JP2023147146A - 画像センサ用のパターン電極構造 - Google Patents
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 48
- 239000002184 metal Substances 0.000 claims abstract description 48
- 238000006243 chemical reaction Methods 0.000 claims description 38
- 238000001228 spectrum Methods 0.000 claims description 11
- ZYECOAILUNWEAL-NUDFZHEQSA-N (4z)-4-[[2-methoxy-5-(phenylcarbamoyl)phenyl]hydrazinylidene]-n-(3-nitrophenyl)-3-oxonaphthalene-2-carboxamide Chemical compound COC1=CC=C(C(=O)NC=2C=CC=CC=2)C=C1N\N=C(C1=CC=CC=C1C=1)/C(=O)C=1C(=O)NC1=CC=CC([N+]([O-])=O)=C1 ZYECOAILUNWEAL-NUDFZHEQSA-N 0.000 claims description 5
- 101100248200 Arabidopsis thaliana RGGB gene Proteins 0.000 claims description 5
- 238000005381 potential energy Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001914 filtration Methods 0.000 claims 2
- 238000002834 transmittance Methods 0.000 description 24
- 238000004088 simulation Methods 0.000 description 10
- 230000008033 biological extinction Effects 0.000 description 8
- 230000010287 polarization Effects 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 5
- 230000000295 complement effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000004120 green S Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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Abstract
【解決手段】画像センサにおいて、サブ画素P1~P4を含む画素12の電極構造は、上部電極110と、上部電極の下方に位置する下部電極とを含む。上部電極は、複数の内部電極114と、内部電極に接続された1つの外部電極112とを含む。内部電極は、第1の方向Xに沿って延在し、波長範囲により光をフィルタリングし、光を偏光になるようにフィルタリングする。各内部電極は、第1の部分1142A及び第2の部分1142Bを有する金属構造1142と、金属構造の第1の部分と第2の部分との間に位置する誘電体構造1144と、を含む。第1の部分、誘電体構造及び第2の部分は、第1の方向に垂直な第2の方向Yに沿って配列される。
【選択図】図2A
Description
Claims (11)
- 画像センサに適用される電極構造であって、
複数の内部電極、及び前記内部電極に電気的に接続された1つの外部電極を含む上部電極と、前記上部電極の下方に位置する下部電極と、を含み、
前記内部電極は、波長範囲により光をフィルタリングし、光を偏光になるようにフィルタリングするように構成され、各前記内部電極は、
第1の方向に沿って延在する第1の部分及び第2の部分を有する金属構造と、
前記第1の方向に沿って延在し、前記金属構造の前記第1の部分と前記第2の部分との間に位置する誘電体構造とを含み、
前記第1の部分、前記誘電体構造及び前記第2の部分は、前記第1の方向と異なる第2の方向に沿って配列され、
前記上部電極及び前記下部電極は、前記第1の方向及び前記第2の方向に垂直な第3の方向において重なる、電極構造。 - 光を電気信号に変換するように構成された光電変換層(PCL)を更に含み、
前記外部電極、前記金属構造及び前記誘電体構造は、前記光電変換層の上方に位置し、
各前記内部電極は、前記金属構造と前記光電変換層との間に位置するとともに、前記金属構造と前記光電変換層との間の位置エネルギー差を滑らかにするように構成された中間層を更に含む、請求項1に記載の電極構造。 - 前記中間層は、透明導電性酸化物(TCO)を含む、請求項2に記載の電極構造。
- 前記外部電極は、前記内部電極の中間層に物理的に接続され、前記外部電極及び前記中間層は、前記光電変換層の前記上部電極に面する上面に位置し、各前記内部電極の金属構造及び誘電体構造は、対応する前記中間層の上面と接触する、請求項2に記載の電極構造。
- 前記外部電極は、前記内部電極の金属構造に物理的に接続され、前記外部電極は、前記光電変換層の前記上部電極に面する上面から離間し、各前記中間層は、前記金属構造及び前記誘電体構造の下部を取り囲み、前記中間層及び前記下部は、前記光電変換層に埋め込まれる、請求項2に記載の電極構造。
- 前記内部電極のピッチは、0.5λ~0.75λの範囲にあり、λが光スペクトルのピーク又は谷に対応し、各前記内部電極は、前記第2の方向に沿う幅を有し、前記内部電極のデューティサイクルは、20%~90%の範囲にある、請求項1に記載の電極構造。
- 複数の画素であって、それぞれが複数のサブ画素を含み、各サブ画素が電極構造を含み、各電極構造が、
複数の内部電極、及び前記内部電極に電気的に接続された1つの外部電極を含む上部電極であって、前記内部電極は、波長範囲により光をフィルタリングし、光を偏光になるようにフィルタリングするように構成され、各前記内部電極は、第1の方向に沿って延在する第1の部分及び第2の部分を有する金属構造と、前記第1の方向に沿って延在し、前記金属構造の前記第1の部分と前記第2の部分との間に位置し、前記第1の部分、前記第2の部分とともに、前記第1の方向と異なる第2の方向において配列される誘電体構造と、を含む、上部電極と、
前記上部電極の下方に位置し、前記上部電極とともに、前記第1の方向及び前記第2の方向に垂直な第3の方向に積層される下部電極と、を含む複数の画像と、
光を電気信号に変換するように構成され、前記上部電極と前記下部電極との間に位置する光電変換層と、
キャリア輸送性能を向上させるように構成され、対応する金属構造と前記光電変換層との間に位置する複数の中間層と、を含む、画像センサ。 - 前記サブ画素の数は、4つであり、前記サブ画素の各内部電極は、傾斜角を有し、隣接する2つのサブ画素の内部電極の傾斜角は、45度の角度差を有する、請求項7に記載の画像センサ。
- 前記サブ画素は、第1の傾斜角を有する第1のサブ画素と、第2の傾斜角を有する第2のサブ画素と、第3の傾斜角を有する第3のサブ画素と、第4の傾斜角を有する第4のサブ画素とを含み、前記第1の傾斜角は、前記第2の傾斜角、前記第3の傾斜角及び前記第4の傾斜角より小さく、前記第1の傾斜角は、90度、120度又は150度である、請求項8に記載の画像センサ。
- 前記画素の数は、4つであり、前記画素は、画素アレイを形成し、前記画素アレイは、CYYMモザイク配列、RGGBモザイク配列、CYGMモザイク配列又はRGBWモザイク配列を含み、前記画素アレイは、前記CYYMモザイク配列を有する場合、1つの青緑色画素、1つの赤紫色画素及び2つの黄色画素を含み、前記画素アレイは、前記RGGBモザイク配列を有する場合、1つの赤色画素、1つの青色画素及び2つの緑色画素を含み、前記画素アレイは、前記CYGMモザイク配列を有する場合、1つの青緑色画素、1つの黄色画素、1つの緑色画素及び1つの赤紫色画素を含み、前記画素アレイは、前記RGBWモザイク配列を有する場合、1つの赤色画素、1つの緑色画素、1つの青色画素及び1つの白色画素を含む、請求項7に記載の画像センサ。
- nチャネルデバイス及びpチャネルデバイスを含み、前記nチャネルデバイスに対応する中間層は、前記光電変換層の前記上部電極に面する上面に位置し、各前記内部電極の金属構造及び誘電体構造は、対応する中間層の前記光電変換層と反対側の面と接触し、前記pチャネルデバイスに対応する各中間層は、前記金属構造及び前記誘電体構造の下部を取り囲み、前記中間層及び前記下部は、前記光電変換層に埋め込まれる、請求項7に記載の画像センサ。
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