. It is characterized by:

The invention according to claim 5 is a method for manufacturing the sunspot plate for an ophthalmological device according to claim 1, which comprises forming the antireflection layer on the substrate layer, and forming a desired pattern on the antireflection layer. After forming a masking layer comprising: forming a dielectric layer constituting the first refractive index matching layer, a dielectric layer constituting the light shielding layer, and a dielectric layer constituting the second refractive index matching layer, and removing the masking layer. It is characterized by

The invention according to claim 6 is a method for manufacturing a sunspot plate for an ophthalmological device according to claim 2, in which, after forming a masking layer having a desired pattern on the substrate layer, the first refractive index matching is performed. A dielectric layer constituting the layers, the light shielding layer, and the second refractive index matching layer are formed, the masking layer is removed, and the first refractive index matching layer, the light shielding layer, and the second refractive index matching layer are formed. The antireflection layer is formed on the substrate layer so as to cover the two refractive index matching layer.

The invention according to claim 7 is a method for manufacturing a sunspot plate for an ophthalmological device according to claim 3, in which, after forming a masking layer having a desired pattern on the substrate layer, the first refractive index matching is performed. A dielectric layer constituting the layers, the light shielding layer, and the second refractive index matching layer are formed, the masking layer is removed, and the first refractive index matching layer, the light shielding layer, and the second refractive index matching layer are formed. The adhesive layer is formed on the substrate layer so as to cover the two refractive index matching layer, and the other substrate layer is bonded onto the adhesive layer.

The invention according to claim 8 is the invention according to any one of claims 5 to 7, when forming the first refractive index matching layer and/or the second refractive index matching layer, at least one metal thin layer is formed. A layer is formed in the dielectric layer.

The invention according to claim 9 is the invention according to any one of claims 5 to 7, which includes forming the masking layer having the desired pattern, forming the refractive index matching layer and the light shielding layer, and then forming the masking layer having the desired pattern. Instead of removing the masking layer, the method is characterized in that the refractive index matching layer and the light shielding layer are formed on the entire surface and then unnecessary portions are removed to form a desired pattern.

The invention according to claim 10 provides an illumination system that projects illumination light from an illumination light source onto the eye to be examined through a hole mirror to illuminate the eye to be examined, and a photographing aperture provided in an optical path for photographing the eye to be examined. an ophthalmological apparatus comprising an imaging system having a lens, wherein the illumination system and the imaging system have a common objective lens disposed between the eye to be examined and the hole mirror; It has a sunspot plate for an ophthalmological device according to any one of items 1 to 4, and when the lens surface of the objective lens is considered as a reflective surface, a position where an image of the aperture of the photographic diaphragm is formed and the light shielding layer. is provided conjugately through the reflective surface, so that the image of the aperture of the photographing diaphragm is covered by the light shielding layer.

According to the present invention, when forming a light-shielding layer corresponding to the small sunspots of the prior art, the light-shielding layer is formed in a desired pattern using masking technology, instead of providing micropores in the substrate or antireflection layer. Therefore, there are no design constraints on dimensions such as the width and thickness of the light-shielding layer, and the thickness is uniform over the entire surface, ensuring high reproducibility even when manufactured multiple times, and there is no need to measure dimensions after manufacturing. . Further, since the light shielding layer is formed on the substrate layer and the antireflection layer via the first refractive index matching layer, reflection of incident light from the substrate side between the substrate and the light shielding layer is suppressed. Since the second refractive index matching layer is formed on the side of the light shielding layer opposite to the substrate layer, that is, between the antireflection layer, the adhesive layer, and the air, reflection of incident light from this side is also suppressed. Ru.

FIG. 1 is a schematic diagram of a conventional ophthalmological device without a sunspot plate. This is a photographic image showing a central ghost. FIG. 1 is a schematic diagram of a conventional ophthalmological device having a sunspot plate. This is a photographic image showing a sunspot shadow caused by inserting a sunspot board. FIG. 2 is a schematic cross-sectional view of a conventional sunspot board. FIG. 1 is a schematic cross-sectional view of a sunspot plate according to a first embodiment of the present invention. FIG. 3 is a schematic cross-sectional view of a sunspot plate according to a second embodiment of the present invention. FIG. 7 is a schematic cross-sectional view of a sunspot plate according to a third embodiment of the present invention. It is a graph showing transmittance, front surface reflectance, and back surface reflectance of a black spot plate in an example.

Hereinafter, the present invention will be explained in detail with reference to the drawings.
FIG. 1 schematically shows an optical system of an ophthalmological apparatus 100, such as a fundus camera, which is the object of the present invention. First, the illumination optical system of the ophthalmologic apparatus 100 includes, from the upstream side, an illumination light source 101 for observation, a lens 102, a hole mirror 103 having a hole (aperture) 103a, and an objective lens 104. Reference numeral 200 is the eye to be examined. As shown by the thin line A, the light emitted from the illumination light source 101 passes through the lens 102, is reflected by the hole mirror 103, passes through the objective lens 104, and is irradiated onto the retina of the eye to be examined.

Next, the observation/photographing optical system includes a sensor 106, a lens 105, a hole mirror 103, an objective lens 104, and an eye to be examined 200. The light irradiated onto the retina of the eye to be examined 200 from the illumination light source 101 passes through the objective lens 104, through the hole 103a of the hole mirror 103, through the lens 105, and is received by the sensor 106. The data is then provided to an observation means (not shown) as fundus image data.

Here, on the surface 104a of the objective lens 104, reflected light is generated at the interface, reaches the sensor 106 along the path shown by the thick line C, and is observed as a ghost as shown in FIG. The black spot plate of the present invention is used to prevent this.

Next, FIG. 3 shows a schematic diagram in which a sunspot plate is inserted into the ophthalmological apparatus 100 of FIG. 1. In the illumination optical system, a black spot plate 107 is inserted between the illumination light source 101 and the lens 102. Light from the illumination light source 101 is emitted as shown by the thin line A, but the sunspot plate 107 forms a shadow and the illumination light near the center of the optical axis is blocked as shown by the thick line _C2 . Thereafter, the illumination light is reflected by the hole mirror 103 and blocks the vicinity of the center of the objective lens surface 104a as shown by _C2 . This prevents reflected light from occurring on the objective lens surface 104a, and no ghost is detected by the sensor 106. Note that depending on the size of the sunspot, or the shielding area becomes large, which may affect the observation/photographing system, another problem arises in that a sunspot shadow appears on the fundus image as shown in FIG. 4.

FIG. 5 shows a schematic cross-sectional view of the sunspot plate according to the prior art described above. (a) is a plan view, and (b) is a side sectional view. The conventional sunspot board 10 includes a substrate layer 11 made of glass or the like, a light shielding layer 12 formed by filling black paint into micropores provided on the substrate layer 11, and an antireflection layer formed thereon. 13. As mentioned above, in the conventional sunspot plate 10, the micropores are chemically or physically formed in the substrate layer, so there are design constraints, and it is difficult to make the depth of the micropores uniform over the entire area. The reproducibility was poor when manufacturing a plurality of sunspot plates, and it also took time to measure the depth after forming the micropores. Furthermore, since the black paint is directly filled into the micropores, incident light from the substrate side may be reflected at the interface between the substrate and the black paint layer, depending on the difference in refractive index between the two.

The present invention solves these problems and will be described in detail below with reference to the drawings.
<First embodiment>
FIG. 6(a) is a schematic cross-sectional view of the sunspot plate 20 according to the first embodiment of the present invention. The sunspot plate 20 has a substrate layer 21 made of a transparent material such as glass, and an antireflection layer 22 is provided on the surface thereof. The antireflection layer 22 is selected to have a refractive index that prevents reflection between the substrate layer 21 and air. A sunspot layer 23 is provided on the surface of the antireflection layer 22 . The above is the basic configuration of the first embodiment. Note that although the sunspot layer 23 forms a convex portion in FIG. 6(a), this is an exaggerated vertical length of the sunspot layer 23, and the actual sunspot layer 23 has a thickness of nm A thin layer of order.

When the sunspot plate of the first embodiment is enlarged in detail, as shown in FIG. It has a first refractive index matching layer 25 made of a dielectric layer 25a. Furthermore, the sunspot layer 23 has a second refractive index matching layer 26 formed of a dielectric layer 26a between the light shielding layer 24 and the surrounding atmosphere (air).

The first refractive index matching layer 25 matches the refractive index of the anti-reflection layer 22 and the refractive index of the light-shielding layer 24 so that incident light from below the drawing is not reflected at the interface between the anti-reflection layer 22 and the light-shielding layer 24. The refractive index is selected accordingly. Similarly, the second refractive index matching layer 26 takes into account the refractive index of the air and the refractive index of the light shielding layer 24 so that the incident light from above the drawing is not reflected at the interface between the air and the light shielding layer 24. and its refractive index is selected.

The thickness of each layer in the sunspot layer 23 will be described. The light shielding layer 24 needs to be opaque to light, and may have a thickness sufficient to block light. Usually, the film is formed to have a thickness of 100 nm or more. The first refractive index matching layer 25 and the second refractive index matching layer 26 may be composed of a single layer of dielectric layers 25a and 26a as in this embodiment, or may be composed of multiple layers as in a modification example described later. The film is formed in the range of 85 to 500 nm.

The material of the light shielding layer 24 is preferably metal, and particularly preferably Cr, Ni, Ti, Fe, Si, Ta, Nb, Zr, Mo, W, etc. The materials of the dielectric layers 25a and 26a constituting the first refractive index matching layer 25 and the second refractive index matching layer 26 are _{SiO2 , NbO2} , _Y2O3 , _Al2O3 , _{TiO2 , Ta2O} . ₅ , ZrO ₂ , HfO ₂ and other oxide types, and MgF ₂ and other fluoride types are preferable. In FIG. 6(b), the dielectric layers 25a and 26a are each shown as a single layer, but two or more types of these compounds are selected and two or more layers are laminated to form the first refractive index matching layer 25 and the first refractive index matching layer 25. A two-refractive index matching layer 26 may be configured.

The method for manufacturing the sunspot plate 20a is as follows. That is, an antireflection layer 22 is formed on a transparent substrate layer 21 made of glass or the like by a known method. Next, a mask (not shown) in which a desired pattern is formed is formed on the anti-reflection layer 22 by a known masking method such as mask film formation (film formation by covering with a mask with holes), lift-off film formation, etc. Deposit a layer.

This masking layer is coated with a known film forming method such as vapor deposition or sputtering using the material of one or more dielectric layers 25a constituting the first refractive index matching layer 25 to form a desired pattern of the masking layer. A first refractive index matching layer 25 is formed to a desired thickness. Subsequently, film formation is performed in the same manner using the material of the light shielding layer 24 and the material of one or more dielectric layers 26a constituting the second refractive index matching layer 26. Finally, the masking layer is removed. In the manner described above, the black spot plate 20a of the first embodiment shown in FIG. 6(b) is obtained.

Alternatively, it is also possible to use photolithography instead of masking technology. That is, the first refractive index matching layer 25, the material of the light shielding layer 24, and the second refractive index matching layer 26 are formed on the entire surface of the antireflection layer 22 to a desired thickness. Next, patterning and etching are performed using photolithography or the like to remove unnecessary portions.

According to the method for manufacturing a sunspot plate of the present invention, since the film is formed on a smooth surface without drilling, a uniform thickness can be obtained over the entire surface, and the thickness can be controlled on the nanometer order. Furthermore, the reproducibility is high even when manufacturing a plurality of sunspot plates.

<First embodiment, modification example 1>
FIG. 6(c) shows a modification of the first embodiment. In the sunspot plate 20b of this modification, a metal thin film made of the same material (metal) as the material constituting the light shielding layer 24 is included in the first refractive index matching layer 25 and the second refractive index matching layer 26. Layers 25b and 26b are formed. That is, in the first refractive index matching layer 25, the dielectric layer 25a, the metal thin layer 25b, and the dielectric layer 25a are laminated in this order, and in the second refractive index matching layer 26, the dielectric layer 26a, the metal thin layer 26b, and the dielectric layer 25a are laminated in this order. The body layers 26a are laminated in this order.

Note that the metal thin layer may be formed only on either the first refractive index matching layer 25 or the second refractive index matching layer 26. The thickness of the thin metal layers 25b and 26b is approximately 10 to 200 nm.

According to a modification of the first embodiment, by inserting a thin layer having an absorption function into the refractive index matching layer, it is possible to absorb and attenuate light that has entered the film. As a result, it is possible to achieve not only a reduction in reflected light due to an interference effect but also a reduction in reflected light due to an absorption effect.

The method for manufacturing the sunspot plate 20b is such that, in the above masking step, the material of the dielectric layer 25a, the material of the metal thin layer 25b, and the material of the dielectric layer 25a (the first material of the three layers) are added in the desired pattern of the masking layer. material of the light shielding layer 24, material of the dielectric layer 26a, material of the metal thin layer 26b, material of the dielectric layer 26a (the above three layers constitute the second refractive index matching layer 26) Film formation is performed in this order. Subsequently, the masking layer is removed. Alternatively, when photolithography is used, instead of the masking step, the order of dielectric layer 25a, thin metal layer 25b, dielectric layer 25a, light shielding layer 24, dielectric layer 26a, thin metal layer 26b, and dielectric layer 26a is A film is formed on the entire surface and unnecessary parts are removed. In the manner described above, the black spot plate 20b shown in FIG. 6(c) is obtained.

<First embodiment, modification example 2>
FIG. 6(d) shows a second modification of the first embodiment. In the sunspot plate 20c of this modification, the same kind of material as the material constituting the light shielding layer 24 is included in the first refractive index matching layer 25 and the second refractive index matching layer 26, similarly to the above-mentioned sunspot plate 20b. Two metal thin layers 25a and 26a each made of metal (metal) are formed. Note that FIG. 6(d) is an example, and one of the first refractive index matching layer 25 and the second refractive index matching layer 26 is provided with two metal thin layers, and the other is provided with 0 to 1 metal thin layer. It's okay to be left behind. Further, three or more thin metal layers may be provided on both or one of the first refractive index matching layer 25 and the second refractive index matching layer 26.

According to the modification of the first embodiment, by forming the refractive index matching layer into a multilayer structure, it becomes possible to widen the antireflection band to a wide band and further reduce the reflectance.

The method for manufacturing the sunspot plate 20c is the same as the method for manufacturing the sunspot plate 20b. In the masking step, films are sequentially formed in a desired pattern of the masking layer in a desired layer order. Subsequently, the masking layer is removed. In the manner described above, the black spot plate 20c shown in FIG. 6(d) is obtained.

<Second embodiment>
FIG. 7(a) is a schematic cross-sectional view of a sunspot plate 30 according to a second embodiment of the present invention. The sunspot plate 30 has a substrate layer 31 made of a transparent material such as glass, and a sunspot layer 33 is provided on the surface thereof. Then, an antireflection layer 32 is provided on the substrate layer 31 so as to cover the sunspot layer 33 . The antireflection layer 32 is selected to have a refractive index that prevents reflection between the substrate layer 31 and air. The above is the basic configuration of the second embodiment.

When the sunspot plate of the second embodiment is enlarged in detail, as shown in FIG. , a first refractive index matching layer 35 made of a dielectric layer 35a. Furthermore, the sunspot layer 23 has a second refractive index matching layer 36 made of a dielectric layer 36a between the light shielding layer 34 and the surrounding antireflection layer 32 that covers it.

The first refractive index matching layer 35 takes into account the refractive index of the substrate layer 31 and the refractive index of the light shielding layer 34 so that the incident light from the bottom of the drawing is not reflected at the interface between the substrate layer 31 and the light shielding layer 34. and its refractive index is selected. Similarly, the second refractive index matching layer 36 is configured to match the refractive index of the anti-reflection layer 32 and the light-shielding layer 34 so that the incident light from above the drawing is not reflected at the interface between the anti-reflection layer 32 and the light-shielding layer 34. The refractive index is selected in consideration of the refractive index.

The method for manufacturing the sunspot plate 30a is as follows. That is, a desired pattern is formed on a transparent substrate layer 31 made of glass or the like by a known masking method such as mask film formation (film formation by covering with a mask with holes), lift-off film formation, etc. A masking layer (not shown) is formed.

With respect to this masking layer, known film formation such as vapor deposition or sputtering is performed using the material of one or more dielectric layers 35a constituting the first refractive index matching layer 35, and within a desired pattern of the masking layer, A first refractive index matching layer 35 is formed to a desired thickness. Subsequently, film formation is performed in the same manner using the material of the light shielding layer 34 and the material of one or more dielectric layers 36a constituting the second refractive index matching layer 36. Finally, the masking layer is removed. Alternatively, the above-mentioned photolithography may be used instead of the masking technique. Subsequently, an antireflection layer 32 is formed by a known method so as to cover the sunspot layer 33. In the manner described above, the black spot plate 30a of the second embodiment shown in FIG. 7(b) is obtained.

<Second embodiment, modification example 1>
FIG. 7(c) shows a modification of the second embodiment. In the sunspot plate 30b of this modification, at least one of the first refractive index matching layer 35 and the second refractive index matching layer 36 is made of the same material (metal) as the material constituting the light shielding layer 34. A metal thin layer 35b and metal 36b are formed. Note that the thin layer may be formed only on either one. The manufacturing process of the sunspot layer 33 of the sunspot board 30b of this modification is the same as the masking process in the manufacturing process of the sunspot layer 23 of the sunspot board 20b of the modification of the first embodiment, so a description thereof will be omitted.

<Second embodiment, modification example 2>
FIG. 7(d) shows a modification of the second embodiment. In the sunspot plate 30c of this modification, the same material as that constituting the light shielding layer 34 is included in at least one of the first refractive index matching layer 35 and the second refractive index matching layer 36, as in the above-mentioned blackspot plate 30b. Two thin metal layers 35b and two metal layers 36b are formed of the material (metal). The manufacturing process of the sunspot layer 33 of the sunspot board 30c of this modification is the same as the masking process in the manufacturing process of the sunspot layer 23 of the sunspot board 20c of the modification of the first embodiment, so a description thereof will be omitted. Similarly, the metal thin layer is not limited to two layers provided in each of the first refractive index matching layer 35 and the second refractive index matching layer 36.

<Third embodiment>
FIG. 8(a) is a schematic cross-sectional view of a sunspot plate 40 according to a third embodiment of the present invention. The sunspot plate 40 has a substrate layer 41 made of a transparent material such as glass, and a sunspot layer 43 is provided on the surface thereof. Then, an adhesive layer 42 is provided on the substrate layer 41 so as to cover the sunspot layer 43. Furthermore, another substrate layer 47 is bonded onto the adhesive layer 42. Adhesive layer 42 and the other substrate layer 47 are selected to have refractive indices that prevent reflections between substrate layer 41 and air. The above is the basic configuration of the third embodiment.

When the sunspot plate of the third embodiment is enlarged in detail, as shown in FIG. , a first refractive index matching layer 45 made of a dielectric layer 45a. Furthermore, the sunspot layer 43 has a second refractive index matching layer 46 made of a dielectric layer 45a between the light shielding layer 44 and the surrounding adhesive layer 42 covering it.

The first refractive index matching layer 45 is formed by considering the refractive index of the substrate layer 41 and the refractive index of the light shielding layer 44 so that the incident light from the bottom of the drawing is not reflected at the interface between the substrate layer 41 and the light shielding layer 44. and its refractive index is selected. Similarly, the second refractive index matching layer 46 is configured to match the refractive index of the adhesive layer 42 and the light shielding layer 44 so that the incident light from above the drawing is not reflected at the interface between the adhesive layer 42 and the light shielding layer 44. The refractive index is selected in consideration of the refractive index.

The method for manufacturing the sunspot plate 40a is as follows. That is, a desired pattern is formed on a transparent substrate layer 41 made of glass or the like by a known masking method such as mask film formation (film formation by covering with a mask with holes), lift-off film formation, etc. A masking layer (not shown) is formed.

This masking layer is formed by a known method such as vapor deposition or sputtering using the material of the one or more dielectric layers 45a constituting the first refractive index matching layer 45, so that a desired pattern of the masking layer is formed. A first refractive index matching layer 45 is formed to a desired thickness. Subsequently, film formation is performed in the same manner using the material of the light shielding layer 44 and the material of one or more dielectric layers 46a constituting the second refractive index matching layer 46. Finally, the masking layer is removed. Alternatively, the above-mentioned photolithography may be used instead of the masking technique. Subsequently, an adhesive layer 42 is formed by a known method to cover the sunspot layer 43. Finally, the other substrate layer 47 is pasted onto the adhesive layer 42. In the manner described above, the black spot plate 40a of the third embodiment shown in FIG. 8(b) is obtained.

<Third embodiment, modification example 1>
FIG. 8(c) shows a modification of the third embodiment. In the sunspot plate 40b of this modification, at least one of the first refractive index matching layer 45 and the second refractive index matching layer 46 is made of the same material (metal) as the material constituting the light shielding layer 44. A metal thin layer 35b and metal 36b are formed. Note that the thin layer may be formed only on either one. The manufacturing process of the sunspot layer 43 of the sunspot board 40b of this modification is the same as the masking process in the manufacturing process of the sunspot layer 23 of the sunspot board 20b of the modification of the first embodiment, so a description thereof will be omitted.

<Third embodiment, modification example 2>
FIG. 8(d) shows a modification of the third embodiment. In the sunspot plate 40c of this modification, the same material as that constituting the light shielding layer 44 is included in at least one of the first refractive index matching layer 45 and the second refractive index matching layer 46, as in the above-mentioned blackspot plate 40b. Two thin metal layers 35b and two metal layers 36b are formed of the material (metal). The manufacturing process of the sunspot layer 43 of the sunspot board 40c of this modification is the same as the masking process in the manufacturing process of the sunspot layer 23 of the sunspot board 20c of the modification of the first embodiment, so the explanation will be omitted. Similarly, the metal thin layer is not limited to two layers provided in each of the first refractive index matching layer 45 and the second refractive index matching layer 46.

The sunspot plate for ophthalmological equipment of the present invention described above has a feature in the manufacturing method of the sunspot layer, so the design accuracy of the sunspot layer is improved, and the sunspot layer has a light shielding layer and other parts. Since a refractive index matching layer is provided at the interface between the layers, the performance of transmittance and reflectance is improved. , can be used by replacing the sunspot board.

An example of a manufacturing example will be described below.
A sunspot board for an ophthalmological apparatus was manufactured using the configuration of the sunspot board 20b of Modification Example 1 of the first embodiment shown in FIG. 6(c). The specifications of each layer are shown in Table 1.

A graph of the optical characteristics of the above manufacturing example is shown in FIG. As shown in the graph, the transmittance is almost 0, and it can be seen that the front surface reflectance and back surface reflectance are also good in the visible light region of 400 to 800 nm.

A highly accurate and high-performance sunspot plate for ophthalmological devices can be manufactured by a simpler method.

10: Conventional sunspot board, 11: Substrate layer, 12: Sunspot layer, 13: Antireflection layer,
20, 20a to 20c: sunspot plate of the present invention, 21: substrate layer, 22: antireflection layer, 23: sunspot layer, 24: light shielding layer, 25: first refractive index matching layer, 25a: dielectric layer, 25b: metal thin layer, 26: second refractive index matching layer, 26a: dielectric layer, 26b: metal thin layer,
30, 30a to 30c: blackspot plate of the present invention, 31: substrate layer, 32: antireflection layer, 33: sunspot layer, 34: light shielding layer, 35: first refractive index matching layer, 35a: dielectric layer, 35b: metal thin layer, 36: second refractive index matching layer, 36a: dielectric layer, 36b: metal thin layer,
40, 40a to 40c: blackspot plate of the present invention, 41: substrate layer, 42: adhesive layer, 43: sunspot layer, 44: light shielding layer, 45: first refractive index matching layer, 45a: dielectric layer, 45b: metal thin layer, 46: second refractive index matching layer, 46a: dielectric layer, 46b: metal thin layer, 47: other substrate layer,
100: Ophthalmological device, 101: Illumination light source, 102: Lens, 103: Hole mirror, 103a: Hole, 104: Objective lens, 104a: Objective lens surface, 105: Lens, 106: Sensor, 200: Eye to be examined, A~ C: Optical path.

Claims (10)

a substrate layer;
an antireflection layer formed of at least one layer provided on the substrate layer;
A sunspot board for an ophthalmological device, comprising a light shielding layer provided as small sunspots on the antireflection layer,
A first refractive index matching layer made of a dielectric layer that prevents reflection of incident light from the antireflection layer is provided between the antireflection layer and the light shielding layer,
A sunspot plate for an ophthalmological apparatus, characterized in that a second refractive index matching layer made of a dielectric layer that prevents reflection of incident light from the air is provided on the light shielding layer. a substrate layer;
a light shielding layer provided as small dots on the substrate layer;
A sunspot board for an ophthalmological device, comprising an antireflection layer formed of at least one layer provided on the substrate layer and covering the light shielding layer,
A first refractive index matching layer made of a dielectric layer that prevents reflection of incident light from the substrate layer is provided between the substrate layer and the light shielding layer,
A second refractive index matching layer made of a dielectric layer that prevents reflection of incident light from the anti-reflection layer is provided between the light-shielding layer and the anti-reflection layer. Black spot board. a substrate layer;
a light shielding layer provided as small dots on the substrate layer;
an adhesive layer provided on the substrate layer covering the light shielding layer;
and another substrate layer provided on the adhesive layer, the sunspot board for an ophthalmological device comprising:
A first refractive index matching layer made of a dielectric layer that prevents reflection of incident light from the substrate layer is provided between the substrate layer and the light shielding layer,
A second refractive index matching layer made of a dielectric layer that prevents reflection of incident light from the adhesive layer is provided between the light shielding layer and the adhesive layer. Black spot board. 4. The sunspot board for an ophthalmological apparatus according to claim 1, wherein a thin metal layer made of the same material as the light shielding layer is provided in the at least one refractive index matching layer. forming the antireflection layer on the substrate layer;
After forming a masking layer having a desired pattern on the antireflection layer, a dielectric layer constituting the first refractive index matching layer, a dielectric layer constituting the light shielding layer, and a dielectric layer constituting the second refractive index matching layer are formed. form,
2. The method of manufacturing a sunspot board for an ophthalmological device according to claim 1, further comprising removing the masking layer. After forming a masking layer having a desired pattern on the substrate layer, forming a dielectric layer constituting the first refractive index matching layer, a dielectric layer constituting the light shielding layer, and a dielectric layer constituting the second refractive index matching layer. death,
removing the masking layer;
The ophthalmological device according to claim 2, wherein the antireflection layer is formed on the substrate layer so as to cover the first refractive index matching layer, the light shielding layer, and the second refractive index matching layer. Method of manufacturing sunspot plates. After forming a masking layer having a desired pattern on the substrate layer, forming a dielectric layer constituting the first refractive index matching layer, a dielectric layer constituting the light shielding layer, and a dielectric layer constituting the second refractive index matching layer. death,
removing the masking layer;
forming the adhesive layer on the substrate layer so as to cover the first refractive index matching layer, the light shielding layer, and the second refractive index matching layer;
4. The method of manufacturing a sunspot board for an ophthalmological device according to claim 3, wherein the other substrate layer is bonded onto the adhesive layer. Any one of claims 5 to 7, characterized in that when forming the first refractive index matching layer and/or the second refractive index matching layer, at least one metal thin layer is formed in the dielectric layer. A method for producing a sunspot plate for an ophthalmological device as described in . Instead of forming the masking layer having the desired pattern, forming the refractive index matching layer and the light shielding layer, and then removing the masking layer,
The method for manufacturing a sunspot board for an ophthalmological device according to any one of claims 5 to 7, characterized in that after forming the refractive index matching layer and the light shielding layer on the entire surface, unnecessary portions are removed to form a desired pattern. . an illumination system that projects illumination light from an illumination light source onto the eye to be examined via a hole mirror to illuminate the eye to be examined;
and a photographing system having a photographing aperture provided in an optical path for photographing the eye to be examined;
The illumination system and the photographing system have a mutually shared objective lens disposed between the eye to be examined and the hole mirror, and the illumination system has a sunspot for an ophthalmological apparatus according to any one of claims 1 to 4. When considering the lens surface of the objective lens as a reflective surface, the light shielding layer is provided in a conjugate manner with the position where an image of the aperture of the photographing diaphragm is formed via the reflective surface, An ophthalmological apparatus characterized in that the image of the aperture of the photographing diaphragm is covered by the light shielding layer.

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