JP2023147159A - 静電チャック - Google Patents

静電チャック Download PDF

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Publication number
JP2023147159A
JP2023147159A JP2022154960A JP2022154960A JP2023147159A JP 2023147159 A JP2023147159 A JP 2023147159A JP 2022154960 A JP2022154960 A JP 2022154960A JP 2022154960 A JP2022154960 A JP 2022154960A JP 2023147159 A JP2023147159 A JP 2023147159A
Authority
JP
Japan
Prior art keywords
power feeding
zones
annular portion
power supply
heater element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022154960A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023147159A5 (enExample
Inventor
瑛人 小野
Eito Ono
哲朗 糸山
Tetsuro Itoyama
智樹 梅津
Tomoki Umezu
淳平 上藤
Jumpei Kamifuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to KR1020230014667A priority Critical patent/KR102716890B1/ko
Priority to US18/121,627 priority patent/US12341050B2/en
Priority to CN202310302696.2A priority patent/CN116895591A/zh
Publication of JP2023147159A publication Critical patent/JP2023147159A/ja
Priority to US19/223,387 priority patent/US20250293071A1/en
Publication of JP2023147159A5 publication Critical patent/JP2023147159A5/ja
Pending legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Resistance Heating (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP2022154960A 2022-03-29 2022-09-28 静電チャック Pending JP2023147159A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020230014667A KR102716890B1 (ko) 2022-03-29 2023-02-03 정전 척
US18/121,627 US12341050B2 (en) 2022-03-29 2023-03-15 Electrostatic chuck
CN202310302696.2A CN116895591A (zh) 2022-03-29 2023-03-27 静电吸盘
US19/223,387 US20250293071A1 (en) 2022-03-29 2025-05-30 Electrostatic chuck

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022053876 2022-03-29
JP2022053876 2022-03-29

Publications (2)

Publication Number Publication Date
JP2023147159A true JP2023147159A (ja) 2023-10-12
JP2023147159A5 JP2023147159A5 (enExample) 2025-07-22

Family

ID=88287123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022154960A Pending JP2023147159A (ja) 2022-03-29 2022-09-28 静電チャック

Country Status (1)

Country Link
JP (1) JP2023147159A (enExample)

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