JP2023140626A - Cutting device - Google Patents

Abstract

To provide a cutting device which can easily remove foreign matters such as scraps and so on adhered to a detection unit.SOLUTION: A cutting device for cutting a work-piece comprises: a cutting unit comprising a spindle, and a blade mount attached to a tip of the spindle, and cuts a work-piece by a cutting blade attached to the blade mount; and a cutting liquid supply unit which supplies a cutting liquid to the cutting blade; and a detection unit which detects a tip of the cutting blade. The detection unit includes: a light projection part; a light reception part which receives light from the light projection part; and a blade insertion part which is provided between the light projection part and the light reception part, and in which the cutting blade is inserted. The blade mount comprises a truncated-conical base part of which one end side is fixed to the tip of the spindle. The base part has a guide part which is provided on an outer peripheral surface side of the base part along a circumferential direction of the base part, and guides the cutting liquid, which has been supplied from the cutting liquid supply unit to the rotating cutting blade, to the light projection part or the light reception part.SELECTED DRAWING: Figure 5

Description

The present invention relates to a cutting device that cuts a workpiece.

A device chip including devices is manufactured by dividing a semiconductor wafer on which a plurality of devices are formed into individual pieces. Furthermore, a package substrate can be obtained by mounting a plurality of device chips on a predetermined substrate and covering the mounted device chips with a sealing material (molding resin) made of resin. By dividing this package substrate into individual pieces, a package device including a plurality of packaged device chips is manufactured. Device chips and package devices are incorporated into various electronic devices such as mobile phones and personal computers.

A cutting device is used to divide workpieces such as semiconductor wafers and package substrates. The cutting device includes a chuck table that holds a workpiece, and a cutting unit that performs cutting on the workpiece. The cutting unit includes a spindle and a truncated conical blade mount fixed to the tip of the spindle, and an annular cutting blade is attached to the blade mount. The workpiece is cut and divided by holding the workpiece on a chuck table and rotating a cutting blade to cut into the workpiece.

When cutting a workpiece with a cutting blade, a load is applied to the tip of the cutting blade that comes into contact with the workpiece, which may cause wear or chipping at the tip of the cutting blade. If the cutting of the workpiece is continued in a state where the cutting blade is excessively worn or chipped, there is a risk that the workpiece will be machined poorly or the cutting blade will be damaged. Therefore, it is required that wear and chipping of the cutting blade be detected promptly.

Therefore, cutting apparatuses are sometimes equipped with a detection unit that detects the tip of the cutting blade and monitors the state of the cutting blade while cutting the workpiece. For example, Patent Document 1 discloses a detection unit (optical detection means) that includes a light projector and a light receiver that are arranged to sandwich the tip of a cutting blade. This type of detection unit is arranged so that the light traveling from the light projector to the light receiver is blocked by the cutting blade. When wear or chipping occurs at the tip of the cutting blade, the light emitted from the light projecting section reaches the light receiving section via the worn area or chipping of the cutting blade, and the amount of light received by the light receiving section increases. Therefore, by monitoring the amount of light received by the light receiving section, it is possible to detect wear or chipping that occurs at the tip of the cutting blade.

Japanese Patent Application Publication No. 2002-370140

When a workpiece is cut with a cutting blade, foreign matter such as debris generated by cutting the workpiece is scattered and adheres to the workpiece and the detection unit. Foreign matter adhering to the workpiece causes contamination of the workpiece. Furthermore, if foreign matter adheres to the light emitting section or the light receiving section of the detection unit, the amount of light received by the light receiving section may fluctuate, which may impede proper detection of the cutting blade.

Therefore, during cutting of the workpiece, a liquid (cutting fluid) such as pure water is supplied to the workpiece and the cutting blade. Foreign matter adhering to the workpiece is washed away by the cutting fluid. Moreover, the cutting fluid supplied to the cutting blade is caught up in the rotation of the cutting blade and is also scattered on the detection unit side. As a result, cutting fluid is also supplied to the detection unit, and foreign matter adhering to the detection unit is removed.

However, when the detection unit is constituted by an optical sensor including a light emitter and a light receiver, the light emitter and the light receiver are arranged to sandwich the tip of the cutting blade. One of the light projecting section and the light receiving section is positioned so as not to overlap the cutting blade, but to overlap a truncated conical blade mount that supports the cutting blade. In this state, if cutting fluid is supplied while rotating the blade mount and cutting blade, the cutting fluid will be repelled by the outer circumferential surface (slanted surface) of the blade mount and will scatter in a direction different from the light emitter or light receiver. . As a result, there is a problem in that sufficient cutting fluid is not supplied to the light projecting section or the light receiving section, making it difficult to remove foreign matter attached to the light projecting section or the light receiving section.

Furthermore, in order to reliably remove foreign matter adhering to the detection unit, it is conceivable to newly mount a nozzle on the cutting unit that supplies cleaning liquid toward the light projecting section and the light receiving section. However, if a dedicated nozzle is used to clean the detection unit, the size of the cutting unit in which the nozzle is mounted increases, and preparation, installation, and operation of the nozzle require time and cost.

The present invention has been made in view of this problem, and an object of the present invention is to provide a cutting device that can easily remove foreign substances such as cutting chips attached to a detection unit.

According to one aspect of the present invention, a cutting device for cutting a workpiece includes a spindle and a blade mount attached to the tip of the spindle, and the cutting blade attached to the blade mount cuts the workpiece. A cutting unit that cuts a workpiece, a cutting fluid supply unit that supplies cutting fluid to the cutting blade, and a detection unit that detects the tip of the cutting blade. , a light receiving part that receives light from the light projecting part, and a blade insertion part provided between the light projecting part and the light receiving part and into which the cutting blade is inserted; A truncated conical base portion having one end fixed to the tip of the spindle, a flange portion connected to the other end side of the base portion and supporting the cutting blade, and a center portion of the cutting blade protruding from the flange portion. a boss portion inserted into a through hole provided in the base portion, the base portion is provided along the circumferential direction of the base portion on the outer peripheral surface side of the base portion, and the cutting fluid supply A cutting device is provided that includes a first guide section that guides the cutting fluid supplied from the unit to the rotating cutting blade to the light projecting section or the light receiving section.

Preferably, the first guiding section is a notch or a protrusion provided at a position facing the light projecting section or the light receiving section.

Preferably, the cutting blade includes an annular hub base having the through hole in the center thereof, and the cutting unit is screwed to the boss portion and clamps and fixes the cutting blade together with the flange portion. The hub base further includes a second guide portion provided along the circumferential direction of the hub base on the outer circumferential side of the hub base, and the fixing nut A third guide part is provided on the outer peripheral surface side of the fixing nut along the circumferential direction of the fixing nut, and the second guide part and the third guide part are rotated from the cutting fluid supply unit. The cutting fluid supplied to the cutting blade is guided to the light projecting section or the light receiving section.

Preferably, the second guiding part or the third guiding part is a notch or a protrusion provided at a position facing the light projecting part or the light receiving part.

Preferably, the cutting unit includes a front flange that supports the cutting blade together with the flange portion, and a fixing nut that is screwed onto the boss portion and clamps and fixes the cutting blade and the front flange together with the flange portion. The front flange or the fixing nut has a fourth guiding part provided along the circumferential direction of the front flange or the fixing nut on the outer peripheral surface side of the front flange or the fixing nut. The fourth guiding section guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light projecting section or the light receiving section.

Preferably, the fourth guiding section is a notch or a protrusion provided at a position facing the light projecting section or the light receiving section.

In the cutting device according to one aspect of the present invention, a guiding part that guides cutting fluid to the light projecting part or the light receiving part of the detection unit is provided on the outer peripheral surface side of the base part included in the blade mount. Thereby, the cutting fluid supplied to the cutting blade during cutting of the workpiece is efficiently supplied to the light projector or the light receiver. As a result, foreign matter adhering to the light projecting section or the light receiving section can be easily removed, and detection of the cutting blade by the detection unit can be prevented from being obstructed by the foreign matter.

In addition, by providing a guide section on the base of the blade mount, cutting fluid can be efficiently delivered to the light emitter or light receiver without installing a new nozzle on the cutting unit to supply cleaning fluid to the detection unit. Can be supplied. This avoids an increase in the size of the cutting unit due to the installation of the nozzle, and reduces the effort and cost required for preparing, installing, and operating the nozzle.

It is a perspective view showing a cutting device. FIG. 2 is an exploded perspective view showing a cutting unit to which a hub-type cutting blade is attached. FIG. 2 is a perspective view showing a cutting unit equipped with a cutting fluid supply unit. It is a sectional view showing a detection unit. FIG. 2 is a partially sectional front view showing a cutting unit and a detection unit to which a hub-type cutting blade is attached. 6(A) is a front view showing the guiding part (notch), FIG. 6(B) is a front view showing a modified example of the guiding part (notch), and FIG. 6(C) is a front view showing the guiding part (notch). FIG. 7 is a front view showing another modification of the notch. FIG. 7(A) is a front view showing the guiding part (protrusion), FIG. 7(B) is a front view showing a modified example of the guiding part (protrusion), and FIG. 7(C) is a front view showing the guiding part (protrusion). It is a front view which shows another modification. FIG. 2 is an exploded perspective view showing a cutting unit to which a washer type cutting blade is attached. FIG. 2 is a partially sectional front view showing a cutting unit and a detection unit to which a washer type cutting blade is attached.

Hereinafter, embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. First, a configuration example of a cutting device according to this embodiment will be described. FIG. 1 is a perspective view showing the cutting device 2. FIG. In FIG. 1, the X-axis direction (processing feed direction, first horizontal direction, front-back direction) and the Y-axis direction (indexing feed direction, second horizontal direction, left-right direction) are directions perpendicular to each other. Further, the Z-axis direction (vertical direction, up-down direction, height direction) is a direction perpendicular to the X-axis direction and the Y-axis direction.

The cutting device 2 includes a base 4 that supports or accommodates each component that constitutes the cutting device 2. A rectangular opening 4a is provided at the front corner of the base 4, and a cassette support stand (cassette elevator) 6 is provided inside the opening 4a. A lifting mechanism (not shown) that moves the cassette support stand 6 up and down along the Z-axis direction is connected to the cassette support stand 6.

A cassette 8 that can accommodate a plurality of workpieces 11 that are objects to be processed by the cutting device 2 is set on the cassette support stand 6 . In addition, in FIG. 1, only the outline of the cassette 8 is illustrated with a chain double-dashed line.

The workpiece 11 is a disk-shaped wafer made of a semiconductor material such as silicon, and has a front surface and a back surface that are substantially parallel to each other. The workpiece 11 is divided into a plurality of rectangular regions by a plurality of streets (dividing lines) arranged in a grid pattern so as to intersect with each other. Further, each of the plurality of areas partitioned by the streets on the surface side of the workpiece 11 includes an IC (Integrated Circuit), an LSI (Large Scale Integration), an LED (Light Emitting Diode), a MEMS (Micro Electro Mechanical Systems), etc. devices have been formed.

A circular tape (dicing tape) 13 having a larger diameter than the workpiece 11 is attached to the back side of the workpiece 11 . For example, the tape 13 includes a film-like base material and an adhesive (glue layer) on the base material. The base material is made of resin such as polyolefin, polyvinyl chloride, polyethylene terephthalate, or the like. Further, the adhesive is an epoxy-based, acrylic-based, or rubber-based adhesive. Note that the adhesive may be an ultraviolet curable resin that is cured by irradiation with ultraviolet rays.

Workpiece 11 is supported by frame 15 . For example, the frame 15 is an annular member made of metal such as SUS (stainless steel). A circular opening passing through the frame 15 in the thickness direction is provided in the center of the frame 15. Note that the diameter of the opening is larger than the diameter of the workpiece 11.

With the workpiece 11 placed inside the opening of the frame 15, the center part of the tape 13 is attached to the back surface 11b side of the workpiece 11, and the outer peripheral part of the tape 13 is attached to the frame 15. . Thereby, the workpiece 11 is supported by the frame 15 via the tape 13.

The workpiece 11 is accommodated in the cassette 8 shown in FIG. 1 while being supported by the frame 15, and is processed by the cutting device 2. For example, by cutting and dividing the workpiece 11 along streets using the cutting device 2, a plurality of device chips each including a device are manufactured.

However, there are no restrictions on the type, material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a substrate (wafer) made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass, sapphire, ceramics, resin, metal, or the like. Further, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of devices formed on the workpiece 11, and the workpiece 11 does not need to have any devices formed thereon.

Further, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate. For example, a package substrate is formed by sealing a plurality of device chips mounted on a base substrate with a resin layer (molding resin). By dividing the package substrate into individual pieces, a plurality of packaged devices each including a plurality of packaged device chips are manufactured.

A rectangular opening 4b whose longitudinal direction is along the X-axis direction is provided on the side of the opening 4a. A chuck table (holding table) 10 that holds the workpiece 11 is provided inside the opening 4b. The upper surface of the chuck table 10 is a flat surface that is generally parallel to the horizontal plane (XY plane), and constitutes a holding surface 10a that holds the workpiece 11. The holding surface 10a is connected to a suction source (not shown) such as an ejector via a suction path (not shown), a valve (not shown), etc. formed inside the chuck table 10.

A moving unit 12 is connected to the chuck table 10. For example, the movement unit 12 is a ball screw type movement mechanism, and includes an X-axis ball screw (not shown) arranged along the X-axis direction and an X-axis pulse motor (not shown) that rotates the X-axis ball screw. Equipped with Furthermore, the moving unit 12 includes a table cover 14 that surrounds the chuck table 10. At the front and rear of the table cover 14, bellows-shaped dust-proof and drip-proof covers 16 are provided that are extendable and retractable along the X-axis direction. The table cover 14 and the dust-proof and drip-proof cover 16 are attached so as to cover the components (X-axis ball screw, X-axis pulse motor, etc.) of the moving unit 12 installed inside the opening 4b.

The moving unit 12 moves the chuck table 10 along with the table cover 14 along the X-axis direction. Further, the chuck table 10 is connected to a rotational drive source (not shown) such as a motor that rotates the chuck table 10 around a rotation axis that is generally parallel to the Z-axis direction. Furthermore, a plurality of clamps 18 are provided around the chuck table 10 to grip and fix a frame 15 supporting the workpiece 11.

A support structure 20 is provided in a region of the base 4 adjacent to the opening 4b. The upper part of the support structure 20 is arranged along the Y-axis direction so as to overlap with the opening 4b. A moving unit 22 is provided on the upper surface side of the support structure 20 . For example, the moving unit 22 is a ball screw type moving mechanism.

Specifically, the moving unit 22 includes a pair of Y-axis guide rails 24 fixed to the surface side of the support structure 20. The pair of Y-axis guide rails 24 are arranged generally parallel to each other along the Y-axis direction. Furthermore, a flat Y-axis moving plate 26 is attached to the pair of Y-axis guide rails 24 so as to be slidable along the Y-axis guide rails 24 .

A nut portion (not shown) is provided on the back side of the Y-axis moving plate 26. A Y-axis ball screw 28 disposed along the Y-axis direction between the pair of Y-axis guide rails 24 is screwed into this nut portion. Furthermore, a Y-axis pulse motor (not shown) that rotates the Y-axis ball screw 28 is connected to an end of the Y-axis ball screw 28 . When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor, the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rail 24.

A pair of Z-axis guide rails 30 are fixed to the front side of the Y-axis moving plate 26. The pair of Z-axis guide rails 30 are arranged generally parallel to each other along the Z-axis direction. Further, a flat Z-axis moving plate 32 is attached to the pair of Z-axis guide rails 30 so as to be slidable along the Z-axis guide rails 30.

A nut portion (not shown) is provided on the back side of the Z-axis moving plate 32. A Z-axis ball screw 34 arranged along the Z-axis direction between the pair of Z-axis guide rails 30 is screwed into this nut portion. Furthermore, a Z-axis pulse motor 36 that rotates the Z-axis ball screw 34 is connected to an end of the Z-axis ball screw 34 . When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36, the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide rail 30.

A cutting unit 38 that performs cutting on the workpiece 11 is fixed to the lower part of the Z-axis moving plate 32. An annular cutting blade 40 for cutting the workpiece 11 is attached to the cutting unit 38 . The cutting unit 38 cuts the workpiece 11 held by the chuck table 10 by rotating the cutting blade 40 to cut into the workpiece 11 held by the chuck table 10 . Note that details of the configuration and functions of the cutting unit 38 will be described later (see FIG. 2, etc.).

An imaging unit 50 is provided adjacent to the cutting unit 38 to take an image of the workpiece 11 held by the chuck table 10. For example, the imaging unit 50 is a camera (visible light camera, infrared camera, etc.) that includes an optical microscope and an imaging element such as a CCD (Charged-Coupled Devices) sensor or a CMOS (Complementary Metal-Oxide-Semiconductor) sensor. By capturing an image of the workpiece 11 held by the chuck table 10 with the imaging unit 50, a captured image of the workpiece 11 is acquired. The captured image is used for alignment between the workpiece 11 and the cutting blade 40, etc.

An opening 4c defining a cylindrical cleaning space (cleaning chamber) is provided on the side of the opening 4b. A cleaning unit 52 for cleaning the workpiece 11 is provided inside the opening 4c. The cleaning unit 52 includes a spinner table 54 that holds and rotates the workpiece 11 and a nozzle 56 that supplies cleaning fluid (cleaning fluid) to the workpiece 11 held by the spinner table 54.

The upper surface of the spinner table 54 is a flat surface that is generally parallel to the horizontal plane (XY plane), and constitutes a holding surface 54a that holds the workpiece 11. The holding surface 54a is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), etc. provided inside the spinner table 54. Further, the spinner table 54 is connected to a rotational drive source (not shown) such as a motor that rotates the spinner table 54 around a rotation axis that is generally parallel to the Z-axis direction.

The nozzle 56 supplies cleaning fluid toward the holding surface 54a of the spinner table 54. As the cleaning fluid, a liquid such as pure water, a mixed fluid containing a liquid (such as pure water) and a gas (such as air), etc. can be used. Further, the nozzle 56 may inject gas (such as air) toward the workpiece 11 for drying the workpiece 11 .

The workpiece 11 processed by the cutting unit 38 is transported from the chuck table 10 to the cleaning unit 52 and placed on the holding surface 54a of the spinner table 54 via the tape 13. In this state, when a suction force (negative pressure) from a suction source is applied to the holding surface 54a, the workpiece 11 is suction-held by the spinner table 54 via the tape 13. Thereafter, while rotating the spinner table 54, cleaning fluid is supplied from the nozzle 56 toward the workpiece 11. As a result, the cleaning fluid flows along the upper surface side of the rotating workpiece 11, and the workpiece 11 is cleaned.

In addition, the cutting device 2 includes each component (cassette support base 6, chuck table 10, moving unit 12, clamp 18, moving unit 22, cutting unit 38, imaging unit 50, cleaning unit 52, etc.) that constitutes the cutting device 2. A control unit (control unit, control device) 58 is provided. The control unit 58 controls the operation of the cutting device 2 by generating control signals and outputting them to each component of the cutting device 2.

For example, the control unit 58 is configured by a computer, and includes a calculation section that performs calculations necessary for the operation of the cutting device 2, and a storage section that stores various information (data, programs, etc.) used for the operation of the cutting device 2. include. The arithmetic unit includes a processor such as a CPU (Central Processing Unit). Further, the storage unit is configured to include memories such as ROM (Read Only Memory) and RAM (Random Access Memory).

When processing the workpiece 11 with the cutting device 2, the workpiece 11 housed in the cassette 8 is first transported to the chuck table 10 by a transport mechanism (not shown). The workpiece 11 is then placed on the holding surface 10a of the chuck table 10 via the tape 13. Further, the frame 15 is fixed by a plurality of clamps 18. When the suction force (negative pressure) of the suction source is applied to the holding surface 10a in this state, the workpiece 11 is suction-held by the chuck table 10 via the tape 13.

Next, the workpiece 11 is machined by the cutting unit 38. The cutting unit 38 cuts the workpiece 11 by cutting into the workpiece 11 while rotating the cutting blade 40 . For example, the cutting blade 40 cuts into the workpiece 11 to a cutting depth exceeding the thickness of the workpiece 11 and cuts the workpiece 11 along the street. Thereby, the workpiece 11 is divided into a plurality of device chips.

The workpiece 11 processed by the cutting unit 38 is transported to the cleaning unit 52 by a transport mechanism (not shown), and is cleaned by the cleaning unit 52. Thereafter, the workpiece 11 is transported to the cassette 8 by a transport mechanism (not shown), and is housed in the cassette 8 again.

Next, a configuration example of the cutting unit 38 will be described. For example, the cutting unit 38 is equipped with a hub-type cutting blade 40 (hub blade). FIG. 2 is an exploded perspective view showing the cutting unit 38 to which the hub-type cutting blade 40 is attached.

The cutting blade 40 includes an annular hub base 42 made of metal such as an aluminum alloy, and an annular cutting blade 44 formed along the outer periphery of the hub base 42. A cylindrical through hole 42a that penetrates the hub base 42 in the thickness direction is provided in the center of the hub base 42.

The cutting blade 44 is formed to protrude from the outer peripheral edge of the hub base 42 toward the outside in the radial direction of the hub base 42. For example, the cutting blade 44 includes abrasive grains made of diamond, cubic boron nitride (cBN), or the like, and a binding material such as a nickel plating layer that fixes the abrasive grains. However, there are no restrictions on the material of the abrasive grains, the grain size of the abrasive grains, the material of the binding material, etc., and they are appropriately selected depending on the material of the workpiece 11, etc.

The cutting unit 38 includes a columnar housing 60 connected to the moving unit 22 (see FIG. 1). The housing 60 accommodates a cylindrical spindle 62 arranged along the Y-axis direction. A tip (one end) of the spindle 62 is exposed from the housing 60. Further, a rotational drive source (not shown) such as a motor is connected to the base end (other end) of the spindle 62.

A blade mount 64 is attached to the tip of the spindle 62. The blade mount 64 includes a truncated conical base part 66, a disc-shaped flange part 68 connected to the base part 66 and supporting the cutting blade 40, and a cylindrical boss part (support shaft) protruding from the flange part 68. )70. The cutting blade 40 is removably mounted on the blade mount 64.

The base portion 66 includes a circular top surface and a bottom surface, and an annular outer circumferential surface (slanted surface) 66a connected to the top surface and the bottom surface. One end side (top side) of the base section 66 is fixed to the tip end of the spindle 62. As a result, the base portion 66 is arranged such that the radial direction of the base portion 66 is approximately perpendicular to the rotation axis of the spindle 62, and the diameter increases as the distance from the housing 60 (base end of the spindle 62) increases. That is, the outer circumferential surface 66a of the base portion 66 is inclined with respect to the rotation axis of the spindle 62 (see FIG. 5).

A flange portion 68 is connected to the other end side (bottom side) of the base portion 66 . The diameter of the flange portion 68 is larger than the diameter of the bottom surface of the base portion 66, and the base portion 66 and the flange portion 68 are arranged concentrically. Therefore, the outer peripheral portion of the flange portion 68 projects from the outer peripheral edge of the bottom surface of the base portion 66 toward the outside in the radial direction of the base portion 66 .

The flange portion 68 includes a surface 68a located on the opposite side to the base portion 66, and an annular convex portion 68b protruding from the surface 68a. The convex portion 68b is formed in an annular shape along the outer peripheral edge of the flange portion 68. Further, the tip end surface of the convex portion 68b is a flat surface that is generally parallel to the surface 68a, and constitutes a support surface 68c that supports the cutting blade 40.

The boss portion 70 is formed to protrude from the center of the surface 68a of the flange portion 68 toward the side opposite to the base portion 66. Further, a threaded groove (externally threaded part) 70a is formed on the outer circumferential surface of the boss part 70, into which a fixing nut 74, which will be described later, is screwed.

A through hole 64 a that passes through the base portion 66 , the flange portion 68 , and the boss portion 70 is provided in the center of the blade mount 64 . The blade mount 64 is fixed to the tip of the spindle 62 by inserting the fixing bolt 72 into the tip of the spindle 62 through the through hole 64a and tightening it.

The cutting unit 38 also includes an annular fixing nut 74 that fixes the cutting blade 40 to the blade mount 64. A through hole passing through the fixing nut 74 in the thickness direction is provided in the center of the fixing nut 74. Further, a threaded groove (female threaded portion) that is screwed into the threaded groove 70a of the boss portion 70 is formed on a side surface (inner circumferential surface) 74a of the fixing nut 74 exposed through the through hole.

When the cutting blade 40 is positioned so that the boss portion 70 is inserted into the through hole 42a, the cutting blade 40 is supported by the blade mount 64. In this state, when the fixing nut 74 is screwed into the thread groove 70a of the boss portion 70 and tightened, the fixing nut 74 and the support surface 68c of the flange portion 68 clamp and fix the cutting blade 40. As a result, the cutting blade 40 is attached to the tip of the spindle 62. The cutting blade 40 rotates around a rotation axis that is generally parallel to the Y-axis direction by power transmitted from the rotational drive source through the spindle 62 and the blade mount 64.

FIG. 3 is a perspective view showing the cutting unit 38 to which the cutting fluid supply unit (blade cover) 76 is attached. A cutting fluid supply unit 76 that supplies liquid (cutting fluid) such as pure water to the cutting blade 40 is attached to the tip of the housing 60 . When the cutting blade 40 is attached to the cutting unit 38, the cutting blade 40 is covered by the cutting fluid supply unit 76.

A pair of first connecting portions 78 are provided at one end of the cutting fluid supply unit 76 . Furthermore, a second connecting portion 82 and a third connecting portion 86 are provided at the other end of the cutting fluid supply unit 76 . Piping such as a tube (not shown) for supplying cutting fluid is connected to each of the first connecting portion 78, the second connecting portion 82, and the third connecting portion 86, and the cutting fluid is supplied thereto.

A pair of nozzles (cooler nozzles) 80 are connected to the pair of first connection parts 78 . The pair of nozzles 80 are arranged to sandwich the lower end of the cutting blade 40 (see FIG. 5). Each of the pair of nozzles 80 is provided with a supply port (not shown) that opens toward the cutting blade 40. When the cutting fluid is supplied to the pair of first connecting portions 78, the cutting fluid flows into the pair of nozzles 80, and the cutting fluid is supplied from the supply ports of the nozzles 80 toward the front and back surfaces of the cutting blade 40.

A nozzle (shower nozzle) 84 provided inside the cutting fluid supply unit 76 is connected to the second connection portion 82 . The tip of the nozzle 84 opens toward the side end of the cutting blade 40. When the cutting fluid is supplied to the second connecting portion 82 , the cutting fluid flows into the nozzle 84 and is supplied from the tip of the nozzle 84 toward the outer peripheral edge of the cutting blade 40 .

A pair of nozzles (spray nozzles) 88 that open downward are connected to the third connection portion 86 . When the cutting fluid is supplied to the third connection part 86, the cutting fluid flows into the nozzle 88, and the cutting fluid flows from the tip of the nozzle 88 toward the workpiece 11 held by the chuck table 10 (see FIG. 1). Supplied.

The workpiece 11 is cut by rotating the cutting blade 40 and cutting into the workpiece 11 held by the chuck table 10. Further, while the workpiece 11 is being processed, cutting fluid is supplied from the nozzles 80 , 84 , and 88 to the workpiece 11 and the cutting blade 40 . As a result, the workpiece 11 and the cutting blade 40 are cooled, and foreign matter such as debris (cutting waste) generated by cutting the workpiece 11 is washed away.

A detection unit 100 that detects the tip of the cutting blade 40 attached to the cutting unit 38 is provided above the cutting fluid supply unit 76 . The detection unit 100 detects the tip (cutting edge 44) of the cutting blade 40 while the cutting blade 40 is cutting the workpiece 11. Thereby, the state of the tip of the cutting blade 40 is monitored.

FIG. 4 is a sectional view showing the detection unit 100. The detection unit 100 includes a frame 102 in the shape of a rectangular parallelepiped. An accommodating portion 102a that opens on the lower surface side of the frame body 102 is provided inside the frame body 102. A detection unit 104 that detects the tip of the cutting blade 40 is housed in the housing unit 102a.

The detection unit 104 is composed of an optical sensor. Specifically, the detection unit 104 includes a rectangular parallelepiped base 104a, and a light projecting unit 104b and a light receiving unit 104c that protrude downward from the base 104a. The light projecting section 104b and the light receiving section 104c are arranged so as to be separated from each other in the Y-axis direction, and face each other. The space between the light projecting section 104b and the light receiving section 104c corresponds to a blade insertion section (recess) 104d into which the tip of the cutting blade 40 is inserted.

A light source 106 is connected to the light projecting section 104b. As the light source 106, an LED or the like can be used. The light emitted by the light source 106 is guided to the light projecting section 104b via an optical fiber or the like, and is irradiated from the light projecting section 104b toward the light receiving section 104c. The light emitted from the light projecting section 104b reaches the light receiving surface of the light receiving section 104c, and is received by the light receiving section 104c.

A photoelectric conversion section 108 is connected to the light receiving section 104c. The photoelectric conversion unit 108 includes a photoelectric conversion element and converts the light received by the light receiving unit 104c into an electric signal (voltage). For example, the light received by the light receiving section 104c is guided to the photoelectric conversion section 108 via an optical fiber or the like. The photoelectric conversion unit 108 then generates an electrical signal corresponding to the amount of light that has reached the photoelectric conversion unit 108 and outputs it to the control unit 58.

Further, the detection unit 104 includes a nut portion (not shown), and a ball screw 110 disposed along the Z-axis direction is screwed into the nut portion. Furthermore, a pulse motor 112 that rotates the ball screw 110 is connected to the upper end of the ball screw 110. When the ball screw 110 is rotated by the pulse motor 112, the detection unit 104 moves (raises and lowers) along the Z-axis direction. Thereby, the height position (position in the Z-axis direction) of the detection unit 104 is adjusted.

FIG. 5 is a partially sectional front view showing the cutting unit 38 and the detection unit 100 to which the hub-type cutting blade 40 is attached. When the cutting blade 40 is attached to the cutting unit 38, the height position of the detection section 104 is adjusted, and the tip (upper end) of the cutting blade 40 is inserted into the blade insertion section 104d. Thereby, the light projecting section 104b and the light receiving section 104c are arranged so as to sandwich the tip of the cutting blade 40. The detection unit 104 is positioned such that at least a portion of the light emitted from the light projecting unit 104b toward the light receiving unit 104c is blocked by the cutting blade 40.

Further, the light projecting section 104b is arranged to overlap with the base section 66 of the blade mount 64 in the Z-axis direction, and the light receiving section 104c is arranged so as to overlap with the hub base 42 of the cutting blade 40 or the fixing nut 74 in the Z-axis direction. Placed. Note that the positions of the light projecting section 104b and the light receiving section 104c may be reversed. In this case, the light receiving section 104c is arranged to overlap with the base section 66 of the blade mount 64, and the light projecting section 104b is arranged so as to overlap with the hub base 42 of the cutting blade 40 or the fixing nut 74.

When processing the workpiece 11 (see FIG. 1) with the cutting unit 38, the spindle 62 is rotated with the cutting blade 40 attached to the blade mount 64. As a result, the cutting blade 40, blade mount 64, and fixing nut 74 rotate around the rotation axis of the spindle 62, which is set along a direction parallel to the Y-axis direction. In this state, the workpiece 11 is cut by cutting the cutting blade 40 into the workpiece 11 held by the chuck table 10 (see FIG. 1).

Further, while the workpiece 11 is being processed, the state of the tip (cutting edge 44) of the cutting blade 40 is monitored by the detection unit 104. Specifically, light is emitted from the light projector 104b toward the light receiver 104c, and is received by the light receiver 104c. Then, the amount of light received by the light receiving section 104c is measured by the photoelectric conversion section 108 (see FIG. 4) and converted into an electrical signal.

When the tip of the cutting blade 40 is not worn or chipped, the light emitted from the light projecting section 104b is blocked by the tip of the cutting blade 40, so the amount of light received by the light receiving section 104c is small. On the other hand, when wear or chipping occurs at the tip of the cutting blade 40, the light emitted from the light projecting part 104b reaches the light receiving part 104c via the worn area or chipping of the cutting blade 40, and the amount of light received by the light receiving part 104c increases.

Therefore, by measuring the amount of light received by the light receiving section 104c using the photoelectric conversion section 108, the state of the tip of the cutting blade 40 can be determined. For example, a signal corresponding to the amount of light received by the light receiving section 104c is output from the photoelectric conversion section 108 to the control unit 58. Then, the control unit 58 determines whether the received light amount is a normal value or an abnormal value by comparing the received light amount indicated by the signal input from the photoelectric conversion unit 108 with a preset reference value (threshold value). Determine whether

Note that when the workpiece 11 is cut with the cutting blade 40, foreign substances such as cutting waste may fly and adhere to the detection unit 100. However, when cutting fluid is supplied from the nozzles 80, 84, 88 (see FIG. 3) during cutting of the workpiece 11, the cutting fluid is caught up in the rotation of the cutting blade 40 and is also scattered on the detection unit 100 side. . As a result, the cutting fluid is also supplied to the detection unit 100, and foreign matter adhering to the detection unit 100 is washed away.

However, the base portion 66 of the blade mount 64 is formed into a truncated cone shape, and the outer peripheral surface 66a of the base portion 66 is inclined toward the spindle 62 side. Therefore, the cutting fluid supplied to the blade mount 64 is repelled by the outer circumferential surface 66a of the rotating base portion 66 and scatters toward the spindle 62 side. That is, it is difficult for the cutting fluid to be supplied to the light projecting section 104b arranged so as to overlap the base section 66. As a result, sufficient cutting fluid may not be supplied to the light projecting section 104b, and cutting debris adhering to the light projecting section 104b may remain.

Therefore, in this embodiment, the base portion 66 of the blade mount 64 is provided with a guiding portion (notch) 120 that guides the cutting fluid to the light projecting portion 104b. The cutting fluid supplied to the guide section 120 is then scattered radially along the rotational direction of the base section 66. As a result, cutting fluid is efficiently supplied to the light projecting section 104b located at a position overlapping with the base section 66, and cutting debris adhering to the light projecting section 104b can be easily removed.

In addition, below, as a typical example, the case where the light projecting part 104b is arrange|positioned at the position which overlaps with the base part 66 is explained in detail. However, as described above, the positions of the light projecting section 104b and the light receiving section 104c may be reversed. In this case, the light receiving section 104c is arranged at a position overlapping the base section 66, and the cutting fluid is guided to the light receiving section 104c by the guiding section 120.

The guiding part 120 is provided along the circumferential direction of the base part 66 on the outer peripheral surface 66a side of the base part 66, and receives a cutting blade rotating from the cutting fluid supply unit 76 (nozzles 80, 84, 88, see FIG. 3). The cutting fluid supplied to 40 is guided to light projecting section 104b. For example, the guide portion 120 is a notch (groove, recess) formed from the outer circumferential surface 66a of the base portion 66 toward the center line, and is formed concentrically with the base portion 66. Note that an annular guide portion 120 may be continuously formed on the base portion 66 along the circumferential direction of the base portion 66, or a plurality of arc-shaped guide portions 120 may be formed around the circumference of the base portion 66. They may be arranged intermittently at predetermined intervals along the direction.

The guiding section 120 is provided at a position facing the light projecting section 104b. Specifically, the guiding portion 120 is formed at a position overlapping the light projecting portion 104b in the radial direction of the blade mount 64. For example, when the detection unit 100 is installed directly above the blade mount 64 as shown in FIG. 5, the guide section 120 is positioned so as to overlap the light projecting section 104b in the Z-axis direction. Note that when the positions of the light projecting section 104b and the light receiving section 104c are reversed, the guiding section 120 is provided at a position facing the light receiving section 104c.

FIG. 6(A) is a front view showing the guide section 120. For example, the guide portion 120 is formed in a right triangular shape when viewed in cross section, and extends along a direction parallel to the Y-axis direction (the rotation axis direction of the spindle 62 and the base portion 66, and the direction perpendicular to the radial direction of the base portion 66). It includes a receiving surface 120a formed by. For example, the angle between the receiving surface 120a and the Y axis is 5° or less, preferably 3° or less, and more preferably 1° or less.

When the cutting fluid is supplied to the guide portion 120 while the blade mount 64 is rotating, the cutting fluid is scattered radially in a direction perpendicular to the receiving surface 120a due to the centrifugal force of the blade mount 64 (see FIG. 5). As a result, the cutting fluid is efficiently supplied to the light projecting section 104b arranged to face the guiding section 120, and foreign matter adhering to the light projecting section 104b is removed.

Note that there is no restriction on the shape of the guide portion 120 as long as it is possible to suppress the cutting fluid from scattering toward the spindle 62 side. FIGS. 6(B) and 6(C) show guide parts (cutouts) 122 and 124 corresponding to modified examples of the guide part 120.

FIG. 6(B) is a front view showing the guide section 122. Like the guide section 120, the guide section 122 includes a receiving surface 122a. However, the receiving surface 122a is formed to be inclined toward the flange portion 68 side. In other words, the end of the receiving surface 122a on the flange portion 68 side (the left end in FIG. 6(B)) is positioned closer to the center line of the base portion 66 than the other end (the right end in FIG. 6(B)). It's slanted like that. This makes it difficult for the cutting fluid supplied to the guide portion 122 to scatter toward the spindle 62 (see FIG. 5).

FIG. 6(C) is a front view showing the guide section 124. The guide portion 124 is an annular groove formed in a rectangular shape when viewed in cross section, and includes a bottom surface 124a and a pair of side surfaces (inner walls) 124b and 124c connected to the bottom surface 124a.

For example, the bottom surface 124a is formed along a direction parallel to the Y-axis direction. The inclination angle of the bottom surface 124a is the same as that of the receiving surface 120a of the guide portion 120 (see FIG. 6(A)). Further, the side surfaces 124b and 124c are formed to face each other along the radial direction of the base portion 66. The cutting fluid supplied to the guide section 124 temporarily remains within the guide section 124, and then is scattered radially along a direction parallel to the side surfaces 124b and 124c due to the centrifugal force of the blade mount 64.

Moreover, a protrusion (protrusion, convex part) can also be provided as the guide part instead of the notch part. FIGS. 7(A) to 7(C) show examples of protrusions that function as guiding portions.

FIG. 7(A) is a front view showing the guide portion (protrusion) 130. Like the guide portion 120 (see FIG. 5), the guide portion 130 is provided continuously or discontinuously along the circumferential direction of the base portion 66 on the outer circumferential surface 66a side of the base portion 66.

For example, the guide portion 130 is formed in a right triangular shape when viewed in cross section, and extends along a direction parallel to the Y-axis direction (the direction of the rotation axis of the spindle 62 and the base portion 66, and the direction perpendicular to the radial direction of the base portion 66). It includes a receiving surface 130a formed by. For example, the angle between the receiving surface 130a and the Y axis is 5° or less, preferably 3° or less, and more preferably 1° or less. When the cutting fluid is supplied to the guide portion 130 while the blade mount 64 is rotating, the centrifugal force of the blade mount 64 causes the cutting fluid to scatter radially in a direction perpendicular to the receiving surface 130a.

FIG. 7(B) is a front view showing the guide portion (protrusion) 132. Like the guide section 130, the guide section 132 includes a receiving surface 132a. However, the receiving surface 132a is formed so as to be inclined toward the flange portion 68 side. In other words, the end of the receiving surface 132a on the flange portion 68 side (the left end in FIG. 7(B)) is positioned closer to the center line of the base portion 66 than the other end (the right end in FIG. 7(B)). It's slanted like that. This makes it difficult for the cutting fluid supplied to the guide portion 132 to scatter toward the spindle 62 (see FIG. 5).

FIG. 7(C) is a front view showing the guide portion (protrusion) 134. The guide portion 134 is a rectangular protrusion in cross-sectional view, and includes a receiving surface 134a formed along the radial direction of the base portion 66. The cutting fluid supplied to the guide section 124 is received by the receiving surface 134a, and is scattered radially along the radial direction of the base section 66 by the centrifugal force of the blade mount 64.

By providing the guide portions (cutouts) 120, 122, 124 or the guide portions (protrusions) 130, 132, 134 on the base portion 66, the cutting fluid can easily scatter toward the light projecting portion 104b. Thereby, the cutting fluid is efficiently supplied to the light projecting section 104b, and the cutting waste adhering to the light projecting section 104b is easily removed.

Further, as shown in FIG. 5, the hub base 42 or the fixing nut 74 of the cutting blade 40 is arranged at a position facing the light receiving part 104c. Specifically, the hub base 42 or the fixing nut 74 is formed at a position overlapping the light receiving portion 104c in the radial direction of the hub base 42 and the fixing nut 74. Therefore, it is preferable that a part of the hub base 42 or the fixing nut 74 function as a guiding part that guides the cutting fluid to the light receiving part 104c.

Specifically, a guide portion is provided on the outer peripheral surface side of the hub base 42 along the circumferential direction of the hub base 42. Further, a guide portion is provided on the outer peripheral surface side of the fixing nut 74 along the circumferential direction of the fixing nut 74. The guide portion of the hub base 42 and the fixing nut 74 guides the cutting fluid supplied from the cutting fluid supply unit 76 (nozzles 80, 84, 88, see FIG. 3) to the rotating cutting blade 40 to the light receiving portion 104c.

For example, the outer peripheral surface of the hub base 42 is formed along a direction parallel to the Y-axis direction (the rotation axis direction of the hub base 42, the direction perpendicular to the radial direction of the hub base 42), and the guide portion 42b is Configure. Further, the outer circumferential surface of the fixing nut 74 is formed along a direction parallel to the Y-axis direction (the rotational axis direction of the fixing nut 74, the direction perpendicular to the radial direction of the fixing nut 74), and constitutes a guide portion 74b. The guiding portion 42b or the guiding portion 74b is arranged at a position facing the light receiving portion 104c. Note that when the positions of the light projecting section 104b and the light receiving section 104c are reversed, the guiding section 42b or the guiding section 74b is arranged at a position facing the light projecting section 104b.

When the cutting fluid is supplied to the hub base 42 and the fixing nut 74 while the hub base 42 and the fixing nut 74 are rotating, the cutting fluid flows into the guiding part due to the centrifugal force of the hub base 42 and the fixing nut 74. The light scatters from 42b and 74b toward the light receiving section 104c. Thereby, the cutting fluid is efficiently supplied to the light receiving section 104c, and cutting debris adhering to the light receiving section 104c is easily removed.

Note that each of the guide portions 42b and 74b may be formed to be inclined toward the cutting blade 44 side. This makes it difficult for the cutting fluid supplied to the hub base 42 and the fixing nut 74 to scatter forward (to the left in FIG. 5).

Further, on the outer peripheral surface side of the hub base 42 and the outer peripheral surface side of the fixing nut 74, there are notches (see FIGS. 6(A) to 6(C)) or protrusions (see FIG. 7( A) to FIG. 7(C)) may be provided. In this case, the guiding part (notch or protrusion) of the hub base 42 is a receiving surface formed along a direction parallel to the Y-axis direction or a receiving surface formed so as to be inclined toward the cutting blade 44 side. Equipped with Further, the guiding part (notch or protrusion) of the fixing nut 74 has a receiving surface formed along a direction parallel to the Y-axis direction or a receiving surface formed so as to be inclined toward the hub base 42 side. Be prepared.

As described above, in the cutting device 2 according to the present embodiment, the cutting fluid is guided to the outer circumferential surface 66a side of the base portion 66 of the blade mount 64 to the light emitting portion 104b or the light receiving portion 104c of the detection unit 100. A section 120 is provided. Thereby, the cutting fluid supplied to the cutting blade 40 during cutting of the workpiece 11 is efficiently supplied to the light projecting section 104b or the light receiving section 104c. As a result, foreign matter adhering to the light projecting section 104b or the light receiving section 104c is easily removed, and detection of the cutting blade 40 by the detection unit 100 can be prevented from being obstructed by the foreign matter.

Furthermore, by providing the guide section 120 on the base section 66 of the blade mount 64, it is possible to eliminate the need to newly mount a nozzle for supplying cleaning liquid to the detection unit 100 on the cutting unit 38, and eliminate the need for the light emitting section 104b or the light receiving section 104c. Cutting fluid can be efficiently supplied to This avoids an increase in the size of the cutting unit 38 due to the installation of the nozzle, and reduces the effort and cost required for preparing, installing, and operating the nozzle.

In addition, although the case where the hub-type cutting blade 40 is used has been described above, the cutting device 2 can also cut the workpiece 11 using a washer-type cutting blade (washer blade). FIG. 8 is an exploded perspective view showing a cutting unit 38A to which a washer type cutting blade 46 is attached.

The cutting blade 46 is a washer blade composed only of an annular cutting blade 48 containing abrasive grains made of diamond, cubic boron nitride, etc., and a binding material made of metal, ceramics, resin, etc. and fixing the abrasive grains. . A circular through hole 46a is provided in the center of the cutting blade 46, passing through the cutting blade 46 in the thickness direction.

Cutting unit 38A, like cutting unit 38 (see FIG. 2), includes a housing 60, a spindle 62, and a blade mount 64. Further, the cutting unit 38A includes an annular front flange (holding flange) 90 that supports the cutting blade 46. The front flange 90 includes an annular outer peripheral surface 90a and a circular through hole 90b passing through the front flange 90 in the thickness direction.

The cutting unit 38A also includes an annular fixing nut 92 that fixes the cutting blade 46 and front flange 90 to the blade mount 64. The fixing nut 92 includes a through hole passing through the fixing nut 92 in the thickness direction. Furthermore, a threaded groove (female threaded portion) that is screwed into the threaded groove 70a of the boss portion 70 is formed on a side surface (inner peripheral surface) 92a of the fixing nut 92 exposed through the through hole.

When the cutting blade 46 is positioned so that the boss portion 70 is inserted into the through hole 46a, the cutting blade 46 is supported by the blade mount 64. Further, when the front flange 90 is positioned so that the boss portion 70 is inserted into the through hole 90b, the front flange 90 is supported by the blade mount 64. In this state, when the fixing nut 92 is screwed into the thread groove 70a of the boss portion 70 and tightened, the front flange 90 and the support surface 68c of the flange portion 68 sandwich and support the cutting blade 46. Further, the fixing nut 92 clamps and fixes the cutting blade 40 and the front flange 90 together with the support surface 68c of the flange portion 68. As a result, the cutting blade 46 is attached to the tip of the spindle 62.

The cutting blade 46 rotates around a rotation axis that is generally parallel to the Y-axis direction by power transmitted from the rotational drive source through the spindle 62 and the blade mount 64. Moreover, the cutting fluid supply unit 76 and the detection unit 100 are attached to the cutting unit 38A similarly to the cutting unit 38 (see FIG. 3).

FIG. 9 is a partially sectional front view showing the cutting unit 38A and the detection unit 100 to which the washer type cutting blade 46 is attached. When the cutting blade 46 is attached to the cutting unit 38A, the height position of the detection section 104 is adjusted, and the tip (upper end) of the cutting blade 46 is inserted into the blade insertion section 104d. Thereby, the light projecting section 104b and the light receiving section 104c are arranged so as to sandwich the tip of the cutting blade 46. The detection unit 104 is positioned such that at least a portion of the light emitted from the light projection unit 104b toward the light reception unit 104c is blocked by the cutting blade 46.

Further, the light receiving portion 104c is arranged to overlap with the front flange 90 in the Z-axis direction. The front flange 90 is provided with a guide section 140 that guides the cutting fluid to the light receiving section 104c.

The guide portion 140 is provided along the circumferential direction of the front flange 90 on the outer circumferential surface 90a side of the front flange 90, and is configured to supply water from the cutting fluid supply unit 76 (nozzles 80, 84, 88, see FIG. 3) to the rotating cutting blade 46. The supplied cutting fluid is guided to the light receiving section 104c. Note that the guide portion 140 may be a notch formed from the outer peripheral surface 90a of the front flange 90 toward the center line side (see FIGS. 6(A) to 6(C)), or It may also be a protrusion protruding from the outer circumferential surface 90a (see FIGS. 7(A) to 7(C)).

For example, the guide portion 140 has a receiving surface formed along a direction parallel to the Y-axis direction (direction of rotation axis of the front flange 90, direction perpendicular to the radial direction of the front flange 90) (FIG. 6(A), (See FIG. 7(A)). The angle between the receiving surface and the Y axis can be set to 5° or less, preferably 3° or less, more preferably 1° or less. Further, the guide portion 140 may include a receiving surface inclined toward the cutting blade 46 side (see FIGS. 6(B) and 7(B)).

The guide portion 140 is formed concentrically with the front flange 90 . Note that the annular guide portion 140 may be continuously formed on the front flange 90 along the circumferential direction of the front flange 90, or a plurality of arc-shaped guide portions 140 may be formed continuously along the circumferential direction of the front flange 90. They may be arranged intermittently at predetermined intervals.

The guiding section 140 is provided at a position facing the light receiving section 104c. Specifically, the guiding portion 140 is formed at a position overlapping the light receiving portion 104c in the radial direction of the front flange 90. For example, when the detection unit 100 is installed directly above the front flange 90 as shown in FIG. 9, the guide section 140 is positioned so as to overlap the light receiving section 104c in the Z-axis direction. Note that when the positions of the light projecting section 104b and the light receiving section 104c are reversed, the guide section 140 is provided at a position facing the light projecting section 104b.

When the cutting fluid is supplied to the guide portion 140 while the front flange 90 is rotated, the cutting fluid is scattered radially along the rotation direction of the front flange 90 due to the centrifugal force of the front flange 90. As a result, cutting fluid is efficiently supplied to the light receiving section 104c disposed to face the guide section 140, and foreign matter adhering to the light receiving section 104c is removed.

Moreover, when the fixing nut 92 is arranged so as to face the light receiving part 104c, a part of the fixing nut 92 may function as a guiding part that guides the cutting fluid to the light receiving part 104c. Specifically, a guide portion is provided on the outer peripheral surface side of the fixing nut 92 along the circumferential direction of the fixing nut 92. For example, the outer circumferential surface of the fixing nut 92 is formed along a direction parallel to the Y-axis direction (the direction of the rotational axis of the fixing nut 92, the direction perpendicular to the radial direction of the fixing nut 92), and constitutes a guide portion 92b.

When the cutting fluid is supplied to the fixing nut 92 while the fixing nut 92 is rotating, the cutting fluid is scattered from the guiding portion 92b toward the light receiving portion 104c due to the centrifugal force of the fixing nut 92. Thereby, the cutting fluid is efficiently supplied to the light receiving section 104c, and cutting debris adhering to the light receiving section 104c is easily removed.

Note that the guide portion 92b may be formed to be inclined toward the cutting blade 46 side. This makes it difficult for the cutting fluid supplied to the fixing nut 92 to scatter forward (to the left in FIG. 9). Further, on the outer peripheral surface side of the fixing nut 92, there is a notch (see FIGS. 6(A) to 6(C)) or a protrusion (see FIGS. 7(A) to 7(C)) that function as a guiding part. may be provided. In this case, the guide portion (notch or protrusion) of the fixing nut 92 has a receiving surface formed along a direction parallel to the Y-axis direction or a receiving surface formed so as to be inclined toward the cutting blade 46 side. Be prepared.

In addition, the structure, method, etc. according to the above embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

11 Workpiece 13 Tape (dicing tape)
15 Frame 2 Cutting device 4 Base 4a, 4b, 4c Opening 6 Cassette support stand (cassette elevator)
8 Cassette 10 Chuck table (holding table)
10a Holding surface 12 Movement unit 14 Table cover 16 Dust-proof and drip-proof cover 18 Clamp 20 Support structure 22 Movement unit 24 Y-axis guide rail 26 Y-axis movement plate 28 Y-axis ball screw 30 Z-axis guide rail 32 Z-axis movement plate 34 Z-axis Ball screw 36 Z-axis pulse motor 38, 38A Cutting unit 40 Cutting blade 42 Hub base 42a Through hole 42b Guide section 44 Cutting blade 46 Cutting blade 46a Through hole 48 Cutting blade 50 Imaging unit 52 Cleaning unit 54 Spinner table 54a Holding surface 56 Nozzle 58 Control unit (control unit, control device)
60 housing 62 spindle 64 blade mount 64a through hole 66 base 66a outer peripheral surface (slanted surface)
68 Flange portion 68a Surface 68b Convex portion 68c Support surface 70 Boss portion (support shaft)
70a Thread groove (male thread part)
72 Fixing bolt 74 Fixing nut 74a Side surface (inner peripheral surface)
74b Guide section 76 Cutting fluid supply unit (blade cover)
78 First connection part 80 Nozzle (cooler nozzle)
82 Second connection part 84 Nozzle (shower nozzle)
86 Third connection part 88 Nozzle (spray nozzle)
90 Front flange (holding flange)
90a Outer peripheral surface 90b Through hole 92 Fixing nut 92a Side surface (inner peripheral surface)
92b Guide section 100 Detection unit 102 Frame 102a Housing section 104 Detection section 104a Base 104b Light projecting section 104c Light receiving section 104d Blade insertion section (recess)
106 Light source 108 Photoelectric conversion section 110 Ball screw 112 Pulse motor 120, 122, 124 Guide section (notch)
120a, 122a receiving surface 124a bottom surface 124b, 124c side surface (inner wall)
130, 132, 134 Guide part (protrusion)
130a, 132a, 134a receiving surface 140 guiding part

Claims (6)

A cutting device that cuts a workpiece,
A cutting unit comprising a spindle and a blade mount attached to the tip of the spindle, and cutting the workpiece with a cutting blade attached to the blade mount;
a cutting fluid supply unit that supplies cutting fluid to the cutting blade;
a detection unit that detects the tip of the cutting blade;
The detection unit includes a light projecting section, a light receiving section that receives light from the light projecting section, and a blade insertion section that is provided between the light projecting section and the light receiving section and into which the cutting blade is inserted. including;
The blade mount includes a truncated conical base portion having one end fixed to the tip of the spindle, a flange portion connected to the other end side of the base portion and supporting the cutting blade, and a flange portion from the flange portion. a boss portion that protrudes and is inserted into a through hole provided in the center of the cutting blade;
The base section is provided along the circumferential direction of the base section on the outer peripheral surface side of the base section, and is configured to project the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade. A cutting device characterized by having a first guiding section that guides the light receiving section or the light receiving section. The cutting device according to claim 1, wherein the first guide portion is a notch or a protrusion provided at a position facing the light projecting portion or the light receiving portion. The cutting blade includes an annular hub base having the through hole in the center thereof,
The cutting unit further includes a fixing nut that is screwed onto the boss portion and clamps and fixes the cutting blade together with the flange portion,
The hub base has a second guiding portion provided along the circumferential direction of the hub base on the outer peripheral surface side of the hub base,
The fixing nut has a third guide portion provided along the circumferential direction of the fixing nut on the outer peripheral surface side of the fixing nut,
The second guiding section and the third guiding section are characterized in that they guide the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light projecting section or the light receiving section. The cutting device according to claim 1 or 2. 4. The cutting device according to claim 3, wherein the second guiding part or the third guiding part is a notch or a protrusion provided at a position facing the light projecting part or the light receiving part. The cutting unit further includes a front flange that supports the cutting blade together with the flange portion, and a fixing nut that is threaded onto the boss portion and clamps and fixes the cutting blade and the front flange together with the flange portion. ,
The front flange or the fixing nut has a fourth guide part provided along the circumferential direction of the front flange or the fixing nut on the outer peripheral surface side of the front flange or the fixing nut,
3. The fourth guiding section guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light projecting section or the light receiving section. cutting equipment. 6. The cutting device according to claim 5, wherein the fourth guiding section is a notch or a protrusion provided at a position facing the light projecting section or the light receiving section.

Images