JP2023079039A5 - - Google Patents
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- JP2023079039A5 JP2023079039A5 JP2021192442A JP2021192442A JP2023079039A5 JP 2023079039 A5 JP2023079039 A5 JP 2023079039A5 JP 2021192442 A JP2021192442 A JP 2021192442A JP 2021192442 A JP2021192442 A JP 2021192442A JP 2023079039 A5 JP2023079039 A5 JP 2023079039A5
- Authority
- JP
- Japan
- Prior art keywords
- canisters
- fill tank
- saying
- goes
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021192442A JP2023079039A (ja) | 2021-11-26 | 2021-11-26 | 半導体製造装置および半導体製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021192442A JP2023079039A (ja) | 2021-11-26 | 2021-11-26 | 半導体製造装置および半導体製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023079039A JP2023079039A (ja) | 2023-06-07 |
| JP2023079039A5 true JP2023079039A5 (https=) | 2024-11-06 |
Family
ID=86646166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021192442A Pending JP2023079039A (ja) | 2021-11-26 | 2021-11-26 | 半導体製造装置および半導体製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2023079039A (https=) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4213331B2 (ja) * | 1999-06-22 | 2009-01-21 | 東京エレクトロン株式会社 | 有機金属気相成長方法及び有機金属気相成長装置 |
| JP2006324532A (ja) * | 2005-05-20 | 2006-11-30 | Matsushita Electric Ind Co Ltd | 薄膜堆積方法および薄膜堆積装置 |
| JP5755958B2 (ja) * | 2011-07-08 | 2015-07-29 | 株式会社フジキン | 半導体製造装置の原料ガス供給装置 |
| JP7129798B2 (ja) * | 2018-03-16 | 2022-09-02 | 東京エレクトロン株式会社 | 流量制御方法及び成膜装置 |
-
2021
- 2021-11-26 JP JP2021192442A patent/JP2023079039A/ja active Pending
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