JP2023097826A - Inspection apparatus and adjustment method of inspection apparatus - Google Patents

Abstract

To provide an adjustment method of an inspection apparatus which inspects an inspection object.SOLUTION: An inspection apparatus includes an arrangement base, an imaging unit and a control part. An inspection object is arranged on the arrangement base. The imaging unit has a lens and an imaging part. The imaging part receives light passing through the lens. The imaging unit images an object 200 arranged on the arrangement base. The object 200 includes a first measurement object shape part 201 and a second measurement object shape part 202. In an optical axis direction Dp of the imaging unit, the first measurement object shape part and the second measurement object shape part are arranged at mutually-different heights. The control part calculates a first position O201 on the basis of the detection result of the first measurement object shape part by the imaging unit and a second position O202 on the basis of the detection result of the second measurement object shape part by the imaging unit.SELECTED DRAWING: Figure 5

Description

The present invention relates to an inspection device and an adjustment method for the inspection device.

2. Description of the Related Art Conventionally, an inspection apparatus is known that includes a placement table on which an object to be inspected is placed, and an imaging unit. As such an inspection apparatus, for example, an apparatus for inspecting defects of components and an apparatus for centering a lens with respect to a lens frame (see, for example, Patent Document 1) are known. Patent Literature 1 describes a lens centering device that includes a placement table on which a test object having a lens or the like is placed, and an imaging unit that captures an image of the test object.

JP 2008-209537 A

However, with the lens centering device of Patent Document 1, it is difficult to accurately center the lens when the optical axis of the imaging unit is inclined with respect to the placement table. The same applies to other inspection apparatuses, and if the optical axis of the imaging unit is tilted with respect to the placement table, it is difficult to accurately detect defects in components, for example.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide an inspection apparatus and an adjustment method of the inspection apparatus that can appropriately adjust the optical axis direction of an imaging unit.

An exemplary inspection apparatus according to one aspect of the invention inspects a specimen. The inspection apparatus has a placement table, an imaging unit, and a control section. The test object is placed on the placement table. The imaging unit has a lens and an imaging section. The imaging unit receives light transmitted through the lens. The imaging unit images an object placed on the placement table. The object has a first shape portion to be measured and a second shape portion to be measured. The first shape portion to be measured and the second shape portion to be measured are arranged at different heights in the optical axis direction of the imaging unit. The control section calculates a first position based on a detection result of the first shape portion to be measured by the imaging unit, and calculates a second position based on a detection result of the second shape portion to be measured by the imaging unit. calculate.

An exemplary method for adjusting an inspection apparatus from another aspect of the present invention includes an arrangement table on which a test object is arranged, and an imaging unit having a lens and an imaging section for receiving light transmitted through the lens. A method for adjusting an inspection device. The adjustment method has a step of capturing an image of the object placed on the placement table by the imaging unit. The object has a first shape portion to be measured and a second shape portion to be measured. The first shape portion to be measured and the second shape portion to be measured are arranged at different heights in the optical axis direction of the imaging unit. The adjustment method includes a step of calculating a first position based on a detection result of the first shape portion to be measured by the imaging unit; calculating a position; and adjusting an optical axis direction of the imaging unit based on the first position and the second position.

According to an exemplary aspect of the present invention, it is possible to provide an inspection device and an adjustment method for the inspection device that can appropriately adjust the optical axis direction of an imaging unit.

FIG. 1 is a schematic diagram of an inspection apparatus according to a first embodiment of the present invention. FIG. 2 is a perspective view showing the structure of the placement table of the inspection apparatus according to the first embodiment of the present invention. FIG. 3 is a perspective view showing the structure of a jig used for adjusting the inspection apparatus according to the first embodiment of the present invention. FIG. 4 is a plan view showing the structure of a jig used for adjusting the inspection apparatus according to the first embodiment of the present invention. FIG. 5 is a diagram schematically showing a state in which the optical axis of the imaging unit of the inspection apparatus according to the first embodiment of the present invention is arranged perpendicular to the placement table. FIG. 6 is a diagram schematically showing a state in which the optical axis of the imaging unit of the inspection apparatus according to the first embodiment of the present invention is tilted in the +X direction with respect to the placement table. FIG. 7 is a diagram schematically showing a state in which the optical axis of the imaging unit of the inspection apparatus according to the first embodiment of the present invention is tilted in the -X direction with respect to the placement table. FIG. 8 is a diagram showing a flow for adjusting the optical axis direction of the imaging unit of the inspection apparatus according to the first embodiment of the present invention. FIG. 9A is a plan view showing a state where the rotation angle of the jig is 0°. FIG. 9B is a plan view showing a state where the rotation angle of the jig is 90°. FIG. 9C is a plan view showing a state where the rotation angle of the jig is 180°. FIG. 9D is a plan view showing a state where the rotation angle of the jig is 270°. FIG. 10A is a perspective view showing the structure of a jig used for adjusting the inspection apparatus according to the second embodiment of the present invention. FIG. 10B is a plan view showing the structure of a jig used for adjusting the inspection apparatus according to the second embodiment of the present invention. FIG. 11A is a perspective view showing the structure of a jig used for adjusting the inspection apparatus according to the third embodiment of the present invention. FIG. 11B is a plan view showing the structure of a jig used for adjusting the inspection apparatus according to the third embodiment of the present invention. FIG. 12 is a schematic diagram of an inspection apparatus according to a fourth embodiment of the present invention.

Exemplary embodiments of an inspection apparatus and an adjustment method for an inspection apparatus according to the present invention will be described below with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals, and description thereof will not be repeated. In the specification of the present application, X-axis, Y-axis, and Z-axis that are orthogonal to each other are sometimes described in order to facilitate understanding of the invention. Typically, the Z axis indicates the vertical direction and the X and Y axes indicate the horizontal direction. However, this embodiment is not limited to this.

In this specification, in terms of the positional relationship between any one of the orientations, lines, and planes and any other, "parallel" means not only a state in which they do not intersect at all no matter how far they are extended, but also a state in which they are substantially parallel. including the state where Also, "perpendicular" and "perpendicular" respectively include not only the state in which the two intersect each other at 90 degrees, but also the state in which they are substantially perpendicular and the state in which they are substantially orthogonal. Furthermore, "vertical" indicates not only the direction in which gravity acts, but also the direction in which gravity actually acts. Moreover, "horizontal" indicates not only a direction strictly orthogonal to the direction in which gravity acts, but also a direction substantially orthogonal to the direction in which gravity acts. In other words, it goes without saying that "parallel", "perpendicular", "perpendicular", "perpendicular" and "horizontal" can each include a state in which the positional relationship between them has an angular deviation to the extent that the effects of the present invention are achieved.

(First embodiment)
First, an inspection apparatus 100 according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic diagram of an inspection apparatus 100 according to the first embodiment of the present invention.

As shown in FIG. 1, the inspection apparatus 100 inspects an inspection object S. As shown in FIG. The inspection object S is an example of the "test object" of the present invention. Although the inspection apparatus 100 is not particularly limited, for example, it may be an apparatus that inspects defects in an inspection object S that is a part, or an apparatus that inspects the concentricity of one part and another part of the inspection object S. It may be a measuring device. The inspection apparatus 100 has a placement table 160 on which an inspection object S is placed, an imaging unit 110 and a control section 152 . The inspection object S is inspected while placed on the placement table 160 of the inspection apparatus 100 . A specific description will be given below.

The inspection apparatus 100 includes an imaging unit 110 , an annular light source 120 , a surface light source 130 and a suppression section 140 . In the inspection apparatus 100, the imaging unit 110, the annular light source 120, and the surface light source 130 are preferably fixedly arranged. For example, it is preferable that the imaging unit 110, the annular light source 120, and the surface light source 130 are fixed to the same fixed base. However, the surface light source 130 may be movable with respect to the imaging unit 110 and the annular light source 120 .

The imaging unit 110 images the inspection object S. As shown in FIG. The imaging unit 110 is arranged on one side (+Z direction side) of the inspection object S. As shown in FIG.

The imaging unit 110 captures an image within the imaging range. The imaging unit 110 images an imaging range that spreads around the optical axis Pa. The imaging range of imaging unit 110 may be adjustable. An optical axis Pa of the imaging unit 110 extends in the optical axis direction Dp. The optical axis Pa of the imaging unit 110 coincides with the optical axis of the lens 112, which will be described later. Here, the optical axis direction Dp is substantially parallel to the vertical direction. The inspection object S is arranged on the optical axis Pa.

The imaging unit 110 has a lens 112 and an imaging section 114 . The imaging unit 114 receives light transmitted through the lens 112 . The imaging unit 114 is, for example, a camera. The imaging unit 114 includes an imaging element. For example, the imaging device is a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor. Although not particularly limited, the lens 112 is a telecentric lens in this embodiment. A telecentric lens is a lens whose principal ray is parallel to the optical axis, and whose magnification does not change even if the object to be imaged moves away from the lens.

Annular light source 120 has an annular structure. The annular light source 120 irradiates the inspection object S with light. Typically, the center of annular light source 120 coincides with optical axis Pa of imaging unit 110 . The annular light source 120 is arranged on one side (+Z direction side) of the inspection object S. As shown in FIG. The annular light source 120 obliquely emits light toward the center of the annular shape. Typically, the annular light source 120 irradiates the inspection object S with light of substantially constant intensity from a predetermined area.

The annular light source 120 has an emission surface 120s for emitting light. The exit surface 120s is inclined with respect to the XY plane. The normal direction of the output surface 120s faces obliquely downward. The imaging unit 110 captures an image of the inspection object S irradiated with light from the annular light source 120 . The imaging unit 110 also captures an image of a jig 200 (discussed later) placed on the placement table 160 .

The surface light source 130 irradiates the inspection object S with light. The surface light source 130 emits light in a planar manner. The surface light source 130 has an emission surface 130s for emitting light. The normal direction of the output surface 130s extends in the Z direction. Typically, surface light source 130 irradiates light of substantially constant intensity from a predetermined area.

The surface light source 130 is arranged on the other side (-Z direction side) of the inspection object S. As shown in FIG. At least when the surface light source 130 irradiates the inspection object S with light, the surface light source 130 is positioned on the optical axis Pa of the imaging unit 110 . The imaging unit 110 captures an image of the inspection object S irradiated with light from the surface light source 130 .

The suppression unit 140 suppresses the light emitted from the annular light source 120 from entering the surface light source 130 . As described above, when the surface light source 130 irradiates the inspection object S with light, the imaging unit 110 images the inspection object S irradiated with light from the surface light source 130 . In this case, the suppression unit 140 does not block the light emitted from the surface light source 130 from entering the inspection object S. As shown in FIG.

On the other hand, the imaging unit 110 captures an image of the inspection object S irradiated with light from the annular light source 120 . In this case, the suppression unit 140 suppresses the light emitted from the annular light source 120 from entering the surface light source 130 . Specifically, when the imaging unit 110 captures an image of the inspection object S irradiated with light from the annular light source 120 , the suppression unit 140 prevents the light irradiated from the annular light source 120 from entering the surface light source 130 . Suppress. Accordingly, it is possible to prevent the imaging unit 110 from receiving the light reflected by the surface light source 130 .

Here, suppressing portion 140 includes a light shielding plate 140p movable between a light shielding position and a retracted position. The light-shielding position is a position where the entire emission surface 130s of the surface light source 130 is covered. The retracted position is the position shown in FIG. 1 and is a position where the light directed from the surface light source 130 toward the inspection object S is not blocked.

The inspection device 100 may further include a control device 150 . The control device 150 may control the operations of the imaging unit 110 , the annular light source 120 , the surface light source 130 and the suppression section 140 of the inspection device 100 . Alternatively, the control device 150 may determine the inspection result of the inspection object S by analyzing the captured image captured by the imaging unit 110 . For example, the control device 150 can inspect whether there is any foreign matter in the inspection object S by image analysis of the captured image.

The control device 150 has a control section 152 and a storage section 154 . Control unit 152 includes an arithmetic element. Arithmetic elements include processors. In one example, the processor includes a Central Processing Unit (CPU).

Storage unit 154 stores various data. For example, the storage unit 154 stores the shape and dimensions of each part of the jig 200, which will be described later. The storage unit 154 also stores control programs. The control unit 152 controls operations of the control device 150 by executing control programs. Specifically, the processor of the control unit 152 executes computer programs stored in the storage elements of the storage unit 154 to control each component of the control device 150 .

For example, a computer program is stored on a non-transitory computer-readable storage medium. Non-transitory computer readable storage media include read only memory (ROM), random access memory (RAM), CD-ROM, magnetic tape, magnetic disk, or optical data storage devices.

The inspection apparatus 100 includes a placement table 160 on which an inspection object S is placed. Typically, placement table 160 is placed at a predetermined position of inspection apparatus 100 .

FIG. 2 is a perspective view showing the structure of the placement table 160 of the inspection apparatus 100 according to the first embodiment of the present invention. As shown in FIG. 2, the placement table 160 has a placement surface 160a on which the inspection object S is placed. The arrangement surface 160a is a surface extending in a direction intersecting the optical axis direction Dp, and here extends substantially horizontally. The placement table 160 has a thin plate shape.

The placement table 160 also has a positioning portion 160p that determines the position where the inspection object S is placed. The positioning portion 160p can position the inspection object S at a predetermined position. Moreover, the placement table 160 has a through hole 160h. 160 h of through-holes accommodate a part of inspection target object S, or let light permeate|transmit.

Although the shape of the inspection object S is not particularly limited, it may have a columnar structure. Further, for example, the inspection object S may be a thin disc. The inspection object S may have a translucent member. The translucent member transmits light. The translucent member may be transparent. Alternatively, the translucent member may be colored.

As shown in FIG. 1, the inspection apparatus 100 further includes an optical axis adjustment mechanism 190. As shown in FIG. The optical axis adjustment mechanism 190 is configured to hold the imaging unit 110 and adjust the optical axis direction Dp of the imaging unit 110 . The optical axis adjustment mechanism 190 is fixedly arranged on a fixed table. The inspection apparatus 100 may further include a holding member that holds the imaging unit 110, and the optical axis adjustment mechanism 190 may adjust the optical axis direction Dp of the imaging unit 110 by adjusting the posture of the holding member. Further, the optical axis adjustment mechanism 190 may be configured to be able to adjust not only the optical axis direction Dp of the imaging unit 110 but also the vertical or horizontal position of the imaging unit 110 .

Next, a method for adjusting the imaging unit 110 of the inspection apparatus 100 of this embodiment will be described with reference to FIGS. 3 and 4. FIG. FIG. 3 is a perspective view showing the structure of a jig 200 used for adjusting the inspection apparatus 100 according to the first embodiment of the present invention. FIG. 4 is a plan view showing the structure of the jig 200 used for adjusting the inspection apparatus 100 according to the first embodiment of the present invention. In order to improve the inspection accuracy of the inspection object S by the inspection apparatus 100, the optical axis Pa of the imaging unit 110 needs to be arranged perpendicular to the placement surface 160a (see FIG. 2) of the placement table 160. FIG. A method for adjusting the optical axis direction Dp of the imaging unit 110 of the inspection apparatus 100 will be described in detail below.

When adjusting the optical axis direction Dp of the imaging unit 110, a jig 200 (see FIG. 3) is used. The jig 200 is placed on the placement surface 160 a of the placement table 160 . Note that the jig 200 is an example of the "object" of the present invention.

As shown in FIGS. 3 and 4, the jig 200 has a first shape portion 201 to be measured and a second shape portion 202 to be measured. The first measured shape portion 201 and the second measured shape portion 202 have characteristic shapes, for example. In this embodiment, the first shape portion to be measured 201 and the second shape portion to be measured 202 have a circular shape. The first measured shape portion 201 and the second measured shape portion 202 may have, for example, a polygonal shape or a rectangular shape. Also, the first shape portion 201 and the second shape portion 202 to be measured may have, for example, two straight lines having lengths of a predetermined ratio, or two straight lines intersecting at a predetermined angle.

The first shape portion to be measured 201 and the second shape portion to be measured 202 are arranged at different heights in the optical axis direction Dp of the imaging unit 110 .

In this embodiment, the jig 200 has, for example, a substantially disk shape or a substantially cylindrical shape. Specifically, the jig 200 has a jig body 210 and a projecting portion 220 . The jig body 210 forms the contour of the jig 200 . The jig body 210 has, for example, a circular shape or a perfect circular shape when viewed from the optical axis direction Dp of the imaging unit 110 . The jig body 210 has a constant thickness.

The protrusion 220 protrudes from the jig body 210 toward the imaging unit 110 . The projecting portion 220 has an outer shape smaller than that of the jig body 210 . The projecting portion 220 has, for example, a circular shape or a true circular shape when viewed from the optical axis direction Dp of the imaging unit 110 . The protrusion 220 has a constant thickness.

Also, the jig 200 has a hole portion 230 . The hole 230 penetrates the jig 200 in the thickness direction. In other words, the hole portion 230 penetrates through the jig body 210 and the projecting portion 220 in the thickness direction. The thickness direction of the jig 200 is the direction along the optical axis direction Dp. Note that the hole portion 230 may be a depression that does not penetrate the jig 200 in the thickness direction.

In this embodiment, the first shape portion 201 to be measured is the peripheral portion of the upper surface 210 a of the jig body 210 . Also, the second shape portion 202 to be measured is the peripheral portion of the upper end of the hole portion 230 . In other words, the second shape portion 202 to be measured is the inner peripheral edge portion of the upper surface 220 a of the protruding portion 220 . In other words, the second shape portion 202 to be measured is a portion where the upper surface 220a and the hole portion 230 intersect.

The position and size of the second shape portion 202 to be measured are not particularly limited. However, the second shape portion 202 is arranged so that the center position O202 of the second shape portion 202 and the center position O201 of the first shape portion 201 do not coincide when viewed from the optical axis direction Dp of the imaging unit 110 . is located in

The control section 152 calculates the first position based on the detection result of the first shape portion 201 to be measured by the imaging unit 110 . In this embodiment, the first position is the center position O201 of the first shape portion 201 to be measured.

The control unit 152 also calculates the second position based on the detection result of the second shape portion 202 to be measured by the imaging unit 110 . In this embodiment, the second position is the center position O202 of the second shape portion 202 to be measured.

Also, in this embodiment, the control unit 152 calculates the distance between the first position and the second position. Specifically, the control unit 152 calculates the distance between the center position O201 of the first shape portion 201 to be measured and the center position O202 of the second shape portion 202 to be measured. The control unit 152 calculates the distance between the center position O201 and the center position O202 when viewed from the optical axis direction Dp. In this embodiment, the distance means the distance when viewed from the optical axis direction Dp unless otherwise specified. In this embodiment, when viewed from the thickness direction of the jig 200, the distance between the center position O201 of the first shape portion 201 to be measured and the center position O202 of the second shape portion to be measured 202 is 0.05 mm. An example in which the jig 200 is formed so as to be will be described.

The distance between the first position and the second position will now be described with reference to FIGS. 5-7. FIG. 5 is a diagram schematically showing a state in which the optical axis Pa of the imaging unit 110 of the inspection apparatus 100 according to the first embodiment of the present invention is arranged perpendicular to the placement table 160. As shown in FIG. FIG. 6 is a diagram schematically showing a state in which the optical axis Pa of the imaging unit 110 of the inspection apparatus 100 according to the first embodiment of the present invention is tilted in the +X direction with respect to the placement table 160. As shown in FIG. FIG. 7 is a diagram schematically showing a state in which the optical axis Pa of the imaging unit 110 of the inspection apparatus 100 according to the first embodiment of the present invention is tilted in the -X direction with respect to the placement table 160. As shown in FIG. Although the inclination of the optical axis Pa with respect to the arrangement surface 160a is several degrees or less, the inclination of the jig 200 with respect to the optical axis Pa is drawn large in FIGS. 6 and 7 for easy understanding. 5 to 7, the jig 200 is drawn to be inclined with respect to the optical axis direction Dp for easy understanding.

As shown in FIG. 5, when the optical axis Pa of the imaging unit 110 is perpendicular to the placement surface 160a (see FIG. 2) of the placement table 160, the first position (the center position O201 of the first shape portion 201 to be measured) ) and the second position (the center position O202 of the second shape portion 202 to be measured) is, for example, 0.05 mm.

As shown in FIG. 6, when the optical axis Pa of the imaging unit 110 is inclined in the +X direction with respect to the placement surface 160a of the placement table 160, the first position (center position O201) and the second position (center position O202) ) is smaller than the distance W1 (for example, 0.04 mm).

As shown in FIG. 7, when the optical axis Pa of the imaging unit 110 is inclined in the −X direction with respect to the placement surface 160a of the placement table 160, the first position (center position O201) and the second position (center position O202) is larger than the distance W1 (for example, 0.06 mm).

That is, the inclination of the optical axis Pa depends on whether the distance between the first position (center position O201) and the second position (center position O202) is larger or smaller than the distance W1 (0.05 mm). direction is determined. Also, the tilt angle of the optical axis Pa is determined by the difference between the distance between the first position (center position O201) and the second position (center position O202) and the distance W1 (0.05 mm). Then, the distance between the first position (center position O201) and the second position (center position O202) is displayed on a display unit such as a display panel, or the tilt direction and tilt angle of the optical axis Pa are displayed on the display unit. Alternatively, the direction and angle at which the optical axis direction Dp of the imaging unit 110 should be changed are displayed on the display unit. Thereby, the user can appropriately adjust the optical axis direction Dp of the imaging unit 110 .

6 and 7, an example of adjusting the tilt of the optical axis Pa along the X direction when the optical axis Pa tilts in the +X direction or the −X direction has been described. The same applies when the axis Pa is inclined in the +Y direction or the -Y direction. That is, when the optical axis Pa is tilted in the +Y direction or the -Y direction, the tilt of the optical axis Pa can be adjusted along the Y direction.

As described above with reference to FIGS. 1 to 7, the control unit 152 calculates the first position based on the detection result of the first shape part 201 to be measured by the imaging unit 110, and calculates the second position by the imaging unit 110. A second position is calculated based on the detection result of the shape portion 202 to be measured. Therefore, the optical axis direction Dp of the imaging unit 110 can be appropriately adjusted based on the calculated first position and second position. Therefore, the inspection object S can be accurately inspected using the adjusted imaging unit 110 .

Further, in the present embodiment, the first position is the center position O201 of the first shape portion 201 to be measured, and the second position is the center position O202 of the second shape portion 202 to be measured, as described above. Therefore, the first position and the second position can be easily calculated based on the first shape portion 201 and the second shape portion 202 to be measured.

Also, in this embodiment, the control unit 152 calculates the distance between the first position and the second position. Therefore, the optical axis direction Dp of the imaging unit 110 can be easily adjusted based on the calculated distance.

Also, in this embodiment, the lens 112 is a telecentric lens. When an imaging unit having a telecentric lens is used, it is usually difficult to adjust the optical axis direction of the imaging unit because the magnification does not change even if the distance from the telecentric lens to the object to be imaged changes. However, in this embodiment, as described above, the optical axis direction Dp can be adjusted appropriately, so applying the present invention to the inspection apparatus 100 using a telecentric lens is particularly effective.

Further, in the present embodiment, the first shape portion 201 and the second shape portion 202 are circular. Therefore, the first shape portion 201 to be measured and the second shape portion 202 to be measured can be formed easily and accurately.

Next, a flow for adjusting the optical axis direction Dp of the imaging unit 110 will be described with reference to FIGS. 8 and 9. FIG. FIG. 8 is a diagram showing a flow for adjusting the optical axis direction Dp of the imaging unit 110 of the inspection device 100 according to the first embodiment of the present invention. FIG. 9A is a plan view showing a state where the rotation angle of jig 200 is 0°. FIG. 9B is a plan view showing a state where the rotation angle of jig 200 is 90°. FIG. 9C is a plan view showing a state where the rotation angle of jig 200 is 180°. FIG. 9D is a plan view showing a state where the rotation angle of jig 200 is 270°.

The adjustment method of the imaging unit 110 of the inspection apparatus 100 of this embodiment includes steps S1 to S7. Steps S1 to S7 are executed by the control unit 152 unless otherwise specified. Here, a case of adjusting the optical axis direction Dp of the imaging unit 110 using the jig 200 having the structure shown in FIGS. 3 and 4 will be described.

As shown in FIG. 8, the user places the jig 200 on the placement table 160 in step S1. Then, the jig 200 placed on the placing table 160 is imaged by the imaging unit 110 . Specifically, the jig 200 placed on the placement surface 160 a of the placement table 160 is irradiated with light from the annular light source 120 . Then, the imaging unit 110 captures an image of the jig 200 placed on the placement surface 160 a of the placement table 160 . The imaging data is transmitted to the control unit 152 .

Next, in step S<b>2 , the first position is calculated based on the detection result of the first shape portion 201 to be measured by the imaging unit 110 . Specifically, the control unit 152 converts the imaging data into an image. Based on the data about the jig 200 stored in the storage unit 154 , the control unit 152 extracts data corresponding to the first shape part 201 to be measured from the imaging data. After that, the control unit 152 calculates the first position based on the extracted data. In this embodiment, the control unit 152 calculates the center position O201 of the first shape portion 201 to be measured based on the extracted data.

Next, in step S<b>3 , the second position is calculated based on the detection result of the second shape portion 202 to be measured by the imaging unit 110 . Specifically, the control unit 152 converts the imaging data into an image. Based on the data about the jig 200 stored in the storage unit 154 , the control unit 152 extracts data corresponding to the second shape portion 202 to be measured from the imaging data. After that, the control unit 152 calculates the second position based on the extracted data. In this embodiment, the control unit 152 calculates the center position O202 of the second shape portion 202 to be measured based on the extracted data.

Next, in step S4, the distance between the first position (center position O201) and the second position (center position O202) is calculated. The calculation in step S4 may be performed by the control unit 152 or by the user.

Next, in step S5, it is determined whether or not the number of imaging times is equal to or greater than a threshold value (here, 4 times). Note that the determination in step S5 may be performed by the control unit 152, or may be performed by the user.

If it is determined in step S5 that the number of times of imaging is less than the threshold, the process proceeds to step S6.

Next, in step S6, the jig 200 is rotated by a predetermined angle (for example, 90°) on the placement table 160. As shown in FIG. Note that the inspection device 100 may rotate the jig 200 in step S6. Specifically, the inspection apparatus 100 may further include a rotation mechanism (not shown) that rotates the jig 200, and the rotation mechanism may rotate the jig 200 by a predetermined angle. Further, the rotation of the jig 200 in step S6 may be manually performed by the user.

Next, the process returns to step S1, and steps S1 to S6 are repeated. When steps S1 to S4 are performed four times, the jig 200 is imaged, for example, in the states shown in FIGS. A distance between the first position and the second position is calculated. Then, the distance between the first position and the second position in each state (four rotation angles) is calculated. As a result, for example, "0.04", "0.06", "0.06", and "0.04" in the columns before adjustment shown in Table 1 below are obtained. Note that the state of the jig 200 when the rotation angle is 0° or 90° may be referred to as the first state. Also, the state of the jig 200 when the rotation angle is 180° or 270° may be referred to as the second state.

If it is determined in step S5 that the number of times of imaging is equal to or greater than the threshold value (here, four times), the process proceeds to step S7.

Next, in step S7, the optical axis direction Dp of the imaging unit 110 is adjusted based on the first position and the second position. In this embodiment, the optical axis direction Dp of the imaging unit 110 is adjusted based on the distance between the first position and the second position. The adjustment of the optical axis direction Dp in step S7 may be performed by driving the optical axis adjusting mechanism 190 by the control section 152, or may be performed by operating the optical axis adjusting mechanism 190 by the user. The adjustment of the optical axis direction Dp is performed in two directions (here, the X direction and the Y direction).

Specifically, based on the distance "0.04" at 0° and the distance "0.06" at 180° before adjustment in Table 1, the inclination of the optical axis Pa is changed along the X direction as described above. to adjust. More specifically, the inclination of the optical axis Pa is adjusted along the X direction so that the average value of the distance "0.04" and the distance "0.06" is 0.05. As a result, the optical axis Pa of the imaging unit 110 is no longer inclined with respect to the placement surface 160a of the placement table 160 in the X direction. Therefore, as shown in the column for the first adjustment in Table 1, the distance at 0° is "0.05" and the distance at 180° is "0.05". That is, the distance between the first position and the second position in the first state (the rotation angle is 0°) and the distance between the first position and the second position in the second state (the rotation angle is 180°). and the optical axis direction Dp of the imaging unit 110 is adjusted along the X direction.

Subsequently, based on the distance "0.06" at 90° and the distance "0.04" at 270° in Table 1, the inclination of the optical axis Pa is adjusted along the Y direction as described above. do. More specifically, the inclination of the optical axis Pa is adjusted along the Y direction so that the average value of the distance "0.06" and the distance "0.04" is 0.05. As a result, the inclination of the optical axis Pa of the imaging unit 110 with respect to the placement surface 160a of the placement table 160 in the Y direction is eliminated. Therefore, as shown in the column for the second adjustment in Table 1, the distance of 90° is "0.05" and the distance of 270° is "0.05". That is, the distance between the first and second positions in the first state (rotation angle is 90°) and the distance between the first and second positions in the second state (rotation angle is 270°) and the optical axis direction Dp of the imaging unit 110 is adjusted along the Y direction.

As described above, the optical axis Pa of the imaging unit 110 becomes perpendicular to the placement surface 160a of the placement table 160, and the process ends.

In this embodiment, as shown in FIG. 8, an example is shown in which the jig 200 is imaged, the first position, the second position and the distance are calculated, and then the jig 200 is rotated. Not exclusively. For example, after repeating the imaging of the jig 200 and the rotation of the jig 200 a plurality of times, the first position, the second position and the distance at each rotation angle may be collectively calculated.

Further, in the present embodiment, an example in which both the adjustment of the optical axis Pa in the X direction and the adjustment of the optical axis Pa in the Y direction are performed in step S7 has been described, but the present invention is not limited to this. In other words, the example of adjusting the optical axis Pa of the imaging unit 110 after repeating the imaging of the jig 200 and the calculation of the first position, the second position, and the distance a plurality of times has been described, but the present invention is directed to this. Not exclusively. For example, for 0° and 180°, the tilt of the optical axis Pa in the X direction may be adjusted after imaging the jig 200 and calculating the distance and the like. Thereafter, for example, for 90° and 270°, after imaging the jig 200 and calculating the distance and the like, the inclination of the optical axis Pa in the Y direction may be adjusted.

As described above with reference to FIGS. 8 and 9, the adjustment method of the inspection apparatus 100 includes the step of imaging the jig 200 with the imaging unit 110 (step S1), and the detection result of the first shape portion 201 to be measured. a step of calculating a first position based on (step S2); a step of calculating a second position based on the detection result of the second shape portion 202 (step S3); and a step of adjusting the optical axis direction Dp of the imaging unit 110 (step S7). Therefore, the optical axis direction Dp of the imaging unit 110 can be appropriately adjusted based on the calculated first position and second position. Therefore, the inspection object S can be accurately inspected using the adjusted imaging unit 110 .

Further, in the present embodiment, as described above, the method for adjusting the inspection apparatus 100 includes the step of rotating the jig 200 on the placement table 160 from the first state to the second state (step S6). The step (step S1) includes a step of imaging the jig 200 in the first state and a step of imaging the jig 200 in the second state. Then, in the step of adjusting the optical axis direction Dp of the imaging unit 110 (step S7), the distance between the first position and the second position in the first state (for example, the rotation angle is 0°) and the second state The optical axis direction Dp of the imaging unit 110 is adjusted based on the distance between the first position (for example, the rotation angle is 180°) and the second position. Therefore, for example, the optical axis direction Dp of the imaging unit 110 can be adjusted such that the two calculated distances are the average value. Therefore, the optical axis direction Dp of the imaging unit 110 can be adjusted with higher accuracy.

Furthermore, in the present embodiment, as described above, the distance between the first position and the second position in the first state (for example, the rotation angle is 90°) and the second state (for example, the rotation angle is 270°) ), the optical axis direction Dp of the imaging unit 110 is adjusted based on the distance between the first position and the second position. Therefore, it is possible to easily adjust the optical axis direction Dp of the imaging unit 110 in two directions (here, the X direction and the Y direction).

(Second embodiment)
Next, an inspection apparatus 100 according to a second embodiment of the present invention will be described with reference to FIGS. 8, 10A and 10B. FIG. 10A is a perspective view showing the structure of a jig 200 used for adjusting the inspection apparatus 100 of the second embodiment of the invention. FIG. 10B is a plan view showing the structure of the jig 200 used for adjusting the inspection apparatus 100 according to the second embodiment of the present invention. In the second embodiment, unlike the first embodiment, an example in which the jig 200 has two second shaped portions 202 to be measured will be described.

As shown in FIGS. 10A and 10B, the jig 200 has a first shape portion 201 to be measured and a second shape portion 202 to be measured. In this embodiment, the jig 200 has two second shaped portions 202 to be measured.

Specifically, the jig 200 has a hole portion 230 and a hole portion 231 . Hole 231 has the same shape as hole 230 . Note that the hole portion 231 may have an inner diameter that is larger or smaller than the inner diameter of the hole portion 230 . Further, the distance between the hole portion 230 and the center position O201 may be the same as the distance between the hole portion 231 and the center position O201, or may be the same as the distance between the hole portion 231 and the center position O201. It may be larger or smaller in comparison. One of the second shaped portions 202 to be measured (hereinafter also referred to as a second shaped portion to be measured 202 a ) is the peripheral portion of the upper end of the hole portion 230 . The other of the second shape portion to be measured 202 (hereinafter also referred to as a second shape portion to be measured 202 b ) is the peripheral portion of the upper end of the hole portion 231 .

The control unit 152 calculates a second position (center position O202a of the second shape portion 202a to be measured) based on the detection result of the second shape portion 202a to be measured by the imaging unit 110 . Further, the control section 152 calculates a second position (center position O202b of the second shape portion 202b to be measured) based on the detection result of the second shape portion 202b to be measured by the imaging unit 110 .

The positions and sizes of the two second shaped portions 202 to be measured are not particularly limited. However, the center position O202a, the center position O202b, and the center position O201 are not arranged on a straight line. In other words, a first straight line M1 passing through one of the two second positions (hereinafter also referred to as the center position O202a) and the first position (the center position O201) and the other of the two second positions (hereinafter referred to as the center position O202b) and the second straight line M2 passing through the first position (center position O201) intersect. In this embodiment, the first straight line M1 and the second straight line M2 are orthogonal.

As described above with reference to FIGS. 10A and 10B, the jig 200 has two second shaped portions 202 to be measured. Therefore, the number of rotations of the jig 200 when adjusting the optical axis direction Dp of the imaging unit 110 can be reduced compared to the case where only one second shape portion 202 to be measured is formed. Specifically, in the present embodiment, two second measured shape portions 202 can be imaged by one imaging, and two second positions are calculated. In other words, the same effects or results as in the case of imaging at positions with rotation angles of 0° and 90° in the first embodiment can be obtained. Therefore, compared to the first embodiment, for example, the number of times the jig 200 is rotated when adjusting the optical axis direction Dp of the imaging unit 110 can be reduced.

Other structures of the second embodiment are similar to those of the first embodiment.

Next, a flow for adjusting the optical axis direction Dp of the imaging unit 110 according to this embodiment will be described with reference to FIG. Differences from the first embodiment will be mainly described below.

As shown in FIG. 8, in step S1, the jig 200 placed on the placing table 160 is imaged by the imaging unit 110, as in the first embodiment.

Next, in step S2, the first position is calculated based on the detection result of the first shape portion 201 to be measured by the imaging unit 110, as in the first embodiment.

Next, in step S<b>3 , the second position is calculated based on the detection result of the second shape portion 202 to be measured by the imaging unit 110 . At this time, in this embodiment, the center position O202a of the second shape portion 202a to be measured and the center position O202b of the second shape portion to be measured 202b are calculated.

Next, in step S4, the distance between the first position (center position O201) and the second position (center position O202a) and the distance between the first position (center position O201) and the second position (center position O202b) and the distance between them are calculated.

Next, in step S5, it is determined whether or not the number of imaging times is equal to or greater than a threshold value (here, two times).

If it is determined in step S5 that the number of times of imaging is less than the threshold, the process proceeds to step S6.

Next, in step S6, the jig 200 is rotated by a predetermined angle (for example, 180°) on the placement table 160. As shown in FIG. In other words, the jig 200 is rotated from the first state (where the rotation angle is 0°) to the second state (where the rotation angle is 180°). Then, the process returns to step S1.

If it is determined in step S5 that the number of times of imaging is equal to or greater than the threshold value (two times in this case), the process proceeds to step S7.

Next, in step S7, the optical axis direction Dp of the imaging unit 110 is adjusted in the X direction and the Y direction based on the first position and the two second positions.

As a result, the optical axis Pa of the imaging unit 110 becomes perpendicular to the placement surface 160a of the placement table 160, and the process ends.

Other adjustment flows and other effects of the second embodiment are the same as those of the first embodiment.

In this embodiment, as shown in FIGS. 10A and 10B, an example is shown in which two holes 230 and 231 are formed in order to provide two second shaped portions 202 to be measured. is not limited to For example, in the first embodiment, the center position of the projecting portion 220 of the jig 200 may be shifted from the center position of the jig body 210 . Then, the outer peripheral edge of the upper surface 220a of the projecting portion 220 may be used as the second shape portion 202b to be measured.

(Third embodiment)
Next, an inspection apparatus 100 according to a third embodiment of the present invention will be described with reference to FIGS. 11A and 11B. FIG. 11A is a perspective view showing the structure of a jig 200 used for adjusting the inspection apparatus 100 of the third embodiment of the invention. FIG. 11B is a plan view showing the structure of a jig 200 used for adjusting the inspection apparatus 100 according to the third embodiment of the invention.

As shown in FIGS. 11A and 11B, jig 200 has jig body 210 and recess 250 . Note that the jig 200 does not have the projecting portion 220 in this embodiment. The concave portion 250 is recessed from the upper surface 210 a of the jig body 210 to the side opposite to the imaging unit 110 . The recess 250 has an inner side surface 251 perpendicular to the top surface 210 a and an inner side surface 252 connected to the inner side surface 251 . The inner side surface 251 has, for example, a circular shape or a perfect circular shape when viewed from the optical axis direction Dp of the imaging unit 110 . The inner surface 252 has, for example, a conical shape.

The inner side surface 251 is formed from the upper surface 210a of the jig main body 210 to a midway depth. The inner side surface 252 is formed from the end of the inner side surface 251 to the bottom surface of the jig body 210 . Note that the inner side surface 252 does not have to extend to the lower surface of the jig body 210 . That is, although the recess 250 penetrates the jig body 210 in this embodiment, the recess 250 does not have to penetrate the jig body 210 .

In this embodiment, the jig 200 has two second shape portions to be measured 202 (a second shape portion to be measured 202a and a second shape portion to be measured 202b), as in the second embodiment. The second shape portion 202 a to be measured is the peripheral portion of the upper end of the concave portion 250 . The second shape portion 202b to be measured is the peripheral portion of the lower end of the concave portion 250. As shown in FIG. Note that the recess 250 is arranged so that the center position of the recess 250 and the center position O201 of the first shape portion 201 to be measured do not coincide when viewed from the optical axis direction Dp.

In addition, in the present embodiment, when viewed from the optical axis direction Dp of the imaging unit 110, one of the two second measured shape portions 202 (here, the second measured shape portion 202b) It is arranged inside the other shape portion 202 (here, the second shape portion 202a to be measured). Therefore, two second shaped portions 202 to be measured can be formed by one concave portion 250 . In addition, for example, it is also possible to form on the jig main body 210 a convex portion having a shape obtained by vertically inverting the concave portion 250 . In this case, two second shaped portions (not shown) to be measured can be formed by one convex portion.

The control unit 152 calculates a second position (center position O202a of the second shape portion 202a to be measured) based on the detection result of the second shape portion 202a to be measured by the imaging unit 110 . Further, the control section 152 calculates a second position (center position O202b of the second shape portion 202b to be measured) based on the detection result of the second shape portion 202b to be measured by the imaging unit 110 .

The positions and sizes of the two second shaped portions 202 to be measured are not particularly limited. However, the center position O202a of the second shape portion to be measured 202a, the center position O202b of the second shape portion to be measured 202b, and the center position O201 are not arranged on a straight line. In other words, a first straight line M1 passing through one of the two second positions (center position O202a) and the first position (center position O201), the other of the two second positions (center position O202b) and the first position It intersects with the second straight line M2 passing through (center position O201).

As described above, in the present embodiment, the jig 200 has two second shaped portions 202 to be measured, as in the second embodiment. Therefore, the number of rotations of the jig 200 when adjusting the optical axis direction Dp of the imaging unit 110 can be reduced compared to the case where only one second shape portion 202 to be measured is formed.

In the third embodiment, the peripheral portion of the upper end of the concave portion 250 is the second shaped portion to be measured 202a, and the peripheral portion of the lower end of the concave portion 250 is the second shaped portion to be measured 202b. do not have. For example, the peripheral portion of the upper end of the recess 250 may be the first shape portion 201 to be measured, and the peripheral portion of the lower end of the recess 250 may be the second shape portion 202 to be measured. In this case, the optical axis direction Dp of the imaging unit 110 can be adjusted by the same flow as in the first embodiment. Moreover, in this case, unlike the case where the outer peripheral edge of the upper surface 210a of the jig body 210 is the first shape portion 201 to be measured, the contact of the first shape portion 201 to be measured with other members can be suppressed. Deformation of the first shape portion 201 to be measured can be suppressed.

In addition, in the third embodiment, an example is shown in which the recess 250 is arranged so that the center position of the upper end of the recess 250 and the center position O201 of the first shape portion 201 to be measured do not coincide when viewed from the optical axis direction Dp. However, the present invention is not limited to this. For example, the recess 250 may be arranged such that the center position of the upper end of the recess 250 and the center position O201 of the first shape portion 201 to be measured match when viewed from the optical axis direction Dp. In other words, the concave portion 250 may be arranged concentrically with the first shape portion 201 to be measured. However, in this case, the jig 200 has only one second shape portion 202 to be measured because the peripheral portion of the upper end of the concave portion 250 cannot be used as the second shape portion to be measured 202 .

Other structures, other adjustment flows, and other effects of the third embodiment are the same as those of the first and second embodiments.

(Fourth embodiment)
Next, an inspection apparatus 100 according to a fourth embodiment of the present invention will be described with reference to FIG. FIG. 12 is a schematic diagram of an inspection apparatus 100 according to a fourth embodiment of the invention.

As shown in FIG. 12, the inspection apparatus 100 includes an imaging unit 110, an annular light source 120, a surface light source 130, a suppressor 140, a placement table 160 (see FIG. 1), an optical axis adjustment mechanism 190, and a fixing table 180. Prepare. The fixed base 180 fixes and arranges the annular light source 120 , the surface light source 130 , the suppressor 140 , the placement base 160 and the optical axis adjustment mechanism 190 . The imaging unit 110 is detachably attached to the optical axis adjustment mechanism 190 .

The embodiments of the present invention have been described above with reference to the drawings. However, the present invention is not limited to the above-described embodiments, and can be implemented in various aspects without departing from the gist of the present invention. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above embodiments. For example, some components may be omitted from all components shown in the embodiments. Furthermore, components across different embodiments may be combined as appropriate. In order to make the drawings easier to understand, the drawings mainly show each component schematically. may be different. Also, the materials, shapes, dimensions, and the like of the components shown in the above embodiment are examples and are not particularly limited, and various modifications are possible without substantially departing from the effects of the present invention.

For example, in the first to fourth embodiments, the inspection apparatus 100 includes the annular light source 120 that irradiates the inspection object S with light from above and the surface light source 130 that irradiates the inspection object S with light from below. Although an example of having one is shown, the present invention is not limited to this. For example, the inspection apparatus 100 may have light sources other than the annular light source 120 and the surface light source 130 . Further, for example, when the inspection apparatus 100 does not have a light source for irradiating the inspection object S with light from below, the placement table 160 may not have the through hole 160h. Moreover, the inspection apparatus 100 may not have a light source.

Further, in the first to third embodiments, the examples in which the jig 200 has a substantially disk shape or a substantially cylindrical shape have been described, but the present invention is not limited to this. The shape of the jig 200 is not particularly limited. The jig 200 may have, for example, a substantially polygonal shape such as a rectangular shape.

Further, for example, the jig 200 may have an outer shape such as a substantially L shape that makes it difficult to calculate the center position when viewed from the optical axis direction Dp. In this case, the jig 200 may have, for example, a hole as the first shape to be measured 201 in addition to the hole 230 as the second shape to be measured 202 . With this configuration, the first position can be easily calculated.

Further, in the first to third embodiments, examples in which the first shape portion 201 to be measured and the second shape portion to be measured 202 have a circular shape have been described, but the present invention is not limited to this. The shapes of the first shape portion 201 to be measured and the second shape portion to be measured 202 are not particularly limited. The first measured shape part 201 and the second measured shape part 202 may have, for example, a polygonal shape such as a rectangular shape.

Further, in the first to third embodiments, examples are shown in which the first position and the second position are the center position of the first shape portion to be measured 201 and the center position of the second shape portion to be measured 202. However, the present invention is not limited to this. For example, the first position and the second position may not be the center position of the first shape portion 201 to be measured and the center position of the second shape portion 202 to be measured.

Note that, for example, the first shape portion 201 and the second shape portion 202 to be measured may be two parallel straight lines or two intersecting straight lines. In this case, the first position and the second position may be the center position or the end of one straight line.

Also, in the first to third embodiments, the example in which the control unit 152 calculates the distance between the first position and the second position has been described, but the present invention is not limited to this. The control unit 152 may calculate, for example, the direction from the first position to the second position in addition to the distance between the first position and the second position. With this configuration, it is possible to determine the tilt direction of the optical axis Pa of the imaging unit 110 without rotating the jig 200 by 180 degrees. Therefore, for example, it is possible to adjust the optical axis direction Dp of the imaging unit 110 by imaging the jig 200 in the first state without imaging the jig 200 in the second state.

100: inspection apparatus 110: imaging unit 112: lens 114: imaging unit 152: control unit 160: placement table 200: jig (object)
201: first shape portions to be measured 202, 202a, 202b: second shape portion to be measured Dp: optical axis direction M1: first straight line M2: second straight line O201: center position (first position)
O202, O202a, O202b: Center position (second position)
Pa: optical axis S: object to be inspected (object to be inspected)
W1, W2, W3: Distance

Claims (9)

An inspection device for inspecting an object,
a placement table on which the test object is placed;
an imaging unit having a lens and an imaging unit that receives light transmitted through the lens;
having a control unit and
The imaging unit images an object placed on the placement table,
The object has a first shape portion to be measured and a second shape portion to be measured,
the first shape portion to be measured and the second shape portion to be measured are arranged at different heights in the optical axis direction of the imaging unit;
The control unit
calculating a first position based on a detection result of the first shape portion to be measured by the imaging unit;
An inspection apparatus that calculates a second position based on a detection result of the second shape portion to be measured by the imaging unit. The first position is a center position of the first shape portion to be measured,
2. The inspection apparatus according to claim 1, wherein said second position is the center position of said second shape portion to be measured. The inspection apparatus according to claim 1 or 2, wherein said control unit calculates a distance between said first position and said second position. The inspection apparatus according to any one of claims 1 to 3, wherein the lens is a telecentric lens. The object has two of the second shape portions to be measured,
The control unit calculates the two second positions based on detection results of the two second shape portions to be measured by the imaging unit,
A first straight line passing through one of the two second positions and the first position and a second straight line passing through the other of the two second positions and the first position intersect. The inspection device according to any one of claims 1 to 4. 6. The inspection apparatus according to claim 5, wherein one of the two second shape portions to be measured is arranged inside the other of the two second shape portions to be measured when viewed from the optical axis direction of the imaging unit. . The inspection apparatus according to any one of claims 1 to 6, wherein the first shape portion to be measured and the second shape portion to be measured are circular. A method for adjusting an inspection apparatus having a placement table on which a test object is placed, and an imaging unit having a lens and an imaging unit for receiving light transmitted through the lens,
a step of capturing an image of the object placed on the placement table with the imaging unit;
The object has a first shape portion to be measured and a second shape portion to be measured,
the first shape portion to be measured and the second shape portion to be measured are arranged at different heights in the optical axis direction of the imaging unit;
The adjustment method is
calculating a first position based on a detection result of the first shape portion to be measured by the imaging unit;
calculating a second position based on a detection result of the second shape portion to be measured by the imaging unit;
A method for adjusting an inspection apparatus, comprising: adjusting an optical axis direction of the imaging unit based on the first position and the second position. further comprising rotating the object on the placement table from a first state to a second state;
The imaging step includes
imaging the object in the first state;
imaging the object in the second state,
In the step of adjusting the optical axis direction of the imaging unit, the distance between the first position and the second position in the first state and the distance between the first position and the second position in the second state 9. The method for adjusting an inspection apparatus according to claim 8, wherein the optical axis direction of said image pickup unit is adjusted based on the distance between the two.

Images