JP2023147159A5 - - Google Patents
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- Publication number
- JP2023147159A5 JP2023147159A5 JP2022154960A JP2022154960A JP2023147159A5 JP 2023147159 A5 JP2023147159 A5 JP 2023147159A5 JP 2022154960 A JP2022154960 A JP 2022154960A JP 2022154960 A JP2022154960 A JP 2022154960A JP 2023147159 A5 JP2023147159 A5 JP 2023147159A5
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- JP
- Japan
- Prior art keywords
- publication
- special table
- special
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020230014667A KR102716890B1 (ko) | 2022-03-29 | 2023-02-03 | 정전 척 |
| US18/121,627 US12341050B2 (en) | 2022-03-29 | 2023-03-15 | Electrostatic chuck |
| CN202310302696.2A CN116895591A (zh) | 2022-03-29 | 2023-03-27 | 静电吸盘 |
| US19/223,387 US20250293071A1 (en) | 2022-03-29 | 2025-05-30 | Electrostatic chuck |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022053876 | 2022-03-29 | ||
| JP2022053876 | 2022-03-29 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023147159A JP2023147159A (ja) | 2023-10-12 |
| JP2023147159A5 true JP2023147159A5 (enExample) | 2025-07-22 |
| JP7829838B2 JP7829838B2 (ja) | 2026-03-16 |
Family
ID=88287123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022154960A Active JP7829838B2 (ja) | 2022-03-29 | 2022-09-28 | 静電チャック |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7829838B2 (enExample) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2844915B2 (ja) * | 1990-11-21 | 1999-01-13 | 富士電機株式会社 | 薄膜形成用基板加熱装置 |
| CN1207939C (zh) | 1999-09-29 | 2005-06-22 | 东京电子株式会社 | 多区电阻加热器 |
| US9666466B2 (en) | 2013-05-07 | 2017-05-30 | Applied Materials, Inc. | Electrostatic chuck having thermally isolated zones with minimal crosstalk |
| US10475687B2 (en) | 2014-11-20 | 2019-11-12 | Sumitomo Osaka Cement Co., Ltd. | Electrostatic chuck device |
| JP6341457B1 (ja) | 2017-03-29 | 2018-06-13 | Toto株式会社 | 静電チャック |
| JP7411383B2 (ja) * | 2019-11-05 | 2024-01-11 | 日本特殊陶業株式会社 | 加熱装置 |
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2022
- 2022-09-28 JP JP2022154960A patent/JP7829838B2/ja active Active